CN102378895B - 一种用于检测加速度和旋转速度的方法及微机电传感器 - Google Patents
一种用于检测加速度和旋转速度的方法及微机电传感器 Download PDFInfo
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- CN102378895B CN102378895B CN201080014830.XA CN201080014830A CN102378895B CN 102378895 B CN102378895 B CN 102378895B CN 201080014830 A CN201080014830 A CN 201080014830A CN 102378895 B CN102378895 B CN 102378895B
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- 230000001133 acceleration Effects 0.000 title claims abstract description 80
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 230000006698 induction Effects 0.000 claims description 136
- 230000033001 locomotion Effects 0.000 claims description 48
- 230000003534 oscillatory effect Effects 0.000 claims description 7
- 230000010355 oscillation Effects 0.000 abstract description 3
- 230000000284 resting effect Effects 0.000 abstract 1
- 230000000875 corresponding effect Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000012491 analyte Substances 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/02—Devices characterised by the use of mechanical means
- G01P3/14—Devices characterised by the use of mechanical means by exciting one or more mechanical resonance systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009002066.7 | 2009-03-31 | ||
DE200910002066 DE102009002066A1 (de) | 2009-03-31 | 2009-03-31 | Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor |
PCT/EP2010/052202 WO2010112268A1 (en) | 2009-03-31 | 2010-02-22 | Method for detecting accelerations and rotation rates, and mems sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102378895A CN102378895A (zh) | 2012-03-14 |
CN102378895B true CN102378895B (zh) | 2015-04-29 |
Family
ID=42167530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080014830.XA Active CN102378895B (zh) | 2009-03-31 | 2010-02-22 | 一种用于检测加速度和旋转速度的方法及微机电传感器 |
Country Status (8)
Country | Link |
---|---|
US (2) | US9134128B2 (zh) |
EP (1) | EP2414773B1 (zh) |
JP (1) | JP5532455B2 (zh) |
KR (1) | KR101657134B1 (zh) |
CN (1) | CN102378895B (zh) |
CA (1) | CA2756849A1 (zh) |
DE (1) | DE102009002066A1 (zh) |
WO (1) | WO2010112268A1 (zh) |
Families Citing this family (20)
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DE102009002066A1 (de) * | 2009-03-31 | 2010-10-07 | Sensordynamics Ag | Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor |
JP5618002B2 (ja) * | 2011-05-12 | 2014-11-05 | 株式会社村田製作所 | 角加速度検出素子 |
DE102011056971A1 (de) | 2011-12-23 | 2013-06-27 | Maxim Integrated Products, Inc. | Mikromechanischer Coriolis-Drehratensensor |
US8875576B2 (en) * | 2012-03-21 | 2014-11-04 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for providing an in-plane inertial device with integrated clock |
US9310202B2 (en) * | 2012-07-09 | 2016-04-12 | Freescale Semiconductor, Inc. | Angular rate sensor with quadrature error compensation |
DE102012219650B4 (de) | 2012-10-26 | 2023-10-12 | Robert Bosch Gmbh | Mechanisches Bauteil, mechanisches System und Verfahren zum Betreiben eines mechanischen Bauteils |
JP5714648B2 (ja) * | 2012-11-16 | 2015-05-07 | 株式会社豊田中央研究所 | 力学量memsセンサ及び力学量memsセンサシステム |
US9506756B2 (en) * | 2013-03-15 | 2016-11-29 | Freescale Semiconductor, Inc. | Multiple axis rate sensor |
JP6125914B2 (ja) * | 2013-06-07 | 2017-05-10 | 日立オートモティブシステムズ株式会社 | 角速度センサ |
US9726493B2 (en) * | 2014-05-16 | 2017-08-08 | Hanking Electronics, Ltd. | Shock-robust integrated multi-axis MEMS gyroscope |
USD752590S1 (en) | 2014-06-19 | 2016-03-29 | Leviton Manufacturing Co., Ltd. | Communication outlet |
