JP2006019734A - 基板表面処理装置 - Google Patents
基板表面処理装置 Download PDFInfo
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- JP2006019734A JP2006019734A JP2005188777A JP2005188777A JP2006019734A JP 2006019734 A JP2006019734 A JP 2006019734A JP 2005188777 A JP2005188777 A JP 2005188777A JP 2005188777 A JP2005188777 A JP 2005188777A JP 2006019734 A JP2006019734 A JP 2006019734A
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- 239000000758 substrate Substances 0.000 title claims abstract description 117
- 238000012545 processing Methods 0.000 title claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 238000000926 separation method Methods 0.000 claims description 40
- 238000004381 surface treatment Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 7
- 230000002940 repellent Effects 0.000 claims description 6
- 239000005871 repellent Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 14
- 238000004140 cleaning Methods 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 8
- 239000011248 coating agent Substances 0.000 abstract description 7
- 238000011109 contamination Methods 0.000 abstract description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 43
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
【解決手段】 本発明の基板表面処理装置は、基板を吸着維持し、前記基板を回転駆動及び昇降駆動するスピンチャックと、前記スピンチャックの周りを覆うと同時に上部に前記基板表面処理のための処理液の供給を受けるための上・下部ボウルと、前記下部ボウルの下部から全体ボウルの内部空気を排気するための排気口と、前記上部ボウルの内部に設置され、前記基板周りの流動を上・下に分離して前記下部に分離された流動を前記排気口を通じて排気させる流動分離突起と、を備えることを特徴とする。
【選択図】 図4A
Description
11,52 供給ノズル
12 供給管
13,31 制御バルブ
14 レジスト液タンク
15 Y方向移動機
16 Z方向移動機
17 ホルダー
24 カップ
25 気流制御板
30 排気管
32 ポンプ
40 ケース
41,42,43 逆飛散防止部
100,110 上部ボウル
100a 流動分離突起
200,210 下部ボウル
401,402,411,413 空気流れ
500,510 排気口
W 基板
Claims (5)
- 基板表面処理装置であって、
基板を吸着維持し、前記基板を回転駆動及び昇降駆動するスピンチャックと、
前記スピンチャックの周りを覆うと共に上部に前記基板表面処理のための処理液の供給を受けるための上・下部ボウルと、
前記下部ボウルの下部からボウル全体の内部の空気を排気するための排気口と、
前記上部ボウルの内部に設置され、前記基板周りの空気流動を上下に分離して前記下部に分離された空気流動を、前記排気口を通じて排気させる流動分離突起と、
を備えることを特徴とする基板表面処理装置。 - 前記流動分離突起は、前記上部ボウルの内壁に環状に形成され、断面形状において前記基板と対向している底面は所定角度で傾斜して形成され、前記流動分離突起の上面の傾斜角度は、前記底面の傾斜角度より小さく形成されており、前記流動分離突起は、前記基板の外径先端と対向する部位に鋭い頂点を有する三角形の形態を有することを特徴とする請求項1に記載の基板表面処理装置。
- 前記流動分離突起の前記鋭い頂点は、前記基板の外径先端と、好ましくは7〜11mm、より好ましくは8〜10mmの距離を置いて形成され、前記基板の上面より、好ましくは2〜5mm、より好ましくは3〜4mmの高さを有することを特徴とする請求項2に記載の基板表面処理装置。
- 前記流動分離突起は、撥水材で製作されることを特徴とする請求項1乃至3のいずれか1項に記載の基板表面処理装置。
- 前記流動分離突起は、撥水材によりコーティングされることを特徴とする請求項1乃至3のいずれか1項に記載の基板表面処理装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040049274A KR100594119B1 (ko) | 2004-06-29 | 2004-06-29 | 기판 표면 처리 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006019734A true JP2006019734A (ja) | 2006-01-19 |
JP4008935B2 JP4008935B2 (ja) | 2007-11-14 |
Family
ID=35504187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005188777A Expired - Fee Related JP4008935B2 (ja) | 2004-06-29 | 2005-06-28 | 基板表面処理装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7582163B2 (ja) |
JP (1) | JP4008935B2 (ja) |
KR (1) | KR100594119B1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010010251A (ja) * | 2008-06-25 | 2010-01-14 | Tokyo Electron Ltd | 基板処理装置 |
