CN102365523A - 用于测定绕三个相垂直空间轴x、y和z的旋转运动的微陀螺 - Google Patents
用于测定绕三个相垂直空间轴x、y和z的旋转运动的微陀螺 Download PDFInfo
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- CN102365523A CN102365523A CN2010800135259A CN201080013525A CN102365523A CN 102365523 A CN102365523 A CN 102365523A CN 2010800135259 A CN2010800135259 A CN 2010800135259A CN 201080013525 A CN201080013525 A CN 201080013525A CN 102365523 A CN102365523 A CN 102365523A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Gyroscopes (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
Description
Claims (24)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910001922 DE102009001922A1 (de) | 2009-03-26 | 2009-03-26 | Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z |
DE102009001922.7 | 2009-03-26 | ||
PCT/EP2010/052880 WO2010108773A1 (de) | 2009-03-26 | 2010-03-08 | Mikro-gyroskop zur ermittlung von rotationsbewegungen um drei senkrecht aufeinanderstehende raumachsen |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102365523A true CN102365523A (zh) | 2012-02-29 |
CN102365523B CN102365523B (zh) | 2015-04-29 |
Family
ID=42227734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080013525.9A Active CN102365523B (zh) | 2009-03-26 | 2010-03-08 | 用于测定绕三个相垂直空间轴x、y和z的旋转运动的微陀螺 |
Country Status (8)
Country | Link |
---|---|
US (2) | US8776599B2 (zh) |
EP (1) | EP2411766B1 (zh) |
JP (1) | JP5743338B2 (zh) |
KR (1) | KR101727514B1 (zh) |
CN (1) | CN102365523B (zh) |
CA (1) | CA2756485C (zh) |
DE (1) | DE102009001922A1 (zh) |
WO (1) | WO2010108773A1 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105091874A (zh) * | 2014-05-23 | 2015-11-25 | 北京大学 | 一种双解耦微机械轮式水平轴陀螺 |
CN105531564A (zh) * | 2013-09-11 | 2016-04-27 | 株式会社村田制作所 | 改进的陀螺仪结构和陀螺仪 |
CN105934651A (zh) * | 2014-01-28 | 2016-09-07 | 株式会社村田制作所 | 改进的陀螺仪结构和陀螺仪 |
CN106233091A (zh) * | 2014-04-28 | 2016-12-14 | (株)提尔爱 | 具有环形弹簧的三轴微陀螺仪 |
WO2024011679A1 (zh) * | 2022-07-15 | 2024-01-18 | 瑞声开泰科技(武汉)有限公司 | 一种全解耦三轴mems陀螺 |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1391972B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche |
IT1392741B1 (it) | 2008-12-23 | 2012-03-16 | St Microelectronics Rousset | Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione |
IT1394007B1 (it) | 2009-05-11 | 2012-05-17 | St Microelectronics Rousset | Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione |
DE102009026511A1 (de) * | 2009-05-27 | 2010-12-02 | Sensordynamics Ag | Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um mindestens eine von drei senkrecht aufeinanderstehenden Raumachsen |
US9097524B2 (en) | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
US8534127B2 (en) | 2009-09-11 | 2013-09-17 | Invensense, Inc. | Extension-mode angular velocity sensor |
ITTO20091042A1 (it) | 2009-12-24 | 2011-06-25 | St Microelectronics Srl | Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento |
JP5652117B2 (ja) * | 2010-10-21 | 2015-01-14 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
CN102116622B (zh) * | 2011-02-14 | 2012-09-26 | 孙博华 | 心跳型单结构三轴微机电陀螺仪 |
CN102840857B (zh) * | 2011-06-24 | 2015-04-08 | 鄂尔多斯市嘉美科技股份有限公司 | 单结构三轴微机电陀螺仪 |
ITTO20110806A1 (it) | 2011-09-12 | 2013-03-13 | St Microelectronics Srl | Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro |
