WO2021256433A1 - 半導体装置の製造装置および製造方法 - Google Patents
半導体装置の製造装置および製造方法 Download PDFInfo
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- WO2021256433A1 WO2021256433A1 PCT/JP2021/022561 JP2021022561W WO2021256433A1 WO 2021256433 A1 WO2021256433 A1 WO 2021256433A1 JP 2021022561 W JP2021022561 W JP 2021022561W WO 2021256433 A1 WO2021256433 A1 WO 2021256433A1
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- mounting tool
- chip
- pressurizing mechanism
- bump
- semiconductor device
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 72
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 36
- 238000002844 melting Methods 0.000 claims abstract description 28
- 230000008018 melting Effects 0.000 claims abstract description 28
- 238000003825 pressing Methods 0.000 claims abstract description 27
- 238000001514 detection method Methods 0.000 claims abstract description 26
- 230000007423 decrease Effects 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 30
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000000155 melt Substances 0.000 abstract description 3
- 230000003028 elevating effect Effects 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 5
- 238000005070 sampling Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000015654 memory Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/75251—Means for applying energy, e.g. heating means in the lower part of the bonding apparatus, e.g. in the apparatus chuck
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/75252—Means for applying energy, e.g. heating means in the upper part of the bonding apparatus, e.g. in the bonding head
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7555—Mechanical means, e.g. for planarising, pressing, stamping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/759—Means for monitoring the connection process
- H01L2224/7592—Load or pressure adjusting means, e.g. sensors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81191—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
Definitions
- This specification discloses a manufacturing apparatus and a manufacturing method for manufacturing a semiconductor device by bonding a chip held by a mounting tool to a substrate.
- a flip chip bonder has been known as a technology for mounting a chip on a board.
- a protruding electrode called a bump is formed on the bottom surface of the chip. Then, the mounting tool presses the chip against the substrate, heats the chip to melt the bumps, and joins the bumps of the chip to the electrodes of the substrate.
- some techniques for detecting the melting timing of bumps have been proposed.
- thermocompression bonding tool if the load detection value by the load detecting means provided in the thermocompression bonding tool (corresponding to the mounting tool) decreases to a predetermined value or less, it is determined that the bump has melted, and the thermocompression bonding tool is used.
- the technology to raise is disclosed. According to such a technique, as soon as the melting of the bump can be detected, the next operation, that is, the rise of the thermocompression bonding tool can be performed.
- the time for thermocompression bonding can be shortened and the productivity can be improved as compared with the technique in which the time until melting is estimated in advance and the heating is continued until the estimated time elapses.
- the position of the mounting tool is kept constant when the chip is heated and pressurized.
- the mounting tool extends axially due to thermal expansion until the bumps melt.
- the load applied to the chip gradually increases due to the elongation of the mounting tool.
- the bumps may be crushed more than necessary.
- the gap between the chip and the board cannot be kept at an appropriate value.
- this specification discloses a manufacturing apparatus and a manufacturing method of a semiconductor device capable of appropriately maintaining the quality of the bump while detecting the melting timing of the bump.
- the semiconductor device manufacturing apparatus disclosed herein includes a stage that supports a substrate, a mounting tool that heatably holds a chip having bumps on the bottom surface, and a mounting tool that is moved in the vertical direction to load the chip.
- the chip is heated by the mounting tool, and the command position in the vertical direction of the pressurizing mechanism is updated as needed so that the position deviation, which is the difference between the commanded position of the pressurizing mechanism and the current position, becomes constant.
- the process and the detection process of monitoring the pressing load of the chip by the pressurizing mechanism and detecting the melting of the bump based on the decrease of the pressing load are performed. It is characterized by being configured.
- the controller has the pressurizing mechanism so that the gap amount, which is the gap amount between the bottom surface of the chip and the substrate, keeps the target value after the time when the melting of the bump is detected in the detection process. Further, the second process of updating the command position at any time may be performed.
- the pressurizing mechanism has a drive motor that moves the mounting tool in the vertical direction, and the controller monitors the current value of the drive motor as a parameter indicating the pressing load in the detection process. You may.
- the controller may calculate a value obtained by subtracting the target value of the position deviation from the current position of the mounting tool as the command position of the pressurizing mechanism.
- the method of manufacturing a semiconductor device disclosed herein is the mounting of a chip held by a mounting tool after the chip is grounded to a substrate supported by a stage until the bumps provided on the bottom surface of the chip are melted.
