1286201 星之一，其他諸如應用於油路的微型壓力感測器 (Micro Pressure Sensor)的應用也大幅地提高了行車 的安全與性能，當然也大幅地降低了汽車控制系統的 零件成本。 除此之外，另一項更為重要的感知器就是微型陀 螺儀（Micro Gyroscope)，微型陀螺儀於汽車的應用相 當廣泛，例如車輛穩定性控制（Vehicle Stability Control)、車輛動態控制（Vehicle Dynamic Control)、翻覆偵測（Rollover Detection)、慣性導 _ 航系統（Inertial Navigation System, INS)與碰撞避 r 免（Collision Avoidance)等等，就功能上而言，慣性 導航系統（INS)整合了加速度計與陀螺儀，可即時地獲 得車體本身的運動參數，例如車體的加速度與角加速 度，有此數據，則只要經積分就可計算出車體在空間 中的位置與車體的運動狀態，利用此特性以之即時監 / 控汽車的行駛動態，可以提升行車的安全與舒適性。 常見之微型陀螺儀設計，包括有振動式 # (Vibratory Rate Gyroscope，）、振動指叉式（TuningOne of the 1286201 stars, other applications such as the Micro Pressure Sensor applied to the oil circuit, has also greatly improved the safety and performance of the vehicle, and of course significantly reduced the cost of parts for the vehicle control system. In addition, another more important sensor is the Micro Gyroscope, which is widely used in automotive applications such as Vehicle Stability Control and Vehicle Dynamic Control (Vehicle Dynamic). Control), Rollover Detection, Inertial Navigation System (INS) and Collision Avoidance, etc. Functionally, the inertial navigation system (INS) integrates acceleration. With the gyroscope, the motion parameters of the car body itself can be obtained in real time, such as the acceleration and angular acceleration of the car body. With this data, the position of the car body and the motion state of the car body can be calculated as long as the integral is integrated. Use this feature to monitor and control the driving dynamics of the car in real time, which can improve the safety and comfort of driving. Common micro gyroscope design, including vibrating #yr (Vibratory Rate Gyroscope), vibrating fork (Tuning
Fork)、振動樑式（Vibrating Beams)及四葉草式 (Clover-leaf Shape)等，微型振動式陀螺儀由於不 用產生大幅度的轉動而毋須轴承，因此可以利用微機 電製程技術以進行微型化及批次製造。所有振動式的 陀螺儀’其作動原理主要乃是藉由外界輸入之角速 度，對致動端之線速度進行外積而在感測端產生科式 加速度（Coriolis Acceleration)，藉由致動及感測 6 1286201 端能量的轉換來進行角速率的感測。而一般應用於陀 • 螺儀中較常見之驅動機制可分為靜電式、電磁式、壓 電式專，而感測機制可分為電容式、壓電式、以及壓 阻式等類型；微型振動式陀螺儀若依其作用原理之不 同，又可分為質量平移式與轉動質量式，其中轉動質 量式可作為雙轴式的致動與輸出。 其中，如第七圖所示係為一種質量平移式陀螺 儀，一般質量平移的陀螺儀皆是驅動懸浮於基底 蠱 （Substrate)上的單一質量塊（Proof Mass)使其產生 振動，並藉由基底的旋轉效應產生科式（c〇ri〇lis)加 速度，並藉由感測模組以計算科氏力；質量塊可以在 兩個垂直的方向上振盪，分別是驅動與感測方向，此 一系統乃屬於兩個自由度（Degree 〇f Freed〇m，D〇F) 的系統，一般在質量平移的操作之下，質量塊的旋轉 效應可予以忽略，故可將其視為質點運動，考慮彈性 / 及阻尼將系統等效。 〜 另，如第八、九圖所示則係為一種旋轉質量式陀 • 嫘，，一般轉動質量式之陀螺儀乃利用靜電、電磁力 或是支撐臂的方式使質量塊懸浮，當陀螺儀受到科式 力矩作用時，會在感測端產生y角的傾斜，而使質量塊 與基，之間的距離改變，進而藉由電容效應感測改變 量而得到角速度；假設陀螺儀在As方向受到致動器的 作用產生旋轉，若系統所受到外加的旋轉效應在^方 向，所以在A2方向上會產生一科氏扭力（c〇ri〇Hs Torque)，並造成質量板稱微的傾斜；藉此原理，旋轉 7 1286201 變化，由於陀螺儀（1)在致動及感測方向分別各有兩個 自i度’因此在兩方向也同樣的具有兩各自然頻率， 可避免雙軸自然頻率無法配合的問題，在致動之時該 第一質量塊（13)、第二質量塊（14)及第三質量塊（15) 在感測方向受到拘束，故只能在致動方向自由動作， 而外力則由第一質量塊（13)處輸入，在感測之時第二 質量塊（14)及第三質量塊（15)則對反耦合之參考體進 订運動，其方向亦侷限僅能在感測方向作動，因此感 _ 測之時僅需感測第二質量塊（14)及第三質量塊（15)間 之相對運動，而不會受到致動方向振幅之干擾，進而 直接消除因製程缺陷而導致的耦合現象。 藉由以上所述，本發明與現有結構相較之下，由 於本發明係在載體上之基座間分別設有第一、二、三 質量塊，同時以第一、二、三感測器對應進行感測， 使其能藉由平面的旋轉運動（〇uter-ring與 Inner-disk)感測X與γ軸的角動量變化，且藉由平移 運動（Trans!ation Proof Mass)感測Z軸向的角動量 • 變化，加上利用了陣列式質量塊作為多軸的致動與輸 出，亦可有效地提高陀螺儀的解析度，以滿足例如汽 車之慣性導航系統（INS)在實際上及下世代所須高解 析度之要求，而更增其整體實用價值性者。 