EP3608545B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3608545B1
EP3608545B1 EP19201021.3A EP19201021A EP3608545B1 EP 3608545 B1 EP3608545 B1 EP 3608545B1 EP 19201021 A EP19201021 A EP 19201021A EP 3608545 B1 EP3608545 B1 EP 3608545B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
disk
sealing gap
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19201021.3A
Other languages
German (de)
English (en)
Other versions
EP3608545A1 (fr
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3608545A1 publication Critical patent/EP3608545A1/fr
Application granted granted Critical
Publication of EP3608545B1 publication Critical patent/EP3608545B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/16—Sealings between pressure and suction sides
    • F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
    • F04D29/164—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips

Definitions

  • the present invention relates to a vacuum pump, in particular a turbo molecular pump.
  • Vacuum pumps such as turbomolecular pumps are used in different areas of technology to create the vacuum required for a particular process.
  • Turbomolecular pumps comprise a stator with a plurality of stator disks following one another in the direction of an axis of rotation, each of which has a pump-active structure, and a rotor which is rotatably mounted relative to the stator about the axis of rotation, has a rotor shaft and several arranged on the rotor shaft, successive in the axial direction and between the Includes rotor disks arranged on stator disks, each of which has a pump-active structure.
  • such a vacuum pump has dynamic sealing areas, for example sealing gaps between the radial outer ends of the rotor disks and the stator or between the radial inner ends of the stator disks and the rotor, which, due to their insufficient tightness, allow an undesired backflow of the gas against the conveying direction , which reduces the suction power and the compression of the vacuum pump.
  • a reduction in the gap widths of existing sealing gaps to reduce the backflow is only possible to a limited extent, since if the gap widths are too small, there is a risk of a collision between the rotor and the stator when the vacuum pump is in operation and the effort for the production of the vacuum pump due to the higher demands on the Component tolerances increase.
  • a turbomolecular pump in which a diaphragm element is provided between at least one stator element and at least one adjacent rotor element to reduce the gas backflow, which is formed in one piece with the stator element and is arranged between the stator element and the rotor element following the stator element in the conveying direction. This is intended to reduce a backflow through the radial sealing gap formed between the radial outside of the upstream rotor element and the stator.
  • the gas is intended to be deflected inward in the radial direction by the diaphragm element so that it cannot pass through the radially outer sealing gap between the upstream rotor element and the stator.
  • the cover elements increase the overall axial height of the vacuum pump and must be provided as additional elements and attached to the stator elements, which increases the cost of providing the vacuum pump.
  • One object of the invention is to specify a vacuum pump which has an improved pumping performance, in particular a high pumping speed and a high compression, and which can be provided with little effort.
  • the vacuum pump comprises a stator with a plurality of stator disks following one another in the direction of an axis of rotation, each of which has a pump-active structure, and a rotor which is rotatably mounted relative to the stator about the axis of rotation, a rotor shaft and several arranged on the rotor shaft, successively in the axial direction and between comprises rotor disks arranged on the stator disks, each having an active pump structure.
  • At least one stator disk and at least one rotor disk delimit a radial sealing gap formed between the stator and the rotor. The sealing gap runs at least in sections at an angle to the axis of rotation.
  • the sealing gap extends at least in sections and in particular over its entire length obliquely to the axis of rotation, the length of the sealing gap is increased and its tightness is improved.
  • an oblique sealing gap can also be implemented particularly easily, for example in that the sealing gap is at least partially delimited by a foot section or collar section of the rotor disk which runs obliquely to the axis of rotation.
  • the inclined sealing gap or one or each inclined section of the sealing gap can have a straight or curved shape or extend in a step-like manner in a direction inclined to the axis of rotation.
  • the stator disk delimiting the sealing gap and the rotor disk delimiting the sealing gap each have an inner ring which carries the active pumping structure of the respective disk, at least a portion of the sealing gap, which runs obliquely to the axis of rotation, through the inner ring of the stator disk and is limited by the inner ring of the rotor disk.
  • a sealing gap with advantageous properties can be created without additional elements.
  • Surfaces delimiting the sealing gap lie opposite one another in the radial direction and are at least approximately parallel to one another.
  • the vacuum pump is preferably a turbo molecular pump.
  • the vacuum pump can also be a side channel pump.
