WO2008105381A1 - 積層型圧電素子 - Google Patents

積層型圧電素子 Download PDF

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Publication number
WO2008105381A1
WO2008105381A1 PCT/JP2008/053228 JP2008053228W WO2008105381A1 WO 2008105381 A1 WO2008105381 A1 WO 2008105381A1 JP 2008053228 W JP2008053228 W JP 2008053228W WO 2008105381 A1 WO2008105381 A1 WO 2008105381A1
Authority
WO
WIPO (PCT)
Prior art keywords
ceramic
piezoelectric element
laminated body
internal electrode
electrode layers
Prior art date
Application number
PCT/JP2008/053228
Other languages
English (en)
French (fr)
Inventor
Atsushi Murai
Satoshi Suzuki
Toshiatu Nagaya
Akio Iwase
Akira Fujii
Shige Kadotani
Original Assignee
Denso Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corporation filed Critical Denso Corporation
Priority to US12/528,677 priority Critical patent/US20100139621A1/en
Priority to DE200811000509 priority patent/DE112008000509T5/de
Publication of WO2008105381A1 publication Critical patent/WO2008105381A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fuel-Injection Apparatus (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

複数の圧電セラミック層１１と複数の内部電極層１３、１４とを交互に積層してなるセラミック積層体１５と、その側面に形成された一対の側面電極１７、１８とを有する積層型圧電素子１である。内部電極層１３、１４は、いずれか一方の側面電極１７、１８に電気的に接続している。セラミック積層体１５は、その側面から内方に凹むスリット状の領域に、圧電セラミック層１１よりも形状を容易に変化し得る応力緩和部１２を有する。そして、応力緩和部１２を挟んで隣り合う２つの内部電極層１３、１４は、いずれも正極側の側面電極１７に電気的に接続されている。
PCT/JP2008/053228 2007-02-26 2008-02-26 積層型圧電素子 WO2008105381A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/528,677 US20100139621A1 (en) 2007-02-26 2008-02-26 Stacked piezoelectric device
DE200811000509 DE112008000509T5 (de) 2007-02-26 2008-02-26 Piezoelektrische Stapelvorrichtung

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-046071 2007-02-26
JP2007046071 2007-02-26
JP2008-042112 2008-02-22
JP2008042112A JP4930410B2 (ja) 2007-02-26 2008-02-22 積層型圧電素子

Publications (1)

Publication Number Publication Date
WO2008105381A1 true WO2008105381A1 (ja) 2008-09-04

Family

ID=39721213

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053228 WO2008105381A1 (ja) 2007-02-26 2008-02-26 積層型圧電素子

Country Status (4)

Country Link
US (1) US20100139621A1 (ja)
JP (1) JP4930410B2 (ja)
DE (1) DE112008000509T5 (ja)
WO (1) WO2008105381A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012019178A (ja) * 2010-07-11 2012-01-26 Nikko Co 圧電素子及び圧電素子製造方法
WO2020161353A1 (de) * 2019-02-08 2020-08-13 Pi Ceramic Gmbh Verfahren zur herstellung eines piezoelektrischen stapelaktors und piezoelektrischer stapelaktor

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101563795B (zh) * 2006-10-20 2011-03-23 京瓷株式会社 压电致动器装置及其制造方法
WO2008053569A1 (en) * 2006-10-31 2008-05-08 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus employing the same
DE102006062076A1 (de) * 2006-12-29 2008-07-10 Siemens Ag Piezokeramischer Vielschichtaktor und Verfahren zu seiner Herstellung
JP4911066B2 (ja) * 2007-02-26 2012-04-04 株式会社デンソー 積層型圧電素子
DE102007015446A1 (de) * 2007-03-30 2008-10-02 Siemens Ag Piezoelektrisches Bauteil mit Sicherheitsschicht und Infiltrationsbarriere und Verfahren zu dessen Herstellung
DE102012103994A1 (de) * 2012-05-07 2013-11-21 Epcos Ag Verfahren zur Herstellung eines Vielschichtbauelements und durch das Verfahren hergestelltes Vielschichtbauelement
JP2019007749A (ja) * 2017-06-20 2019-01-17 ヤマハ株式会社 圧力センサー

