EP3683447B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3683447B1
EP3683447B1 EP19218135.2A EP19218135A EP3683447B1 EP 3683447 B1 EP3683447 B1 EP 3683447B1 EP 19218135 A EP19218135 A EP 19218135A EP 3683447 B1 EP3683447 B1 EP 3683447B1
Authority
EP
European Patent Office
Prior art keywords
bearing
rotor
adjustment
stator
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19218135.2A
Other languages
German (de)
English (en)
Other versions
EP3683447A1 (fr
Inventor
Sönke Gilbrich
Hans-Jürgen Jung
Miriam Schmitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19218135.2A priority Critical patent/EP3683447B1/fr
Publication of EP3683447A1 publication Critical patent/EP3683447A1/fr
Application granted granted Critical
Publication of EP3683447B1 publication Critical patent/EP3683447B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/502—Thermal properties
    • F05D2300/5021—Expansivity
    • F05D2300/50212—Expansivity dissimilar

Definitions

  • the invention relates to a vacuum pump, in particular a turbo-molecular pump, according to the preamble of claim 1.
  • Such vacuum pumps are known in principle, for example from DE 10 2009 024 337 A1 .
  • Turbomolecular vacuum pumps are of particular importance in practice.
  • the pumping action is based on an arrangement of stator blades assigned to the stator and rotor blades that are connected to the rotor.
  • the axis of rotation of the rotor runs parallel to the pumping direction, from the suction side of the pump, also known as the high vacuum side (HV side) and provided with a pump inlet, to the outlet side of the pump, also known as the fore-vacuum side (W side) runs.
  • HV side high vacuum side
  • W side fore-vacuum side
  • the rotor is typically supported by a so-called hybrid bearing.
  • the aforementioned magnetic bearing is located between the rotor and stator.
  • the rotor is supported by means of a roller bearing, in particular a ball bearing.
  • the rotors of vacuum pumps and in particular of turbo-molecular vacuum pumps rotate at very high speeds during operation.
  • the pump and in particular the rotor heat up.
  • the result is a comparatively high thermal expansion of the rotor, particularly in the axial direction, that is, parallel to the axis of rotation.
  • the object of the invention is to improve a pump of the type mentioned at the outset so that uneven running behavior due to operational heating of the pump is avoided and in particular the preload of the magnetic bearing is at least essentially independent of the operating temperature of the pump.
  • At least one of the bearing assemblies is clamped axially between two adjusting sections of an adjusting device, the adjusting sections behaving under the influence of heat in such a way that an axial displacement of the bearing assembly clamped between the adjusting sections results
  • the adjusting sections differ from one another with regard to a change in their dimensions and / or their shape and / or their rigidity which is effective in the axial direction and is caused by the influence of heat.
  • the two adjusting sections behave under the influence of heat in such a way that an axial displacement of the relevant bearing assembly clamped between the two adjusting sections results.
  • the adjusting device according to the invention can compensate for a different temperature behavior of the rotor and stator and thus prevent the axial relative position between the rotor bearing assembly and the stator bearing assembly from changing due to the pump heating up.
  • the preload of the magnetic bearing can also be maintained, so that the pump runs in a defined operating state at all times and consequently regardless of its operating temperature.
  • clamping of the bearing assembly in question by the two adjusting sections of the actuating device is not to be understood as a compression of the bearing assembly. Rather, clamping is to be understood as meaning that the actuating device, i.e. the two actuating sections, has sufficient rigidity to prevent the bearing rings of the bearing assembly in question from repelling and shifting, which would make it impossible to set a defined preload.
  • the adjusting sections can differ from one another with regard to a change in their dimensions and / or their shape and / or their rigidity which is effective in the axial direction and is caused by the influence of heat.
  • the adjusting sections can each comprise a spring arrangement that is pretensioned in the initial state, one of which loses or gains more rigidity under the influence of heat than the other, so that a force acting on the package in the axial direction results.
  • an adjustment section can expand by an amount that is determined by its coefficient of thermal expansion.