  • the inner ring of the rotor disk delimiting the sealing gap has a collar section protruding in the axial direction, at least a section of the sealing gap which runs obliquely to the axis of rotation being delimited by the collar section.
  • the collar section is preferably connected to the rotor shaft and can thus serve, within the scope of the invention, at the same time to connect the rotor disk to the rotor shaft and to create the sealing gap which is inclined to the axis of rotation.
  • the collar section can either be designed in one piece with the shaft or designed as a separate part and connected to the shaft.
  • the space between the widening collar section and the stator is designed as an inclined sealing gap or sealing gap section, a good sealing effect is achieved in this area and the problem is avoided that the widening shape of the collar section creates an extended space between the rotor and the stator, which allows excessive backflow.
  • a ring delimiting the sealing gap in particular the stator disk, has an extension protruding in the radial direction, at least a section of the sealing gap which runs obliquely to the axis of rotation being delimited by the extension.
  • An extension of the stator disk preferably delimits the inclined section of the sealing gap together with a collar section of the rotor disk as described above.
  • the design of the space between the collar section and the stator as a sealing gap or sealing gap section prevents a high backflow in the area of the widening collar section.
  • the stator disk with the ring and the extension is preferably formed in one piece by a single body.
  • the sealing gap has at least two sections which run obliquely to the axis of rotation and at an angle to one another, with both sections preferably each being through a stator disk on the one hand and one of two rotor disks adjacent to the stator disk on the other hand are limited.
  • the two sections can form a V-shaped sealing gap. Both sections can be delimited by a radially protruding extension of the stator disk, as described above, on the one hand and a collar section of the respective rotor disk on the other hand.
  • the two sections of the sealing gap can extend inward in the radial direction, viewed in the axial direction from the respective rotor disk to the stator disk, or the apex of the V-shape of the sealing gap can point toward the rotor shaft.
  • the sealing section thus represents an obstacle to an axial return flow of the gas passing through the sealing gap. Since the sealing section can be arranged in front of and / or next to the pumping-active structure of the downstream stator disk in relation to the conveying direction, the sealing section can prevent that in the area of the pumping-active Structure of the stator disc, the gas flowing back flows on its way back through the stator disc in the radial direction to the sealing gap of the upstream rotor disc and consequently can get into the sealing gap after passing through the stator disc and flow back further through the sealing gap.
  • the gas can at best flow back through the stator disk in an area remote from the sealing gap and is therefore captured by the pumping-active structure of the upstream rotor disk after any return flow through the stator disk, which deflects the gas again in the conveying direction.
  • the sealing section can thus reduce the backflow and increase the pumping performance.
  • the sealing section can cover the sealing gap over its entire radial gap width. This achieves a particularly effective seal, which ensures a high pumping speed and high compression of the vacuum pump.
  • the rotor disk can engage behind the sealing section in the radial direction, in particular to ensure that the sealing gap is covered by the sealing section over the entire gap width of the sealing gap.
  • the stator disk can have a ring, in particular an outer ring, which carries the pump-active structure of the stator disk, wherein the sealing section can be formed by the ring of the stator disk.
  • a ring of the stator disk carrying the active pumping structure is designed as a sealing section, additional expenditure for the provision of the sealing section and additional space requirement for the sealing section are largely avoided.
  • a stator disk with an outer ring can simply be used, which has a relatively large radial width and covers the radial sealing gap of the preceding rotor disk.
  • the sealing section can be formed by a spacer ring which holds two stator disks following one another in the axial direction at an axial distance from one another.
  • Such spacer rings are in any case favorable to maintain a predetermined axial distance between the stator disks and can be modified in a simple manner so that they form a sealing section for covering the radial sealing gap of the upstream rotor disk.
  • the radial sealing gap can by a Section of the spacer ring can be delimited and the sealing section can be formed by a section of the spacer ring which protrudes in the radial direction with respect to the section of the spacer ring which delimits the sealing gap and in particular forms a shoulder of the spacer ring.
  • stator disk following the rotor disk in the conveying direction does not have a ring, that is, for example, no outer ring, arranged in the area of the sealing gap.
  • a stator disk can, for example, be machined from a solid body by removing material, while a stator disk with an outer ring can be designed, for example, as a laminated stator disk, i.e. as a stator disk which is produced by deforming a base body formed by sheet metal.
  • the sealing section of the spacer ring can delimit a groove which extends in the radial direction into the spacer ring.