ITUA20162172A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento |
CN106197376B (zh) * | 2016-09-23 | 2018-08-07 | 华南农业大学 | 基于单轴mems惯性传感器的车身倾角测量方法 |
US10023010B2 (en) * | 2016-12-13 | 2018-07-17 | Ford Global Technologies, Llc | Micro-electromechanical system for use in vehicle doors to increase sound quality vehicle performance of the vehicle doors |
DE102018003901B3 (de) * | 2018-05-15 | 2019-06-27 | Psa Automobiles Sa | Sensorsystem zur Gangwahlerkennung bei einem Kraftfahrzeug |
WO2021018368A1 (de) * | 2019-07-26 | 2021-02-04 | Robert Bosch Gmbh | Drehratensensor mit einem, eine haupterstreckungsebene aufweisenden substrat und mindestens einem massenschwinger |
JP7188311B2 (ja) | 2019-07-31 | 2022-12-13 | セイコーエプソン株式会社 | ジャイロセンサー、電子機器、及び移動体 |
CN113175923A (zh) * | 2021-05-19 | 2021-07-27 | 瑞声开泰科技(武汉)有限公司 | 一种mems波动陀螺仪 |
US20230258523A1 (en) * | 2022-02-16 | 2023-08-17 | Honeywell Federal Manufacturing & Technologies, Llc | Method and system for centrifuge testing |
CN115454161B (zh) * | 2022-09-13 | 2024-02-27 | 联想(北京)有限公司 | 一种振动控制方法及装置 |
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DE102007017209A1 (de) * | 2007-04-05 | 2008-10-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Inertialsensor zur Messung von Drehraten |
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JP3263113B2 (ja) | 1992-03-06 | 2002-03-04 | 株式会社東芝 | 慣性センサー |
DE19641284C1 (de) * | 1996-10-07 | 1998-05-20 | Inst Mikro Und Informationstec | Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen |
US5955668A (en) * | 1997-01-28 | 1999-09-21 | Irvine Sensors Corporation | Multi-element micro gyro |
JP3106395B2 (ja) * | 1998-07-10 | 2000-11-06 | 株式会社村田製作所 | 角速度センサ |
US6370937B2 (en) * | 2000-03-17 | 2002-04-16 | Microsensors, Inc. | Method of canceling quadrature error in an angular rate sensor |
US20020134154A1 (en) * | 2001-03-23 | 2002-09-26 | Hsu Ying W. | Method and apparatus for on-chip measurement of micro-gyro scale factors |
JP2002296038A (ja) * | 2001-03-30 | 2002-10-09 | Mitsubishi Electric Corp | 角速度センサ |
US20020189351A1 (en) * | 2001-06-14 | 2002-12-19 | Reeds John W. | Angular rate sensor having a sense element constrained to motion about a single axis and flexibly attached to a rotary drive mass |
US6513380B2 (en) * | 2001-06-19 | 2003-02-04 | Microsensors, Inc. | MEMS sensor with single central anchor and motion-limiting connection geometry |
US6715352B2 (en) * | 2001-06-26 | 2004-04-06 | Microsensors, Inc. | Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method |
US6725719B2 (en) * | 2002-04-17 | 2004-04-27 | Milli Sensor Systems And Actuators, Inc. | MEMS-integrated inertial measurement units on a common substrate |
DE10360963B4 (de) * | 2003-12-23 | 2007-05-16 | Litef Gmbh | Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel |
JP2005283481A (ja) * | 2004-03-30 | 2005-10-13 | Denso Corp | センサシステム |
DE102004017480B4 (de) * | 2004-04-08 | 2009-04-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Rotations-Drehratensensor mit mechanisch entkoppelten Schwingungsmoden |
EP1794543B1 (de) * | 2004-09-27 | 2009-11-04 | Contitemic Microelectronic GmbH | Drehratensensor |
US20070220973A1 (en) * | 2005-08-12 | 2007-09-27 | Cenk Acar | Multi-axis micromachined accelerometer and rate sensor |
JP4887034B2 (ja) | 2005-12-05 | 2012-02-29 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
EP1832841B1 (en) * | 2006-03-10 | 2015-12-30 | STMicroelectronics Srl | Microelectromechanical integrated sensor structure with rotary driving motion |
