JP2017508997A - 光変調装置{light modulation device} - Google Patents
光変調装置{light modulation device} Download PDFInfo
- Publication number
- JP2017508997A JP2017508997A JP2016533588A JP2016533588A JP2017508997A JP 2017508997 A JP2017508997 A JP 2017508997A JP 2016533588 A JP2016533588 A JP 2016533588A JP 2016533588 A JP2016533588 A JP 2016533588A JP 2017508997 A JP2017508997 A JP 2017508997A
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- Prior art keywords
- layer
- light modulation
- modulation device
- oxide layer
- light
- Prior art date
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- G02F1/13737—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on a field-induced phase transition in liquid crystals doped with a pleochroic dye
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Abstract
Description
複合層の製造
ガラス基板上にRF Sputter方式を用いてCeO2を35nmの厚さに蒸着して前記第1金属酸化物層を形成した。前記第1金属酸化物層上にDC sputter方式を用いて1.5W/cm2及び3mTorrの条件でAgからなる前記金属層を10nm厚さに蒸着し、前記金属層上に前記第2金属酸化物層としてGaをドーピングした酸化亜鉛層(GZO)を45nm厚さに蒸着して前記複合層を製造した。
ウレタンアクリレート多官能性オリゴマー(SU530、Mw:5、000、ソルテック社製)100mg、2官能性アクリレート(HDDA、aldrich社製300mg、3官能性アクリレート(PETA、aldrich社製)20mg、一官能性アクリレート(EHA、TCI社製)570mg、異方性染料(X12、BASF社製)23mg及び光開始剤(Zs−539、fuji film社製)10mgを混合して高分子前駆物質を製造し、前記前駆物質に前記液晶化合物(HPC21600、HCCH社製)2.3g及び異方性染料(X12、BASF社製)20mgを添加した後、直径25umの球状のスペーサー20mg入れて、7時間攪拌機で撹拌した後、液晶組成物を製造した。その後、前記製造された前記複合層の前記第2金属酸化物層の表面に前記液晶組成物をmayer bar(#14)を用いてバーコーティングした。コーティングされた液晶組成物上に前記製造された前記複合層の前記第2金属酸化物層が接するように積層した後、30mWの高圧水銀燈の下において20秒間UVを照射して黒色染料が導入された前記高分子分散型液晶層を製造した。
前記複合層として下記の製造された前記複合層を使用したことを除き、実施例1と同一の方法を行い、実施例2のスマートウィンドウを製造した。
ガラス基板上にRF Sputter方式を用いてCeO2を30nmの厚さに蒸着して前記第1金属酸化物層を形成した。前記第1金属酸化物層上にDC sputter方式を用いて1.5W/cm2及び3mTorrの条件でAgからなる前記金属層を10nm厚さに蒸着し、前記金属層上に前記第2金属酸化物層としてAlをドーピングした酸化亜鉛層(AZO)を50nm厚さに蒸着して前記複合層を製造した。
前記複合層としてITO透明電極層を使用したことを除き、実施例1と同一の方法を行い、比較例1のスマートウィンドウを製造した。
前記複合層として下記の製造された前記複合層を使用したことを除き、実施例1と同一の方法を行い、比較例2のスマートウィンドウを製造した。
ガラス基板上にRF Sputter方式を用いてCeO2を35nmの厚さに蒸着して第1金属酸化物層を形成した。前記第1金属酸化物層上にDC sputter方式で0.5W/cm2及び15mTorrの条件でAgを10nm厚さに蒸着して前記金属層を形成した後、前記金属層上に第2金属酸化物層としてGaをドーピングした酸化亜鉛層(GZO)を45nm厚さに蒸着して前記複合層を製造した。
前記複合層の製造の際、前記第1金属酸化物層を10nmに形成し、前記第2金属酸化物層の厚さを80nmに形成したことを除き、実施例2と同一の方法を行い、比較例3のスマートウィンドウを製造した。
実施例及び比較例において、製造された前記光変調装置に対して電圧が印加されない状態で透過度及び反射度を測定した。具体的に、Solid Spec−3700[製造社:shimadzu(JAPAN)]装置を用いて測定し、その結果を図5(実施例1)及び図6(比較例1)にそれぞれ示した。図5及び図6に示したように、本出願の前記複合層として透明電極層を使用した実施例の前記光変調装置は、ITO透明電極層を使用した比較例1の前記光変調装置と比べ、可視光領域においては光透過率が類似している反面、赤外線領域においては、顕著に低い光透過率を示すことが確認できる。
実施例1及び比較例2において、製造された前記金属層に対して屈折率による屈折率及び吸収係数を評価してその結果を図7に示した。図7において、nは前記金属層の光の波長による屈折率を意味し、λは光の波長を意味し、kは前記金属層の光の波長による吸収係数を意味する。図7に示したように、同一の厚さで前記金属層を形成しても、前記金属層の形成条件により屈折率及び吸収係数が異なることが確認できる。
実施例1及び2と同一に前記光変調装置を製造するが、前記第1金属酸化物層及び前記第2金属酸化物層の屈折率を変化させながら、屈折率による前記複合層の550nm波長の光に対する透過率を評価してその結果を図8に示した。図8に示したように、前記複合層の光透過率は、前記第1金属酸化物層及び前記第2金属酸化物層の屈折率に影響を受けることが確認でき、特に、前記第1金属酸化物層及び前記第2金属酸化物層の屈折率範囲が本出願の範囲内に属する場合、550nm波長の光に対して約80%以上の優れた光透過率を示すことが確認できる。