  • a change in the dimensions of the adjusting section in the axial direction can alternatively or additionally also result from a change in the shape of the adjusting section, which is caused by a change in temperature. This is the case, for example, when the adjusting section consists at least partially of different materials which differ from one another in terms of their thermal expansion coefficients, as is the case with bimetals according to the invention.
  • one of the adjusting sections can deform under the influence of heat in such a way that its axial overall height either increases or decreases, while the other adjusting section is designed in such a way that it is either axially compressed by the bearing assembly acted upon by an axially effective force due to the increase in overall height or - starting from a compressed initial state - relaxes due to the decrease in overall height, i.e. expands axially, and thereby the package with an axially effective Force applied.
  • the bearing assembly which itself is not axially compressible, is thus axially displaced in both cases.
  • An increase in height or decrease in height of an adjusting section can take place as a result of any deformation and / or thermal expansion.
  • one of the adjusting sections (which is made of a bimetal) is itself deformed directly in an axially effective manner in the event of a temperature change
  • the other adjusting section (which is, for example, a spring made of a any material) is designed in such a way that it can react to this by means of a deformation that is also effective axially, with the same amount but in the opposite direction.
  • the other adjusting section does not have to be designed in such a way that it - like an adjusting section made from a bimetal, for example - deforms itself directly due to the change in temperature. Rather, the other adjusting section can be designed (e.g.
  • one - the one that acts - deforms itself directly due to the change in temperature, while the other - the one that reacts to that extent - also deforms, but not directly due to the change in temperature, but as a reaction to a change the force acting axially via the bearing assembly. If this change is a reduction in the force, the reacting actuating section relaxes. If the force increases, the reacting actuating section is compressed.
  • the actuating device can consequently have an acting actuating section and a reacting actuating section.
  • the acting adjusting section can be designed in such a way that it either increases or decreases its axial height when the temperature increases.
  • the acting actuating section can be arranged on the VV side or on the HV side of the bearing package in question. The arrangement of the actuating section depends on whether it increases or decreases its axial height when the temperature increases and whether the bearing assembly is to be shifted to the W side or to the HV side when the temperature increases. If the bearing package is to be moved to the HV side, for example, and the acting adjusting section is designed so that it reduces its axial height when the temperature rises, the acting adjusting section is arranged on the HV side of the bearing package.
  • the actuating device is arranged on the stator and clamps the stator-side bearing assembly with its actuating sections. If the rotor expands in the axial direction during operation due to the heating and this results in an axial displacement of the rotor bearing assembly, the two adjusting sections that clamp the stator bearing assembly can ensure that the stator bearing assembly "moves along" with the heat-induced movement of the rotor bearing assembly.
  • stator-side bearing package is clamped between the adjusting sections and the temperature behavior of the adjusting device is matched to the temperature behavior of the rotor in such a way that the axial relative position of the two bearing packages remains at least essentially unchanged during operation.
  • the invention is not restricted to providing the actuating device according to the invention for the stator core.
  • the adjusting device can also be arranged on the rotor and clamp the rotor-side bearing assembly with adjusting sections. Accordingly, in some embodiments it can be provided that the rotor-side bearing package is clamped between the adjusting sections and the temperature behavior of the adjusting device is matched to the temperature behavior of the stator in such a way that the axial relative position of the two bearing packages remains at least essentially unchanged during operation.
  • one of the adjusting sections expands axially during operation and / or deforms while increasing its axial dimension and thereby compresses the other adjusting section axially by means of the axially shifting package.
  • one of the adjusting sections shrinks axially during operation and / or is deformed while reducing its axial dimension and allows an axial expansion and / or enlargement of the other, previously compressed, adjusting section, which thereby axially shifts.
  • At least one of the adjusting sections comprises at least one adjusting element which at least partially consists of a bimetal.
  • a bimetal is characterized by the fact that it comprises different metals which differ from one another with regard to their coefficients of thermal expansion.
  • the bimetal changes its shape when the temperature changes, for example in the sense of a bending. This effect can be used for the invention in order to ensure a sufficiently large expansion or shrinkage of the adjusting element and / or change in shape of the adjusting element in the axial direction when the pump is heated.
