JP5014151B2 - チップ実装装置およびチップ実装方法 - Google Patents
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- 238000000034 method Methods 0.000 title claims description 35
- 239000000758 substrate Substances 0.000 claims description 122
- 229910000679 solder Inorganic materials 0.000 claims description 62
- 238000002844 melting Methods 0.000 claims description 26
- 230000008018 melting Effects 0.000 claims description 26
- 238000003825 pressing Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 13
- 239000000155 melt Substances 0.000 claims description 7
- 239000002344 surface layer Substances 0.000 claims description 4
- 238000007373 indentation Methods 0.000 claims 1
- 238000007711 solidification Methods 0.000 claims 1
- 230000008023 solidification Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 238000002788 crimping Methods 0.000 description 6
- 230000002706 hydrostatic effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 241001331845 Equus asinus x caballus Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
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- H01L2224/757—Means for aligning
- H01L2224/75743—Suction holding means
- H01L2224/75745—Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
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- H01L2224/759—Means for monitoring the connection process
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8112—Aligning
- H01L2224/81121—Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
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- Wire Bonding (AREA)
- Supply And Installment Of Electrical Components (AREA)
Description
1a:バンプ
2:ツール
3:Z軸送り装置
4:基板保持ステージ
5:基板
5a:電極
6:サーボモータ
7:送り機構
8:スライダー
9:装置フレーム
10:ガイドレール
13:エンコーダ
15:ツールホルダ支持手段
16:ホルダブラケット
17:ツールホルダ
18:静圧空気軸受
19:加圧ポート
20:バランス圧ポート
22:駆動制御手段
23:ツールホルダ位置検出手段
24:チップ吸着孔
25:基板吸着孔
26a,26b:加振器
27a,27b:圧力調整手段
28:加圧ポート圧力制御手段
29:バランス圧ポート圧力制御手段
30:ポンプ
実施例1
図1は、本実施例に係るチップ実装装置を示している。チップ実装装置に備えられたZ軸送り装置3は、装置フレーム9に装着されたサーボモータ6で送り機構(例えば、ボールネジ)を回転させ、これを螺合させたスライダー8を、装置フレーム9に装着されたガイドレール10で案内して昇降させている。Z軸送り装置3は、本発明装置における駆動手段に相当する。
図2から図9に、チップ1の実装におけるツールホルダ支持手段15及びツールホルダ17の一連の昇降(上下動)制御態様が示されている。また、図10に、ツールホルダ支持手段15の高さ位置、ツールホルダ17の位置、ツール2のヒータの通電およびバンプ1aに掛かる荷重のそれぞれのタイミングが示されている。図10において(A)に示すグラフはチップ1の実装におけるホルダ支持手段15の高さ位置を示したものであり、チップ1のバンプ1aの下端部が基板5の電極5aに当接した位置を基準高さ(図10のh0)としている。図10において(B)に示すグラフは、ツールホルダ支持手段15の内部のツールホルダ17の位置を示したものであり、ツールホルダ17の下端がツールホルダ支持手段15に接触した位置を下端としている。図10において(C)に示すグラフは、ツール2のヒータ通電のON−OFFのタイミングを示している。図10において(D)に示すグラフは、チップ1のバンプ1aおよび基板の電極5aにかかる荷重(加圧力)を示している。
本実施例では、基板保持ステージ4の構成が上記実施例1と異なるので、同じ構成部分には同一符号を付すことにより説明を省略し、異なる部分について具体的に説明する。
本実施例は、実施例1のバンプ1aの溶融時間を計測した後に実装するようにしたものである。まず、実施例1の図10のタイミングチャートに示されるバンプ1aの溶融時間(t2からt4までの時間)を生産開始時に測定する。バンプ1aの溶融時間は、バンプ1aの生産ロット等により半田バンプの融点温度が変化するため微妙に違っている。そのため、実装対象となるチップ1の型式変更時など初めての生産(実装作業の初めの生産)時に、半田バンプ溶融時間を計測する。計測された溶融時間(図15のタイミングチャートに示すTmelt)は、駆動制御手段22に記憶され、以後のチップ実装生産において溶融監視タイマーとして動作する。
