WO2011151996A1 - プラズマ処理装置及びプラズマ処理方法 - Google Patents
プラズマ処理装置及びプラズマ処理方法 Download PDFInfo
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- WO2011151996A1 WO2011151996A1 PCT/JP2011/002909 JP2011002909W WO2011151996A1 WO 2011151996 A1 WO2011151996 A1 WO 2011151996A1 JP 2011002909 W JP2011002909 W JP 2011002909W WO 2011151996 A1 WO2011151996 A1 WO 2011151996A1
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- tray
- wafer
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- plasma processing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B44—DECORATIVE ARTS
- B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
- B44C1/00—Processes, not specifically provided for elsewhere, for producing decorative surface effects
- B44C1/22—Removing surface-material, e.g. by engraving, by etching
- B44C1/227—Removing surface-material, e.g. by engraving, by etching by etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/32779—Continuous moving of batches of workpieces
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/973—Substrate orientation
Definitions
- the present invention relates to a plasma processing apparatus such as a dry etching apparatus or a CVD apparatus.
- a wafer as a processing target is supported on a support table called a susceptor provided in a chamber.
- a high frequency voltage is applied to the sealed chamber and a plasma generating gas is supplied to generate plasma in the chamber.
- plasma processing such as dry etching.
- a tray that can accommodate a plurality of wafers is used (for example, Patent Document 1).
- the tray includes a plurality of receiving holes having a slightly larger diameter than the wafer.
- a wafer is accommodated in each accommodation hole.
- the tray containing the wafer is transported by the transport mechanism and supported by the support base.
- Each wafer in the tray is electrostatically adsorbed via the tray by an electrostatic adsorption device provided in the support table.
- each wafer is cooled by a cooling gas (for example, helium gas) supplied via a tray from a cooling gas supply line provided inside the support base.
- a cooling gas for example, helium gas
- the conventional plasma processing apparatus configured to collectively support a plurality of wafers on the support base by the tray having the accommodation holes, whether or not the wafers are properly accommodated in the individual accommodation holes is determined. is important. That is, when the wafer accommodated in the accommodation hole of the tray runs on the inner edge of the accommodation hole and is displaced, the cooling gas for cooling the wafer does not sufficiently reach the lower surface of the wafer. As a result, the wafer may be exposed to high-temperature plasma in an insufficiently cooled state, thereby causing so-called resist burning.
- an object of the present invention is to prevent the plasma processing from being executed in a state where the wafer is displaced with respect to the tray receiving hole.
- a stock unit for supplying and collecting a transportable tray containing a wafer in each of a plurality of receiving holes, and the wafer contained in the tray supplied from the stock unit.
- a processing unit that performs plasma processing, a table on which the tray before the plasma processing is mounted, an alignment unit that positions the wafer on the table, and a table on the alignment unit.
- a plasma processing apparatus comprising: a storage state detection unit configured to detect whether or not a wafer stored in each storage hole of the tray placed is displaced relative to a corresponding storage hole. I will provide a.
- the transport mechanism that transports the tray, and the storage state detection unit causes a positional shift in the wafer in the storage hole in one of the trays placed on the table.
- the image forming apparatus further includes a conveyance control unit that returns the tray on the table to the processing unit without conveying the tray to the processing unit by the conveyance mechanism.
- the tray Before the plasma processing in the processing unit, the tray is placed on the alignment unit table for positioning. With respect to the tray on the table, the accommodation state detection unit detects whether or not the wafer in each accommodation hole has been displaced. As a result, when there is an accommodation hole in which the wafer is displaced among the plurality of accommodation holes provided in the tray, the tray can be prevented from being subjected to plasma processing in the processing unit.
- the accommodation state detection unit detects the height at the target point on the wafer side of the surface of each wafer accommodated in the plurality of accommodation holes provided in the tray placed on the table. And the height of the surface of the wafer at the wafer-side target point detected by the height detection unit, it is determined whether each wafer is misaligned with respect to the corresponding accommodation hole. A determination unit to perform.
