CN102954970B - 用于检测玻璃衬底的表面缺陷的设备 - Google Patents
用于检测玻璃衬底的表面缺陷的设备 Download PDFInfo
- Publication number
- CN102954970B CN102954970B CN201110358433.0A CN201110358433A CN102954970B CN 102954970 B CN102954970 B CN 102954970B CN 201110358433 A CN201110358433 A CN 201110358433A CN 102954970 B CN102954970 B CN 102954970B
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- photographic means
- imaginary line
- image
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2011-0082380 | 2011-08-18 | ||
KR1020110082380A KR101324015B1 (ko) | 2011-08-18 | 2011-08-18 | 유리기판 표면 불량 검사 장치 및 검사 방법 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2013102636267A Division CN103399018A (zh) | 2011-08-18 | 2011-11-11 | 用于检测玻璃衬底的表面缺陷的设备和方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102954970A CN102954970A (zh) | 2013-03-06 |
CN102954970B true CN102954970B (zh) | 2015-04-08 |
Family
ID=47712384
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2013102636267A Pending CN103399018A (zh) | 2011-08-18 | 2011-11-11 | 用于检测玻璃衬底的表面缺陷的设备和方法 |
CN201110358433.0A Expired - Fee Related CN102954970B (zh) | 2011-08-18 | 2011-11-11 | 用于检测玻璃衬底的表面缺陷的设备 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2013102636267A Pending CN103399018A (zh) | 2011-08-18 | 2011-11-11 | 用于检测玻璃衬底的表面缺陷的设备和方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20130044209A1 (zh) |
JP (1) | JP5583102B2 (zh) |
KR (1) | KR101324015B1 (zh) |
CN (2) | CN103399018A (zh) |
TW (1) | TW201310023A (zh) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5999474B2 (ja) * | 2012-04-04 | 2016-09-28 | 日本電気株式会社 | テラヘルツイメージング装置、テラヘルツ画像からの干渉パターン除去方法及びプログラム |
US8959468B2 (en) * | 2013-03-15 | 2015-02-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fault injection of finFET devices |
KR102145960B1 (ko) * | 2013-07-19 | 2020-08-20 | 삼성디스플레이 주식회사 | 실링 검사 장치 및 방법 |
CN103791835A (zh) * | 2014-01-26 | 2014-05-14 | 扬州苏庆非标装备研发有限公司 | 条状光学玻璃截面轮廓及体积检测方法 |
CN103837552A (zh) * | 2014-03-14 | 2014-06-04 | 苏州精创光学仪器有限公司 | 触摸屏保护玻璃外观缺陷检测*** |
JP6370177B2 (ja) * | 2014-09-05 | 2018-08-08 | 株式会社Screenホールディングス | 検査装置および検査方法 |
CN105092607B (zh) * | 2015-08-27 | 2018-01-30 | 浙江大学 | 球面光学元件表面缺陷评价方法 |
JP2016125968A (ja) * | 2015-01-07 | 2016-07-11 | 旭硝子株式会社 | 検査装置および検査方法 |
US10416289B2 (en) * | 2015-02-19 | 2019-09-17 | Philips Photonics Gmbh | Infrared laser illumination device |
KR20180033186A (ko) * | 2015-06-19 | 2018-04-02 | 코닝 인코포레이티드 | 결함들을 위해 기판을 검사하고 광학 기술을 이용하여 3차원으로 그러한 결함들의 위치를 찾아내는 방법 및 장치 |
US9470641B1 (en) * | 2015-06-26 | 2016-10-18 | Glasstech, Inc. | System and method for measuring reflected optical distortion in contoured glass sheets |
