ATE517752T1 - Piezoelektrischer aktuator und herstellungsverfahren dafür - Google Patents

Piezoelektrischer aktuator und herstellungsverfahren dafür

Info

Publication number
ATE517752T1
ATE517752T1 AT08156258T AT08156258T ATE517752T1 AT E517752 T1 ATE517752 T1 AT E517752T1 AT 08156258 T AT08156258 T AT 08156258T AT 08156258 T AT08156258 T AT 08156258T AT E517752 T1 ATE517752 T1 AT E517752T1
Authority
AT
Austria
Prior art keywords
piezoelectric actuator
layer
production method
piezoelectric layer
piezoelectric
Prior art date
Application number
AT08156258T
Other languages
English (en)
Inventor
David D L Wijngaards
Hans Reinten
Hendrik J Stolk
Alex N Westland
Original Assignee
Oce Tech Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oce Tech Bv filed Critical Oce Tech Bv
Application granted granted Critical
Publication of ATE517752T1 publication Critical patent/ATE517752T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
AT08156258T 2007-05-30 2008-05-15 Piezoelektrischer aktuator und herstellungsverfahren dafür ATE517752T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07109197 2007-05-30

Publications (1)

Publication Number Publication Date
ATE517752T1 true ATE517752T1 (de) 2011-08-15

Family

ID=38543703

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08156258T ATE517752T1 (de) 2007-05-30 2008-05-15 Piezoelektrischer aktuator und herstellungsverfahren dafür

Country Status (4)

Country Link
US (1) US7843113B2 (de)
EP (1) EP1997635B1 (de)
JP (1) JP2008300838A (de)
AT (1) ATE517752T1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4435049B2 (ja) * 2005-08-08 2010-03-17 株式会社東芝 薄膜圧電共振器及びその製造方法
JP5819585B2 (ja) * 2009-12-15 2015-11-24 セイコーエプソン株式会社 液滴噴射ヘッド及び液滴噴射装置
US8960862B2 (en) * 2011-05-31 2015-02-24 Konica Minolta, Inc. Ink-jet head and ink-jet drawing device including same
WO2013079369A1 (en) * 2011-11-30 2013-06-06 Oce-Technologies B.V. Inkjet print head and method for manufacturing such print head
US20130222481A1 (en) * 2012-02-27 2013-08-29 Toshiba Tec Kabushiki Kaisha Inkjet head and method of manufacturing the same
JP2013184321A (ja) * 2012-03-06 2013-09-19 Toshiba Tec Corp インクジェットヘッドおよびその製造方法
DE102012107155B4 (de) * 2012-08-03 2017-07-13 Snaptrack, Inc. Topografische Struktur und Verfahren zu deren Herstellung
US20140292894A1 (en) * 2013-03-29 2014-10-02 Xerox Corporation Insulating substrate electrostatic ink jet print head
JP6464842B2 (ja) * 2014-03-26 2019-02-06 ブラザー工業株式会社 液体吐出装置
JP6547249B2 (ja) * 2014-07-31 2019-07-24 ブラザー工業株式会社 液体吐出装置の製造方法、及び、液体吐出装置
WO2016030247A1 (en) * 2014-08-26 2016-03-03 Oce-Technologies B.V. Multi-chip print head
JP6439331B2 (ja) * 2014-09-08 2018-12-19 ブラザー工業株式会社 液体吐出装置の製造方法、及び、液体吐出装置
JP6365347B2 (ja) * 2015-02-27 2018-08-01 コニカミノルタ株式会社 圧電デバイス、圧電デバイスの製造方法、インクジェットヘッド、インクジェットヘッドの製造方法およびインクジェットプリンタ
JP6519404B2 (ja) * 2015-08-24 2019-05-29 セイコーエプソン株式会社 電子デバイス、および、液体噴射ヘッド
JP6613717B2 (ja) * 2015-08-25 2019-12-04 セイコーエプソン株式会社 電子デバイス、液体噴射ヘッド、および、電子デバイスの製造方法
JP6701784B2 (ja) * 2016-02-17 2020-05-27 株式会社リコー 液体吐出ヘッド、液体吐出ユニット及び液体を吐出する装置
JP6256641B2 (ja) * 2017-02-01 2018-01-10 セイコーエプソン株式会社 液体噴射ヘッド、及び、液体噴射装置
CN111010100A (zh) * 2019-03-02 2020-04-14 天津大学 压电层带凹陷结构的体声波谐振器、滤波器及电子设备
JP7275769B2 (ja) * 2019-04-01 2023-05-18 ブラザー工業株式会社 圧電アクチュエータ及び液体吐出装置
JP2021138018A (ja) * 2020-03-04 2021-09-16 セイコーエプソン株式会社 液体吐出ヘッド