- the height detection unit further detects the height of the surface of the tray at the tray side target point facing the wafer side target point across the hole edge of the accommodation hole, and the determination unit Based on the comparison between the height of the surface of the wafer at the measurement point on the wafer side and the height of the surface of the tray at the target point on the tray, whether or not each wafer is misaligned with respect to the corresponding accommodation hole Judgment is made.
- the wafer position shift can be executed with high accuracy by comparing the height of the wafer surface at the wafer-side measurement point with the height of the tray surface at the tray-side target point.
- the determination unit further determines whether or not the wafer is present in each accommodation hole based on the height of the wafer-side target point detected by the height detection unit.
- the accommodation state detection unit is based on an imaging unit that images each wafer accommodated in the plurality of accommodation holes provided in the tray placed on the table from above, and an image obtained by the imaging unit.
- a determination unit that determines whether or not each wafer is displaced with respect to the corresponding accommodation hole may be provided.
- the determination unit further determines whether or not the wafer exists in each accommodation hole based on an image obtained by the imaging unit.
- the table may be a rotary table that rotates the tray in a horizontal plane. In this case, whether the accommodation state detection unit is misaligned with respect to the corresponding accommodation hole of each of the wafers accommodated in the plurality of accommodation holes provided in the tray during the rotation of the tray by the rotary table. Detect whether or not.
- the height of the plurality of receiving holes by the single height detecting unit with the fixed orientation of the wafer presence / absence detecting unit or the detection of the plurality of receiving holes by the single imaging unit with a fixed field of view Wafer image acquisition is possible.
- the plasma processing apparatus may further include an alarm generation unit that generates an alarm when the accommodation state detection unit detects that the wafer in any of the accommodation holes of the tray is displaced.
- a tray in which a wafer is accommodated in each of a plurality of accommodation holes is transported from a stock portion to an alignment portion and placed on a table, and each of the trays on the table in the alignment portion is accommodated.
- the accommodation state of the wafer in the hole is detected, and if the wafer is accommodated in all the accommodation holes of the tray on the table without causing a positional shift, the tray is moved from the alignment unit to the processing unit.
- Plasma processing is performed by transferring the tray to the stock section from the alignment section if the wafer in any of the receiving holes of the tray on the table is displaced.
- each wafer accommodated in the plurality of accommodation holes provided in the tray is displaced relative to the corresponding accommodation hole. It is designed to detect whether or not it has occurred. If there is a wafer that is displaced relative to the corresponding accommodation hole, the tray can be returned to the stock unit without being transferred to the processing unit. As a result, the wafer is not exposed to high-temperature plasma in a state of insufficient cooling due to the positional deviation with respect to the accommodation hole, and it is possible to prevent resist burning on the wafer.
- the perspective view of the plasma processing apparatus in Embodiment 1 of this invention. 1 is a cross-sectional plan view of a plasma processing apparatus in Embodiment 1 of the present invention.
- 1 is a cross-sectional side view of a plasma processing apparatus in Embodiment 1 of the present invention.
- 1 is a cross-sectional side view of a plasma processing apparatus in Embodiment 1 of the present invention.
- FIG 3 is a cross-sectional perspective view of an alignment chamber provided in the plasma processing apparatus in Embodiment 1 of the present invention. Explanatory drawing of operation
- the sectional side view of the susceptor in the process chamber with which the plasma processing apparatus in Embodiment 1 of this invention is provided.
- the figure which shows the procedure which mounts a tray on the susceptor in the process chamber with which the plasma processing apparatus in Embodiment 1 of this invention is provided.
- the figure which shows the procedure which mounts a tray on the susceptor in the process chamber with which the plasma processing apparatus in Embodiment 1 of this invention is provided.
- the figure which shows the procedure which mounts a tray on the susceptor in the process chamber with which the plasma processing apparatus in Embodiment 1 of this invention is provided.
- the figure which shows the procedure which mounts a tray on the susceptor in the process chamber with which the plasma processing apparatus in Embodiment 1 of this invention is provided.
- the figure which shows the procedure which mounts a tray on the susceptor in the process chamber with which the plasma processing apparatus in Embodiment 1 of this invention is provided.
- the figure which shows the procedure which mounts a tray on the susceptor in the process chamber with which the plasma processing apparatus in Embodiment 1 of this invention is provided.
