DE60314868D1 - Verbesserte struktur gestapelter kontaktlöcher in mehrschichtigen elektronischen bauelementeträgern - Google Patents
Verbesserte struktur gestapelter kontaktlöcher in mehrschichtigen elektronischen bauelementeträgernInfo
- Publication number
- DE60314868D1 DE60314868D1 DE60314868T DE60314868T DE60314868D1 DE 60314868 D1 DE60314868 D1 DE 60314868D1 DE 60314868 T DE60314868 T DE 60314868T DE 60314868 T DE60314868 T DE 60314868T DE 60314868 D1 DE60314868 D1 DE 60314868D1
- Authority
- DE
- Germany
- Prior art keywords
- conductive
- contact holes
- improved structure
- construction elements
- multilayer electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0237—High frequency adaptations
- H05K1/025—Impedance arrangements, e.g. impedance matching, reduction of parasitic impedance
- H05K1/0251—Impedance arrangements, e.g. impedance matching, reduction of parasitic impedance related to vias or transitions between vias and transmission lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
- H05K1/116—Lands, clearance holes or other lay-out details concerning the surrounding of a via
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6605—High-frequency electrical connections
- H01L2223/6616—Vertical connections, e.g. vias
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15172—Fan-out arrangement of the internal vias
- H01L2924/15173—Fan-out arrangement of the internal vias in a single layer of the multilayer substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09218—Conductive traces
- H05K2201/09236—Parallel layout
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09381—Shape of non-curved single flat metallic pad, land or exposed part thereof; Shape of electrode of leadless component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09536—Buried plated through-holes, i.e. plated through-holes formed in a core before lamination
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/096—Vertically aligned vias, holes or stacked vias
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/0979—Redundant conductors or connections, i.e. more than one current path between two points
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
- Connecting Device With Holders (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02368053 | 2002-05-23 | ||
EP02368053 | 2002-05-23 | ||
PCT/EP2003/012647 WO2004017687A1 (en) | 2002-05-23 | 2003-04-18 | Improved structure of stacked vias in multiple layer electronic device carriers |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60314868D1 true DE60314868D1 (de) | 2007-08-23 |
DE60314868T2 DE60314868T2 (de) | 2008-03-13 |
Family
ID=31725517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60314868T Expired - Lifetime DE60314868T2 (de) | 2002-05-23 | 2003-04-18 | Verbesserte struktur gestapelter kontaktlöcher in mehrschichtigen elektronischen bauelementeträgern |
Country Status (10)
Country | Link |
---|---|
US (1) | US7319197B2 (de) |
EP (1) | EP1506701B1 (de) |
JP (1) | JP4056525B2 (de) |
KR (1) | KR100702554B1 (de) |
CN (1) | CN100370887C (de) |
AT (1) | ATE367077T1 (de) |
AU (1) | AU2003276277A1 (de) |
DE (1) | DE60314868T2 (de) |
MX (1) | MXPA04011463A (de) |
WO (1) | WO2004017687A1 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004214657A (ja) | 2003-01-07 | 2004-07-29 | Internatl Business Mach Corp <Ibm> | プリント回路板製造用水溶性保護ペースト |
US7652896B2 (en) * | 2004-12-29 | 2010-01-26 | Hewlett-Packard Development Company, L.P. | Component for impedance matching |
US20080067665A1 (en) * | 2006-09-20 | 2008-03-20 | Azniza Binti Abd Aziz | Via structure |
US7649265B2 (en) * | 2006-09-29 | 2010-01-19 | Intel Corporation | Micro-via structure design for high performance integrated circuits |