EP2607849A1 (en) | 2011-12-22 | 2013-06-26 | Tronics Microsystems S.A. | Multiaxial micro-electronic inertial sensor |
DE102011057081A1 (de) * | 2011-12-28 | 2013-07-04 | Maxim Integrated Products, Inc. | Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors |
US9506756B2 (en) * | 2013-03-15 | 2016-11-29 | Freescale Semiconductor, Inc. | Multiple axis rate sensor |
WO2015045621A1 (ja) * | 2013-09-26 | 2015-04-02 | 株式会社村田製作所 | 角速度検出素子 |
US9404747B2 (en) * | 2013-10-30 | 2016-08-02 | Stmicroelectroncs S.R.L. | Microelectromechanical gyroscope with compensation of quadrature error drift |
WO2017061638A1 (ko) * | 2015-10-06 | 2017-04-13 | 주식회사 스탠딩에그 | Mems 장치, 이를 포함하는 mems 패키지 및 사용자 단말기 |
JP6514790B2 (ja) * | 2016-01-27 | 2019-05-15 | 株式会社日立製作所 | ジャイロスコープ |
US10696541B2 (en) | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
US10371521B2 (en) | 2016-05-26 | 2019-08-06 | Honeywell International Inc. | Systems and methods for a four-mass vibrating MEMS structure |
JP6562878B2 (ja) * | 2016-06-30 | 2019-08-21 | 株式会社東芝 | 角速度取得装置 |
JP6571065B2 (ja) * | 2016-12-08 | 2019-09-04 | 株式会社東芝 | 振動装置 |
CN107328402B (zh) * | 2017-07-12 | 2022-06-24 | 深迪半导体(绍兴)有限公司 | 一种三轴mems陀螺仪 |
CN107192384B (zh) * | 2017-07-24 | 2022-04-05 | 深迪半导体(绍兴)有限公司 | 一种mems三轴陀螺仪 |
EP3671118B1 (en) | 2018-12-19 | 2021-08-25 | Murata Manufacturing Co., Ltd. | Vibration-robust multiaxis gyroscope |
EP3671116B1 (en) * | 2018-12-19 | 2021-11-17 | Murata Manufacturing Co., Ltd. | Synchronized multi-axis gyroscope |
JP6879391B2 (ja) * | 2019-02-15 | 2021-06-02 | 株式会社村田製作所 | 同期フレームを有する多軸ジャイロスコープ |
JP6897806B2 (ja) * | 2019-02-15 | 2021-07-07 | 株式会社村田製作所 | バランス型多軸ジャイロスコープ |
EP3696503B1 (en) * | 2019-02-15 | 2022-10-26 | Murata Manufacturing Co., Ltd. | Vibration-robust multiaxis gyroscope |
CN114459453A (zh) * | 2021-12-24 | 2022-05-10 | 瑞声开泰科技(武汉)有限公司 | 微机械陀螺仪及电子产品 |
CN114719833A (zh) * | 2022-02-22 | 2022-07-08 | 瑞声开泰科技(武汉)有限公司 | 一种mems陀螺 |
CN116734821A (zh) * | 2022-03-04 | 2023-09-12 | 瑞声开泰科技(武汉)有限公司 | 微机械陀螺仪及电子产品 |
Citations (5)
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JP2000180174A (ja) * | 1998-12-10 | 2000-06-30 | Denso Corp | 角速度センサ |
US20020088279A1 (en) * | 1996-10-07 | 2002-07-11 | Bernd Folkmer | Rotational rate gyroscope with decoupled orthogonal primary and secondary oscillations |
CN1782713A (zh) * | 2004-12-01 | 2006-06-07 | 株式会社电装 | 具有沿转动方向振荡的惯性质量块的角速度探测器 |
EP1832841A1 (en) * | 2006-03-10 | 2007-09-12 | STMicroelectronics S.r.l. | Microelectromechanical integrated sensor structure with rotary driving motion |
WO2008051677A2 (en) * | 2006-10-23 | 2008-05-02 | Custom Sensors & Technologies, Inc. | Dual axis rate sensor |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0791958A (ja) * | 1993-09-27 | 1995-04-07 | Canon Inc | 角速度センサ |
JPH10246636A (ja) * | 1997-03-05 | 1998-09-14 | Shinko Electric Co Ltd | 減揺装置 |
JP3399336B2 (ja) * | 1997-12-22 | 2003-04-21 | 株式会社豊田中央研究所 | 検出器 |
JPH11325905A (ja) | 1998-05-08 | 1999-11-26 | Fuji Electric Co Ltd | 振動ジャイロ |
JP3106395B2 (ja) * | 1998-07-10 | 2000-11-06 | 株式会社村田製作所 | 角速度センサ |
JP4348759B2 (ja) | 1998-12-15 | 2009-10-21 | ミツミ電機株式会社 | 回転振動型ジャイロ |
JP2001264071A (ja) * | 2000-03-17 | 2001-09-26 | Aisin Seiki Co Ltd | 振動子駆動装置 |
JP2002148048A (ja) | 2000-11-08 | 2002-05-22 | Murata Mfg Co Ltd | 角速度検出素子 |