- the sectional side view of the plasma processing apparatus in Embodiment 1 of this invention The cross-sectional perspective view of the alignment chamber with which the plasma processing apparatus in Embodiment 2 of this invention is provided.
- the figure which shows the positional relationship of the height detection sensor and tray in an alignment chamber with which the plasma processing apparatus in Embodiment 2 of this invention is provided.
- the figure which shows the positional relationship of the height detection sensor and tray in an alignment chamber with which the plasma processing apparatus in Embodiment 3 of this invention is provided.
- the figure which shows the positional relationship of the height detection sensor and tray in an alignment chamber with which the plasma processing apparatus in Embodiment 4 of this invention is provided.
- the figure which shows the positional relationship of the height detection sensor and tray in an alignment chamber with which the plasma processing apparatus in Embodiment 5 of this invention is provided.
- the figure which shows the positional relationship of the camera and tray in an alignment chamber with which the plasma processing apparatus in Embodiment 6 of this invention is provided.
- a plasma processing apparatus 1 performs plasma processing (for example, dry etching) on a processing object, and includes a stock unit 2, a transfer chamber (transfer unit) 3. , An alignment chamber (alignment unit) 4, a processing chamber (processing unit) 5, and a control device 6 (FIGS. 1 and 3).
- 3 is a cross-sectional view taken along the line AA in FIG. 2
- FIG. 4 is a cross-sectional view taken along the line BB in FIG.
- a transportable tray 7 as shown in FIGS. 5A and 5B is used so that a plurality of wafers W as processing objects can be processed simultaneously.
- the tray 7 is a thin disk-shaped member, and is formed from an electrically insulating material such as a ceramic material.
- the tray 7 is provided with a plurality (seven in this case) of circular accommodation holes 7 a that are provided so as to penetrate in the thickness direction and have a slightly larger diameter than the wafer W.
- a ring-shaped projecting portion 7b projecting inward of the housing hole 7a is provided at the lower edge portion of the inner peripheral portion of each housing hole 7a.
- the overhang portion 7b supports the outer edge of the lower surface of the wafer W accommodated in the accommodation hole 7a.
- the tray 7 in this embodiment accommodates one wafer W in one accommodation hole 7a arranged at the center position of the tray 7. Further, six wafers W can be accommodated in the six accommodation holes 7 a arranged so that the centers are arranged at equal intervals on the virtual circle CL centered on the center position of the tray 7.
- the stock unit 2 of the plasma processing apparatus 1 includes a plurality of trays 7 (wafers W in each of the plurality of receiving holes 7 a provided in each tray 7). And a cassette 21 that can be taken out and stored.
- the cassette 21 can be accessed from the outside through an opening / closing door 22 provided in the stock unit 2.
- the transfer chamber 3 is provided adjacent to the stock unit 2, and a transfer mechanism 30 for transferring the tray 7 is accommodated therein.
- the transport mechanism 30 includes a transport arm 31.
- the transfer arm 31 has two parallel protrusions 31a and has a “U” shape in a plan view, and is attached to a horizontal movement mechanism 33 provided on an upper portion of a rotary shaft 32 that is rotatable about a vertical axis. It has been.
- the horizontal movement mechanism 33 is fixed to the upper end portion of the rotating shaft 32 and extends in a horizontal plane direction, and the base stage 33 a extends in a direction in which the base stage 33 a extends.
- a lower stage 33b provided movably and an upper stage 33c provided movably in the extending direction of the base stage 33a with respect to the lower stage 33b.
- the transfer arm 31 is attached to the upper stage 33c in a state in which the extending direction of the two protrusions 31a coincides with the extending direction of the base stage 33a.
- the transport arm 31 rotates in the horizontal plane by the rotation of the rotary shaft 32, and the upper stage 33c moves in the lower stage 33b in conjunction with the lower stage 33b of the horizontal movement mechanism 33 moving in the horizontal plane with respect to the base stage 33a. Move in the horizontal plane by moving in the horizontal plane.
