CN107852143B - 弹性波装置 - Google Patents

弹性波装置 Download PDF

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Publication number
CN107852143B
CN107852143B CN201680043272.7A CN201680043272A CN107852143B CN 107852143 B CN107852143 B CN 107852143B CN 201680043272 A CN201680043272 A CN 201680043272A CN 107852143 B CN107852143 B CN 107852143B
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CN
China
Prior art keywords
elastic wave
wave device
insulating layer
inorganic insulating
wiring
Prior art date
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Active
Application number
CN201680043272.7A
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English (en)
Chinese (zh)
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CN107852143A (zh
Inventor
奥出贵之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication date
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Publication of CN107852143A publication Critical patent/CN107852143A/zh
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Publication of CN107852143B publication Critical patent/CN107852143B/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6406—Filters characterised by a particular frequency characteristic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6459—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode
    • H03H9/6463—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode the tracks being electrically cascaded
    • H03H9/6466—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode the tracks being electrically cascaded each track containing more than two transducers

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201680043272.7A 2015-07-28 2016-07-12 弹性波装置 Active CN107852143B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015-148832 2015-07-28
JP2015148832 2015-07-28
PCT/JP2016/070593 WO2017018207A1 (ja) 2015-07-28 2016-07-12 弾性波装置

Publications (2)

Publication Number Publication Date
CN107852143A CN107852143A (zh) 2018-03-27
CN107852143B true CN107852143B (zh) 2021-02-26

Family

ID=57884542

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680043272.7A Active CN107852143B (zh) 2015-07-28 2016-07-12 弹性波装置

Country Status (6)

Country Link
US (2) US10530330B2 (de)
JP (1) JP6323609B2 (de)
KR (1) KR101983955B1 (de)
CN (1) CN107852143B (de)
DE (1) DE112016003390B4 (de)
WO (1) WO2017018207A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6323609B2 (ja) * 2015-07-28 2018-05-16 株式会社村田製作所 弾性波装置
JP2021097313A (ja) * 2019-12-17 2021-06-24 三安ジャパンテクノロジー株式会社 弾性波デバイスパッケージ
JP7055503B1 (ja) 2020-12-30 2022-04-18 三安ジャパンテクノロジー株式会社 弾性波デバイス
CN118318394A (zh) * 2021-12-01 2024-07-09 株式会社村田制作所 滤波器装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0491508A (ja) * 1990-08-06 1992-03-25 Fujitsu Ltd 弾性表面波デバイスとその製造方法
JPH05235684A (ja) * 1992-02-25 1993-09-10 Tdk Corp 多電極型弾性表面波装置
US5710529A (en) * 1993-10-15 1998-01-20 Ngk Insulators, Ltd. Surface acoustic wave filer device having a cascade filter structure and a piezoelectric substrate having mirror-polished surfaces
JP2000261285A (ja) * 1999-03-09 2000-09-22 Hitachi Media Electoronics Co Ltd 弾性表面波装置
JP4222197B2 (ja) 2003-02-24 2009-02-12 株式会社村田製作所 弾性表面波フィルタ、通信機
US7385463B2 (en) * 2003-12-24 2008-06-10 Kyocera Corporation Surface acoustic wave device and electronic circuit device
KR100755184B1 (ko) * 2004-07-23 2007-09-03 가부시키가이샤 무라타 세이사쿠쇼 탄성 표면파 장치
JP4738164B2 (ja) * 2005-12-22 2011-08-03 京セラ株式会社 弾性表面波装置及び通信装置
JP2008011011A (ja) * 2006-06-28 2008-01-17 Kyocera Corp 弾性表面波装置及び通信装置
EP1962424A4 (de) * 2006-12-27 2013-04-03 Panasonic Corp Akustischer oberflächenwellenresonator, akustischer oberflächenwellenfilter unter verwendung des akustischen oberflächenwellenresonators und antennenduplexer
CN101874348B (zh) * 2008-03-27 2013-11-06 株式会社村田制作所 弹性波滤波装置
US9041487B2 (en) 2009-06-26 2015-05-26 Kyocera Corporation Surface acoustic wave filter and duplexer using same
WO2011087018A1 (ja) * 2010-01-12 2011-07-21 京セラ株式会社 弾性波装置
JP5516606B2 (ja) * 2010-01-20 2014-06-11 パナソニック株式会社 弾性波装置
WO2013008494A1 (ja) * 2011-07-11 2013-01-17 株式会社村田製作所 弾性波フィルタ装置
JP5765598B2 (ja) * 2011-12-27 2015-08-19 京セラ株式会社 電子部品
JP2014216971A (ja) * 2013-04-27 2014-11-17 京セラ株式会社 弾性表面波装置
CN105284049B (zh) 2013-06-13 2018-06-08 株式会社村田制作所 滤波器装置以及双工器
JP5880529B2 (ja) 2013-11-29 2016-03-09 株式会社村田製作所 弾性表面波フィルタ
JP6323609B2 (ja) * 2015-07-28 2018-05-16 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
US11496114B2 (en) 2022-11-08
DE112016003390B4 (de) 2024-06-20
JP6323609B2 (ja) 2018-05-16
WO2017018207A1 (ja) 2017-02-02
US20200091889A1 (en) 2020-03-19
JPWO2017018207A1 (ja) 2017-07-27
US20180145659A1 (en) 2018-05-24
US10530330B2 (en) 2020-01-07
KR101983955B1 (ko) 2019-05-29
KR20180021170A (ko) 2018-02-28
DE112016003390T5 (de) 2018-04-19
CN107852143A (zh) 2018-03-27

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