JP2000214184A - プロ―ブ装置 - Google Patents

プロ―ブ装置

Info

Publication number
JP2000214184A
JP2000214184A JP11017055A JP1705599A JP2000214184A JP 2000214184 A JP2000214184 A JP 2000214184A JP 11017055 A JP11017055 A JP 11017055A JP 1705599 A JP1705599 A JP 1705599A JP 2000214184 A JP2000214184 A JP 2000214184A
Authority
JP
Japan
Prior art keywords
probe
elastic body
probe device
slit
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11017055A
Other languages
English (en)
Japanese (ja)
Inventor
Yoshie Hasegawa
義栄 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP11017055A priority Critical patent/JP2000214184A/ja
Priority to TW088101858A priority patent/TW510971B/zh
Priority to KR1019990013962A priority patent/KR100314874B1/ko
Publication of JP2000214184A publication Critical patent/JP2000214184A/ja
Pending legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B81/00—Power-actuated vehicle locks
    • E05B81/54—Electrical circuits

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP11017055A 1999-01-26 1999-01-26 プロ―ブ装置 Pending JP2000214184A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP11017055A JP2000214184A (ja) 1999-01-26 1999-01-26 プロ―ブ装置
TW088101858A TW510971B (en) 1999-01-26 1999-02-08 Probe device for testing
KR1019990013962A KR100314874B1 (ko) 1999-01-26 1999-04-20 프로브 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11017055A JP2000214184A (ja) 1999-01-26 1999-01-26 プロ―ブ装置

Publications (1)

Publication Number Publication Date
JP2000214184A true JP2000214184A (ja) 2000-08-04

Family

ID=11933315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11017055A Pending JP2000214184A (ja) 1999-01-26 1999-01-26 プロ―ブ装置

Country Status (3)

Country Link
JP (1) JP2000214184A (ko)
KR (1) KR100314874B1 (ko)
TW (1) TW510971B (ko)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029575A1 (en) * 2003-09-24 2005-03-31 Byung-June Jun Structure of probe needle for probe card
JP2005189026A (ja) * 2003-12-25 2005-07-14 Micronics Japan Co Ltd プローブ装置
JP2006145514A (ja) * 2004-10-19 2006-06-08 Micronics Japan Co Ltd プローブ組立体
KR100638106B1 (ko) 2005-06-21 2006-10-24 주식회사 코디에스 평판형 디스플레이장치 검사용 프로브장치
CN100439924C (zh) * 2004-12-30 2008-12-03 De&T株式会社 用于检测平面显示屏的探测装置的探针组件
KR100878432B1 (ko) 2008-02-12 2009-01-13 (주) 루켄테크놀러지스 엘시디 검사용 일체형 프로브 유니트
WO2010104337A2 (en) * 2009-03-12 2010-09-16 Pro-2000 Co. Ltd. Probe card for testing film package
KR101003078B1 (ko) 2009-03-12 2010-12-21 주식회사 프로이천 필름형 패키지를 테스트하기 위한 프로브 카드
JP2012519868A (ja) * 2009-03-10 2012-08-30 プロ−２０００・カンパニー・リミテッド パネルテストのためのプローブユニット
KR101326718B1 (ko) 2012-04-03 2013-11-20 주식회사 마이크로이즈 접촉형 필름 프로브 모듈
KR101923594B1 (ko) 2018-06-04 2018-11-29 주식회사 프로이천 패널 검사용 프로브 블록에 장착되는 프로브 필름
WO2022091930A1 (ja) * 2020-10-27 2022-05-05 株式会社ヨコオ 可撓性基板、検査治具

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001036987A1 (fr) * 1999-11-16 2001-05-25 Toray Engineering Co., Ltd. Sonde, son procede de fabrication, et procede de verification d'un substrat a l'aide de la sonde
US7619429B2 (en) 2003-10-20 2009-11-17 Industrial Technology Research Institute Integrated probe module for LCD panel light inspection
KR100670557B1 (ko) * 2005-08-19 2007-01-17 주식회사 파이컴 프로브 어셈블리
JP5491790B2 (ja) * 2009-07-27 2014-05-14 株式会社日本マイクロニクス プローブ装置
KR101020624B1 (ko) * 2010-07-20 2011-03-09 주식회사 코디에스 가압부재를 구비한 프로브 유닛의 제조방법
KR101020625B1 (ko) * 2010-10-07 2011-03-09 주식회사 코디에스 필름타입 프로브유닛 및 그의 제조방법
KR101039336B1 (ko) * 2010-10-08 2011-06-08 주식회사 코디에스 필름타입 프로브유닛
KR101311441B1 (ko) * 2011-01-21 2013-09-25 주식회사 프로이천 프로브블록
JP6184301B2 (ja) 2013-11-14 2017-08-23 株式会社日本マイクロニクス 検査装置

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029575A1 (en) * 2003-09-24 2005-03-31 Byung-June Jun Structure of probe needle for probe card
JP2005189026A (ja) * 2003-12-25 2005-07-14 Micronics Japan Co Ltd プローブ装置
JP4571517B2 (ja) * 2004-10-19 2010-10-27 株式会社日本マイクロニクス プローブ組立体
JP2006145514A (ja) * 2004-10-19 2006-06-08 Micronics Japan Co Ltd プローブ組立体
CN100439924C (zh) * 2004-12-30 2008-12-03 De&T株式会社 用于检测平面显示屏的探测装置的探针组件
KR100638106B1 (ko) 2005-06-21 2006-10-24 주식회사 코디에스 평판형 디스플레이장치 검사용 프로브장치
KR100878432B1 (ko) 2008-02-12 2009-01-13 (주) 루켄테크놀러지스 엘시디 검사용 일체형 프로브 유니트
JP2012519867A (ja) * 2009-03-10 2012-08-30 プロ−２０００・カンパニー・リミテッド パネルテストのためのプローブユニット
JP2012519868A (ja) * 2009-03-10 2012-08-30 プロ−２０００・カンパニー・リミテッド パネルテストのためのプローブユニット
TWI482972B (zh) * 2009-03-10 2015-05-01 Pro 2000 Co Ltd 檢測面板之探針單元
KR101003078B1 (ko) 2009-03-12 2010-12-21 주식회사 프로이천 필름형 패키지를 테스트하기 위한 프로브 카드
WO2010104337A3 (en) * 2009-03-12 2010-12-23 Pro-2000 Co. Ltd. Probe card for testing film package
JP2012519869A (ja) * 2009-03-12 2012-08-30 プロ−２０００・カンパニー・リミテッド フィルム型パッケージをテストするためのプローブカード
WO2010104337A2 (en) * 2009-03-12 2010-09-16 Pro-2000 Co. Ltd. Probe card for testing film package
KR101326718B1 (ko) 2012-04-03 2013-11-20 주식회사 마이크로이즈 접촉형 필름 프로브 모듈
KR101923594B1 (ko) 2018-06-04 2018-11-29 주식회사 프로이천 패널 검사용 프로브 블록에 장착되는 프로브 필름
WO2022091930A1 (ja) * 2020-10-27 2022-05-05 株式会社ヨコオ 可撓性基板、検査治具

Also Published As

Publication number Publication date
TW510971B (en) 2002-11-21
KR20000052281A (ko) 2000-08-16
KR100314874B1 (ko) 2001-11-23

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