  • the rotor disk can engage in the groove, preferably in the radial direction.
  • the radial sealing gap can be limited by the rotor disk and the groove base.
  • the side walls of the groove preferably each cover the sealing gap in the axial direction.
  • This configuration has the advantage that the sealing gap is covered not only on one side in relation to the axial direction, but on both sides, that is, both in the downstream direction and in the upstream direction, by one side wall of the groove in each case.
  • the side walls of the groove can, with the rotor disk, delimit one of two axial sealing gaps adjoining the radial sealing gap on both sides. A particularly effective sealing of the radial sealing gap is achieved in this way.
  • the spacer ring can be divided in the radial direction in such a way that the spacer ring and the rotor disk can be assembled in the axial direction.
  • the spacer ring such as described above, has a radial groove into which the rotor disk engages radially.
  • the spacer ring can be divided in the radial direction in the area of the groove in order to enable axial assembly. Due to the possibility of axial assembly, the effort required to manufacture the vacuum pump is considerably reduced.
  • the rotor disk can have at least one radial extension, which preferably protrudes from the pump-active structure of the rotor disk in the radial direction, the radial sealing gap being at least partially delimited by the extension.
  • Such an extension can be adapted in order to ensure a particularly good sealing of the sealing gap, so that a back flow is avoided particularly reliably.
  • the extension is preferably designed to be gas-tight throughout in order to ensure the best possible seal. It is preferred if the rotor disk engages with the extension in a radial groove of a spacer ring as described above.
  • the extension can be annular and / or extend over at least approximately the entire circumference of the rotor disk.
  • the extension preferably extends only over part of the axial extent of the pump-active structure of the rotor disk.
  • the additional cost of material and the additional weight of the rotor disk formed by the extension can be kept low and a targeted and extremely effective sealing of the sealing gap can still be achieved.
  • the sealing portion as above described, is formed by a spacer ring with a groove in which the extension engages
  • the groove preferably also extends only over part of the axial extension of the active pumping elements of the rotor disk. In this way it can be achieved that the groove walls tightly enclose the extension on all sides, so that the radial sealing gap is preferably only accessible via axial gaps, whereby the backflow is further reduced.
  • the pumping-active structures of the stator disks and rotor disks can be designed to provide a pumping action oriented in a conveying direction for a gas present in a suction area.
  • Opposing surfaces of the rotor and the stator that delimit the sealing area can form at least one pumping stage to provide a pumping action for the gas present in the sealing area, which counteracts a backflow of the gas through the sealing area.
  • the scoop area is generally understood to mean the area in which the pumping-active structures of the stator disks and rotor disks provide a pumping action oriented in a conveying direction for the gas present there.
  • a sealing area is understood to mean an area which adjoins the scoop area and through which, in principle, a return flow of the gas directed against the conveying direction can take place.
  • At least one of the surfaces forming the pump stage runs obliquely to the axis of rotation.
  • the surfaces forming the pump stage are preferably formed by the stator disk and the adjacent rotor disk.
  • the pumping stage can thus be easily implemented by appropriate adaptation of the surfaces of the stator disk and the rotor disk.
  • the surfaces forming the pumping stage are formed by the inner rings of the stator disk and the rotor disk. These surfaces are particularly suitable for implementing a pumping stage that reduces the backflow.
  • the stator disks and rotor disks can be designed as turbomolecular stator and rotor disks with a turbomolecular pump-active structure.
  • the active pumping structures of the rotor disks and the stator disks preferably have a plurality of active pumping elements designed as blades, which are preferably carried by an outer ring and / or by an inner ring of the respective disk.
  • the blades can be inclined relative to the axial direction, which serves to deflect the gas molecules coming into contact with the blades in the conveying direction, the inclination of the blades of the stator disks and the rotor disks preferably being mirror images of one another.
  • the rotor disks in the case of a side channel pump, preferably have rotor blades in the area of their radial outside, which run around in a side channel formed by the stator disks, which is widened in relation to the rotor blades.
  • the active pumping structures of the stator disks are formed by sections of the stator disks delimiting the side channel.
  • a side channel can be delimited by two stator disks following one another in the axial direction, between which a rotor disk with rotor blades is arranged.
  • the vacuum pump shown comprises a pump inlet 70 surrounded by an inlet flange 68 as well as several pump stages for conveying the gas present at the pump inlet 70 to an in Fig. 1 pump outlet not shown.
