IT1261253B - Metodo e apparecchiatura per la sorveglianza e il controllo dello spessore di una pellicola sottile - Google Patents

Metodo e apparecchiatura per la sorveglianza e il controllo dello spessore di una pellicola sottile

Info

Publication number
IT1261253B
IT1261253B ITTO930654A ITTO930654A IT1261253B IT 1261253 B IT1261253 B IT 1261253B IT TO930654 A ITTO930654 A IT TO930654A IT TO930654 A ITTO930654 A IT TO930654A IT 1261253 B IT1261253 B IT 1261253B
Authority
IT
Italy
Prior art keywords
coating
thickness
surveillance
equipment
thin film
Prior art date
Application number
ITTO930654A
Other languages
English (en)
Inventor
Michel Hannotiau
Guy Penard
Robert Terneu
Original Assignee
Glaverbel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel filed Critical Glaverbel
Publication of ITTO930654A0 publication Critical patent/ITTO930654A0/it
Publication of ITTO930654A1 publication Critical patent/ITTO930654A1/it
Application granted granted Critical
Publication of IT1261253B publication Critical patent/IT1261253B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Un metodo per sorvegliare lo spessore e l'uniformità di un rivestimento trasparente applicato ad un substrato sotto forma di lastra, comprende l'invio di luce policromatica al rivestimento in una molteplicità di punti e la misura dell'intensità di luce riflessa da detto rivestimento. In ogni punto, l'intensità di luce riflessa viene misurata ad almeno due lunghezze d'onda discrete di sorveglianza e dette misure vengono elaborate per generare un segnale elettrico che può venire confrontato con uno o più valori di soglia predeterminati e con segnali elettrici analoghi generati in altri punti per indicare se lo spessore e l'uniformità del rivestimento si trovano entro valori di tolleranza predeterminati. I risultati della sorveglianza possono essere usati per regolare il processo di rivestimento.(Figura 1A).
ITTO930654A 1992-09-15 1993-09-08 Metodo e apparecchiatura per la sorveglianza e il controllo dello spessore di una pellicola sottile IT1261253B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929219450A GB9219450D0 (en) 1992-09-15 1992-09-15 Thin film thickness monitoring and control

Publications (3)

Publication Number Publication Date
ITTO930654A0 ITTO930654A0 (it) 1993-09-08
ITTO930654A1 ITTO930654A1 (it) 1995-03-08
IT1261253B true IT1261253B (it) 1996-05-09

Family

ID=10721896

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO930654A IT1261253B (it) 1992-09-15 1993-09-08 Metodo e apparecchiatura per la sorveglianza e il controllo dello spessore di una pellicola sottile

Country Status (17)

Country Link
US (1) US5396080A (it)
JP (1) JPH06201333A (it)
CN (1) CN1049045C (it)
AU (1) AU664474B2 (it)
BE (1) BE1006795A3 (it)
CA (1) CA2105635A1 (it)
CZ (1) CZ289962B6 (it)
DE (1) DE4331355A1 (it)
ES (1) ES2078864B1 (it)
FI (1) FI933971A (it)
FR (1) FR2695721B1 (it)
GB (2) GB9219450D0 (it)
IT (1) IT1261253B (it)
LU (1) LU88402A1 (it)
NL (1) NL194246C (it)
PT (1) PT101364B (it)
SE (1) SE515115C2 (it)

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Also Published As

Publication number Publication date
AU664474B2 (en) 1995-11-16
GB2270561B (en) 1996-07-17
DE4331355A1 (de) 1994-03-17
SE9302985D0 (sv) 1993-09-14
NL9301577A (nl) 1994-04-05
CA2105635A1 (en) 1994-03-16
PT101364A (pt) 1994-12-30
ITTO930654A0 (it) 1993-09-08
NL194246C (nl) 2001-10-02
FR2695721A1 (fr) 1994-03-18
AU4487393A (en) 1994-03-24
GB9318814D0 (en) 1993-10-27
CZ289962B6 (cs) 2002-05-15
GB2270561A (en) 1994-03-16
ITTO930654A1 (it) 1995-03-08
SE515115C2 (sv) 2001-06-11
CZ9301924A3 (cs) 2001-12-12
FR2695721B1 (fr) 1995-02-24
US5396080A (en) 1995-03-07
CN1085655A (zh) 1994-04-20
FI933971A (fi) 1994-03-16
GB9219450D0 (en) 1992-10-28
JPH06201333A (ja) 1994-07-19
LU88402A1 (fr) 1995-04-05
CN1049045C (zh) 2000-02-02
PT101364B (pt) 1999-11-30
FI933971A0 (fi) 1993-09-10
ES2078864B1 (es) 1997-05-16
NL194246B (nl) 2001-06-01
BE1006795A3 (fr) 1994-12-13
ES2078864R (it) 1996-12-16
ES2078864A2 (es) 1995-12-16
SE9302985L (sv) 1994-03-16

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