  • the actuating element which is at least partially made of a bimetal, is designed in such a way that, starting from a flat or slightly curved state, when the temperature increases, it changes into a curved or more curved state, or vice versa.
  • the adjusting element can preferably be shaped like a plate spring in the curved or more strongly curved state.
  • Disc springs are known in principle to the person skilled in the art and are characterized in particular by the fact that they are able to transmit relatively large forces in a comparatively small space.
  • a single plate spring formed from a bimetal can be used.
  • At least one of the actuating sections comprises at least one spring element.
  • the spring element can be a so-called wave spring, for example.
  • Wave springs are known in principle to the person skilled in the art. These typically consist of one or more superimposed, circular, partially circular, ring or partially ring-shaped metal strips, which, however, do not lie in a single plane, but rather have a wave shape in the circumferential direction, i.e. have a three-dimensional shape.
  • the actuating section acting in the sense explained above comprises a wave spring which is at least partially made from a bimetal, ie an actuating element comprising a bimetal of the actuating section does not have to - as explained in the above example - be designed in the manner of one or more disc springs.
  • the wave spring of the actuating adjusting section is designed in such a way that the amplitude of its wave shape and thus the axially effective structural height changes when the temperature increases.
  • the wave spring can be designed so that either in a non-operating state or in an operating state, the amplitude is zero or only slightly different from zero, the wave spring is flat or essentially flat and only changes when there is a temperature change - either a temperature increase or a Decrease in temperature - deformed to take on a wave shape.
  • Some embodiments of the invention can have a combination of two adjusting sections for the adjusting device according to the invention, one adjusting section comprising an adjusting element at least partially made of a bimetal, for example in the form of one or more disc springs, and the other adjusting section comprising a spring element, for example in the form of a wave spring .
  • the actuating element which is at least partially made of a bimetal
  • the spring element is arranged on the high-vacuum side of the magnetic bearing.
  • the reverse arrangement of the two adjusting elements is also possible according to the invention, i.e. the adjusting element, which is at least partially made of a bimetal, can be arranged in alternative embodiments on the high vacuum side of the magnetic bearing and the spring element on its fore-vacuum side.
  • the adjusting sections of the adjusting device according to the invention are each supported on their axial side facing away from the magnetic bearing package on a support section of the stator or the rotor. Between the two axially spaced support sections of the stator or the rotor are then with the exception of the two adjusting sections and the magnetic bearing assembly clamped by them no further components - possibly with the exception of spacer elements as explained below - arranged.
  • the actuating sections can each comprise a spacer element which is arranged between the actuating element in question and the first permanent magnet bearing ring as seen from this.
  • the spacer element can therefore be a component of the respective adjusting section or be viewed as such a component. But this is not mandatory.
  • the spacer elements can each be a component between the bearing assembly and the actuating section or can be viewed as such a component. Such a spacer element can in particular protect the bearing ring in question from damage due to the deformation of the adjusting element.
  • VV-side support section - W-side adjusting element - W-side spacer element - permanent magnet ring bearing package - HV-side spacer element - HV-side adjusting element - HV-side support section.
  • the two magnetic bearing assemblies are displaced relative to one another in the axial direction.
  • This preload of the magnetic bearing is made as a pre-setting when the pump is manufactured. That bearing package that is not clamped by the adjusting device can be shifted either in the direction of a fore-vacuum side or a high-vacuum side of the magnetic bearing with respect to the bearing stack clamped by the adjusting device.
  • the invention ensures that the rotor bearing package remains on the preset side and a stable state is established during operation.
  • the turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (see also FIG Fig. 3 ).
  • a plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbo-molecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a barrier gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 (see e.g. Fig. 3 ) can be admitted into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which is fed into the vacuum pump for cooling purposes can be directed.