  • the vacuum pump comprises a stator with a static housing 72 and a rotor which is arranged in the housing 72 and has a rotor shaft 12 which is rotatably mounted about an axis of rotation 14.
  • the vacuum pump is designed as a turbo-molecular pump and comprises several turbo-molecular pump stages connected in series with one another with several turbo-molecular rotor disks 16 connected to the rotor shaft 12 and several turbomolecular stator disks 26 arranged in the axial direction between the rotor disks 16 and fixed in the housing 72, which are secured by spacer rings 36 are held at a desired axial distance from one another.
  • the rotor disks 16 and stator disks 26 provide an axial pumping action directed in the direction of arrow 58 in the scoop region 50.
  • the vacuum pump also comprises three Holweck pump stages, which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor-side part of the Holweck pump stages comprises a rotor hub 74 connected to the rotor shaft 12 and two cylindrical-shell-shaped Holweck rotor sleeves 76, 78 which are attached to the rotor hub 74 and carried by the latter, which are oriented coaxially to the axis of rotation 14 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 80, 82 are provided, which are also oriented coaxially to the axis of rotation 14 and are nested in one another in the radial direction.
  • the rotatable mounting of the rotor shaft 12 is brought about by a roller bearing 84 in the area of the pump outlet and a permanent magnetic bearing 86 in the area of the pump inlet 70.
  • An emergency or backup bearing 98 is provided within the magnetic bearing 86, which is designed as an unlubricated roller bearing and runs empty during normal operation of the vacuum pump without contact and only comes into engagement with an excessive radial deflection of the rotor relative to the stator, to a radial stop to form for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
  • a conical injection-molded nut 100 with an outer diameter increasing towards the roller bearing 84 is provided on the rotor shaft 12, which with at least one stripper of a plurality of absorbent disks 102 impregnated with an operating medium, such as a lubricant, in sliding Contact is available.
  • an operating medium such as a lubricant
  • the operating medium is transferred from the operating medium reservoir via the scraper to the rotating injection nut 100 by capillary action and, as a result of the centrifugal force, is conveyed along the injection nut 100 in the direction of the increasing outer diameter of the injection nut 100 to the roller bearing 84, where there is, for example, a lubricating Function fulfilled.
  • the turbomolecular pumping stages provide a pumping effect in the scoop area 50 in the direction of arrow 58.
  • the following are based on the Figures 2 to 7 those in the vacuum pump of Fig. 1 implemented measures to prevent a backflow of the gas against the conveying direction described.
  • Components that correspond to one another are designated in principle by the same reference symbols in all figures.
  • the gas is deflected inward in the radial direction by the sealing section 34, so that, after any backflow through the stator disk 26, it hits the pumping-active structure formed by the blades 22 of the upstream rotor disk 16 and is pumped again in the conveying direction.
  • Figs. 3 to 5 show the in Fig. 2 stator disk 26 shown in detail.
  • the stator disk 26 consists of two semicircular parts 26a, 26b.
  • stator disk 26 It is a laminated stator disk 26, that is to say one made or to be produced from a sheet-shaped base body by deforming the base body. Between the inner ring 28 and the outer ring 30 of the stator disk 26, the blades 32 of the stator disk are punched and slotted in the sheet-metal base body 26 formed.
  • Fig. 3 and 4th show the stator disk 26 in an unfinished state in that the stator disk 26 is still in its undeformed flat state and the blades 32 have not yet been brought into their inclined position by bending the base body.
  • Fig. 5 shows the completed stator disk 26 after the blades 32 have been moved into their inclined position.
  • the outer ring 30 of the stator disk 26 with the sealing section 34 forms a continuously closed annular surface which covers the sealing gap 42 of the rotor disk 16 preceding in the conveying direction, preferably over the entire circumference of the rotor disk 16.
  • Fig. 6 shows the in Fig. 1 with the reference character B designated area of the in Fig. 1 shown vacuum pump in detail.
  • the rotor disk 16 has an extension 20 arranged at the outer radial ends of its blades 22 and protruding in the radial direction, which extends into a radial groove 38 of the spacer ring 36 which is adjacent to the rotor disk 16 in the radial direction and consists of the two parts 36a, 36b extends into it.