JP2002296038A (ja) * | 2001-03-30 | 2002-10-09 | Mitsubishi Electric Corp | 角速度センサ |
US6848304B2 (en) * | 2003-04-28 | 2005-02-01 | Analog Devices, Inc. | Six degree-of-freedom micro-machined multi-sensor |
TWI286201B (en) | 2006-08-18 | 2007-09-01 | Nan-Chyuan Tsai | Three-axis sensing micro gyroscope |
DE102009001244A1 (de) * | 2009-02-27 | 2010-09-02 | Sensordynamics Ag | Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse |
-
2009
- 2009-03-26 DE DE200910001922 patent/DE102009001922A1/de not_active Withdrawn
-
2010
- 2010-03-08 EP EP10709994.7A patent/EP2411766B1/de active Active
- 2010-03-08 CN CN201080013525.9A patent/CN102365523B/zh active Active
- 2010-03-08 US US13/258,177 patent/US8776599B2/en active Active
- 2010-03-08 JP JP2012501228A patent/JP5743338B2/ja active Active
- 2010-03-08 WO PCT/EP2010/052880 patent/WO2010108773A1/de active Application Filing
- 2010-03-08 CA CA2756485A patent/CA2756485C/en active Active
- 2010-03-08 KR KR1020117025179A patent/KR101727514B1/ko active IP Right Grant
-
2014
- 2014-07-14 US US14/331,124 patent/US20140345379A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020088279A1 (en) * | 1996-10-07 | 2002-07-11 | Bernd Folkmer | Rotational rate gyroscope with decoupled orthogonal primary and secondary oscillations |
JP2000180174A (ja) * | 1998-12-10 | 2000-06-30 | Denso Corp | 角速度センサ |
CN1782713A (zh) * | 2004-12-01 | 2006-06-07 | 株式会社电装 | 具有沿转动方向振荡的惯性质量块的角速度探测器 |
EP1832841A1 (en) * | 2006-03-10 | 2007-09-12 | STMicroelectronics S.r.l. | Microelectromechanical integrated sensor structure with rotary driving motion |
WO2008051677A2 (en) * | 2006-10-23 | 2008-05-02 | Custom Sensors & Technologies, Inc. | Dual axis rate sensor |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105531564A (zh) * | 2013-09-11 | 2016-04-27 | 株式会社村田制作所 | 改进的陀螺仪结构和陀螺仪 |
CN105934651A (zh) * | 2014-01-28 | 2016-09-07 | 株式会社村田制作所 | 改进的陀螺仪结构和陀螺仪 |
CN106233091A (zh) * | 2014-04-28 | 2016-12-14 | (株)提尔爱 | 具有环形弹簧的三轴微陀螺仪 |
CN106233091B (zh) * | 2014-04-28 | 2018-12-28 | (株)提尔爱 | 具有环形弹簧的三轴微陀螺仪 |
CN105091874A (zh) * | 2014-05-23 | 2015-11-25 | 北京大学 | 一种双解耦微机械轮式水平轴陀螺 |
WO2024011679A1 (zh) * | 2022-07-15 | 2024-01-18 | 瑞声开泰科技(武汉)有限公司 | 一种全解耦三轴mems陀螺 |
Also Published As
Publication number | Publication date |
---|---|
DE102009001922A1 (de) | 2010-09-30 |
KR101727514B1 (ko) | 2017-04-17 |
WO2010108773A1 (de) | 2010-09-30 |
EP2411766B1 (de) | 2015-05-06 |
JP2012521548A (ja) | 2012-09-13 |
US20140345379A1 (en) | 2014-11-27 |
US8776599B2 (en) | 2014-07-15 |
US20120024056A1 (en) | 2012-02-02 |
CA2756485A1 (en) | 2010-09-30 |
EP2411766A1 (de) | 2012-02-01 |
JP5743338B2 (ja) | 2015-07-01 |
CN102365523B (zh) | 2015-04-29 |
CA2756485C (en) | 2018-08-21 |
KR20110134492A (ko) | 2011-12-14 |
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Address after: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant after: MAXIM INTEGRATED GmbH Address before: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant before: Induction Power Corp. |
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Effective date of registration: 20231031 Address after: Room A, 12th Floor, 300 Lockhart Road, Wan Chai, Hong Kong, China Patentee after: Hanwang Microelectronics Hong Kong Ltd. Address before: Ohio, USA Patentee before: Hanking Microelectronics Co.,Ltd. |