CN105510343A (zh) * | 2015-11-05 | 2016-04-20 | 苏州威盛视信息科技有限公司 | 一种表面检测装置 |
JP6654649B2 (ja) * | 2015-12-14 | 2020-02-26 | 株式会社ニコン・トリンブル | 欠陥検出装置及びプログラム |
CN106932399B (zh) * | 2015-12-30 | 2020-02-18 | 上海微电子装备(集团)股份有限公司 | 一种暗场照明装置及表面缺陷检测装置 |
CN107024487B (zh) * | 2016-03-10 | 2023-08-29 | 上海帆声图像科技有限公司 | Ito导电玻璃检测***及其检测方法 |
KR20170133113A (ko) * | 2016-05-25 | 2017-12-05 | 코닝정밀소재 주식회사 | 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법 |
KR101955757B1 (ko) * | 2016-06-08 | 2019-03-07 | 삼성에스디아이 주식회사 | 필름 처리장치 및 처리방법 |
CN106556608B (zh) * | 2016-07-14 | 2019-05-28 | 苏州新材料研究所有限公司 | 一种检测产品表面缺陷的方法和*** |
KR101864030B1 (ko) * | 2016-09-22 | 2018-08-03 | 유진인스텍코어 주식회사 | 와인딩되는 재료용 검사장치 |
US10289930B2 (en) * | 2017-02-09 | 2019-05-14 | Glasstech, Inc. | System and associated for online measurement of the optical characteristics of a glass sheet |
CN106885809B (zh) * | 2017-04-11 | 2019-03-15 | 安徽省蚌埠华益导电膜玻璃有限公司 | 一种ito导电玻璃缺陷检测成像方法 |
CN107764835A (zh) * | 2017-09-30 | 2018-03-06 | 长沙派数控股份有限公司 | 一种电子产品玻璃盖板检测装置及方法 |
CN109656033B (zh) * | 2017-10-12 | 2021-07-02 | 凌云光技术股份有限公司 | 一种区分液晶显示屏灰尘和缺陷的方法及装置 |
TWI640748B (zh) * | 2017-10-26 | 2018-11-11 | 頂瑞機械股份有限公司 | 玻璃檢測方法 |
CN108287086B (zh) * | 2017-11-23 | 2020-10-27 | 彩虹显示器件股份有限公司 | 一种平板玻璃板微米级颗粒物取样方法 |
CN107764834B (zh) * | 2017-12-07 | 2024-06-11 | 南京波长光电科技股份有限公司 | 一种自动检测透明零件表面缺陷的装置及其检测方法 |
JP7051445B2 (ja) * | 2018-01-10 | 2022-04-11 | 日東電工株式会社 | 光学表示パネルの連続検査方法および連続検査装置、並びに、光学表示パネルの連続製造方法および連続製造システム |
CN108318503A (zh) * | 2018-02-06 | 2018-07-24 | 凌云光技术集团有限责任公司 | 液晶屏幕灰尘检测方法和装置 |
CN108764166B (zh) * | 2018-05-30 | 2020-10-09 | 成都天仁民防科技有限公司 | 一种基于支撑杆的人防门位置状态检测***及方法 |
JP7084227B2 (ja) * | 2018-06-22 | 2022-06-14 | 株式会社Screenホールディングス | マーク位置検出装置、描画装置およびマーク位置検出方法 |
CN109632828B (zh) * | 2018-10-29 | 2021-11-09 | 彩虹显示器件股份有限公司 | 一种平板玻璃缺陷复检***及复检方法 |
JP2020085587A (ja) * | 2018-11-21 | 2020-06-04 | 日本電気硝子株式会社 | ガラス板の製造方法、及びガラス板の製造装置 |
CN109374638B (zh) * | 2018-12-18 | 2022-01-18 | 深圳市鼎源检测技术有限公司 | 一种基于机器视觉的木地板表面检测装置及其检测方法 |
CN109540049A (zh) * | 2019-01-10 | 2019-03-29 | 宁波众鑫压铸模具有限公司 | 采用气体快速平面度检测仪器 |
CN109900723A (zh) * | 2019-04-26 | 2019-06-18 | 李配灯 | 玻璃表面缺陷检测方法及装置 |
CN110596139A (zh) * | 2019-08-26 | 2019-12-20 | 武汉精立电子技术有限公司 | 一种屏缺陷检测方法和*** |
CN110823106B (zh) * | 2019-10-16 | 2021-09-10 | 江苏大学 | 一种基于激光连续波调制原理的平板玻璃质量检测方法 |
JPWO2021090827A1 (zh) * | 2019-11-05 | 2021-05-14 | ||
CN114930158A (zh) * | 2019-12-13 | 2022-08-19 | 康宁公司 | 基于激光的夹杂物检测***及方法 |
CN111080638B (zh) * | 2019-12-27 | 2023-04-07 | 成都泓睿科技有限责任公司 | 一种检测模制瓶瓶底脏污的方法 |