  • a radial sealing gap 44 is delimited by the extension 20 and the spacer ring 36 and is adjoined on both sides by an axial sealing gap 45 delimited by the extension 20 and the spacer ring 36.
  • the lower part 36b of the spacer ring 36 forms a sealing section 40 which covers the radial sealing gap 44 and reduces a return flow directed through the sealing gap 42.
  • the extension 20 is designed as a closed ring that runs around the entire circumference of the rotor disk 16 and is carried by the blades 22 of the rotor disk 16.
  • the radial division of the spacer ring 36 into two parts 36a, 36b makes it possible to assemble the rotor disk 26 and the spacer ring 36 in the axial direction despite the axial undercut formed by the engagement of the extension 20 in the groove 38.
  • Fig. 7 shows the in Fig. 1 with the reference character C designated area of the in Fig. 1 shown vacuum pump in detail.
  • the blades 22 of the rotor disks 16 and the blades 32 of the stator disk 26 arranged between the rotor disks 16 provide a pumping effect for a gas present in the pumping area 50 in the direction of the arrow 58, while the inner ring 28 of the stator disk 26 with the inner rings 18 of the rotor disks 16 delimits a sealing area which comprises a radial sealing gap 46 and two axial sealing gaps 48.
  • the surfaces of the inner rings 18 of the rotor disks 16 and of the inner ring 28 of the stator disk 26 each of which is one of the limit axial sealing gaps 48, each forming a Siegbahn pumping stage which provides a pumping action that counteracts a backflow of the gas through the sealing area.
  • the surfaces of the inner ring 28 of the stator disk 26 each have a structuring with a groove 52 running in the form of a spiral line in the radial direction, in which the propelled gas is guided.
  • the opposite surfaces of the inner rings 18 of the rotor disks 16 are smooth.
  • Fig. 8 shows a section of a vacuum pump according to an embodiment of the invention in a sectional view.
  • Fig. 9 shows the in Fig. 8 with the reference character D in detail.
  • the vacuum pump shown corresponds to that in Fig. 1 described vacuum pump.
  • the rotor disks 16 of the in Figures 8 and 9 The vacuum pumps shown each comprise an inner ring 18 with a collar section 24 which widens in the radial direction towards the rotor shaft 12 and via which the rotor disks 16 are connected to the rotor shaft 12.
  • the stator disk 26 has an inner ring 28 which has an extension 35 protruding in the radial direction. Together, the inner ring 28 of the stator disk 26 and the inner rings 18 of the rotor disks 16 delimit two axial sealing gaps 49.
  • the extension 35 of the inner ring 28 of the stator disk 26 and the collar portions 24 also delimit a radial sealing gap 47 connecting the axial sealing gaps 49, which is V-shaped and comprises two sections 47a, 47b inclined to the axis of rotation 14.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (13)

  1. Pompe à vide, en particulier pompe turbomoléculaire, comprenant
    - un stator pourvu de plusieurs disques de stator (26) successifs en direction d'un axe de rotation (14) et comprenant chacun une structure active en pompage (32), et
    - un rotor monté mobile en rotation autour de l'axe de rotation (14) par rapport au stator et comprenant un arbre de rotor (12) et plusieurs disques de rotor (16) disposés sur l'arbre de rotor (12), successifs en direction axiale, interposés entre les disques de stator (26) et comprenant chacun une structure active en pompage (22),
    dans laquelle
    au moins un disque de stator (26) et au moins un disque de rotor (16) délimitent un intervalle d'étanchéité (44) radial ménagé entre le stator et le rotor,
    l'intervalle d'étanchéité (44) s'étend au moins localement en oblique par rapport à l'axe de rotation (14),
    le disque de stator (26) délimitant l'intervalle d'étanchéité (47) et le disque de rotor (16) délimitant l'intervalle d'étanchéité (47) comprennent chacun un anneau intérieur (18, 28) portant la structure active en pompage (22, 32) du disque respectif (16, 26), et
    au moins une portion (47a, 47b) de l'intervalle d'étanchéité (47) s'étendant en oblique par rapport à l'axe de rotation (14) est délimitée par l'anneau intérieur (28) du disque de stator (26) et par l'anneau intérieur (18) du disque de rotor (16),
    caractérisée en ce que
    des surfaces délimitant l'intervalle d'étanchéité (47) sont opposées l'une à l'autre en direction radiale et sont au moins approximativement parallèles l'une à l'autre.