102:複合層
1021:第1酸化物層
1022:金属層
1023:第2酸化物層
301、401A、401B:基材層
Claims (22)
- 光変調層と、
前記光変調層の一側または両側に配置され、順次形成された第1酸化物層、金属層及び第2酸化物層とを含み、
550nm波長の光に対する透過率が80%以上であり、780nm以上の光に対する透過率は70%以下の複合層を含み、
前記光変調層は、前記複合層により印加される信号によって駆動するように設置されている、光変調装置。 - 前記光変調層は、前記複合層による電圧印加有無によって可視光領域の透過率が40%〜90%範囲の透過モード及び可視光領域の透過率が5%〜30%範囲の遮断モードの間をスイッチングできる、請求項1に記載の光変調装置。
- 前記光変調層は、液晶化合物を含む液晶層である、請求項1または2に記載の光変調装置。
- 前記光変調層は、高分子分散型液晶層(PDLC)、画素孤立型液晶層(PILC)、浮遊粒子デバイス(SPD)または電気変色ディスプレイ(ECD)である、請求項1〜3のいずれか一項に記載の光変調装置。
- 前記光変調層は、異方性染料を含む、請求項1〜4のいずれか一項に記載の光変調装置。
- 前記異方性染料は、黒色染料である、請求項5に記載の光変調装置。
- 前記複合層は、面抵抗が20Ω/□以下である、請求項1〜6のいずれか一項に記載の光変調装置。
- 前記第1酸化物層の屈折率が前記第2酸化物層の屈折率に比べて高く、前記金属層の屈折率が前記第2酸化物層の屈折率に比べて低い、請求項1〜7のいずれか一項に記載の光変調装置。
- 前記金属層は、550nmの波長に対する屈折率が0.1〜1の範囲内にある、請求項8に記載の光変調装置。
- 前記金属層は、厚さが5nm〜20nmの範囲内にある、請求項1〜9のいずれか一項に記載の光変調装置。
- 前記金属層は、面抵抗値が20Ω/□以下の伝導性金属を含む、請求項1〜10のいずれか一項に記載の光変調装置。
- 前記第1酸化物層の550nmの波長の光に対する屈折率は、1.2〜2.8の範囲内にあり、前記第2酸化物層の屈折率は、1.5〜2.5の範囲内にある、請求項8〜11のいずれか一項に記載の光変調装置。
- 前記第1酸化物層は、厚さが20nm〜60nmの範囲内にある、請求項1〜12のいずれか一項に記載の光変調装置。
- 前記第2酸化物層は、厚さが10nm〜100nmの範囲内にある、請求項1〜13のいずれか一項に記載の光変調装置。
- 前記第2酸化物層は、比抵抗値が1.0x10−5Ωcm〜1.0x105Ωcmの範囲内にある、請求項1〜14のいずれか一項に記載の光変調装置。
- 前記第1酸化物層及び前記第2酸化物層は、それぞれアンチモン(SB)、バリウム(BA)、ガリウム(GA)、ゲルマニウム(Ge)、ハフニウム(Hf)、インジウム(In)、ランタン(LA)、マグネシウム(Mg)、セレン(Se)、ケイ素(Si)、タンタル(TA)、チタン(Ti)、バナジウム(V)、イットリウム(Y)、亜鉛(Zn)及びジルコニウム(Zr)からなる群から選択される1種以上の金属を含む金属酸化物層である、請求項1〜15のいずれか一項に記載の光変調装置。
- 前記第2酸化物層は、ガリウム(GA)、アルミニウム(Al)、ジルコニウム(Zr)、チタン(Ti)、ニオブ(NB)、タンタル(TA)、インジウム(In)及びバナジウム(V)からなる群から選択される1種以上の第2金属をさらに含む、請求項16に記載の光変調装置。
- 前記第2金属の前記第2酸化物層内の含有量は、0.1重量%以上、10重量%以下である、請求項17に記載の光変調装置。
- 前記第2酸化物層が、前記第1酸化物層に比べて前記光変調層に接して存在する、請求項1〜18のいずれか一項に記載の光変調装置。
- 前記光変調層の両側に前記複合層が存在する、請求項1〜19のいずれか一項に記載の光変調装置。
- 前記複合層は、厚さが50nm〜300nmの範囲内にある、請求項1〜20のいずれか一項に記載の光変調装置。
- 請求項1〜21のいずれか一項に記載の光変調装置を含む、スマートウィンドウ。
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JP6450998B2 (ja) | 2019-01-16 |
KR101630119B1 (ko) | 2016-06-13 |
EP3115834A1 (en) | 2017-01-11 |
JP2017508169A (ja) | 2017-03-23 |
EP3115832B1 (en) | 2019-02-20 |
KR20150105266A (ko) | 2015-09-16 |
TW201539097A (zh) | 2015-10-16 |
TWI536087B (zh) | 2016-06-01 |
EP3115832A1 (en) | 2017-01-11 |
US20160291357A1 (en) | 2016-10-06 |
US20160377902A1 (en) | 2016-12-29 |
US9958742B2 (en) | 2018-05-01 |
EP3115834A4 (en) | 2017-09-06 |
EP3115832A4 (en) | 2017-08-09 |
KR101630118B1 (ko) | 2016-06-13 |
JP6326693B2 (ja) | 2018-05-23 |
KR20150105249A (ko) | 2015-09-16 |
CN105874379B (zh) | 2019-10-01 |
TW201602678A (zh) | 2016-01-16 |
CN105723275B (zh) | 2019-06-11 |
CN105723275A (zh) | 2016-06-29 |
CN105874379A (zh) | 2016-08-17 |
EP3115834B1 (en) | 2019-01-30 |
TWI599814B (zh) | 2017-09-21 |
US9904129B2 (en) | 2018-02-27 |
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