  • Other existing turbo-molecular vacuum pumps (not shown) are operated exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards. In principle, any angle is possible.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example. This is not possible with other existing turbo-molecular vacuum pumps (not shown), which are in particular larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping. There are other turbo-molecular vacuum pumps (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested in one another.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbo molecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite ones
  • the outer surfaces of the Holweck rotor sleeves 163, 165 are smooth and propel the gas for operating the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection molded nut 185 with an outer diameter that increases towards the roller bearing 181 is provided on the rotor shaft 153.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • an injection screw can be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, which each have a ring stack of several permanent magnetic rings 195, stacked one on top of the other in the axial direction, 197 include.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or backup bearing 215 is provided within the magnetic bearing, which runs idle during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form so that a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures is prevented under all circumstances.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, e.g. from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve better sealing of the motor compartment 217 from the radially outside Holweck pump stages.
  • the invention explained below with reference to a possible exemplary embodiment can be used in turbo-molecular vacuum pumps, as described above by way of example with reference to FIG Figs. 1 to 5 described and in connection with the description of the Figs. 1 to 5 mentioned but not shown.
  • a rotor 15 rotatably mounted about an axis of rotation 13 and provided with rotor blades is provided in the area of its axial end facing the high vacuum side HV, i.e. the pump inlet 27 of the vacuum pump, with an arrangement of several axially successive permanent magnet rings 35, also referred to below as rotor bearing assembly 25.
  • the rotor 15 is supported by a roller bearing (not shown) on a housing or a lower part of the pump (not shown).
  • the rotor bearing assembly 25 is axially supported on the VV side on a support section 15b of the rotor 15, which is formed by a shoulder, and on the HV side on an end-face end section 15a of the rotor 15. With the end section 15a, the rings 35 are pressed together without any gaps.
  • stator 11 of the turbomolecular vacuum pump according to the invention shown separately in each case, is also provided with an arrangement of several axially successive permanent magnet rings 31, which is also referred to below as the stator bearing assembly 21.
  • This stator bearing assembly 21 and the bearing assembly 25 of the rotor 15 form the radial magnetic bearing of the turbo-molecular vacuum pump according to the invention for its rotor 15 and the HV-side bearing point of the rotor 15 in the area of the inlet 27 of the pump.
  • the stator 11 At its axial end on the fore-vacuum side, the stator 11 is provided with an emergency bearing 23, also known as a safety bearing, in the form of a roller bearing which, in the event of an excessive deflection of the rotor 15 that does not correspond to a normal operating state, interacts with a pin 24 of the rotor 15 to prevent damage to the rotor Magnetic bearing 21, 25 to prevent.
  • an emergency bearing 23 also known as a safety bearing, in the form of a roller bearing which, in the event of an excessive deflection of the rotor 15 that does not correspond to a normal operating state, interacts with a pin 24 of the rotor 15 to prevent damage to the rotor Magnetic bearing 21, 25 to prevent.
  • the stator 11 is provided with a flange section 29, which serves on the one hand as an axial support section 11a for the stator bearing assembly 21 and on the other hand for the HV-side fixation of the stator 11 on the pump housing (not shown).
  • the flange section 29 can be connected to a star-shaped end section of the pump housing (not shown), which extends perpendicular to the axis of rotation 13 in the inlet opening of the pump housing and comprises a plurality of arms distributed in the circumferential direction and extending in the radial direction.
  • the turbo-molecular vacuum pump according to the invention differs from conventional pumps of this type in that the stator bearing assembly 21 is axially accommodated. 11a supported axially.
  • an adjusting section 17 in the form of a disk spring assembly is provided between the stator bearing assembly 21 and the relevant support section 11b of the stator 11, the individual disk springs each being made from a bimetal.
  • the individual disc springs In a non-operational state according to Figure 7a the individual disc springs are flat or only slightly curved.
  • an operating state according to Figure 7b in which due to the operational warming of the pump have also heated the disc springs, they have changed into a more arched state, which means that the overall axial height of this adjusting section 17 compared to the starting position ( Figure 7a ) has enlarged.
  • stator bearing assembly 21 When the pump is heated up for operational reasons, the stator bearing assembly 21 is consequently displaced by the adjusting section 17 in the axial direction towards the HV side.