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WO1999004976A1 (fr) * 1997-07-25 1999-02-04 Seiko Epson Corporation Tete d'ecriture et imprimante a jet d'encre
JP3589560B2 (ja) * 1998-01-27 2004-11-17 株式会社リコー インクジェットヘッド及びその製造方法
JP3868143B2 (ja) * 1999-04-06 2007-01-17 松下電器産業株式会社 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド並びにこれらの製造方法
JP2003086854A (ja) * 2001-08-30 2003-03-20 Oce Technologies Bv 多層圧電アクチュエータ
WO2004017063A2 (de) * 2002-07-19 2004-02-26 Siemens Aktiengesellschaft Vorrichtung und verfahren zur detektion einer substanz mithilfe eines hochfrequenten piezoakustischen dünnfilmresonators
US20040051763A1 (en) 2002-09-13 2004-03-18 Shogo Matsubara Piezoelectric thin film element, actuator, ink-jet head and ink-jet recording apparatus therefor
JP4366568B2 (ja) 2003-08-04 2009-11-18 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2005123421A (ja) * 2003-10-17 2005-05-12 Matsushita Electric Ind Co Ltd 圧電体薄膜素子、インクジェットヘッド、インクジェット式記録装置、角速度センサ及びディスク装置用圧電アクチュエータ
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JP5070674B2 (ja) 2004-06-14 2012-11-14 富士ゼロックス株式会社 インクジェット記録ヘッド、及びインクジェット記録装置
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JP5041765B2 (ja) * 2005-09-05 2012-10-03 キヤノン株式会社 エピタキシャル酸化物膜、圧電膜、圧電膜素子、圧電膜素子を用いた液体吐出ヘッド及び液体吐出装置
JP5023461B2 (ja) * 2005-09-27 2012-09-12 富士ゼロックス株式会社 圧電素子、液滴吐出ヘッド、液滴吐出装置、圧電素子の製造方法
JP4142706B2 (ja) * 2006-09-28 2008-09-03 富士フイルム株式会社 成膜装置、成膜方法、絶縁膜、誘電体膜、圧電膜、強誘電体膜、圧電素子および液体吐出装置
JP4296441B2 (ja) * 2006-10-11 2009-07-15 セイコーエプソン株式会社 アクチュエータ装置の製造方法
JP4300431B2 (ja) * 2007-01-15 2009-07-22 セイコーエプソン株式会社 アクチュエータ装置及びそれを用いた液体噴射ヘッド
US7837305B2 (en) * 2007-01-30 2010-11-23 Panasonic Corporation Piezoelectric element, ink jet head, and ink jet recording device
EP1997637B1 (de) * 2007-05-30 2012-09-12 Océ-Technologies B.V. Verfahren zur Herstellung einer piezoelektrischen Tintenstrahlvorrichtung
EP1997638B1 (de) * 2007-05-30 2012-11-21 Océ-Technologies B.V. Verfahren zur Erzeugung eines Arrays piezoelektrischer Aktuatoren auf einer Membran

Also Published As

Publication number Publication date
JP2008300838A (ja) 2008-12-11
US7843113B2 (en) 2010-11-30
EP1997635B1 (de) 2011-07-27
EP1997635A1 (de) 2008-12-03
US20080297006A1 (en) 2008-12-04

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