KR960038125A - 다단형 용적이송식 진공펌프 - Google Patents

다단형 용적이송식 진공펌프 Download PDF

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Publication number
KR960038125A
KR960038125A KR1019960011736A KR19960011736A KR960038125A KR 960038125 A KR960038125 A KR 960038125A KR 1019960011736 A KR1019960011736 A KR 1019960011736A KR 19960011736 A KR19960011736 A KR 19960011736A KR 960038125 A KR960038125 A KR 960038125A
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KR
South Korea
Prior art keywords
pump
vacuum pump
type vacuum
transfer type
volumetric transfer
Prior art date
Application number
KR1019960011736A
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English (en)
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KR100382309B1 (ko
Inventor
마사미 나가야마
가쯔아끼 우스이
히로아끼 오가미노
Original Assignee
후지무라 히로유끼
가부시키 가이샤 에바라 세사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 후지무라 히로유끼, 가부시키 가이샤 에바라 세사쿠쇼 filed Critical 후지무라 히로유끼
Publication of KR960038125A publication Critical patent/KR960038125A/ko
Application granted granted Critical
Publication of KR100382309B1 publication Critical patent/KR100382309B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/18—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

반도체장치의 가공에 사용되는 것이 바람직하며 대기압에서부터 동작될 수 있는 다단형 용적이송식 진공펌프가 개시된다. 진공펌프는 펌프케이싱과, 상기 펌프케이싱에 내장되어 있고, 서로 동기되게 회전가능하며 다단식으로 구성된 한 쌍의 펌프 로우터로 이루어지는 펌프조립체와, 상기 펌프케이싱의 선행단과 후행단 사이에 설치된 중간압실을 포함한다. 상기 선행단과 후행단 사이에 위치된 상기 펌프 로우터의 샤프트부는 상기 중간압실에 위치되어 있다.

Description

다단형 용적이송식 진공펌프
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예에 따른 다단형 용적이송식 진공펌프의 종단면도, 제2도는 제1도의 선 Ⅱ-Ⅱ를 따른 단면도, 제3도는 제1도의 선 Ⅲ-Ⅲ를 따른 단면도, 제4도는 제1도의 선 Ⅳ-Ⅳ를 따른 단면도, 제5도는 제1도의 확대 단면도, 제6도는 제1도의 선 Ⅳ-Ⅳ를 따른 단면도, 제7도는 7A, 7B, 7C 및 7D도는 제1도에서 나타낸 진공펌프의 루트 펌프가 작동하는 방법을 설명하는 단면도

Claims (3)

  1. 다단형 용적이송식 진공펌프에 있어서, 펌프케이싱과; 상기 펌프케이싱에 내장되어 있고, 서로 동기되게 회전가능하며 다단식으로 구성된 한 쌍의 펌프 로우터로 이루어지는 펌프조립체와; 상기 펌프케이싱의 선행단과 후행단 사이에 설치된 중간압실을 포함하고, 상기 선행단과 후행단 사이에 위치되어 있는 상기 펌프 로우터의 샤프트부가 상기 중간압실에 위치되어 있는 것을 특징을 하는 다단형 용적이송식 진공펌프.
  2. 제1항에 있어서, 상기 선행단과 후행단 사이에 위치된 상기 펌프 로우터의 상기 샤프트부는 상기 선행단에 의해 압축된 후와 상기 후행단에 의해 압축되기 전의 압력을 가지는 가스에 의해 밀폐되는 것을 특징으로 하는 다단형 용적이송식 진공펌프.
  3. 제1항에 있어서, 상기 펌프케이싱은 분리가능한 상측 및 하측 케이싱을 포함하는 것을 특징으로 하는 다단형 용적이송식 진공펌프.
KR1019960011736A 1995-04-19 1996-04-18 다단 용적형 진공펌프 KR100382309B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11792895 1995-04-19
JP95-117928 1995-04-19

Publications (2)

Publication Number Publication Date
KR960038125A true KR960038125A (ko) 1996-11-21
KR100382309B1 KR100382309B1 (ko) 2003-07-07

Family

ID=14723679

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960011736A KR100382309B1 (ko) 1995-04-19 1996-04-18 다단 용적형 진공펌프

Country Status (4)

Country Link
US (1) US5816782A (ko)
EP (1) EP0738833B1 (ko)
KR (1) KR100382309B1 (ko)
DE (1) DE69610352T2 (ko)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100346820B1 (ko) * 1994-04-21 2002-11-30 가부시키 가이샤 에바라 세이사꾸쇼 다축전기모터 및 그에 결합된 용적형 진공펌프
DE19923201A1 (de) * 1999-05-20 2000-11-23 Mannesmann Vdo Ag Für einen Einsatz in einem aggressiven Medium vorgesehener Einsatz
JP2003129979A (ja) * 2001-10-23 2003-05-08 Taiko Kikai Industries Co Ltd 密閉式メカニカルブースタ
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
DE10223869A1 (de) * 2002-05-29 2003-12-11 Leybold Vakuum Gmbh Zwei-Wellen-Vakuumpumpe
GB0310615D0 (en) * 2003-05-08 2003-06-11 Boc Group Plc Improvements in seal assemblies
GB0319300D0 (en) * 2003-08-18 2003-09-17 Boc Group Plc Low pulsation booster pumps
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
DE102005008887A1 (de) * 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Einwellige Vakuum-Verdränderpumpe
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
US20080226480A1 (en) * 2007-03-15 2008-09-18 Ion Metrics, Inc. Multi-Stage Trochoidal Vacuum Pump
DE202010015439U1 (de) * 2010-11-16 2012-02-17 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe und Gehäuse-Halbschale für selbige
TWI594551B (zh) 2012-03-29 2017-08-01 荏原製作所股份有限公司 密封電動機、真空泵
TWI612759B (zh) * 2012-03-29 2018-01-21 荏原製作所股份有限公司 密封電動機、真空泵
DE202017001029U1 (de) * 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
KR101878798B1 (ko) 2017-03-29 2018-07-16 한국에어로(주) 싱글 스크류 타입의 진공펌프장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1531607A (en) * 1923-01-24 1925-03-31 Thomas W Green High-pressure rotary pump
GB637942A (en) * 1941-05-31 1950-05-31 Jarves Carter Marble Improvements in rotary compressors of the gear wheel type
CH380281A (de) * 1959-02-26 1964-07-31 Svenska Rotor Maskiner Ab Schraubenradmaschine
GB1248031A (en) * 1967-09-21 1971-09-29 Edwards High Vacuum Int Ltd Two-stage rotary vacuum pumps
US3545888A (en) * 1968-09-16 1970-12-08 Edwards High Vacuum Int Ltd Multistage rotary pumps
JPS62189388A (ja) * 1987-01-30 1987-08-19 Ebara Corp 多段ル−ツ型真空ポンプ
JPH03111690A (ja) * 1989-09-22 1991-05-13 Tokuda Seisakusho Ltd 真空ポンプ
JP3112490B2 (ja) * 1991-04-08 2000-11-27 アネルバ株式会社 メカニカル真空ポンプ
JPH06185483A (ja) * 1991-12-02 1994-07-05 Shinku Kiko Kk ドライメカニカルブースタポンプ

Also Published As

Publication number Publication date
EP0738833B1 (en) 2000-09-20
EP0738833A1 (en) 1996-10-23
DE69610352T2 (de) 2001-05-17
DE69610352D1 (de) 2000-10-26
US5816782A (en) 1998-10-06
KR100382309B1 (ko) 2003-07-07

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