JP4687577B2 (ja) | 2006-06-16 | 2011-05-25 | ソニー株式会社 | 慣性センサ |
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US7757555B2 (en) | 2006-08-30 | 2010-07-20 | Robert Bosch Gmbh | Tri-axis accelerometer having a single proof mass and fully differential output signals |
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US7950281B2 (en) * | 2007-02-28 | 2011-05-31 | Infineon Technologies Ag | Sensor and method for sensing linear acceleration and angular velocity |
DE102007011816B4 (de) * | 2007-03-12 | 2013-10-02 | Infineon Technologies Ag | Sensor und Verfahren zum Erfassen einer Linearbeschleunigung und einer Winkelgeschwindigkeit |
DE102007030119A1 (de) * | 2007-06-29 | 2009-01-02 | Litef Gmbh | Corioliskreisel |
DE102008002748A1 (de) * | 2008-06-27 | 2009-12-31 | Sensordynamics Ag | Mikro-Gyroskop |
DE102009001248B4 (de) * | 2009-02-27 | 2020-12-17 | Hanking Electronics, Ltd. | MEMS-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse |
DE102009002066A1 (de) * | 2009-03-31 | 2010-10-07 | Sensordynamics Ag | Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor |
DE202009007836U1 (de) * | 2009-06-03 | 2009-08-20 | Sensordynamics Ag | MEMS-Sensor |
US8584522B2 (en) * | 2010-04-30 | 2013-11-19 | Qualcomm Mems Technologies, Inc. | Micromachined piezoelectric x-axis gyroscope |
-
2009
- 2009-03-31 DE DE200910002066 patent/DE102009002066A1/de not_active Withdrawn
-
2010
- 2010-02-22 KR KR1020117025724A patent/KR101657134B1/ko active IP Right Grant
- 2010-02-22 CA CA2756849A patent/CA2756849A1/en not_active Abandoned
- 2010-02-22 US US13/258,153 patent/US9134128B2/en active Active
- 2010-02-22 CN CN201080014830.XA patent/CN102378895B/zh active Active
- 2010-02-22 EP EP20100713141 patent/EP2414773B1/en active Active
- 2010-02-22 WO PCT/EP2010/052202 patent/WO2010112268A1/en active Application Filing
- 2010-02-22 JP JP2012502529A patent/JP5532455B2/ja active Active
-
2015
- 2015-09-14 US US14/853,592 patent/US9664515B2/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007017209A1 (de) * | 2007-04-05 | 2008-10-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Inertialsensor zur Messung von Drehraten |
Also Published As
Publication number | Publication date |
---|---|
CA2756849A1 (en) | 2010-10-07 |
EP2414773A1 (en) | 2012-02-08 |
US20160003617A1 (en) | 2016-01-07 |
JP5532455B2 (ja) | 2014-06-25 |
KR101657134B1 (ko) | 2016-09-30 |
DE102009002066A1 (de) | 2010-10-07 |
US20120017678A1 (en) | 2012-01-26 |
EP2414773B1 (en) | 2013-10-09 |
CN102378895A (zh) | 2012-03-14 |
KR20120030343A (ko) | 2012-03-28 |
US9134128B2 (en) | 2015-09-15 |
US9664515B2 (en) | 2017-05-30 |
JP2012522228A (ja) | 2012-09-20 |
WO2010112268A1 (en) | 2010-10-07 |
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Address after: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant after: MAXIM INTEGRATED GmbH Address before: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant before: Induction Power Co.,Ltd. Address after: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant after: Induction Power Co.,Ltd. Address before: Austria - Graz A8403 Hotel Fende Aibei lebu Ling Applicant before: Induction Power Corp. |
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Effective date of registration: 20231102 Address after: Room A, 12th Floor, 300 Lockhart Road, Wan Chai, Hong Kong, China Patentee after: Hanwang Microelectronics Hong Kong Ltd. Address before: Ohio, USA Patentee before: Hanking Microelectronics Co.,Ltd. |