EP3462036B1 - Pompe à vide turbomoléculaire - Google Patents

Pompe à vide turbomoléculaire Download PDF

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Publication number
EP3462036B1
EP3462036B1 EP17194409.3A EP17194409A EP3462036B1 EP 3462036 B1 EP3462036 B1 EP 3462036B1 EP 17194409 A EP17194409 A EP 17194409A EP 3462036 B1 EP3462036 B1 EP 3462036B1
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EP
European Patent Office
Prior art keywords
projection
rotor
blade
vacuum pump
blade base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17194409.3A
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German (de)
English (en)
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EP3462036A1 (fr
Inventor
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17194409.3A priority Critical patent/EP3462036B1/fr
Priority to JP2018183168A priority patent/JP6716656B2/ja
Publication of EP3462036A1 publication Critical patent/EP3462036A1/fr
Application granted granted Critical
Publication of EP3462036B1 publication Critical patent/EP3462036B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the present invention relates to a turbomolecular vacuum pump comprising at least two adjacently arranged rotor disks, each of which has a plurality of blades distributed in the circumferential direction, each of which extends radially outward from a blade base.
  • Such pumps are known, for example, from EN 10 2008 056352 A1 , the JP H05 106588 A and the JP-S60 203375 A disclosed.
  • the invention also relates to a method for producing a turbomolecular vacuum pump with at least two adjacent rotor disks, each of which has a plurality of blades distributed in the circumferential direction, each of which extends radially outward from a blade base.
  • Turbomolecular vacuum pumps are used in various areas of technology to create the vacuum necessary for a respective process.
  • Turbomolecular vacuum pumps or turbomolecular pumps for short comprise a stator with a plurality of stator disks which follow one another in the direction of a rotor axis and a rotor which is rotatably mounted relative to the stator about the rotor axis and which comprises a rotor shaft and a plurality of rotor disks which are arranged on the rotor shaft and which follow one another in the axial direction and are arranged between the stator disks, wherein the stator disks and the rotor disks each have a pump-active structure.
  • a blade base is the area in which a blade of the rotor disk begins in the radial direction. This blade base is always smooth or flat in the rotor disks known to date.
  • the performance of a vacuum pump and in particular its performance in relation to the vacuum that can be achieved depends on a variety of factors.
  • the invention is based on the object of further optimizing the contribution of the rotor disks, particularly with regard to vacuum performance.
  • turbomolecular vacuum pump with the features of claim 1, and in particular in that at least one, in particular tooth-like, projection is provided on at least one blade base of a respective rotor disk.
  • Each of the at least two rotor disks of the pump therefore has at least one blade base with a projection.
  • each of the at least two rotor disks can have projections according to the invention on several, in particular all, blade bases.
  • the contribution of the rotor disks to the performance of the vacuum pump and in particular to the vacuum performance is further optimized. Due to the projection provided on or in the area of the blade base, the gas to be conveyed from a pump inlet to a pump outlet of the vacuum pump is also captured in the area of a respective blade base and set in rotation, whereby it reaches the interlocked blade area in order to be transported further in the direction of the pump outlet become. This ensures that the gas to be pumped is optimally captured by the rotating rotor disk even in the area of a respective blade base, whereby the pumping effect is increased accordingly.
  • the projection is formed at a suction-side and/or pressure-side end of the blade base.
  • the projection is particularly easy to form if it is formed by a jump between two surfaces of the blade base.
  • the surfaces can be formed, for example, by machining, in particular by milling and/or sawing.
  • the surfaces and thus the projection are preferably created when the blades are formed, in particular when the blades are sawn out of a raw disk. Separate work steps just to form the projection are therefore not necessary. This is a particularly simple way of improving vacuum performance.
  • the surfaces are flat. This further simplifies their manufacture.
  • the projection can be pointed, for example pyramid-shaped, in particular as a triangular pyramid or by three converging surfaces.
  • the projection has a first side surface which runs at least essentially parallel to a first adjacent blade.
  • the projection can thus interact optimally with the blade in terms of vacuum technology.
  • such a projection, in particular the surface parallel to the blade can be produced particularly easily, for example with the same tool and/or the same working movement as the blade parallel to it.
  • the projection each has a second side surface which runs at least substantially perpendicular to a second adjacent blade. This is optimally avoided a negative vacuum impact of the projection on this side surface in relation to the blade perpendicular to it.
  • the vertical surface can also be produced particularly easily, for example by machining, for example with the same tool and/or the same working movement as the blade perpendicular to it.
  • the projection has a third side surface which runs at least substantially perpendicular to a rotor axis of the pump.
  • the third side surface can be flat and/or parallel to an end face of the rotor disk or form part of it.
  • first, second or third side surface or blade it is understood that this is only intended to assist in understanding and referring to the description of the figures below, but does not refer to a corresponding number of side surfaces or blades actually provided. In this respect, for example, only one side surface perpendicular to the rotor axis and/or one side surface perpendicular to an adjacent blade can be provided on the projection.
  • two projections opposite one another in the pumping direction are formed on the blade base.