CN104979238A (zh) * | 2014-04-14 | 2015-10-14 | 沈阳芯源微电子设备有限公司 | 一种track机台匀胶单元的防回溅与防粘附型工艺腔体 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4816747B2 (ja) * | 2009-03-04 | 2011-11-16 | 東京エレクトロン株式会社 | 液処理装置及び液処理方法 |
DE102011009423B4 (de) | 2011-01-26 | 2017-07-20 | GM Global Technology Operations LLC (n. d. Ges. d. Staates Delaware) | Montagehilfe für eine Belüftungsdüse und einen Belüftungskanal eines Kraftfahrzeuges, Belüftungsdüse, Belüftungskanal und Armaturentafel |
JP5789546B2 (ja) | 2011-04-26 | 2015-10-07 | 東京エレクトロン株式会社 | 塗布処理装置、塗布現像処理システム、並びに塗布処理方法及びその塗布処理方法を実行させるためのプログラムを記録した記録媒体 |
JP2015023205A (ja) * | 2013-07-22 | 2015-02-02 | 株式会社ディスコ | 洗浄装置 |
US8991329B1 (en) | 2014-01-31 | 2015-03-31 | Applied Materials, Inc. | Wafer coating |
US10512946B2 (en) * | 2015-09-03 | 2019-12-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Gigasonic cleaning techniques |
JP7074688B2 (ja) * | 2016-07-01 | 2022-05-24 | カーボン,インコーポレイテッド | 液体を節約する特徴を有する多層薄膜をスピンコーティングする方法及びシステム |
KR102447277B1 (ko) | 2017-11-17 | 2022-09-26 | 삼성전자주식회사 | 스핀 코터 및 이를 구비하는 기판처리 장치와 기판처리 시스템 |
KR20220108560A (ko) | 2021-01-27 | 2022-08-03 | 삼성전자주식회사 | 기판 처리 장치 |
KR102677850B1 (ko) | 2021-05-26 | 2024-06-21 | 세메스 주식회사 | 기판처리장치 및 기판처리방법 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0910658A (ja) | 1995-06-27 | 1997-01-14 | Hitachi Ltd | 塗布方法および塗布装置 |
JP3408904B2 (ja) * | 1995-11-17 | 2003-05-19 | 大日本スクリーン製造株式会社 | 回転式基板処理装置 |
JP3641115B2 (ja) * | 1997-10-08 | 2005-04-20 | 大日本スクリーン製造株式会社 | 基板処理装置 |
KR200222598Y1 (ko) | 1998-03-31 | 2002-06-21 | 김영환 | 반도체감광제도포장비의감광제되튐방지장치 |
TW480584B (en) * | 1999-08-17 | 2002-03-21 | Tokyo Electron Ltd | Solution processing apparatus and method |
EP1091388A3 (en) * | 1999-10-06 | 2005-09-21 | Ebara Corporation | Method and apparatus for cleaning a substrate |
US6527860B1 (en) * | 1999-10-19 | 2003-03-04 | Tokyo Electron Limited | Substrate processing apparatus |
JP3599323B2 (ja) | 1999-10-19 | 2004-12-08 | 東京エレクトロン株式会社 | 基板処理装置 |
KR100800531B1 (ko) * | 2000-06-30 | 2008-02-04 | 가부시키가이샤 에바라 세이사꾸쇼 | 구리 도금액, 도금 방법 및 도금 장치 |
JP3824057B2 (ja) | 2000-09-13 | 2006-09-20 | 東京エレクトロン株式会社 | 液処理装置 |
-
2004
- 2004-06-29 KR KR1020040049274A patent/KR100594119B1/ko not_active IP Right Cessation
-
2005
- 2005-06-21 US US11/157,522 patent/US7582163B2/en not_active Expired - Fee Related
- 2005-06-28 JP JP2005188777A patent/JP4008935B2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010010251A (ja) * | 2008-06-25 | 2010-01-14 | Tokyo Electron Ltd | 基板処理装置 |
CN104979238A (zh) * | 2014-04-14 | 2015-10-14 | 沈阳芯源微电子设备有限公司 | 一种track机台匀胶单元的防回溅与防粘附型工艺腔体 |
CN104979238B (zh) * | 2014-04-14 | 2017-12-15 | 沈阳芯源微电子设备有限公司 | 一种track机台匀胶单元的防回溅与防粘附型工艺腔体 |
Also Published As
Publication number | Publication date |
---|---|
US20050284362A1 (en) | 2005-12-29 |
KR20060000417A (ko) | 2006-01-06 |
JP4008935B2 (ja) | 2007-11-14 |
KR100594119B1 (ko) | 2006-06-28 |
US7582163B2 (en) | 2009-09-01 |
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