FR2695721B1 - Contrôle de l'épaisseur de couches minces. - Google Patents

Contrôle de l'épaisseur de couches minces.

Info

Publication number
FR2695721B1
FR2695721B1 FR9310761A FR9310761A FR2695721B1 FR 2695721 B1 FR2695721 B1 FR 2695721B1 FR 9310761 A FR9310761 A FR 9310761A FR 9310761 A FR9310761 A FR 9310761A FR 2695721 B1 FR2695721 B1 FR 2695721B1
Authority
FR
France
Prior art keywords
thickness
control
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9310761A
Other languages
English (en)
Other versions
FR2695721A1 (fr
Inventor
Michel Hannotiau
Guy Renard
Robert Terneu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Glass Europe SA
Original Assignee
Glaverbel Belgium SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel Belgium SA filed Critical Glaverbel Belgium SA
Publication of FR2695721A1 publication Critical patent/FR2695721A1/fr
Application granted granted Critical
Publication of FR2695721B1 publication Critical patent/FR2695721B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR9310761A 1992-09-15 1993-09-08 Contrôle de l'épaisseur de couches minces. Expired - Fee Related FR2695721B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929219450A GB9219450D0 (en) 1992-09-15 1992-09-15 Thin film thickness monitoring and control

Publications (2)

Publication Number Publication Date
FR2695721A1 FR2695721A1 (fr) 1994-03-18
FR2695721B1 true FR2695721B1 (fr) 1995-02-24

Family

ID=10721896

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9310761A Expired - Fee Related FR2695721B1 (fr) 1992-09-15 1993-09-08 Contrôle de l'épaisseur de couches minces.

Country Status (17)

Country Link
US (1) US5396080A (fr)
JP (1) JPH06201333A (fr)
CN (1) CN1049045C (fr)
AU (1) AU664474B2 (fr)
BE (1) BE1006795A3 (fr)
CA (1) CA2105635A1 (fr)
CZ (1) CZ289962B6 (fr)
DE (1) DE4331355A1 (fr)
ES (1) ES2078864B1 (fr)
FI (1) FI933971A (fr)
FR (1) FR2695721B1 (fr)
GB (2) GB9219450D0 (fr)
IT (1) IT1261253B (fr)
LU (1) LU88402A1 (fr)
NL (1) NL194246C (fr)
PT (1) PT101364B (fr)
SE (1) SE515115C2 (fr)

