JP2009004547A - 半導体装置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 133
- 239000012535 impurity Substances 0.000 claims abstract description 50
- 230000000737 periodic effect Effects 0.000 claims abstract description 16
- 239000012212 insulator Substances 0.000 claims description 30
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 20
- 230000015556 catabolic process Effects 0.000 abstract description 35
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 11
- 230000007423 decrease Effects 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 230000005684 electric field Effects 0.000 description 9
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
【解決手段】第2の第1導電型半導体層と第3の第2導電型半導体層との周期的配列構造より外側でこの周期的配列構造に隣接して第1の第1導電型半導体層の主面上に設けられ、周期的配列構造よりも不純物濃度が低い第6の半導体層と、第6の半導体層に隣接し、底部が第1の第1導電型半導体層まで到達するトレンチとを備え、周期的配列構造における、第6の半導体層に隣接する第1導電型もしくは第2導電型の最外半導体層の不純物量は、最外半導体層より内側の第2の第1導電型半導体層もしくは第3の第2導電型半導体層の不純物量の概ね半分である。
【選択図】図1
Description
図1は本発明の第1の実施形態に係る半導体装置の構成を模式的に示す断面図である。
スーパージャンクション構造では、p型ピラー層の不純物濃度とn型ピラー層の不純物濃度とが同程度となることで高耐圧を保持できる。p型ピラー層とn型ピラー層との不純物濃度バランスがくずれると、つまり、p型ピラー層の方が不純物濃度が高くても、あるいはn型ピラー層の方が不純物濃度が高くても、耐圧が低下してしまう。ただし、プロセス上のばらつきを考慮し、若干の耐圧低下は許容できるとして、例えば600V系素子において耐圧低下を50V程度に抑えるためには、p型ピラー層の不純物濃度とn型ピラー層の不純物濃度とのばらつきを±10%程度の範囲に抑える必要がある。この観点から、前述した「概ね半分」とは、最外ピラー層11の不純物量が、n型ピラー層3もしくはp型ピラー層4の不純物量の50%±10%、すなわち40〜60%を意味する。最外ピラー層11の不純物量が内側のピラー層(n型ピラー層3もしくはp型ピラー層4)の不純物量の40%未満では、最外ピラー層11からこれと隣接する内側のピラー層へと空乏層を伸ばせず高耐圧を維持できない。一方、最外ピラー層11の不純物量が内側のピラー層の60%より大きくなると、隣接する内側のピラー層から最外ピラー層11へ空乏層を伸ばせず、やはり高耐圧を維持できない。
図4は本発明の第2の実施形態に係る半導体装置の構成を模式的に示す断面図である。
図6は本発明の第3の実施形態に係る半導体装置の構成を模式的に示す断面図である。
図9は本発明の第4の実施形態に係る半導体装置の構成を模式的に示す断面図である。
図10は本発明の第5の実施形態に係る半導体装置の構成を模式的に示す断面図である。
図11は本発明の第6の実施形態に係る半導体装置の素子角部におけるスーパージャンクション構造、高抵抗層12、トレンチT及び絶縁物10の平面レイアウトを示す模式図である。
図12は本発明の第7の実施形態に係る半導体装置の構成を模式的に示す断面図である。
Claims (5)
- 第1の第1導電型半導体層と、
前記第1の第1導電型半導体層の主面上に設けられた第2の第1導電型半導体層と、
前記第2の第1導電型半導体層に隣接して前記第1の第1導電型半導体層の主面上に設けられ、前記第1の第1導電型半導体層の主面に対して略平行な横方向に前記第2の第1導電型半導体層と共に周期的配列構造を形成する第3の第2導電型半導体層と、
前記第1の第1導電型半導体層に電気的に接続された第1の主電極と、
前記第3の第2導電型半導体層の上に設けられた第4の第2導電型半導体領域と、
前記第4の第2導電型半導体領域の表面に選択的に設けられた第5の第1導電型半導体領域と、
前記第5の第1導電型半導体領域及び前記第4の第2導電型半導体領域に接して設けられた第2の主電極と、
前記第5の第1導電型半導体領域、前記第4の第2導電型半導体領域、及び前記第2の第1導電型半導体層の上に、絶縁膜を介して設けられた制御電極と、
前記第2の第1導電型半導体層と前記第3の第2導電型半導体層との周期的配列構造より外側で前記周期的配列構造に隣接して前記第1の第1導電型半導体層の主面上に設けられ、前記周期的配列構造よりも不純物濃度が低い第6の半導体層と、
前記第6の半導体層に隣接し、底部が前記第1の第1導電型半導体層まで到達するトレンチと、を備え、
前記周期的配列構造における、前記第6の半導体層に隣接する第1導電型もしくは第2導電型の最外半導体層の不純物量は、前記最外半導体層より内側の前記第2の第1導電型半導体層もしくは前記第3の第2導電型半導体層の不純物量の概ね半分であることを特徴とする半導体装置。 - 前記第4の第2導電型半導体領域は、前記第6の半導体層の表面上にも設けられ、前記トレンチと接していることを特徴とする請求項1記載の半導体装置。
- 前記トレンチ内に絶縁物が埋め込まれていることを特徴とする請求項1記載の半導体装置。
- 前記トレンチの内壁に絶縁物が設けられ、前記トレンチ内における前記絶縁物の内側に多結晶シリコンが埋め込まれていることを特徴とする請求項1記載の半導体装置。
- 前記多結晶シリコンは、前記トレンチ及び前記第6の半導体層を含む終端部の表面上にもフィールド絶縁膜を介して設けられていることを特徴とする請求項4記載の半導体装置。
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