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CN113945491A (zh) * | 2021-09-01 | 2022-01-18 | 郑州旭飞光电科技有限公司 | 玻璃基板表面颗粒检测*** |
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CN113777110B (zh) * | 2021-09-29 | 2024-07-09 | 苏州威达智科技股份有限公司 | 一种产品玻璃面瑕疵检测装置及检测方法 |
CN114088740B (zh) * | 2022-01-24 | 2022-04-29 | 武汉精立电子技术有限公司 | 一种确定透明体表面缺陷所在层面的方法及*** |
EP4242642A1 (en) | 2022-03-09 | 2023-09-13 | Analitica d.o.o. | Container examination apparatus |
KR102576137B1 (ko) * | 2023-02-06 | 2023-09-11 | 주식회사 나노프로텍 | 초박형 유리 검사 장치 |
CN116091505B (zh) * | 2023-04-11 | 2023-06-30 | 青岛芯康半导体科技有限公司 | 一种蓝宝石衬底自动缺陷检测分类的方法和*** |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040252372A1 (en) * | 2003-06-12 | 2004-12-16 | Olympus Corporation | Dark field illumination device |
US20100208249A1 (en) * | 2006-11-07 | 2010-08-19 | Yukihiro Shibata | Apparatus For Inspecting Defects |
CN101988908A (zh) * | 2009-07-31 | 2011-03-23 | 法国圣-戈班玻璃公司 | 用于对基板的缺陷进行区分的方法和*** |
CN102141526A (zh) * | 2010-01-29 | 2011-08-03 | 三星康宁精密素材株式会社 | 平板玻璃表面的异物检测装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0778413B2 (ja) * | 1990-01-23 | 1995-08-23 | ダックエンジニアリング株式会社 | 被験体の厚さ及び表面歪み測定方法並びに混入異物検出方法 |
JPH0743326B2 (ja) * | 1991-01-29 | 1995-05-15 | 東洋ガラス株式会社 | 物体端部の欠陥検査方法及びその装置 |
JPH0882602A (ja) * | 1994-09-13 | 1996-03-26 | Nippon Electric Glass Co Ltd | 板ガラスの欠点検査方法及び装置 |
JPH08193955A (ja) * | 1995-01-18 | 1996-07-30 | Nippon Electric Glass Co Ltd | 板ガラスの欠点検査方法 |
JPH11242004A (ja) * | 1997-12-26 | 1999-09-07 | Toshiba Corp | 陰極線管の蛍光面検査方法およびその装置 |
KR20010055184A (ko) * | 1999-12-09 | 2001-07-04 | 구자홍 | 유리기판의 패턴 검사용 광학 장치 |
CN100370243C (zh) * | 2001-09-21 | 2008-02-20 | 奥林巴斯株式会社 | 缺陷检查装置 |
JP4654408B2 (ja) * | 2004-06-22 | 2011-03-23 | レーザーテック株式会社 | 検査装置、検査方法及びパターン基板の製造方法 |
JP2006071284A (ja) * | 2004-08-31 | 2006-03-16 | Central Glass Co Ltd | ガラス基板欠陥の表裏識別方法 |
JP2006071512A (ja) * | 2004-09-03 | 2006-03-16 | Canon Chemicals Inc | 三次元計測方法および三次元計測装置 |
US7567344B2 (en) * | 2006-05-12 | 2009-07-28 | Corning Incorporated | Apparatus and method for characterizing defects in a transparent substrate |
JP5281741B2 (ja) * | 2006-12-13 | 2013-09-04 | 株式会社日立ハイテクノロジーズ | 欠陥検査装置 |
US7551274B1 (en) * | 2007-02-28 | 2009-06-23 | Lite Sentry Corporation | Defect detection lighting system and methods for large glass sheets |
JP5596925B2 (ja) * | 2009-01-20 | 2014-09-24 | 株式会社山梨技術工房 | 異物検査装置及び検査方法 |
KR101209857B1 (ko) * | 2009-02-20 | 2012-12-10 | 삼성코닝정밀소재 주식회사 | 유리 표면 이물 검사 장치 및 방법 |