US7531373B2 (en) | 2007-09-19 | 2009-05-12 | Micron Technology, Inc. | Methods of forming a conductive interconnect in a pixel of an imager and in other integrated circuitry |
US8242593B2 (en) * | 2008-01-27 | 2012-08-14 | International Business Machines Corporation | Clustered stacked vias for reliable electronic substrates |
CN101562951B (zh) * | 2008-04-18 | 2011-05-11 | 欣兴电子股份有限公司 | 线路板及其制作方法 |
JP5397007B2 (ja) * | 2009-05-14 | 2014-01-22 | 富士通株式会社 | プリント配線板および電子部品パッケージ |
US8735734B2 (en) * | 2009-07-23 | 2014-05-27 | Lexmark International, Inc. | Z-directed delay line components for printed circuit boards |
US8198547B2 (en) | 2009-07-23 | 2012-06-12 | Lexmark International, Inc. | Z-directed pass-through components for printed circuit boards |
KR101161971B1 (ko) * | 2010-07-21 | 2012-07-04 | 삼성전기주식회사 | 다층 회로 기판 및 다층 회로 기판의 제조 방법 |
KR101696644B1 (ko) * | 2010-09-15 | 2017-01-16 | 삼성전자주식회사 | 3차원 수직 배선을 이용한 rf 적층 모듈 및 이의 배치 방법 |
US9078374B2 (en) | 2011-08-31 | 2015-07-07 | Lexmark International, Inc. | Screening process for manufacturing a Z-directed component for a printed circuit board |
US8943684B2 (en) * | 2011-08-31 | 2015-02-03 | Lexmark International, Inc. | Continuous extrusion process for manufacturing a Z-directed component for a printed circuit board |
US8790520B2 (en) | 2011-08-31 | 2014-07-29 | Lexmark International, Inc. | Die press process for manufacturing a Z-directed component for a printed circuit board |
US8752280B2 (en) | 2011-09-30 | 2014-06-17 | Lexmark International, Inc. | Extrusion process for manufacturing a Z-directed component for a printed circuit board |
US8658245B2 (en) | 2011-08-31 | 2014-02-25 | Lexmark International, Inc. | Spin coat process for manufacturing a Z-directed component for a printed circuit board |
US9009954B2 (en) | 2011-08-31 | 2015-04-21 | Lexmark International, Inc. | Process for manufacturing a Z-directed component for a printed circuit board using a sacrificial constraining material |
JP5765633B2 (ja) * | 2011-12-22 | 2015-08-19 | 株式会社フジクラ | プリント配線板及びその製造方法 |
TWI449475B (zh) * | 2012-01-09 | 2014-08-11 | Novatek Microelectronics Corp | 電路板 |
US8822838B2 (en) | 2012-03-29 | 2014-09-02 | Lexmark International, Inc. | Z-directed printed circuit board components having conductive channels for reducing radiated emissions |
US8822840B2 (en) | 2012-03-29 | 2014-09-02 | Lexmark International, Inc. | Z-directed printed circuit board components having conductive channels for controlling transmission line impedance |
US8830692B2 (en) | 2012-03-29 | 2014-09-09 | Lexmark International, Inc. | Ball grid array systems for surface mounting an integrated circuit using a Z-directed printed circuit board component |
US8912452B2 (en) | 2012-03-29 | 2014-12-16 | Lexmark International, Inc. | Z-directed printed circuit board components having different dielectric regions |
TW201431450A (zh) * | 2013-01-29 | 2014-08-01 | Hon Hai Prec Ind Co Ltd | 印刷電路板 |
CN103974519B (zh) * | 2013-01-29 | 2017-02-08 | 江苏传艺科技股份有限公司 | 印刷电路板 |
US11069734B2 (en) | 2014-12-11 | 2021-07-20 | Invensas Corporation | Image sensor device |
US9871017B2 (en) * | 2016-01-04 | 2018-01-16 | Infineon Technologies Ag | Multi-level chip interconnect |
JP6674016B2 (ja) * | 2016-03-24 | 2020-04-01 | 京セラ株式会社 | 印刷配線板およびその製造方法 |
JP6730960B2 (ja) * | 2017-05-24 | 2020-07-29 | 日本特殊陶業株式会社 | 配線基板 |
US10916519B2 (en) | 2018-06-08 | 2021-02-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for manufacturing semiconductor package with connection structures including via groups |
US11462419B2 (en) | 2018-07-06 | 2022-10-04 | Invensas Bonding Technologies, Inc. | Microelectronic assemblies |
JP6869209B2 (ja) * | 2018-07-20 | 2021-05-12 | 日本特殊陶業株式会社 | 配線基板 |
US10727190B2 (en) * | 2018-12-27 | 2020-07-28 | Tektronix, Inc. | Compound via RF transition structure in a multilayer high-density interconnect |