  • the projections each form an end face of the rotor disk with a side surface and/or coincide with such.
  • the projections can be arranged and/or designed symmetrically.
  • the performance is further improved if, according to a further exemplary embodiment, the projections are inclined in opposite directions with respect to a circumference of the respective rotor disk.
  • a projection arranged on the pressure side can have at least one component in the direction of rotation point.
  • a projection arranged on the suction side can point at least one component counter to the direction of rotation.
  • the pump can have a bearing for a rotor carrying the rotor disks, wherein a first bearing of the bearing is designed as a rolling bearing and a second bearing of the bearing is designed as a magnetic bearing.
  • a bearing is also referred to as a hybrid bearing.
  • the turbomolecular vacuum pump can be manufactured and operated particularly advantageously if the rotor disks are combined to form a common component.
  • the object of the invention is also achieved by a method according to claim 10, and in particular in that at least one, in particular tooth-like, projection is formed on at least one blade base of a respective rotor disk.
  • the blades, including the projection are each produced by machining, in particular by sawing out, from a blank disk.
  • the projection can be produced particularly easily and inexpensively by forming it using two working movements of a machining tool, which form two surfaces on the blade base and the projection as a jump between the surfaces.
  • the surfaces are formed as planes that are slightly skewed relative to one another.
  • a further development provides that an upper side of a first blade and an opposite underside of an adjacent blade are formed by each of two working movements of a processing tool.
  • a first of two working movements produces a first side surface of a first projection and a second side surface of a second projection and/or a second of two working movements produces a second side surface of a first projection and a first side surface of a second projection.
  • the pump-active structure can be formed at the blade base and, in the event that the lower and upper sides of the blades are also formed with the working movements, the complete pump-active structure can be formed, which is conducive to particularly simple and cost-effective production.
  • a respective work movement can be linear.
  • the work movements can therefore be planned and programmed particularly easily.
  • a respective working movement can, for example, run transversely through a raw disk provided for the rotor disk.
  • a work movement can include moving through a raw disc.
  • the working movements have different directions of movement.
  • the working movements can, for example, have trajectories that are tilted relative to one another, in particular slightly, and/or run along skewed straight lines.
  • the working movements can, for example, have a different angle in relation to the rotor disks.
  • Turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms the vacuum pump in the alignment according to Fig.1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on the side of which an electronics housing 123 is arranged. Electrical and/or electronic components of the vacuum pump 111 are housed in the electronics housing 123, e.g. for operating an electric motor 125 arranged in the vacuum pump. Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 e.g. according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection is also arranged, via which purge gas can be brought into the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, to protect the electric motor 125 from the gas delivered by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection as an outlet for coolant that can be fed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can therefore be operated hanging, so to speak.
  • the vacuum pump 111 can be designed so that it can be put into operation even if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 can be arranged not facing downwards, but facing to the side or facing upwards.
  • a bearing cover 145 is attached to the underside 141.
  • fastening holes 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface.
  • a coolant line 148 is shown in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about a rotation axis 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another and having a plurality of radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages that are arranged one inside the other in the radial direction and are effectively connected in series.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 which are fastened to the rotor hub 161 and supported by it, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested within one another when viewed in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, i.e. by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and forms a second Holweck pump stage with this.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies on the radial outer surface of the inner Holweck rotor sleeve 165 forming a radial Holweck gap 175 opposite and with this forms the third Holweck pump stage.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series with one another.
  • a connecting channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the rotation axis 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and propel the gas in the Holweck grooves for operating the vacuum pump 111.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one wiper of an operating medium storage.
  • the operating medium storage comprises a plurality of absorbent disks 187 stacked on top of one another, which are soaked with an operating medium for the rolling bearing 181, for example with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid storage via the wiper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 92 to the rolling bearing 181, where it e.g. fulfills a lubricating function.
  • the rolling bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnet rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, with the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsion forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a support section 201 of the rotor shaft 153, which surrounds the ring magnets 195 on the radial outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the rotor-side ring magnets 195 are fixed parallel to the rotation axis 151 by a cover element 207 coupled to the support section 203.