Claims (8)
- チップに加圧力を与えるツールと、前記ツールが装着されたツールホルダと、前記ツールホルダを上下動可能に支持するツールホルダ支持手段と、前記ツールホルダ支持手段を上下動させる駆動手段と、前記ツールホルダ支持手段に対するツールホルダの相対的な位置を検出するツールホルダ位置検出手段とを備えたチップ実装装置において、前記ツールとチップとが重なって基板に接触しているときの前記ツールホルダの位置に基づいて、前記ツールの高さと前記加圧力とを制御する駆動制御手段を備えたことを特徴とするチップ実装装置。
- 前記駆動制御手段は、チップと基板が当接したときの前記チップと前記基板との間隔のパラメータと、前記チップを前記基板に押し込む際の押し込み量のパラメータと、前記ツールホルダ位置検出手段により検出された前記ツールホルダの相対的な位置のパラメータとから、前記ツールホルダの引き上げ量を演算し制御する手段を備えている、請求項1に記載のチップ実装装置。
- 基板保持ステージに保持されている基板の上方から、ツールホルダ支持手段により上下動可能に支持されたツールホルダを降下させ、前記ツールホルダに装着されたツールを介してチップに加圧力を与えることにより、前記チップのバンプを前記基板上の電極に圧着し、接合するチップ実装方法において、前記ツールを降下させて前記チップのバンプを所定の加圧力で前記基板の電極に押圧し、ツールホルダのツールホルダ支持手段に対する相対的な位置をツールホルダ位置検出手段によって検出し、前記ツールのヒータに通電して半田からなる前記チップのバンプを半田の融点以上の温度に加熱し、前記ツールホルダ位置検出手段により検出した前記ツールホルダの相対的な位置が所定値に到達したならば前記チップのバンプが溶融したと判断し、しかる後に前記ツールホルダ支持手段を上昇させることを特徴とするチップ実装方法。
- 前記チップのバンプが溶融した後、前記チップのバンプと前記基板の電極との間に相対的な摩擦を発生させ、該摩擦により半田の表層の酸化膜を破壊して除去する、請求項3に記載のチップ実装方法。
- 前記チップのバンプが溶融する時の前記チップの加圧力を、流動化した半田の内部の圧力よりも低い圧力として、前記チップのバンプを前記基板上の電極に接合する、請求項3に記載のチップ実装方法。
- 前記ツールホルダ位置検出手段により、チップのバンプと基板の電極が当接したときのツールホルダの第1の位置を検出し、次にツールを基板に押し込んだときのツールホルダの第2の位置を検出し、次にツールのヒータに通電してツールを加熱したときのツールホルダの第3の位置を検出し、次いで、前記ツールホルダ位置検出手段によって検出されるツールホルダの位置が第4の位置に到達したならばチップのバンプが溶融したと判断し、ツールホルダが前記第1の位置になるまで前記ツールホルダ支持手段を引き上げ、チップと基板との間隔を一定間隔に保持して半田を固化させる、請求項3に記載のチップ実装方法。
- 予め設定したチップのバンプが固化したときのチップと基板との間隔と、チップのバンプと基板の電極が当接したときのチップと基板との間隔と、ツールを基板側に押し込んだときの押し込み量と、前記ツールホルダの第1の位置と、前記ツールホルダの第2の位置と、前記ツールホルダの第3の位置と、前記ツールホルダの第4の位置とから、半田固化時のツールホルダの引き上げ量を求める、請求項6に記載のチップ実装方法。
- ツールのヒータに通電してツールを加熱してからチップのバンプが溶融するまでの時間を予め計測し、前記計測した時間内でバンプの溶融時のツールの高さに到達しない場合、上部ヒータ又は下部ヒータの温度設定を上昇させ半田を溶融させる、請求項6に記載のチップ実装方法。
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JP2007549089A JP5014151B2 (ja) | 2005-12-06 | 2006-11-30 | チップ実装装置およびチップ実装方法 |
PCT/JP2006/323888 WO2007066559A1 (ja) | 2005-12-06 | 2006-11-30 | チップ実装装置およびチップ実装方法 |
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JP5014151B2 true JP5014151B2 (ja) | 2012-08-29 |
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US (1) | US20090289098A1 (ja) |
JP (1) | JP5014151B2 (ja) |
KR (1) | KR101260550B1 (ja) |
TW (1) | TWI412089B (ja) |
WO (1) | WO2007066559A1 (ja) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100909093B1 (ko) | 2008-02-01 | 2009-07-23 | 경희대학교 산학협력단 | 레이저 다이오드 칩의 수동형 접착 장치 |
JP5801526B2 (ja) * | 2008-07-30 | 2015-10-28 | 東レエンジニアリング株式会社 | チップ実装装置 |
FR2937216B1 (fr) * | 2008-10-10 | 2010-12-31 | Valeo Etudes Electroniques | Procede et dispositif d'assemblage d'une pastille sur un substrat par apport d'une masse formant brasure. |
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US8651159B2 (en) * | 2009-06-12 | 2014-02-18 | Asm Assembly Automation Ltd | Die bonder providing a large bonding force |