US11296053B2 (en) | 2019-06-26 | 2022-04-05 | Invensas Bonding Technologies, Inc. | Direct bonded stack structures for increased reliability and improved yield in microelectronics |
US11776899B2 (en) * | 2020-05-11 | 2023-10-03 | Mediatek Inc. | Via array design for multi-layer redistribution circuit structure |
US11631647B2 (en) | 2020-06-30 | 2023-04-18 | Adeia Semiconductor Bonding Technologies Inc. | Integrated device packages with integrated device die and dummy element |
US11764177B2 (en) | 2020-09-04 | 2023-09-19 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structure with interconnect structure |
US11728273B2 (en) | 2020-09-04 | 2023-08-15 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structure with interconnect structure |
US20240074053A1 (en) * | 2022-08-25 | 2024-02-29 | Nvidia Corporation | Clustered microvia structure for a high-density interface pcb |
JP7448060B1 (ja) | 2023-03-27 | 2024-03-12 | Toto株式会社 | 静電チャック |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8803923D0 (en) * | 1988-02-19 | 1988-03-23 | Gen Electric Co Plc | Optical storage devices |
JPH0797705B2 (ja) | 1989-07-17 | 1995-10-18 | 日本電気株式会社 | 多層セラミツク基板 |
JPH03142896A (ja) | 1989-10-27 | 1991-06-18 | Fujitsu Ltd | 多層回路基板 |
JP2767645B2 (ja) * | 1990-03-07 | 1998-06-18 | 富士通株式会社 | 多層配線基板の製造方法 |
JP2503725B2 (ja) * | 1990-05-18 | 1996-06-05 | 日本電気株式会社 | 多層配線基板 |
JPH06326471A (ja) | 1993-05-17 | 1994-11-25 | Sony Corp | 多層配線基板 |
US5378927A (en) * | 1993-05-24 | 1995-01-03 | International Business Machines Corporation | Thin-film wiring layout for a non-planar thin-film structure |
JPH088393A (ja) | 1994-06-23 | 1996-01-12 | Fujitsu Ltd | 半導体装置 |
US5699613A (en) * | 1995-09-25 | 1997-12-23 | International Business Machines Corporation | Fine dimension stacked vias for a multiple layer circuit board structure |
JPH1174651A (ja) * | 1997-03-13 | 1999-03-16 | Ibiden Co Ltd | プリント配線板及びその製造方法 |
JP3961092B2 (ja) * | 1997-06-03 | 2007-08-15 | 株式会社東芝 | 複合配線基板、フレキシブル基板、半導体装置、および複合配線基板の製造方法 |
JP3562568B2 (ja) * | 1999-07-16 | 2004-09-08 | 日本電気株式会社 | 多層配線基板 |
US6362438B1 (en) * | 1999-12-15 | 2002-03-26 | Intel Corporation | Enhanced plated-through hole and via contact design |
US7091424B2 (en) * | 2002-10-10 | 2006-08-15 | International Business Machines Corporation | Coaxial via structure for optimizing signal transmission in multiple layer electronic device carriers |
-
2003
- 2003-04-18 EP EP03787806A patent/EP1506701B1/de not_active Expired - Lifetime
- 2003-04-18 DE DE60314868T patent/DE60314868T2/de not_active Expired - Lifetime
- 2003-04-18 AT AT03787806T patent/ATE367077T1/de not_active IP Right Cessation
- 2003-04-18 WO PCT/EP2003/012647 patent/WO2004017687A1/en active IP Right Grant
- 2003-04-18 CN CNB038115107A patent/CN100370887C/zh not_active Expired - Lifetime
- 2003-04-18 AU AU2003276277A patent/AU2003276277A1/en not_active Abandoned
- 2003-04-18 JP JP2004528511A patent/JP4056525B2/ja not_active Expired - Fee Related
- 2003-04-18 US US10/515,511 patent/US7319197B2/en not_active Expired - Lifetime
- 2003-04-18 MX MXPA04011463A patent/MXPA04011463A/es active IP Right Grant
- 2003-04-18 KR KR1020047017762A patent/KR100702554B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP4056525B2 (ja) | 2008-03-05 |
KR20050009998A (ko) | 2005-01-26 |
EP1506701B1 (de) | 2007-07-11 |
MXPA04011463A (es) | 2005-07-01 |
KR100702554B1 (ko) | 2007-04-04 |
DE60314868T2 (de) | 2008-03-13 |
ATE367077T1 (de) | 2007-08-15 |
AU2003276277A1 (en) | 2004-03-03 |
CN100370887C (zh) | 2008-02-20 |
WO2004017687A1 (en) | 2004-02-26 |
EP1506701A1 (de) | 2005-02-16 |
US20050156319A1 (en) | 2005-07-21 |
CN1656861A (zh) | 2005-08-17 |
JP2005527122A (ja) | 2005-09-08 |
US7319197B2 (en) | 2008-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) |