HK1000016A1 - Improved turbomolecular pump - Google Patents

Improved turbomolecular pump

Info

Publication number
HK1000016A1
HK1000016A1 HK97101526A HK97101526A HK1000016A1 HK 1000016 A1 HK1000016 A1 HK 1000016A1 HK 97101526 A HK97101526 A HK 97101526A HK 97101526 A HK97101526 A HK 97101526A HK 1000016 A1 HK1000016 A1 HK 1000016A1
Authority
HK
Hong Kong
Prior art keywords
rotor
tangential flow
vanes
stages
channel
Prior art date
Application number
HK97101526A
Other languages
English (en)
Inventor
Casaro Fausto
Dolcino Luigi
Hablanian Mars
Levi Giampaolo
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Publication of HK1000016A1 publication Critical patent/HK1000016A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
HK97101526A 1990-03-09 1997-07-09 Improved turbomolecular pump HK1000016A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT67163A IT1241431B (it) 1990-03-09 1990-03-09 Pompa turbomolecolare perfezionata.

Publications (1)

Publication Number Publication Date
HK1000016A1 true HK1000016A1 (en) 1997-10-03

Family

ID=11300124

Family Applications (1)

Application Number Title Priority Date Filing Date
HK97101526A HK1000016A1 (en) 1990-03-09 1997-07-09 Improved turbomolecular pump

Country Status (7)

Country Link
EP (1) EP0445855B1 (it)
JP (1) JPH0826877B2 (it)
AT (1) ATE113343T1 (it)
DE (1) DE69104749T2 (it)
ES (1) ES2064873T3 (it)
HK (1) HK1000016A1 (it)
IT (1) IT1241431B (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5456575A (en) * 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
IT1287016B1 (it) * 1996-07-18 1998-07-24 Varian Spa Pompa da vuoto.
IT1288738B1 (it) * 1996-10-08 1998-09-24 Varian Spa Unita' elettronica di comando per pompa da vuoto.
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
IT1289811B1 (it) 1996-12-27 1998-10-16 Varian Spa Metodo ed apparato di diagnosi per pompa da vuoto.
IT1297347B1 (it) 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
US6074165A (en) * 1998-03-10 2000-06-13 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
TW504548B (en) 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
EP1234982B1 (en) 2001-02-22 2003-12-03 VARIAN S.p.A. Vacuum pump
US20070227357A1 (en) * 2006-03-31 2007-10-04 Mcdermott Wayne T Turbomolecular pump system for gas separation
US8247315B2 (en) * 2008-03-17 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus and method for manufacturing semiconductor device
US8148839B2 (en) * 2008-07-02 2012-04-03 Rosefsky Jonathan B Ribbon drive power generation and method of use
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE239213C (it) *
FR1443239A (fr) * 1965-05-05 1966-06-24 Pompe à vide mécanique rotative
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
KR890004933B1 (ko) * 1985-07-31 1989-11-30 가부시기가이샤 히다찌세이사꾸쇼 터어보분자펌프
JPS62113887A (ja) * 1985-11-13 1987-05-25 Hitachi Ltd 真空ポンプ
JPH0610477B2 (ja) * 1987-05-13 1994-02-09 株式会社日立製作所 タ−ボ真空ポンプ
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械
JPH01247794A (ja) * 1988-03-29 1989-10-03 Daikin Ind Ltd 複合形真空ポンプ
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
JPH0249996A (ja) * 1988-08-11 1990-02-20 Daikin Ind Ltd 渦流形真空ポンプ

Also Published As

Publication number Publication date
IT9067163A1 (it) 1991-09-09
IT1241431B (it) 1994-01-17
ATE113343T1 (de) 1994-11-15
ES2064873T3 (es) 1995-02-01
JPH0826877B2 (ja) 1996-03-21
IT9067163A0 (it) 1990-03-09
DE69104749D1 (de) 1994-12-01
DE69104749T2 (de) 1995-03-30
EP0445855B1 (en) 1994-10-26
JPH04224295A (ja) 1992-08-13
EP0445855A1 (en) 1991-09-11

Similar Documents

Publication Publication Date Title
HK1000016A1 (en) Improved turbomolecular pump
EP0773367A1 (en) Turbo-molecular pump
JP2002515568A (ja) ステータとロータを備えた摩擦真空ポンプ
KR20050031064A (ko) 진공하에서 물체를 가공하기 위한 다중 챔버 장치, 상기장치를 진공화하기 위한 방법 및 이를 위한 진공화 시스템
KR960038125A (ko) 다단형 용적이송식 진공펌프
EP1201929A3 (en) Vacuum pump
EP1039138A3 (en) Vacuum pump with inverted motor
ATE75007T1 (de) Mehrstufiges vakuumpumpenaggregat.
EP1234982A1 (en) Vacuum pump
JPS57191492A (en) Molecular turbo-pump
DE59908691D1 (de) Gasballasteinrichtung für eine mehrstufige Verdrängerpumpe
GB2232445A (en) A multi-stage vacuum pump
US3116872A (en) Gas ballast pumps
SU1366709A1 (ru) Турбомолекул рный вакуумный насос
JP2001090690A (ja) 真空ポンプ
JPS6385290A (ja) 真空ポンプ
DE60238538D1 (de) Zellstoffpumpe
JPH02264196A (ja) ターボ真空ポンプ
SU1222898A1 (ru) Колесо турбомолекул рного вакуумного насоса
SU981697A1 (ru) Вакуумный агрегат
SU1550222A1 (ru) Турбомолекул рный вакуумный насос
RU1807242C (ru) Турбомолекул рный вакуумный насос
RU2014510C1 (ru) Турбомолекулярный вакуумный насос
JP3045418B2 (ja) ターボ真空ポンプ
RU2016255C1 (ru) Молекулярный вакуумный насос

Legal Events

Date Code Title Description
PF Patent in force
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20050213