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    l'intervalle d'étanchéité (47) présente une largeur d'intervalle au moins approximativement constante.
  3. Pompe à vide selon la revendication 1 ou 2,
    caractérisée en ce que
    l'anneau intérieur (18) du disque de rotor (16) est disposé sur l'arbre de rotor (12) pour relier le disque de rotor (16) à l'arbre de rotor (12).
  4. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'anneau intérieur (18) du disque de rotor (16) comprend une portion de collerette (24) faisant saillie en direction axiale, et
    au moins une portion (47a, 47b) de l'intervalle d'étanchéité (47) s'étendant en oblique par rapport à l'axe de rotation (14) est délimitée par la portion de collerette (24).
  5. Pompe à vide selon la revendication 4,
    caractérisée en ce que
    la portion de collerette (24) est reliée à l'arbre de rotor (12).
  6. Pompe à vide selon la revendication 4 ou 5,
    caractérisée en ce que
    la portion de collerette (24) présente une forme qui va en s'élargissant en direction radiale vers l'arbre de rotor (12).
  7. Pompe à vide selon la revendication 6,
    caractérisée en ce que
    une surface de la portion de collerette (24) prévue au niveau de l'élargissement sert à délimiter au moins une portion de l'intervalle d'étanchéité (47) oblique par rapport à l'axe de rotation, et
    en particulier la portion oblique de l'intervalle d'étanchéité (47), vue en direction axiale du disque de rotor (16) vers le disque de stator (26), s'étend en direction radiale vers l'arbre de rotor (12).
  8. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'anneau intérieur (28) du disque de stator (26) présente un prolongement (35) faisant saillie en direction radiale, et
    au moins une portion (47a, 47b) de l'intervalle d'étanchéité (47) s'étendant en oblique par rapport à l'axe de rotation (14) est délimitée par le prolongement (35).
  9. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'intervalle d'étanchéité (47) comprend au moins deux portions (47a, 47b) qui s'étendent en oblique par rapport à l'axe de rotation (14) et selon un angle l'une par rapport à l'autre.
  10. Pompe à vide selon la revendication 9,
    caractérisée en ce que
    les deux portions (47a, 47b) sont délimitées chacune par un disque de stator (26) d'une part et par l'un des deux disques de rotor (16) voisins du disque de stator (26) d'autre part.
  11. Pompe à vide selon la revendication 9 ou 10,
    caractérisée en ce que
    les deux portions (47a, 47b) forment un intervalle d'étanchéité (47) en forme de V.
  12. Pompe à vide selon la revendication 11,
    caractérisée en ce que
    le sommet de la forme en V de l'intervalle d'étanchéité (47) est dirigé vers l'arbre de rotor (12).
  13. Pompe à vide selon l'une des revendications 9 à 12,
    caractérisée en ce que
    les deux portions (47a, 47b) de l'intervalle d'étanchéité (47), vu en direction axiale du disque de rotor respectif (16) vers le disque de stator (26), s'étendent en direction radiale vers l'intérieur.
EP19201021.3A 2013-10-15 2014-10-09 Pompe à vide Active EP3608545B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201310220879 DE102013220879A1 (de) 2013-10-15 2013-10-15 Vakuumpumpe
EP14188325.6A EP2863063B1 (fr) 2013-10-15 2014-10-09 Pompe à vide

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP14188325.6A Division EP2863063B1 (fr) 2013-10-15 2014-10-09 Pompe à vide
EP14188325.6A Division-Into EP2863063B1 (fr) 2013-10-15 2014-10-09 Pompe à vide

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GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP7134053B2 (ja) * 2018-10-05 2022-09-09 ミネベアミツミ株式会社 軸流ファン
CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

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JPS6185599A (ja) * 1984-10-03 1986-05-01 Ulvac Corp タ−ボ分子ポンプ
JPS6314893U (fr) * 1986-07-11 1988-01-30
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
JPH0444496U (fr) * 1990-08-16 1992-04-15
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JPH0687691U (ja) * 1993-05-28 1994-12-22 セイコー精機株式会社 ターボ分子ポンプ
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JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
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EP2863063B1 (fr) 2019-12-11
EP2863063A2 (fr) 2015-04-22
EP2863063A3 (fr) 2015-08-26
DE102013220879A1 (de) 2015-04-16

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