KR101047033B1 (ko) * | 2009-07-23 | 2011-07-06 | (주) 에스에스피 | 공정거리 설정이 편리한 자동화 조립장비 및 이를 이용한 공정거리 설정방법 |
JP5173029B2 (ja) * | 2009-09-17 | 2013-03-27 | 株式会社東芝 | 電子機器 |
JP4880055B2 (ja) * | 2010-06-04 | 2012-02-22 | 株式会社新川 | 電子部品実装装置及びその方法 |
JP5565966B2 (ja) * | 2011-01-26 | 2014-08-06 | パナソニック株式会社 | 部品実装方法および部品実装装置 |
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KR101270670B1 (ko) * | 2011-05-26 | 2013-06-03 | (주)케이티엠 | 슬로팅 머신의 램 자동 유압 클램프장치 |
JP2013026268A (ja) * | 2011-07-15 | 2013-02-04 | Hitachi High-Tech Instruments Co Ltd | 2軸駆動機構及びダイボンダ |
JP5768677B2 (ja) * | 2011-11-22 | 2015-08-26 | 株式会社デンソー | バンプ接合構造体の製造方法 |
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JP2015062211A (ja) * | 2013-09-23 | 2015-04-02 | 日本電産リード株式会社 | 接触装置 |
US9165902B2 (en) * | 2013-12-17 | 2015-10-20 | Kulicke And Soffa Industries, Inc. | Methods of operating bonding machines for bonding semiconductor elements, and bonding machines |
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KR20160048301A (ko) * | 2014-10-23 | 2016-05-04 | 삼성전자주식회사 | 본딩 장치 및 그를 포함하는 기판 제조 설비 |
JP6581389B2 (ja) * | 2015-05-12 | 2019-09-25 | 東芝メモリ株式会社 | 半導体装置の製造装置及び製造方法 |
US9929121B2 (en) | 2015-08-31 | 2018-03-27 | Kulicke And Soffa Industries, Inc. | Bonding machines for bonding semiconductor elements, methods of operating bonding machines, and techniques for improving UPH on such bonding machines |
JP6598635B2 (ja) * | 2015-10-29 | 2019-10-30 | 東京エレクトロン株式会社 | 基板押圧機構および接合装置 |
JP6345819B2 (ja) * | 2017-02-07 | 2018-06-20 | 東レエンジニアリング株式会社 | チップ実装装置 |
CN108511381B (zh) * | 2017-02-28 | 2023-05-23 | 韩美半导体株式会社 | 接合设备及其控制方法 |
KR102075198B1 (ko) * | 2017-03-24 | 2020-02-07 | 한미반도체 주식회사 | 본딩장치 및 이의 제어방법 |
JP6636567B2 (ja) * | 2018-05-23 | 2020-01-29 | 東レエンジニアリング株式会社 | チップ実装装置 |
CN115971633A (zh) * | 2018-11-28 | 2023-04-18 | 库利克和索夫工业公司 | 超声焊接***及其使用方法 |
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DE102020007235A1 (de) * | 2020-11-26 | 2022-06-02 | Mühlbauer Gmbh & Co. Kg | Thermokompressionsvorrichtung und Verfahren zum Verbinden von elektrischen Bauteilen mit einem Substrat |
CN114466526A (zh) * | 2021-11-02 | 2022-05-10 | 深圳市智链信息技术有限公司 | 一种无线接收信号放大器的芯片固定装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003179100A (ja) * | 2001-10-05 | 2003-06-27 | Nec Corp | 電子部品の製造装置および電子部品の製造方法 |
JP2005209833A (ja) * | 2004-01-22 | 2005-08-04 | Sony Corp | 半導体装置の製造方法 |
Family Cites Families (2)
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JP4577941B2 (ja) * | 1999-04-05 | 2010-11-10 | 東レエンジニアリング株式会社 | チップ実装方法及びその装置 |
KR20030046306A (ko) * | 2001-12-05 | 2003-06-12 | 에섹 트레이딩 에스에이 | 반도체 칩을 설치하기 위한 장치 |
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US20090289098A1 (en) | 2009-11-26 |
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