- the vertical command of the pressurizing mechanism so that the position deviation, which is the difference between the command position and the current position of the pressurizing mechanism that heats the chip with the tool and moves the mounting tool in the vertical direction, is constant.
- a detection that monitors the pressing load of the chip by the pressurizing mechanism in parallel with the first step of updating the position at any time and detects the melting of the bump based on the decrease of the pressing load. It is characterized by having a step and.
- the command position of the pressurizing mechanism is such that the gap amount, which is the gap amount between the bottom surface of the chip and the substrate, keeps the target value. May be provided with a second step of updating from time to time.
- the quality of the bump can be appropriately maintained while detecting the melting timing of the bump.
- FIG. 1 is an image diagram showing a configuration of a semiconductor device manufacturing apparatus 10.
- the manufacturing apparatus 10 is an apparatus for manufacturing a semiconductor device by mounting a semiconductor chip 100, which is an electronic component, on a substrate 110 in a face-down state.
- the manufacturing apparatus 10 has a bonding head 14 having a mounting tool 20, a chip supply means (not shown) for supplying the semiconductor chip 100 to the mounting tool 20, a stage 12 for supporting the substrate 110, and a stage 12 in the XY direction (horizontal direction). ), An XY stage 18 to be moved to), a controller 16 to control the drive thereof, and the like.
- the substrate 110 is sucked and held by the stage 12, and is heated by a stage heater (not shown) provided on the stage 12. Further, the semiconductor chip 100 is supplied to the mounting tool 20 by the chip supply means.
- the chip supply means can be considered. For example, a configuration in which a semiconductor chip is picked up by a relay arm from a wafer mounted on a wafer stage and transferred to the relay stage can be considered. In this case, the XY stage 18 transfers the relay stage directly under the mounting tool 20, and the mounting tool 20 picks up the semiconductor chip from the relay stage located directly below.
- the substrate 110 is subsequently transferred directly under the mounting tool 20 by the XY stage 18. In this state, the mounting tool 20 descends toward the substrate 110, and the semiconductor chip 100 sucked and held at the end is crimped onto the substrate 110 for mounting.
- the mounting tool 20 sucks and holds the semiconductor chip 100 and heats the semiconductor chip 100. Therefore, the mounting tool 20 is provided with a suction hole communicating with the vacuum source, a tool heater for heating the semiconductor chip 100 (neither of them is shown), and the like. In addition to the mounting tool 20, the bonding head 14 is further provided with a pressurizing mechanism 22 and an elevating mechanism 24.
- the pressurizing mechanism 22 presses the semiconductor chip 100 against the substrate 110 by moving the mounting tool 20 in the Z-axis direction (that is, in the vertical direction), and applies a pressing load to the semiconductor chip 100.
- the pressurizing mechanism 22 includes a drive motor 30, a slide shaft 32, a leaf spring 34, and a guide member 36.
- the drive motor 30 is a drive source of the pressurizing mechanism 22, for example, a voice coil motor.
- the drive motor 30 has a stator 30a fixed to the moving body 46 and a mover 30b movable in the Z-axis direction with respect to the stator 30a.
- the mover 30b is mechanically connected to the mounting tool 20 via the slide shaft 32.
- the slide shaft 32 is attached to the moving body 46 via a leaf spring 34 that can bend in the Z-axis direction. Further, the guide member 36 is fixed to the moving body 46. The slide shaft 32 is inserted through a through hole formed in the guide member 36, and is slidable along the through hole.
- the mover 30b moves in the Z-axis direction with respect to the moving body 46.
- the mounting tool 20 fixed to the slide shaft 32 and the slide shaft 32 moves in the Z-axis direction together with the mover 30b while elastically deforming the leaf spring 34.
- the amount of displacement of the slide shaft 32 with respect to the stator 30a is detected by a position sensor such as a linear scale 50 fixed to the guide member 36 and sent to the controller 16.
- the elevating mechanism 24 elevates the mounting tool 20 and the pressurizing mechanism 22 with respect to the base member 38 in the Z-axis direction.
- the elevating mechanism 24 has an elevating motor 40 as a drive source.
- a lead screw 42 extending in the axial direction is connected to the elevating motor 40 via a coupling, and the reed screw 42 rotates as the elevating motor 40 is driven.
- a moving block 44 is screwed into the lead screw 42, and the moving block 44 is fixed to the upper surface of the stator 30a of the drive motor 30.
- a moving body 46 is fixed to the side surface of the stator 30a. The moving body 46 is slidable along a guide rail 48 fixed to the base.