綜上所述，本發明實施例確能達到所預期之使用 功效，又其所揭露之具體構造，不僅未曾見諸於同類 產品中’亦未曾公開於申請前，誠已完全符合專利法 之規定與要求’爰依法提出發明專利之申請，懇請惠 10 1286201 予審查，並賜准專利，則實感德便。 1286201 【圖式簡單說明】 第一圖：本發明之結構示意圖（一） 第二圖：本發明之結構示意圖（二） 第三圖：本發明之結構示意圖（三） 第四圖：本發明之結構剖視示意圖（一） 第五圖··本發明之結構剖視示意圖（二） 第六圖：本發明之設計概念圖 第七圖：現有質量平移式陀螺儀之系統等效圖 第八圖：現有旋轉質量式陀螺儀之作用原理示意 圖（一） 第九圖：現有旋轉質量式陀螺儀之作用原理示意 圖（二） 【主要元件符號說明】 (1) 陀螺儀 (11) 載體 (12) 基座 (13) 第一質量塊 (131) 第一感測器 (14) 第二質量塊 (141) 第二感測器 (15) 第三質量塊 (151) 第三感測器 (16) 梳狀電極 12Fork), Vibrating Beams and Clover-leaf Shapes, micro-vibration gyroscopes can be miniaturized by using micro-electromechanical process technology because they do not require large rotations and require bearings. Batch manufacturing. The principle of operation of all vibrating gyroscopes is mainly to generate the Coriolis Acceleration at the sensing end by externally accumulating the angular velocity of the input end by the angular velocity input from the outside, by actuating and sensing 6 1286201 End energy conversion for angular rate sensing. The more common driving mechanisms commonly used in gyroscopic devices can be classified into electrostatic, electromagnetic, and piezoelectric, while sensing mechanisms can be classified into capacitive, piezoelectric, and piezoresistive types; Vibratory gyroscopes can be divided into mass translation type and rotary mass type according to their different action principles, and the rotary mass type can be used as two-axis type actuation and output. Among them, as shown in the seventh figure, it is a mass translation type gyroscope, and the general mass translation gyroscope drives a single mass (Proof Mass) suspended on a substrate to generate vibration. The rotation effect of the substrate generates the acceleration (c〇ri〇lis) and the Coriolis force is calculated by the sensing module; the mass can oscillate in two perpendicular directions, namely the driving and sensing directions, respectively. A system is a system of two degrees of freedom (Degree 〇f Freed〇m, D〇F). Generally, under the operation of mass translation, the rotation effect of the mass can be ignored, so it can be regarded as particle motion. Consider the elasticity / and damping to make the system equivalent. ~ In addition, as shown in the eighth and ninth figures, it is a kind of rotary mass type • 嫘,, the general rotary mass type gyro uses the static electricity, electromagnetic force or support arm to suspend the mass, when the gyroscope When subjected to the coercive moment, the inclination of the y angle is generated at the sensing end, and the distance between the mass and the base is changed, and then the angular velocity is obtained by sensing the amount of change by the capacitive effect; assuming that the gyroscope is in the direction of As Rotating by the action of the actuator, if the system is subjected to the additional rotation effect in the ^ direction, a Coriolis torque (c〇ri〇Hs Torque) is generated in the A2 direction, and the mass plate is slightly tilted; By this principle, the rotation of 7 1286201 changes, since the gyroscope (1) has two self-i degrees in the actuation and