FI933971A - Oevervakning av tjockleken hos en tunn film - Google Patents

Oevervakning av tjockleken hos en tunn film Download PDF

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Publication number
FI933971A
FI933971A FI933971A FI933971A FI933971A FI 933971 A FI933971 A FI 933971A FI 933971 A FI933971 A FI 933971A FI 933971 A FI933971 A FI 933971A FI 933971 A FI933971 A FI 933971A
Authority
FI
Finland
Prior art keywords
film
Prior art date
Application number
FI933971A
Other languages
English (en)
Other versions
FI933971A0 (fi
Inventor
Michel Hannotiau
Guy Renard
Robert Terneu
Original Assignee
Glaverbel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel filed Critical Glaverbel
Publication of FI933971A0 publication Critical patent/FI933971A0/fi
Publication of FI933971A publication Critical patent/FI933971A/fi

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
FI933971A 1992-09-15 1993-09-10 Oevervakning av tjockleken hos en tunn film FI933971A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929219450A GB9219450D0 (en) 1992-09-15 1992-09-15 Thin film thickness monitoring and control

Publications (2)

Publication Number Publication Date
FI933971A0 FI933971A0 (fi) 1993-09-10
FI933971A true FI933971A (fi) 1994-03-16

Family

ID=10721896

Family Applications (1)

Application Number Title Priority Date Filing Date
FI933971A FI933971A (fi) 1992-09-15 1993-09-10 Oevervakning av tjockleken hos en tunn film

Country Status (17)

Country Link
US (1) US5396080A (fi)
JP (1) JPH06201333A (fi)
CN (1) CN1049045C (fi)
AU (1) AU664474B2 (fi)
BE (1) BE1006795A3 (fi)
CA (1) CA2105635A1 (fi)
CZ (1) CZ289962B6 (fi)
DE (1) DE4331355A1 (fi)
ES (1) ES2078864B1 (fi)
FI (1) FI933971A (fi)
FR (1) FR2695721B1 (fi)
GB (2) GB9219450D0 (fi)
IT (1) IT1261253B (fi)
LU (1) LU88402A1 (fi)
NL (1) NL194246C (fi)
PT (1) PT101364B (fi)
SE (1) SE515115C2 (fi)

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Also Published As

Publication number Publication date
AU664474B2 (en) 1995-11-16
GB2270561B (en) 1996-07-17
DE4331355A1 (de) 1994-03-17
SE9302985D0 (sv) 1993-09-14
NL9301577A (nl) 1994-04-05
CA2105635A1 (en) 1994-03-16
PT101364A (pt) 1994-12-30
ITTO930654A0 (it) 1993-09-08
NL194246C (nl) 2001-10-02
FR2695721A1 (fr) 1994-03-18
AU4487393A (en) 1994-03-24
GB9318814D0 (en) 1993-10-27
CZ289962B6 (cs) 2002-05-15
IT1261253B (it) 1996-05-09
GB2270561A (en) 1994-03-16
ITTO930654A1 (it) 1995-03-08
SE515115C2 (sv) 2001-06-11
CZ9301924A3 (cs) 2001-12-12
FR2695721B1 (fr) 1995-02-24
US5396080A (en) 1995-03-07
CN1085655A (zh) 1994-04-20
GB9219450D0 (en) 1992-10-28
JPH06201333A (ja) 1994-07-19
LU88402A1 (fr) 1995-04-05
CN1049045C (zh) 2000-02-02
PT101364B (pt) 1999-11-30
FI933971A0 (fi) 1993-09-10
ES2078864B1 (es) 1997-05-16
NL194246B (nl) 2001-06-01
BE1006795A3 (fr) 1994-12-13
ES2078864R (fi) 1996-12-16
ES2078864A2 (es) 1995-12-16
SE9302985L (sv) 1994-03-16

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