- the lead screw 42 rotates on its axis, and the moving block 44 moves up and down in the Z-axis direction accordingly. Then, as the moving block 44 moves up and down, the pressurizing mechanism 22 and the mounting tool 20 fixed to the moving block 44 also move up and down.
- the amount of elevation of the pressurizing mechanism 22 by the elevating mechanism 24 is also detected by a sensor (for example, an encoder attached to the elevating motor 40) and sent to the controller 16.
- the controller 16 controls the drive of the mounting tool 20, the pressurizing mechanism 22, the elevating mechanism 24, the stage 12, and the XY stage 18.
- the controller 16 is physically a computer having a processor 16a and a memory 16b.
- This "computer” also includes a microcontroller that incorporates a computer system into an integrated circuit.
- the processor 16a refers to a processor in a broad sense, and is a general-purpose processor (for example, CPU: Central Processing Unit, etc.) or a dedicated processor (for example, GPU: Graphics Processing Unit, ASIC: Application Special Integrated Circuit, FP). Field Processor Gate Array, programmable logic device, etc.) are included.
- the operation of the processor 16a described below may be performed not only by one processor but also by a plurality of processors existing at physically separated positions in cooperation with each other.
- the memory 16b does not have to be a physically single element, and may be composed of a plurality of memories that are physically separated from each other.
- the memory 16b may include at least one of a semiconductor memory (for example, RAM, ROM, solid state drive, etc.) and a magnetic disk (for example, a hard disk drive, etc.).
- the controller 16 When driving the drive motor 30, the controller 16 first acquires the detection value of the linear scale 50 as the detection position Pd in the Z-axis direction of the mounting tool 20, and obtains the differential value of the detection value of the linear scale 50 as the speed detection value. Get as. Then, the controller 16 calculates the speed command value based on the position deviation which is the deviation between the detection position and the command position in the Z-axis direction of the mounting tool 20, and based on the deviation between the speed command value and the speed detection value. A torque command value is calculated, and a current corresponding to the torque command value is applied to the drive motor 30.
- the drive motor 30 is a voice coil motor and outputs a torque proportional to the applied current. Therefore, the current value applied to the drive motor 30 is substantially proportional to the pressing load applied to the semiconductor chip 100. Therefore, in this example, the controller 16 acquires the current value of the drive motor 30 as a parameter indicating the pressing load. Further, the controller 16 sequentially updates the command position used for controlling the drive motor 30 according to the flow of the mounting process, which will be described later.
- FIG. 2 is an image diagram showing how the semiconductor chip 100 is mounted.
- a plurality of electrodes 112 are formed on the upper surface of the substrate 110.
- the semiconductor chip 100 protrudes from the bottom surface of the chip main body 102 and has a plurality of bumps 104 made of a conductive metal such as solder.
- the semiconductor chip 100 is heated in a state where the bump 104 is in contact with the electrode 112 of the substrate 110 to melt the bump 104. Then, by melting the bump 104, the bump 104 and the electrode 112 are coupled.
- a thermosetting resin layer for example, a layer of a non-conductive film, or the like may be further provided on the bottom surface of the chip main body 102.
- the semiconductor chip 100 is continuously pressed even after the bump 104 is melted, the melted bump may be deformed and crushed.
- the bump 104 that is crushed and spreads laterally may cause a short circuit defect with another adjacent bump 104.
- the mounting tool 20 continuously applies a load to the semiconductor chip 100, and the timing at which the mounting tool 20 is subducted above a certain level is detected as the melting timing of the bump 104, and thereafter, the load is applied to the semiconductor chip 100.
- a technique for reducing the load to be applied has been proposed.
- the technique for detecting the subduction of the mounting tool 20 it was not possible to accurately determine whether the subduction was caused by the melting of the bump 104 or the destruction of the bump 104 before melting. ..
- the mounting tool 20 since the mounting tool 20 temporarily sinks significantly, the molten bump 104 may be crushed and spread laterally.
- Patent Document 1 it is determined that the bump 104 has melted if the load detection value by the load detection means provided on the mounting tool 20 decreases below a predetermined position instead of the sinking amount of the mounting tool 20. .. According to such a technique, the sinking of the mounting tool 20 can be suppressed to some extent.
- the mounting tool 20 is not raised or lowered in order to keep the Z-axis direction position of the mounting tool 20 constant from the start of heating until the bump 104 is melted, and the mounting is accompanied by heating. No consideration was given to the thermal expansion of the tool 20.
