FR2676603B1 - Procede et appareil de retenue electrostatique d'un corps. - Google Patents

Procede et appareil de retenue electrostatique d'un corps.

Info

Publication number
FR2676603B1
FR2676603B1 FR9205882A FR9205882A FR2676603B1 FR 2676603 B1 FR2676603 B1 FR 2676603B1 FR 9205882 A FR9205882 A FR 9205882A FR 9205882 A FR9205882 A FR 9205882A FR 2676603 B1 FR2676603 B1 FR 2676603B1
Authority
FR
France
Prior art keywords
electrostatic
retaining
electrostatic retaining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9205882A
Other languages
English (en)
Other versions
FR2676603A1 (fr
Inventor
Horwitz Christopher Max
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unisearch Ltd
Original Assignee
Unisearch Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unisearch Ltd filed Critical Unisearch Ltd
Publication of FR2676603A1 publication Critical patent/FR2676603A1/fr
Application granted granted Critical
Publication of FR2676603B1 publication Critical patent/FR2676603B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
FR9205882A 1991-05-17 1992-05-14 Procede et appareil de retenue electrostatique d'un corps. Expired - Lifetime FR2676603B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPK621191 1991-05-17

Publications (2)

Publication Number Publication Date
FR2676603A1 FR2676603A1 (fr) 1992-11-20
FR2676603B1 true FR2676603B1 (fr) 1995-07-13

Family

ID=3775413

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9205882A Expired - Lifetime FR2676603B1 (fr) 1991-05-17 1992-05-14 Procede et appareil de retenue electrostatique d'un corps.

Country Status (4)

Country Link
US (1) US5325261A (fr)
JP (1) JPH0729968A (fr)
DE (1) DE4216218B4 (fr)
FR (1) FR2676603B1 (fr)

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Also Published As

Publication number Publication date
DE4216218A1 (de) 1992-11-19
FR2676603A1 (fr) 1992-11-20
US5325261A (en) 1994-06-28
DE4216218B4 (de) 2009-04-02
JPH0729968A (ja) 1995-01-31

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