  • the stator-side ring magnets 197 are fixed parallel to the rotation axis 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203.
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnets 197.
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages when there is an excessive radial deflection of the rotor 149 relative to the stator in order to form a radial stop for the rotor 149, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the safety bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the safety bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the safety bearing 215 engages is large enough so that the safety bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures is prevented under all circumstances.
  • the vacuum pump 111 comprises the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, whose rotor shaft 153 extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the engine compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purging gas and which can be, for example, air or nitrogen, can reach the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, for example, via the sealing gas corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing vacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve a better sealing of the engine compartment 217 compared to the Holweck pump stages located radially outside.
  • Fig. 6 shows a part of a rotor disk 300 of the prior art in a plan view or a view with a line of sight parallel to a rotor axis, not shown in more detail.
  • the rotor disk 300 has a plurality of blades 302 distributed in the circumferential direction, between which respective blade bases 304 are formed.
  • a respective blade base 304 is essentially uniform and designed as a curve that connects respective top and bottom sides of adjacent blades 302.
  • a respective rotor disk 400 also has a plurality of blades 402 distributed in the circumferential direction, of which a first blade 402a and a second blade 402b are used as examples to describe the invention.
  • the blades 402a and 402b are connected by a blade base 404.
  • the blade base 404 is formed by two flat surfaces 406a and 406b.
  • the surface 406a runs perpendicular to an upper side 408 of the first blade 402a.
  • the surface 406b runs perpendicular to an underside 410 of the second blade 402b.
  • the surfaces 406a and 406b are arranged slightly skewed relative to one another, like the upper side 408 and the underside 410.
  • the blade base 404 has two symmetrically arranged and designed projections designed as teeth 412a and 412b.
  • the teeth 412a and 412b are designed as a jump between the two surfaces 406a and 406b.
  • the tooth 412a is attached to the pressure side of the rotor disk 400 and the tooth 412b is attached to the suction side of the rotor disk 400.
  • the pump-active structure i.e. the blades 402 and the blade base 404
  • a rotating circular saw blade is moved through the raw disc in two working movements in order to form an upper side 408 of the blade 402a, the blade base 404 and the underside 410 of the blade 402b.
  • the surface 406a and the surface 408 of the blade 402a are each made flat by the saw blade.
  • material is left opposite the surface 408, which forms the tooth 412a in conjunction with a second working movement forming the surface 406b.
  • the tooth 412a is therefore at a distance from the surface 408, which corresponds in particular to the width of the saw blade used.
  • a first side surface 414a runs parallel to the top 408 of the blade 402a.
  • the second surface 406b is formed together with the underside 410 of the blade 402b by a second, also linear working movement with a circular saw, in particular the same circular saw.
  • the second working movement is slightly skewed to the first working movement in relation to the rotor disk.
  • the circular saw blade leaves material 410 opposite the underside, which forms the tooth 412b in conjunction with the first working movement.
  • the tooth 412b also has a first side surface 414b, which runs parallel to the opposite blade surface, here the underside 410 of the blade 402b, and at a distance therefrom corresponds to a tool diameter.
  • first and second work movements do not have to be carried out in the order mentioned.
  • the first working movement can first be carried out for several or all blades and then the second working movement can be carried out for several or all blades.
  • the second working movement and then the first working movement can also be carried out for one, several or all blades.
  • the tooth 412a used as an example for the teeth 412, is essentially designed as a triangular pyramid and points with a tip in the circumferential direction, here in a direction of rotation of the rotor disk 400, while the tooth 412b points against this direction of rotation.
  • the tooth 412a has a second side surface 416a, which runs parallel to the underside 410 of the blade 402b and coincides with the surface 406b, which was therefore formed by the second working movement.
  • a third side surface 418a of the tooth 412a coincides with an end face of the rotor disk 400.
  • the tooth 412b is designed accordingly, but a second side surface 416b of the tooth 412b coincides with the surface 406a and was formed during the first working movement.
  • a third side surface of the tooth 412b coincides with a suction-side end face of the rotor disk 400, but is in the Fig. 7 not visible due to the chosen perspective.
  • Fig. 8 are the rotor disks 400 of Fig. 7 shown in a slightly different perspective.
  • a first side surface 414b of a suction-side tooth 412b is better visible.
  • Fig. 9 shows a top view of the upper one of the rotor disks 400 Fig. 7 and 8th , wherein outer ends of the blades 402 are covered by a circumferential edge of a flange, not shown, of the turbomolecular vacuum pump.
  • a tooth 412a is provided on each of the blade bases 404 provided between the rotor blades 402, of which a third side surface 418a is visible.
  • the teeth 412a are inclined in the direction of rotation.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (13)