- the built-in tool heater of the mounting tool 20 raises the temperature in order to heat the semiconductor chip 100.
- the mounting tool 20 thermally expands in the long axis direction as shown by the two-dot chain line in FIG. Therefore, even if the mounting tool 20 is stopped without being raised or lowered, the end surface of the mounting tool 20 is displaced downward due to thermal expansion, and the pressing load increases.
- the pressing load increases, and there is a possibility that the bump 104 before melting may be destroyed or the molten bump 104 may be excessively crushed.
- the pressing load applied to the semiconductor chip 100 is monitored, and the timing at which the pressing load suddenly decreases is detected as the melting timing of the bump 104. Further, in order to prevent the bump 104 from being destroyed before melting, even if the mounting tool 20 thermally expands until the bump 104 is melted, a position deviation which is a deviation between the current position of the mounting tool 20 and the command position. The command position is sequentially updated so that Hereinafter, the flow of mounting the semiconductor chip 100 will be described with reference to FIGS. 3 to 5.
- FIG. 3 is a graph showing changes over time of various parameters when the semiconductor chip 100 is mounted.
- the upper row shows the detected value of the linear scale 50
- the middle row shows the current value of the drive motor 30, and the lower row shows the drive state of the tool heater.
- 4 and 5 are flowcharts showing the flow of a method for manufacturing a semiconductor device.
- the stage 12 aligns horizontally with respect to the mounting tool 20 so that the bump 104 of the semiconductor chip 100 is located directly above the electrode 112 of the substrate 110. ..
- the flowchart of FIG. 4 starts from this state. After that, the controller 16 drives the elevating motor 40 and lowers the mounting tool 20 together with the pressurizing mechanism 22 at high speed (S10). If the semiconductor chip 100 is close to the substrate 110 (Yes in S12) until a slight gap remains between the semiconductor chip 100 and the substrate 110, the controller 16 stops driving the elevating motor 40.
- the time t1 in FIG. 3 indicates the timing when the semiconductor chip 100 is close to the substrate 110.
- the controller 16 drives the drive motor 30 and lowers the mounting tool 20 at a low speed until the bump 104 touches the electrode 112 (S14). Specifically, the controller 16 gradually updates the command position P * input to the drive motor 30 so that the mounting tool 20 gradually approaches the substrate 110 until grounding is detected.
- the grounding timing of the bump 104 may be determined based on the detection position or the current value of the drive motor 30. That is, when the bump 104 touches the electrode 112, the detection position Pd does not change even if the command position P * is updated. Therefore, the timing presented by the change in the detection position Pd may be determined as the ground contact timing.
- the semiconductor chip 100 and the mounting tool 20 receive a reaction force from the substrate 110. Since the drive motor 30 tries to output the torque corresponding to this reaction force, the current value of the drive motor 30 rapidly increases. The timing of this rapid increase in current value may be determined as the grounding timing. In FIG. 3, grounding is detected at time t2.
- Pd is the detection position of the mounting tool 20.
- ⁇ a is the amount of thermal expansion of the mounting tool 20 generated per sampling.
- the coefficient of thermal expansion ⁇ a per sampling is obtained in advance by an experiment or the like. Further, the thermal expansion amount ⁇ a per sampling may be a fixed value, or may be a variable value that changes with the passage of time or a temperature change of the tool heater.
- Pd + ⁇ a is the current position of the mounting tool 20.
- ⁇ P * is a target value of the position deviation ⁇ P, and is a fixed value having a constant value.
- the broken line in FIG. 3 indicates the command position P * used during the first processing.
- the position deviation ⁇ P is always kept constant even if the mounting tool 20 or the semiconductor chip 100 is thermally expanded. be able to. Then, by keeping the position deviation ⁇ P constant, the output torque from the drive motor 30, and by extension, the pressing load of the semiconductor chip 100 can be kept substantially constant. As a result, it is possible to effectively prevent the bump 104 before melting from being destroyed and crushed.
- the controller 16 In parallel with the first process, the controller 16 also monitors the pressing load applied to the semiconductor chip 100 (S22). Since the pressing load is substantially proportional to the current value Id of the drive motor 30, the controller 16 monitors the current value Id of the drive motor 30 as a parameter indicating the pressing load.
- the controller 16 determines that the bump 104 has been melted if the current value Id drops sharply.
- the bump 104 is melted and the reaction force from the semiconductor chip 100 is reduced.