  • This spring element 19 forms a further adjusting section which, together with the disk spring assembly 17, forms an adjusting device according to the invention for the stator bearing assembly 21.
  • the insofar as passive or reactive spring element 19 is thus indirectly compressed via the stator bearing assembly 17, which is moved towards the HV side, by the insofar active or acting actuating section 17, namely by an amount that compensates for the increase in the axial height of the actuating section 17.
  • This resulting direction of movement of the stator bearing assembly 21 corresponds to the direction in which, in the exemplary embodiment described here, the rotor 15 expands under the influence of heat and consequently the rotor bearing assembly 25 moves.
  • the rotor bearing assembly 25 is set towards the VV side.
  • A denotes the axial distance between the stator 11 and the end section 15a of the rotor 15.
  • the dimension d is designated by which the permanent magnet rings 31 of the stator bearing assembly 21 are axially offset with respect to the permanent magnet rings 35 of the rotor bearing assembly 25.
  • L denotes the axial height of the VV-side adjusting section 17 of the stator 11, that is to say of the bimetallic cup spring stack.
  • the stator bearing assembly 21 has moved under the influence of heat due to the inventive design of the adjusting device comprising the two adjusting sections 17, 19 in the axial direction by the dimension x towards the HV side.
  • the two adjusting sections 17, 19 have been designed in such a way that the dimension x corresponds to that axial dimension A - A 'by which the rotor 15 expands in the axial direction and the rotor bearing assembly 25 has moved to the HV side.
  • the stator bearing assembly 21 under the influence of heat, the stator bearing assembly 21 "migrated" with the rotor 15 towards the HV side.
  • the actuating device according to the invention in particular the arrangement of the spring element 19 and bimetallic disk spring assembly 17, can alternatively also be assigned to the rotor 15, unlike in the exemplary embodiment described above.
  • a respective assignment can be selected individually for each type of vacuum pump depending on the temperature conditions between rotor and stator during operation.
  • a rotor that is permanently set either in the direction of the fore-vacuum side - as in the exemplary embodiment described above - or in the direction of the high-vacuum side can lead to better running behavior.
  • the respective setting of the rotor will then have to be selected accordingly. This then results in the relative arrangement of the two different adjusting sections 17, 19 of the adjusting device according to the invention.
  • the “active” or “acting” actuating section for example a bimetallic disk spring assembly
  • the “passive” or “reactive” actuating section for example a wave spring or another Spring element

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Pompe à vide, en particulier pompe turbomoléculaire, comportant un stator (11) et un rotor (15) qui, en fonctionnement, tourne par rapport au stator (11) autour d'un axe de rotation (13) et entre lesquels est disposé au moins un palier magnétique radial ayant des empilements formant palier (21, 25) disposés coaxialement l'un dans l'autre par rapport à l'axe de rotation (13) et constitués chacun de plusieurs anneaux d'aimant permanent (31, 35) qui se succèdent axialement,
    dans laquelle
    l'un au moins des empilements formant palier (21) est serré axialement entre deux portions de positionnement (17, 19) d'un dispositif de positionnement, et
    sous l'effet de la chaleur, les portions de positionnement (17, 19) se comportent de telle sorte qu'il en résulte un déplacement axial de l'empilement formant palier (21) serré entre les portions de positionnement (17, 19), caractérisée en ce que
    l'une au moins des portions de positionnement comprend au moins un élément de positionnement (17) qui est constitué au moins partiellement d'une bilame, et
    l'élément de positionnement (17) est réalisé de telle sorte que, partant d'un état plat ou légèrement incurvé, il passe à un état incurvé ou plus fortement incurvé lors d'un changement de température, de préférence l'élément de positionnement (17) dans l'état incurvé ou plus fortement incurvé présentant la forme d'une rondelle-ressort, ou
    l'élément de positionnement (17) est réalisé sous forme de ressort ondulé dans lequel l'amplitude de sa forme ondulée change avec un changement de température.