sensing directions respectively, so the two natural frequencies are also the same in both directions, which can avoid the two-axis natural frequency. Unable to cooperate, the first mass (13), the second mass (14) and the third mass (15) are constrained in the sensing direction at the time of actuation, so they can only move freely in the actuating direction. And the external force is A mass (13) is input, and at the time of sensing, the second mass (14) and the third mass (15) are bound to the anti-coupling reference body, and the direction is limited only in the sensing direction. Actuation, therefore, only the relative motion between the second mass (14) and the third mass (15) needs to be sensed without being disturbed by the amplitude of the actuation direction, thereby directly eliminating process defects. The resulting coupling phenomenon. According to the above, the present invention is provided with the first, second and third masses respectively between the pedestals on the carrier, and the first, second and third sensors are correspondingly compared with the prior art. Sensing is performed so that the angular momentum changes of the X and γ axes can be sensed by a planar rotational motion (〇uter-ring and Inner-disk), and the Z axis is sensed by a translational motion (Trans!ation Proof Mass) The angular momentum of the direction, the change, and the use of the array mass as the multi-axis actuation and output, can also effectively improve the resolution of the gyroscope to meet, for example, the inertial navigation system (INS) of the car. The next generation must meet the requirements of high resolution, and increase its overall practical value. In summary, the embodiments of the present invention can achieve the expected use efficiency, and the specific structure disclosed therein has not been seen in the same product and has not been disclosed before the application, and has completely complied with the provisions of the Patent Law. With the request for 'claiming an invention patent according to law, please request 10 1286201 for review, and grant a patent, it is really sensible. 1286201 [Simplified description of the drawings] First: Schematic diagram of the structure of the present invention (1) Second diagram: Schematic diagram of the structure of the present invention (2) Third diagram: Schematic diagram of the structure of the present invention (3) Fourth: The present invention Schematic cross-sectional view (1) Fifth diagram · Schematic cross-sectional view of the structure of the present invention (2) Sixth: Design concept of the present invention Figure 7: System equivalent diagram of the existing mass translational gyroscope : Schematic diagram of the function principle of the existing rotary mass gyroscope (1) Fig. 9: Schematic diagram of the function principle of the existing rotary mass gyroscope (2) [Explanation of main component symbols] (1) Gyro (11) Carrier (12) Seat (13) First mass (131) First sensor (14) Second mass (141) Second sensor (15) Third mass (151) Third sensor (16) Comb Electrode 12