JP2014081253A - 光検出器 - Google Patents
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- JP2014081253A JP2014081253A JP2012228619A JP2012228619A JP2014081253A JP 2014081253 A JP2014081253 A JP 2014081253A JP 2012228619 A JP2012228619 A JP 2012228619A JP 2012228619 A JP2012228619 A JP 2012228619A JP 2014081253 A JP2014081253 A JP 2014081253A
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- 238000005259 measurement Methods 0.000 claims abstract description 23
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- 238000002366 time-of-flight method Methods 0.000 description 14
- 238000010791 quenching Methods 0.000 description 13
- 230000000171 quenching effect Effects 0.000 description 13
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- G—PHYSICS
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4865—Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
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- Condensed Matter Physics & Semiconductors (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
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- Optical Radar Systems And Details Thereof (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
【解決手段】光の入射を受けて、フォトン入射の有無を示す2値のパルスを出力するフォトンカウント型の受光素子を含む受光手段102と、電圧電流変換手段104と、測定期間に亘ってパルスのパルス幅の合計値を積分した出力値を求める積分手段106と、を備える光検出器100とする。
【選択図】図1
Description
上記実施の形態では、受光手段102の出力を電流の積分値として出力する構成としたが、デジタル処理する構成としてもよい。
Claims (5)
- 光の入射を受けて、フォトン入射の有無を示す2値のパルスを出力するフォトンカウント型の受光素子を含む受光手段と、
測定期間に亘って前記パルスのパルス幅の合計値を積分又は累算加算した出力値を求める累算手段と、
を備えることを特徴とする光検出器。 - 請求項1に記載の光検出器であって、
前記パルスのパルス幅以下の間隔で前記パルスをサンプリングするサンプリング手段を備え、
前記累積手段は、前記サンプリング手段でのサンプリング値を前記測定期間に亘って計数する計数手段と、
を備えることを特徴とする光検出器。 - 請求項1又は2に記載の光検出器であって、
前記受光手段は、前記受光素子を複数配置したアレイ型であり、
複数の前記受光素子から出力されたパルスを加算する加算手段を備え、
前記累積手段は、加算手段の出力を測定時間に亘って積分又は累積加算する、
ことを特徴とする光検出器。 - 請求項1〜3のいずれか1項に記載の光検出器であって、
前記出力値が入射光量に比例するように補正を行う補正手段を備えることを特徴とする光検出器。 - 請求項1〜4のいずれか1項に記載の光検出器であって、
前記受光素子は、ガイガーモードのアバランシェフォトダイオードを含むことを特徴とする光検出器。
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JP2012228619A JP6017916B2 (ja) | 2012-10-16 | 2012-10-16 | 光検出器 |
US14/054,114 US9431439B2 (en) | 2012-10-16 | 2013-10-15 | Light detector |
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JP2012228619A JP6017916B2 (ja) | 2012-10-16 | 2012-10-16 | 光検出器 |
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JP2014081253A true JP2014081253A (ja) | 2014-05-08 |
JP6017916B2 JP6017916B2 (ja) | 2016-11-02 |
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