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186625A (ja) * 1997-12-24 1999-07-09 Hitachi Ltd 圧電素子
JP2006216850A (ja) * 2005-02-04 2006-08-17 Tdk Corp 積層型圧電素子
WO2006087871A1 (ja) * 2005-02-15 2006-08-24 Murata Manufacturing Co., Ltd. 積層型圧電素子
JP2006351602A (ja) * 2005-06-13 2006-12-28 Nec Tokin Corp 積層型圧電アクチュエータ素子

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271478A (ja) 1986-05-19 1987-11-25 Nec Corp 電歪効果素子の製造方法
JP3045531B2 (ja) * 1990-10-01 2000-05-29 日立金属株式会社 積層型変位素子
JPH04139884A (ja) * 1990-10-01 1992-05-13 Hitachi Metals Ltd 積層型変位素子
US6653762B2 (en) * 2000-04-19 2003-11-25 Murata Manufacturing Co., Ltd. Piezoelectric type electric acoustic converter
JP2002319715A (ja) * 2001-04-19 2002-10-31 Denso Corp 圧電体素子及びこれを用いたインジェクタ
US20030020377A1 (en) * 2001-07-30 2003-01-30 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and piezoelectric/electrostrictive device and production method thereof
JP2004111939A (ja) * 2002-08-29 2004-04-08 Ngk Insulators Ltd 積層型圧電素子及びその製造方法
JP2004190653A (ja) * 2002-10-18 2004-07-08 Ngk Insulators Ltd 液体噴射装置
JP2004297041A (ja) * 2003-03-12 2004-10-21 Denso Corp 積層型圧電体素子
US7075217B2 (en) * 2003-04-09 2006-07-11 Face International Corp Laminated piezoelectric transformer
JP4470504B2 (ja) * 2004-02-03 2010-06-02 株式会社デンソー 積層型圧電素子及びその製造方法
JP4876467B2 (ja) * 2004-12-06 2012-02-15 株式会社デンソー 積層型圧電素子
DE102005026717B4 (de) * 2005-06-09 2016-09-15 Epcos Ag Piezoelektrisches Vielschichtbauelement
DE502005007156D1 (de) * 2005-12-23 2009-06-04 Delphi Tech Inc Verfahren zum Herstellen eines piezoelektrischen Bauteils

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11186625A (ja) * 1997-12-24 1999-07-09 Hitachi Ltd 圧電素子
JP2006216850A (ja) * 2005-02-04 2006-08-17 Tdk Corp 積層型圧電素子
WO2006087871A1 (ja) * 2005-02-15 2006-08-24 Murata Manufacturing Co., Ltd. 積層型圧電素子
JP2006351602A (ja) * 2005-06-13 2006-12-28 Nec Tokin Corp 積層型圧電アクチュエータ素子

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012019178A (ja) * 2010-07-11 2012-01-26 Nikko Co 圧電素子及び圧電素子製造方法
WO2020161353A1 (de) * 2019-02-08 2020-08-13 Pi Ceramic Gmbh Verfahren zur herstellung eines piezoelektrischen stapelaktors und piezoelektrischer stapelaktor
JP2022521557A (ja) * 2019-02-08 2022-04-08 ピーアイ・セラミック・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 圧電スタックアクチュエータの製造方法、および圧電スタックアクチュエータ
US12010922B2 (en) 2019-02-08 2024-06-11 Pi Ceramic Gmbh Method for producing a piezoelectric stack actuator, and piezoelectric stack actuator

Also Published As

Publication number Publication date
DE112008000509T5 (de) 2010-01-07
US20100139621A1 (en) 2010-06-10
JP2008244458A (ja) 2008-10-09
JP4930410B2 (ja) 2012-05-16

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