JP2011069813A - 長さ測定装置 - Google Patents
長さ測定装置 Download PDFInfo
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- JP2011069813A JP2011069813A JP2010159338A JP2010159338A JP2011069813A JP 2011069813 A JP2011069813 A JP 2011069813A JP 2010159338 A JP2010159338 A JP 2010159338A JP 2010159338 A JP2010159338 A JP 2010159338A JP 2011069813 A JP2011069813 A JP 2011069813A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34753—Carriages; Driving or coupling means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
【解決手段】長さ測定装置は、支持体(12)とその支持体に摩擦の乏しく固定された物差し(11)とを包含する構成ユニット(1)を有する。支持体(12)は位置測定するために、測定すべき物体(13)に固定式に固定できる。さらに、保持体(3)が設けられていて、この保持体により物差し(11)が固定点(P)に支持体(12)を避けて測定すべき物体(13)に固定できる。
【選択図】 図1
Description
・測定区分が温度安定な物差しに分布されるならば、正確で温度安定な位置測定が達成されること、
・物差しの安定化が価格の安い材料から成る支持体によって達成できること、
・支持体の熱膨張係数が測定すべき物体の熱膨張係数に適合されていることを考慮される。
て図2は走査ユニットなしのこの測定装置の横断面IIーIIを示す。
3.....保持体
4.....軸受
11....物差し
110...測定区分
12....支持体
121...第一支持部分
122...第二支持部分
13....測定すべき物体
14、15...中間層
32....緊張要素
33....ストッパ
34....ねじ
35....接着剤
36....突起
41....案内ロール
Claims (10)
- 測定区分(110)を支持する物差し(11)が固定手段(14)によって固定されている支持体(12)から成る構成ユニット(1)を備えて、固定手段(14)は、温度変動の際に支持体(12)の温度条件付き長さ変更が物差し(11)に対して可能とされるように、形成されていて、そして構成ユニット(1)が支持体(12)によって測定すべき物体(13)に固定できる長さ測定装置において、長さ測定装置が測定方向(X)におけるある位置に保持体(3)を有し、この保持体により物差し(11)が固定点(P)に支持体(12)を避けて測定すべき物体(13)に固定できることを特徴とする長さ測定装置。
- 支持体(12)が物差し(11)と異なっている熱膨張係数を有することを特徴とする請求項1に記載の長さ測定装置。
- 物差し(11)が0.1×1/106 ・1/Kより小さい熱膨張係数を備える材料から成り、それに対して、支持体(12)がより大きい熱膨張係数を有することを特徴とする請求項2に記載の長さ測定装置。
- 支持体(12)は複数の支持部分(121、122)から成り、温度変動の際に長さ膨張が複数の支持部分(121、122)間に可能とされるように、互いに結合されていて、物差し(11)と結合されている支持部分(122)の熱長さ膨張係数が、測定すべき物体(13)に固定できる支持部分(121)の熱長さ膨張係数より小さいことを特徴とする請求項3に記載の長さ測定装置。
- 物差し(11)が中間層(14)であり、特に、物差し(11)が付着して支持体(12)に保持されている液状膜であることを特徴とする請求項1乃至4のいずれか一項に記載の長さ測定装置。
- 物差し(11)が全長さに渡って固定点(P)を含めて中間層(14)によって平らに支持体(12)に付着して保持されていて、支持体(12)が物差し(11)を全長さに渡って固定点(P)を含めて支持することを特徴とする請求項5に記載の長さ測定装置。
- 物差し(11)が固定点(P)に保持体(3)に固定式に固定されていて、保持体(3)が横に支持体(12)の傍に且つ横に支持体(12)から間隔を置いて測定すべき物体(13)にまで延びて配置されていることを特徴とする請求項1乃至6のいずれか一項に記載の長さ測定装置。
- 保持体(3)は、保持体が固定点(P)に物差し(11)と保持体(3)の間の形状一体化を奏するように、形成されていることを特徴とする請求項1乃至7のいずれか一項に記載の長さ測定装置。
- 保持体(3)は、保持体が固定点(P)に物差し(11)と保持体(3)の間の力一体化を奏するように、形成されていることを特徴とする請求項1乃至7のいずれか一項に記載の長さ測定装置。
- 保持体(3)は、保持体が固定点(P)に物差し(11)と保持体(3)の間の材料一体化を奏するように、形成されていることを特徴とする請求項1乃至7のいずれか一項に記載の長さ測定装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009044917.5 | 2009-09-23 | ||
DE102009044917A DE102009044917A1 (de) | 2009-09-23 | 2009-09-23 | Längenmesseinrichtung |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011069813A true JP2011069813A (ja) | 2011-04-07 |
JP2011069813A5 JP2011069813A5 (ja) | 2013-05-23 |
JP5479250B2 JP5479250B2 (ja) | 2014-04-23 |
Family
ID=43312561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010159338A Active JP5479250B2 (ja) | 2009-09-23 | 2010-07-14 | 長さ測定装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8156658B2 (ja) |
EP (1) | EP2302332B1 (ja) |
JP (1) | JP5479250B2 (ja) |
CN (1) | CN102022962B (ja) |
DE (1) | DE102009044917A1 (ja) |
ES (1) | ES2593359T3 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3009806B1 (de) * | 2014-10-14 | 2016-12-14 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung mit Vorrichtung zur Kompensation von Fehlern durch thermische Dilatation eines Massstabes |
CN104457498A (zh) * | 2014-12-19 | 2015-03-25 | 苏州莱测检测科技有限公司 | 一种棒材长度测量装置 |
JP6530130B2 (ja) * | 2016-03-03 | 2019-06-12 | 株式会社東芝 | 測定装置 |
EP3399284B1 (de) * | 2017-05-03 | 2019-07-10 | Dr. Johannes Heidenhain GmbH | Sensoreinheit zur positionsmessung |
JP7148262B2 (ja) * | 2018-04-19 | 2022-10-05 | 株式会社ミツトヨ | リニアエンコーダ |