- the mounting tool 20 may be displaced downward by the target value ⁇ P * of the position deviation from the current position (Pd + ⁇ a) so as to reach the command position P *.
- the target value ⁇ P * of the position deviation is set to a sufficiently small value so that the bump 104 is not largely crushed in the displacement at the time of melting the bump 104.
- Pg is the position of the mounting tool 20 when the mounting tool 20 is grounded on the semiconductor chip 100 in a normal temperature state and the gap amount G is a desired value.
- this Pg is referred to as a "standard position”.
- This standard position Pg is a fixed value calculated in advance from the value of the gap amount G, the dimensional value of the semiconductor chip 100, and the like.
- ⁇ g is the amount of thermal expansion of the mounting tool 20 and the semiconductor chip 100. This ⁇ g is a variable value that fluctuates depending on the time and the temperature of the heater.
- the controller 16 turns off the tool heater at an appropriate timing (S26). After that, if a sufficient cooling time has elapsed to cure the bump 104 (Yes in S28), the controller 16 releases the suction of the semiconductor chip 100 and then drives the pressurizing mechanism 22 and the elevating mechanism 24. Raise the mounting tool 20 (S30).
- the timing at which the current value of the drive motor 30, and by extension, the pressing load suddenly drops, is detected as the melting timing of the bump 104.
- the melting timing of the bump 104 can be accurately detected without crushing the melted bump 104.
- the pressing load can be kept constant even if thermal expansion occurs. As a result, an excessive load is applied to the bump 104 before melting, and the bump 104 can be effectively prevented from being destroyed.
- the configuration described so far is an example, and the first command position P * in the vertical direction of the pressurizing mechanism 22 is updated as needed so that the position deviation ⁇ P becomes constant after touchdown until the bump 104 melts.
- Other configurations may be appropriately changed as long as the processing and the detection processing for detecting the timing at which the pressing load is suddenly reduced as the melting timing of the bump 104 are performed.
- the current value of the drive motor 30 has been monitored as a parameter indicating the pressing load, but a load sensor may be provided in the pressurizing mechanism 22 to monitor the detected value of the load sensor. ..
- the value obtained by adding the thermal expansion amount ⁇ a per sampling to the detection position Pd of the mounting tool 20 is treated as the mounting tool 20 and the current position, but the thermal expansion is taken into consideration.
- another value may be used as the current position.
- a profile of the displacement of the mounting tool 20 due to thermal expansion may be acquired in advance by an experiment or the like, and the current position of the mounting tool 20 may be obtained from this profile.
- the drive motor 30 is used as the drive source of the pressurizing mechanism 22, but other drive sources such as a battery cylinder and a hydraulic cylinder may be used.
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Abstract
Description
Claims (6)
- 基板を支持するステージと、
底面にバンプを有するチップを加熱可能に保持する実装ツールと、
前記実装ツールを鉛直方向に移動させて前記チップに荷重を付与する加圧機構と、
前記実装ツールおよび前記加圧機構の駆動を制御するコントローラと、
を備え、前記コントローラは、
前記チップを前記基板に着地させた後、前記バンプが溶融するまで、前記実装ツールで前記チップを加熱するとともに、前記加圧機構の指令位置と現在位置との差である位置偏差が一定となるように、前記加圧機構の鉛直方向の指令位置を随時更新する第一処理と、
