CN102869476B - 圆片的倒角装置 - Google Patents

圆片的倒角装置 Download PDF

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Publication number
CN102869476B
CN102869476B CN201180022063.1A CN201180022063A CN102869476B CN 102869476 B CN102869476 B CN 102869476B CN 201180022063 A CN201180022063 A CN 201180022063A CN 102869476 B CN102869476 B CN 102869476B
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CN
China
Prior art keywords
disk
mentioned
machine table
emery wheel
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201180022063.1A
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English (en)
Chinese (zh)
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CN102869476A (zh
Inventor
片山一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daito Electron Co Ltd
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Daito Electron Co Ltd
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Publication date
Application filed by Daito Electron Co Ltd filed Critical Daito Electron Co Ltd
Publication of CN102869476A publication Critical patent/CN102869476A/zh
Application granted granted Critical
Publication of CN102869476B publication Critical patent/CN102869476B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • B24B47/225—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation for bevelling optical work, e.g. lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02021—Edge treatment, chamfering

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
CN201180022063.1A 2010-05-11 2011-02-28 圆片的倒角装置 Active CN102869476B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010109645A JP5491273B2 (ja) 2010-05-11 2010-05-11 ウェーハの面取り装置
JP2010-109645 2010-05-11
PCT/JP2011/054445 WO2011142159A1 (ja) 2010-05-11 2011-02-28 ウェーハの面取り装置

Publications (2)

Publication Number Publication Date
CN102869476A CN102869476A (zh) 2013-01-09
CN102869476B true CN102869476B (zh) 2015-08-19

Family

ID=44914218

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180022063.1A Active CN102869476B (zh) 2010-05-11 2011-02-28 圆片的倒角装置

Country Status (5)

Country Link
JP (1) JP5491273B2 (ja)
KR (1) KR101598657B1 (ja)
CN (1) CN102869476B (ja)
TW (1) TWI499482B (ja)
WO (1) WO2011142159A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6099960B2 (ja) * 2012-12-18 2017-03-22 ダイトエレクトロン株式会社 ウェーハの面取り加工方法およびウェーハの面取り装置
JP6007889B2 (ja) * 2013-12-03 2016-10-19 信越半導体株式会社 面取り加工装置及びノッチレスウェーハの製造方法
JP6141814B2 (ja) * 2014-10-30 2017-06-07 信越半導体株式会社 研磨装置
KR101578713B1 (ko) * 2015-06-22 2015-12-18 황정하 광학렌즈의 양면 모따기 장치
JP6614978B2 (ja) * 2016-01-14 2019-12-04 株式会社荏原製作所 研磨装置及び研磨方法
JP6774263B2 (ja) * 2016-08-19 2020-10-21 株式会社ディスコ 切削装置
CN106181681A (zh) * 2016-08-31 2016-12-07 天通银厦新材料有限公司 一种蓝宝石加工用精确打磨装置
EP3581331B1 (en) 2018-06-13 2022-07-20 W-M GLASS Sp. z o.o. Set of discs for grinding the edges of glass plates
CN109333222B (zh) * 2018-11-01 2023-06-27 浙江中晶新材料研究有限公司 一种全自动硅片倒角加工设备及其加工工艺
JP7153578B2 (ja) * 2019-01-29 2022-10-14 信越半導体株式会社 シリコンウェーハの製造方法
JP7016032B2 (ja) 2019-09-24 2022-02-04 日亜化学工業株式会社 半導体素子の製造方法
CN114888983A (zh) * 2022-05-31 2022-08-12 杭州中为光电技术有限公司 硅片自动倒角清洗一体化设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2186135Y (zh) * 1994-03-04 1994-12-28 廖胜钦 多轴式圆形玻璃磨斜边机
CN1278472A (zh) * 1999-06-21 2001-01-03 Z·巴维罗尼股份公司 用于加工玻璃或石质等板材边缘的双边自动加工机
CN1526668A (zh) * 2003-02-04 2004-09-08 坂东机工株式会社 玻璃板的加工装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2554432B2 (ja) * 1992-11-20 1996-11-13 住友シチックス株式会社 半導体ウエーハの外周面加工装置
JP2882458B2 (ja) 1994-11-28 1999-04-12 株式会社東京精密 ウェーハ面取り機
JPH1177501A (ja) * 1997-09-05 1999-03-23 Asahi Glass Co Ltd ガラス板端部の加工方法
JP4323058B2 (ja) 2000-04-24 2009-09-02 エムテック株式会社 ウェーハのノッチの研摩装置
JP2006110642A (ja) * 2004-10-12 2006-04-27 Shiraitekku:Kk 研磨装置
JP5112703B2 (ja) 2007-01-18 2013-01-09 ダイトエレクトロン株式会社 ウェーハ面取り加工方法およびその装置
KR100905094B1 (ko) * 2007-08-01 2009-06-30 주식회사 에스에프에이 웨이퍼 연마장치
JP5304020B2 (ja) * 2008-05-14 2013-10-02 新東工業株式会社 板状部材の端面の加工方法
JP4758457B2 (ja) * 2008-05-22 2011-08-31 株式会社東京精密 ウェーハ面取り装置
JP5434014B2 (ja) * 2008-08-22 2014-03-05 坂東機工株式会社 ガラス板の加工方法及びガラス板加工装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2186135Y (zh) * 1994-03-04 1994-12-28 廖胜钦 多轴式圆形玻璃磨斜边机
CN1278472A (zh) * 1999-06-21 2001-01-03 Z·巴维罗尼股份公司 用于加工玻璃或石质等板材边缘的双边自动加工机
CN1526668A (zh) * 2003-02-04 2004-09-08 坂东机工株式会社 玻璃板的加工装置

Also Published As

Publication number Publication date
TWI499482B (zh) 2015-09-11
TW201206636A (en) 2012-02-16
JP2011235406A (ja) 2011-11-24
KR101598657B1 (ko) 2016-02-29
WO2011142159A1 (ja) 2011-11-17
JP5491273B2 (ja) 2014-05-14
CN102869476A (zh) 2013-01-09
KR20130092401A (ko) 2013-08-20

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