EP2459989A4 (en) * | 2009-07-31 | 2017-03-29 | Saint-Gobain Glass France | Method and system for detecting and classifying defects of substrate |
-
2011
- 2011-08-18 KR KR1020110082380A patent/KR101324015B1/ko not_active IP Right Cessation
- 2011-10-03 US US13/251,831 patent/US20130044209A1/en not_active Abandoned
- 2011-10-06 JP JP2011222188A patent/JP5583102B2/ja not_active Expired - Fee Related
- 2011-11-11 CN CN2013102636267A patent/CN103399018A/zh active Pending
- 2011-11-11 CN CN201110358433.0A patent/CN102954970B/zh not_active Expired - Fee Related
- 2011-11-15 TW TW100141599A patent/TW201310023A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040252372A1 (en) * | 2003-06-12 | 2004-12-16 | Olympus Corporation | Dark field illumination device |
US20100208249A1 (en) * | 2006-11-07 | 2010-08-19 | Yukihiro Shibata | Apparatus For Inspecting Defects |
CN101988908A (zh) * | 2009-07-31 | 2011-03-23 | 法国圣-戈班玻璃公司 | 用于对基板的缺陷进行区分的方法和*** |
CN102141526A (zh) * | 2010-01-29 | 2011-08-03 | 三星康宁精密素材株式会社 | 平板玻璃表面的异物检测装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20130020026A (ko) | 2013-02-27 |
KR101324015B1 (ko) | 2013-10-31 |
TW201310023A (zh) | 2013-03-01 |
US20130044209A1 (en) | 2013-02-21 |
JP5583102B2 (ja) | 2014-09-03 |
CN103399018A (zh) | 2013-11-20 |
CN102954970A (zh) | 2013-03-06 |
JP2013040915A (ja) | 2013-02-28 |
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CI01 | Correction of invention patent gazette |
Correction item: Description Correct: Correct False: You Luanma Number: 10 Volume: 29 |
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Correction item: Description Correct: Correct False: You Luanma Number: 10 Page: Description Volume: 29 |
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C53 | Correction of patent for invention or patent application | ||
CB02 | Change of applicant information |
Address after: South Korea Chungnam Asan Tang Tang Lu 30 well all night Applicant after: Corning Precision Materials Co.,Ltd. Applicant after: BASLER VISION TECHNOLOGIES AG Address before: South Korea Gyeongbuk Gumi really Ping Dong 644-1 Applicant before: Samsung Corning Precision Materials Co., Ltd. Applicant before: BASLER VISION TECHNOLOGIES AG |
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Free format text: CORRECT: APPLICANT; FROM: SAMSUNG CORNING PRECISION MATERIALS CO., LTD. TO: KANGNING PRECISION MATERIAL CO., LTD. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150408 Termination date: 20161111 |
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CF01 | Termination of patent right due to non-payment of annual fee |