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DE19735246C2 (de) * 1997-08-14 1999-07-15 Bayern Freistaat Verfahren zur Bestimmung eines Volumens
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US6392756B1 (en) 1999-06-18 2002-05-21 N&K Technology, Inc. Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
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US6472238B1 (en) * 2000-02-09 2002-10-29 Therma-Wave, Inc. Evaluation of etching processes in semiconductors
US6570650B1 (en) * 2001-06-21 2003-05-27 Kla-Tenor Corporation Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces
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US8062922B2 (en) 2008-03-05 2011-11-22 Global Solar Energy, Inc. Buffer layer deposition for thin-film solar cells
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US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
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US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US8855450B2 (en) 2012-02-20 2014-10-07 Cardinal Cg Company System and method for measuring properties of a thin film coated glass
US8666202B2 (en) 2012-02-20 2014-03-04 Cardinal Ig Company System and method for measuring properties of a thin film coated glass
KR101897835B1 (ko) * 2012-07-24 2018-09-12 삼성에스디아이 주식회사 극판 두께 측정 장치 및 방법
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
WO2014078666A1 (fr) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Procédé et appareil pour détecter des caractéristiques d'intégrité de revêtement de barrière rapide
KR102211950B1 (ko) 2012-11-30 2021-02-04 에스아이오2 메디컬 프로덕츠, 인크. 의료용 주사기 카트리지 등의 pecvd 증착 균일성 제어
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CN105392916B (zh) 2013-03-11 2019-03-08 Sio2医药产品公司 涂布包装材料
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
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DE102014100594A1 (de) 2014-01-20 2015-07-23 Isra Surface Vision Gmbh Vorrichtung zur Inspektion eines mit einer beschichteten Oberfläche versehenen Materials und entsprechendes Verfahren
US9996765B2 (en) 2014-03-12 2018-06-12 The Sherwin-Williams Company Digital imaging for determining mix ratio of a coating
CA2942509C (fr) * 2014-03-12 2018-09-11 The Sherwin-Williams Company Imagerie numerique en temps reel amelioree pour la prediction, l'application et l'inspection de revetements
WO2015148471A1 (fr) 2014-03-28 2015-10-01 Sio2 Medical Products, Inc. Revêtements antistatiques pour des récipients en plastique
WO2015165503A1 (fr) * 2014-04-29 2015-11-05 Hewlett-Packard Indigo B.V. Mesure d'épaisseur de couche transparente
WO2016074750A1 (fr) 2014-11-13 2016-05-19 Gerresheimer Glas Gmbh Filtre à particules de machine de formage de verre, unité de piston, tête de soufflage, support de tête de soufflage et machine de formage de verre adaptée audit filtre ou le comprenant
CN105115430B (zh) * 2015-05-26 2016-08-31 山东建筑大学 一种点栅透射式化学药液涂抹均匀性检测方法及装置
US9702689B2 (en) * 2015-06-18 2017-07-11 Xerox Corporation Use of a full width array imaging sensor to measure real time film thicknesses on film manufacturing equipment
JP2017013408A (ja) 2015-07-02 2017-01-19 株式会社リコー 被処理物改質装置、被処理物改質システム、画像形成システムおよび画像形成方法
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EP3400430A4 (fr) * 2016-01-07 2019-11-06 Arkema, Inc. Procédé indépendant de la position d'objet permettant de mesurer l'épaisseur de revêtements déposés sur des objets incurvés se déplaçant à grande vitesse
CN107179055B (zh) * 2017-05-28 2019-11-01 中国计量大学 用于bopp薄膜生产的薄膜厚度监测方法
CN107782280B (zh) * 2017-10-20 2020-09-01 维沃移动通信有限公司 一种贴膜厚度的检测方法和移动终端
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CN114292032B (zh) * 2021-12-30 2023-07-25 凯盛信息显示材料(洛阳)有限公司 一种导电玻璃的在线镀膜方法及在线镀膜装置
CN115807219B (zh) * 2023-02-13 2023-05-30 南昌大学 一种光电薄膜材料制备控制***及方法
CN116603716B (zh) * 2023-04-28 2024-03-29 宁波市融嘉轻合金科技有限公司 一种压铸件表面处理方法、***、智能终端及存储介质
CN118051069A (zh) * 2024-03-29 2024-05-17 广州泽亨实业有限公司 一种涂层厚度自动控制方法和***

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Also Published As

Publication number Publication date
DE4331355A1 (de) 1994-03-17
PT101364A (pt) 1994-12-30
US5396080A (en) 1995-03-07
JPH06201333A (ja) 1994-07-19
ITTO930654A0 (it) 1993-09-08
FI933971A0 (fi) 1993-09-10
GB9219450D0 (en) 1992-10-28
SE9302985L (sv) 1994-03-16
CN1085655A (zh) 1994-04-20
SE515115C2 (sv) 2001-06-11
CA2105635A1 (fr) 1994-03-16
NL194246B (nl) 2001-06-01
BE1006795A3 (fr) 1994-12-13
FI933971A (fi) 1994-03-16
LU88402A1 (fr) 1995-04-05
NL194246C (nl) 2001-10-02
GB2270561A (en) 1994-03-16
GB9318814D0 (en) 1993-10-27
ES2078864B1 (es) 1997-05-16
ES2078864A2 (es) 1995-12-16
PT101364B (pt) 1999-11-30
NL9301577A (nl) 1994-04-05
GB2270561B (en) 1996-07-17
CZ289962B6 (cs) 2002-05-15
IT1261253B (it) 1996-05-09
CZ9301924A3 (cs) 2001-12-12
FR2695721A1 (fr) 1994-03-18
ITTO930654A1 (it) 1995-03-08
CN1049045C (zh) 2000-02-02
ES2078864R (fr) 1996-12-16
AU664474B2 (en) 1995-11-16
SE9302985D0 (sv) 1993-09-14
AU4487393A (en) 1994-03-24

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