  2. Pompe à vide selon la revendication 1,
    dans laquelle les portions de positionnement (17, 19) se distinguent l'une de l'autre par une modification de leur dimension et/ou de leur forme et/ou de leur rigidité qui agit dans la direction axiale et qui est provoquée par effet de la chaleur.
  3. Pompe à vide selon la revendication 1 ou 2,
    dans laquelle le dispositif de positionnement est disposé sur le stator (11) et serre l'empilement formant palier (21) côté stator au moyen de ses portions de positionnement (17, 19).
  4. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle l'empilement formant palier (21) côté stator est serré entre les portions de positionnement (17, 19), et le dispositif de positionnement est adapté au comportement thermique du rotor (15) de telle sorte que la position relative axiale des deux empilements formant palier (21, 25) reste au moins sensiblement inchangée pendant le fonctionnement, ou l'empilement formant palier (25) côté rotor est serré entre les portions de positionnement (17, 19), et le dispositif de positionnement est adapté au comportement thermique du stator (11) de telle sorte que la position relative axiale des deux empilements formant palier (21, 25) reste au moins sensiblement inchangée pendant le fonctionnement.
  5. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle, pendant le fonctionnement, l'une des portions de positionnement (17) se dilate axialement et/ou se déforme en augmentant sa dimension axiale et comprime ainsi l'autre portion de positionnement (19) axialement au moyen de l'empilement formant palier (21) se déplaçant axialement, ou
    pendant le fonctionnement, l'une des portions de positionnement se rétracte axialement et/ou se déforme en réduisant sa dimension axiale, et permet une dilatation et/ou une augmentation axiale de l'autre portion de positionnement, précédemment comprimée, qui déplace ainsi axialement l'empilement formant palier.
  6. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle les portions de positionnement (17, 19) sont réalisées chacune sous forme de composants ou de groupes structurels séparés, et/ou les portions de positionnement (17, 19) sont supportées chacune sur une portion de support (11b, 11a) du stator (11) ou du rotor (15) sur leur côté axial détourné de l'empilement formant palier (21).
  7. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle l'une au moins des portions de positionnement comprend au moins un élément de ressort (19), en particulier un ressort ondulé.
  8. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle ladite portion de positionnement comprend au moins un élément de positionnement (17) constitué au moins partiellement d'une bilame, et l'autre portion de positionnement comprend un élément de ressort (19), et en particulier, l'élément de positionnement (17) constitué au moins partiellement d'une bilame est disposé sur un côté de vide primaire (VV) du palier magnétique, et l'élément de ressort est disposé sur un côté de vide poussé (HV) du palier magnétique, ou inversement.
  9. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle les deux empilements formant palier (21, 25) sont déplacés l'un par rapport à l'autre dans la direction axiale au moins dans un état de non-fonctionnement, et, de préférence, l'empilement formant palier (25) qui n'est pas serré par le dispositif de positionnement est déplacé en direction d'un côté de vide primaire (VV) ou d'un côté de vide poussé (HV) du palier magnétique par rapport à l'empilement formant palier (21) qui n'est pas serré par le dispositif de positionnement.
EP19218135.2A 2019-12-19 2019-12-19 Pompe à vide Active EP3683447B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19218135.2A EP3683447B1 (fr) 2019-12-19 2019-12-19 Pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19218135.2A EP3683447B1 (fr) 2019-12-19 2019-12-19 Pompe à vide

Publications (2)

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EP3683447A1 EP3683447A1 (fr) 2020-07-22
EP3683447B1 true EP3683447B1 (fr) 2021-11-24

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4108930A1 (fr) * 2022-08-31 2022-12-28 Pfeiffer Vacuum Technology AG Pompe à vide dotée d'un support d'aimants réglable dans une direction axiale

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009024337A1 (de) * 2009-06-09 2010-12-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP3085964B1 (fr) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production d'un composant de pompe à vide par fabrication additive métallique
EP3444478A1 (fr) * 2017-08-18 2019-02-20 Pfeiffer Vacuum Gmbh Pompe à vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

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