前記第一処理と並行して、前記加圧機構による前記チップの押圧荷重を監視し、前記押圧荷重の減少に基づいて、前記バンプの溶融を検出する検出処理と、
を行うように構成されている、ことを特徴とする半導体装置の製造装置。 - 請求項1に記載の半導体装置の製造装置であって、
前記コントローラは、前記検出処理において前記バンプの溶融を検出した時点から後に、前記チップの底面と前記基板との間隙量であるギャップ量が目標値を保つように、前記加圧機構の指令位置を随時更新する第二処理をさらに行う、
ことを特徴とする半導体装置の製造装置。 - 請求項1に記載の半導体装置の製造装置であって、
前記加圧機構は、前記実装ツールを鉛直方向に移動させる駆動モータを有しており、
前記コントローラは、前記検出処理において前記駆動モータの電流値を、前記押圧荷重を示すパラメータとして監視する、
ことを特徴とする半導体装置の製造装置。 - 請求項1から3のいずれか1項に記載の半導体装置の製造装置であって、
前記コントローラは、前記第一処理において、前記実装ツールの現在位置から、位置偏差の目標値を減算した値を、前記加圧機構の指令位置として算出する、ことを特徴とする半導体装置の製造装置。 - 半導体装置の製造方法であって、
実装ツールで保持されたチップをステージで支持された基板に接地させた後、前記チップの底面に設けられたバンプが溶融するまで、前記実装ツールで前記チップを加熱するとともに、前記実装ツールを鉛直方向に移動させる加圧機構の指令位置と現在位置との差である位置偏差が一定となるように、前記加圧機構の鉛直方向の指令位置を随時更新する第一ステップと、
前記第一ステップと並行して、前記加圧機構による前記チップの押圧荷重を監視し、前記押圧荷重の減少に基づいて、前記バンプの溶融を検出する検出ステップと、
を備えることを特徴とする半導体装置の製造方法。 - 請求項5に記載の半導体装置の製造方法であって、さらに、
前記検出ステップにおいて前記バンプの溶融を検出した時点から後に、前記チップの底面と前記基板との間隙量であるギャップ量が目標値を保つように、前記加圧機構の指令位置を随時更新する第二ステップを、備える、ことを特徴とする半導体装置の製造方法。
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JP2022531812A JP7320886B2 (ja) | 2020-06-15 | 2021-06-14 | 半導体装置の製造装置および製造方法 |
KR1020227042639A KR20230006011A (ko) | 2020-06-15 | 2021-06-14 | 반도체 장치의 제조장치 및 제조방법 |
CN202180039872.7A CN115699277A (zh) | 2020-06-15 | 2021-06-14 | 半导体装置的制造装置及制造方法 |
US18/009,984 US20230230853A1 (en) | 2020-06-15 | 2021-06-14 | Manufacturing apparatus and manufacturing method of semiconductor device |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH11145197A (ja) * | 1997-11-10 | 1999-05-28 | Matsushita Electric Ind Co Ltd | 半田バンプ付電子部品の熱圧着方法 |
JP2000195907A (ja) * | 1998-12-25 | 2000-07-14 | Matsushita Electric Ind Co Ltd | 部品実装方法と装置 |
JP2003179100A (ja) * | 2001-10-05 | 2003-06-27 | Nec Corp | 電子部品の製造装置および電子部品の製造方法 |
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JPH09153525A (ja) * | 1995-11-30 | 1997-06-10 | Toshiba Corp | ボンディング装置およびボンディング方法 |
TW501242B (en) * | 2000-09-15 | 2002-09-01 | Hitachi Ltd | Semiconductor package and flip chip bonding method of semiconductor package |
JP4260712B2 (ja) * | 2004-09-03 | 2009-04-30 | パナソニック株式会社 | 電子部品実装方法及び装置 |
JPWO2014077044A1 (ja) * | 2012-11-16 | 2017-01-05 | シャープ株式会社 | フリップチップ接合方法、および当該フリップチップ接合方法を含むことを特徴とする固体撮像装置の製造方法 |
US9426898B2 (en) * | 2014-06-30 | 2016-08-23 | Kulicke And Soffa Industries, Inc. | Thermocompression bonders, methods of operating thermocompression bonders, and interconnect methods for fine pitch flip chip assembly |
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- 2021-06-14 JP JP2022531812A patent/JP7320886B2/ja active Active
- 2021-06-14 WO PCT/JP2021/022561 patent/WO2021256433A1/ja active Application Filing
- 2021-06-14 US US18/009,984 patent/US20230230853A1/en active Pending
- 2021-06-14 KR KR1020227042639A patent/KR20230006011A/ko not_active Application Discontinuation
- 2021-06-14 CN CN202180039872.7A patent/CN115699277A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11145197A (ja) * | 1997-11-10 | 1999-05-28 | Matsushita Electric Ind Co Ltd | 半田バンプ付電子部品の熱圧着方法 |
JP2000195907A (ja) * | 1998-12-25 | 2000-07-14 | Matsushita Electric Ind Co Ltd | 部品実装方法と装置 |
JP2003179100A (ja) * | 2001-10-05 | 2003-06-27 | Nec Corp | 電子部品の製造装置および電子部品の製造方法 |
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KR20230006011A (ko) | 2023-01-10 |
TW202213574A (zh) | 2022-04-01 |
JP7320886B2 (ja) | 2023-08-04 |
US20230230853A1 (en) | 2023-07-20 |
CN115699277A (zh) | 2023-02-03 |
TWI801873B (zh) | 2023-05-11 |
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