  1. Pompe à vide turbomoléculaire, comprenant
    au moins deux disques de rotor (400) disposés au voisinage l'un de l'autre, qui présentent chacun une pluralité d'aubes (402) réparties dans la direction périphérique, s'étendant chacune radialement vers l'extérieur à partir d'un fond d'aube (404),
    dans laquelle
    au moins une saillie (412), en particulier en forme de dent, est prévue sur au moins un fond d'aube (404) d'un disque de rotor (400) respectif,
    la saillie (412) est formée à une extrémité côté aspiration et/ou côté refoulement du fond d'aube (404), et
    la saillie (412) présente une première face latérale (414) qui s'étend au moins sensiblement parallèlement à la face supérieure ou à la face inférieure (408, 410) d'une première aube voisine (402).
  2. Pompe à vide turbomoléculaire selon la revendication 1,
    caractérisée en ce que
    la saillie (412) est formée par un saut respectif entre deux surfaces (406) du fond d'aube (404).
  3. Pompe à vide turbomoléculaire selon la revendication 2,
    caractérisée en ce que
    les surfaces (406) sont planes.
  4. Pompe à vide turbomoléculaire selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la saillie (412) présente une deuxième face latérale (416) respective qui s'étend au moins sensiblement perpendiculairement à une deuxième aube voisine (402).
  5. Pompe à vide turbomoléculaire selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    deux saillies (412) opposées l'une à l'autre dans la direction de pompage sont formées sur le fond d'aube (404).
  6. Pompe à vide turbomoléculaire selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la pompe comporte un support pour un rotor portant les disques de rotor, un premier palier du support étant réalisé sous la forme d'un palier à roulement et un deuxième palier du support étant réalisé sous la forme d'un palier magnétique.
  7. Pompe à vide turbomoléculaire selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    les disques de rotor (400) sont réunis en un composant commun.
  8. Procédé de fabrication d'une pompe à vide turbomoléculaire comprenant au moins deux disques de rotor (400) voisins qui présentent chacun une pluralité d'aubes (402) réparties dans la direction périphérique, s'étendant chacune radialement vers l'extérieur à partir d'un fond d'aube (404),
    dans lequel
    au moins une saillie (412), en particulier en forme de dent, est formée sur au moins un fond d'aube (404) d'un disque de rotor (400) respectif,
    la saillie (412) est formée à une extrémité côté aspiration et/ou côté refoulement du fond d'aube (404), et
    la saillie (412) présente une première face latérale (414) qui s'étend au moins sensiblement parallèlement à la face supérieure ou à la face inférieure (408, 410) d'une première aube voisine (402).
  9. Procédé selon la revendication 8,
    caractérisé en ce que
    les aubes (402), y compris la saillie (412) respective, sont réalisées par sciage à partir d'un disque brut.
  10. Procédé selon la revendication 8 ou 9,
    caractérisé en ce que
    la saillie (412) est formée par deux mouvements de travail d'un outil d'usinage qui forment deux surfaces (406) sur le fond d'aube (404) et ainsi la saillie (412) à titre de saut entre les surfaces (406).
  11. Procédé selon l'une au moins des revendications 8 à 10,
    caractérisé en ce que
    une face supérieure (408) d'une première aube (402) et une face inférieure opposée (410) d'une aube voisine (402) sont formées chacune par un mouvement respectif parmi deux mouvements de travail d'un outil d'usinage.
  12. Procédé selon la revendication 10 ou 11,
    caractérisé en ce que
    un mouvement de travail respectif est linéaire.
  13. Procédé selon l'une au moins des revendications 10 à 12,
    caractérisé en ce que
    les mouvements de travail ont des directions de mouvement différentes.
EP17194409.3A 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire Active EP3462036B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17194409.3A EP3462036B1 (fr) 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire
JP2018183168A JP6716656B2 (ja) 2017-10-02 2018-09-28 ターボ分子真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17194409.3A EP3462036B1 (fr) 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire

Publications (2)

Publication Number Publication Date
EP3462036A1 EP3462036A1 (fr) 2019-04-03
EP3462036B1 true EP3462036B1 (fr) 2024-04-03

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Application Number Title Priority Date Filing Date
EP17194409.3A Active EP3462036B1 (fr) 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire

Country Status (2)

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EP (1) EP3462036B1 (fr)
JP (1) JP6716656B2 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6361799A (ja) * 1986-09-02 1988-03-17 Nippon Soken Inc タ−ボ分子ポンプ
EP3002459A1 (fr) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide

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JP3160039B2 (ja) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 ターボ分子ポンプと動翼の加工方法
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JPS6361799A (ja) * 1986-09-02 1988-03-17 Nippon Soken Inc タ−ボ分子ポンプ
EP3002459A1 (fr) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide

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JP6716656B2 (ja) 2020-07-01
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