EP3705850B1 (de) | 2019-03-06 | 2021-12-29 | Etel S.A. | Anordnung mit einem hauptträger, einem auf dem hauptträger angeordneten zwischenträger und einem auf dem zwischenträger angeordneten massstab |
CN112504198B (zh) * | 2020-12-24 | 2022-06-17 | 深圳南玻应用技术有限公司 | 玻璃尺寸测量装置及其测量方法 |
CN112985472B (zh) * | 2021-05-21 | 2021-09-21 | 深圳清华大学研究院 | 接触式超滑编码器 |
GB202211615D0 (en) * | 2022-08-09 | 2022-09-21 | Renishaw Plc | Scale |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2979666B2 (ja) * | 1991-02-13 | 1999-11-15 | ソニー・プレシジョン・テクノロジー株式会社 | スケール装置 |
JP2000161940A (ja) * | 1998-11-25 | 2000-06-16 | Dr Johannes Heidenhain Gmbh | 長さ測定装置 |
EP1731877A1 (de) * | 2005-06-08 | 2006-12-13 | Dr. Johannes Heidenhain GmbH | Geberelement eines Messsystems |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3319600A1 (de) * | 1983-05-30 | 1984-12-06 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Laengenmesseinrichtung |
DE3719409A1 (de) * | 1987-06-11 | 1988-12-22 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung |
DE3929629A1 (de) * | 1989-09-06 | 1991-03-07 | Zeiss Carl Fa | Laengen- oder winkelmesseinrichtung |
DE4320728C2 (de) * | 1993-06-23 | 2001-08-02 | Heidenhain Gmbh Dr Johannes | Lagemeßeinrichtung |
DE19512892C2 (de) * | 1995-04-06 | 1998-11-05 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
DE19526517C2 (de) * | 1995-07-20 | 2000-08-24 | Zeiss Carl Jena Gmbh | Anordnung zur Befestigung einer Längenmeßeinrichtung |
DE19821558B4 (de) * | 1997-08-08 | 2007-09-13 | Dr. Johannes Heidenhain Gmbh | Maßstab und Verfahren zur Herstellung eines Maßstabes sowie Positionsmeßeinrichtung |
DE19914311A1 (de) * | 1999-03-29 | 2000-10-05 | Heidenhain Gmbh Dr Johannes | Verfahren und Vorrichtung zum Anbringen eines Maßstabes |
DE10106012A1 (de) * | 2001-02-09 | 2002-08-14 | Heidenhain Gmbh Dr Johannes | Winkelmesseinrichtung |
JP3806328B2 (ja) * | 2001-09-27 | 2006-08-09 | 株式会社ミツトヨ | ユニット型直線変位測定装置、及び、その端部固定具 |
DE10236381A1 (de) * | 2002-08-08 | 2004-02-19 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
JP4223823B2 (ja) * | 2003-02-10 | 2009-02-12 | ソニーマニュファクチュアリングシステムズ株式会社 | スケール装置 |
DE102005053088A1 (de) * | 2005-11-04 | 2007-05-10 | Dr. Johannes Heidenhain Gmbh | Verfahren zum Befestigen eines Maßstabs an einen Träger sowie Maßstab und Träger mit diesem Maßstab |
CN101416031A (zh) * | 2006-03-29 | 2009-04-22 | 约翰尼斯海登海恩博士股份有限公司 | 用于使刻度尺保持在载体上的方法以及具有载体和刻度尺的装置 |
JP5162800B2 (ja) * | 2009-03-24 | 2013-03-13 | 株式会社ミツトヨ | リニアスケール |
-
2009
- 2009-09-23 DE DE102009044917A patent/DE102009044917A1/de not_active Withdrawn
-
2010
- 2010-05-18 ES ES10163093.7T patent/ES2593359T3/es active Active
- 2010-05-18 EP EP10163093.7A patent/EP2302332B1/de active Active
- 2010-07-14 JP JP2010159338A patent/JP5479250B2/ja active Active
- 2010-09-21 CN CN201010293102.9A patent/CN102022962B/zh active Active
- 2010-09-21 US US12/924,157 patent/US8156658B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2979666B2 (ja) * | 1991-02-13 | 1999-11-15 | ソニー・プレシジョン・テクノロジー株式会社 | スケール装置 |
JP2000161940A (ja) * | 1998-11-25 | 2000-06-16 | Dr Johannes Heidenhain Gmbh | 長さ測定装置 |
EP1731877A1 (de) * | 2005-06-08 | 2006-12-13 | Dr. Johannes Heidenhain GmbH | Geberelement eines Messsystems |
Also Published As
Publication number | Publication date |
---|---|
CN102022962B (zh) | 2014-11-26 |
DE102009044917A1 (de) | 2011-04-07 |
JP5479250B2 (ja) | 2014-04-23 |
EP2302332B1 (de) | 2016-09-07 |
CN102022962A (zh) | 2011-04-20 |
ES2593359T3 (es) | 2016-12-07 |
US8156658B2 (en) | 2012-04-17 |
US20110067255A1 (en) | 2011-03-24 |
EP2302332A2 (de) | 2011-03-30 |
EP2302332A3 (de) | 2012-11-28 |
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