- the rotation operation (rotation operation of the rotation shaft 32) of the transfer arm 31 in the horizontal plane is performed by the control device 6 performing operation control of the rotation shaft drive motor 32a (FIGS. 3, 4, and 6). Further, the movement operation of the transfer arm 31 in the horizontal plane (the movement operation of the lower stage 33b in the horizontal plane direction relative to the base stage 33a and the movement operation in the horizontal plane direction of the lower stage 33b of the upper stage 33c) is performed by the control device 6. Is performed by controlling the operation of a horizontal movement mechanism drive unit 33 d (FIG. 6) provided in the horizontal movement mechanism 33.
- control device 6 rotates the transfer arm 31 in the horizontal plane and moves the transfer arm 31 in the horizontal plane, thereby transferring the tray 7 in the stock unit 2 to the alignment chamber 4 and the tray 7 in the alignment chamber 4.
- Transport to the processing chamber 5, transport of the tray 7 in the processing chamber 5 to the alignment chamber 4, and transport of the tray 7 in the alignment chamber 4 to the stock unit 2 are performed.
- the alignment chamber 4 is provided adjacent to the transfer chamber 3.
- the alignment chamber 4 includes a rotary table 41, a centering mechanism 42, and a transmission type optical sensor (an optical sensor in which the light receiver directly receives the inspection light projected by the light projector).
- a temporary table 45 is provided.
- the rotary table 41 is provided so as to be rotatable in a horizontal plane with respect to the bottom plate portion 4 a of the alignment chamber 4, and the tray supplied from the stock unit 2 by the transfer arm 31 in the transfer chamber 3. 7 (wafer W is accommodated in each accommodation hole 7a of this tray 7) is placed.
- the rotary table 41 is rotated by the operation of a rotary table drive motor 46 (FIGS. 4 and 6) provided below the bottom plate portion 4a, whereby the tray 7 on the rotary table 41 rotates in a horizontal plane.
- a rotary table drive motor 46 (FIGS. 4 and 6) provided below the bottom plate portion 4a, whereby the tray 7 on the rotary table 41 rotates in a horizontal plane.
- the centering mechanism 42 is provided on the bottom plate portion 4a of the alignment chamber 4 so as to be close to or separated from each other on the same axis in the horizontal plane.
- a total of four abutting members 42c are provided on each lateral member 42b.
- the approaching or separating operation of the pair of longitudinal members 42a (that is, the approaching or separating operation of the pair of transverse members 42b) is performed by the control device 6 provided with a centering mechanism driving unit provided between the pair of longitudinal members 42a. This is done by performing the operation control of 42d.
- the control device 6 moves the transfer arm 31 in the transfer chamber 3 in the horizontal plane, and places the tray 7 on the rotary table 41 by the transfer arm 31. Thereafter, the control device 6 controls the operation of the centering mechanism drive unit 42d to operate the pair of longitudinal members 42a (and thus the pair of lateral members 42b) close to each other (arrow A shown in FIG. 8). ) A total of four contact members 42c erected on the pair of lateral members 42b are brought into contact with the outer edge of the tray 7 to sandwich the tray 7 (see the contact member 42c shown by a solid line in FIG. 8). As a result, the tray 7 on the turntable 41 moves to a position where the center position ct (FIG. 8) of the tray 7 coincides with the center position CT (FIG. 8) of the turntable 41, and the center position alignment ( Centering) is performed.
- the control device 6 controls the operation of the centering mechanism drive unit 42d to operate the pair of longitudinal members 42a (and thus the pair of lateral members 42b) apart from each other. Let As a result, the four contact members 42 c are separated from the tray 7, and the tray 7 can be rotated by the rotation operation of the rotary table 41.
- the outer edge of the rotary table 41 is set within the inner region of the virtual circle CL of the tray 7. .
- the notch detection sensor 43 is provided on the ceiling portion 4b (FIGS. 4 and 7) of the alignment chamber 4 and projects the inspection light L1 downward, and is directly below the projector HS. And a light receiver JS provided on the bottom plate portion 4a.
- the ceiling portion 4b of the alignment chamber 4 is made of a transparent member such as an acrylic plate, and the notch detection sensor 43 is provided on the upper surface side of the ceiling portion 4b and is projected from the projector HS.
- the light L1 passes through the ceiling portion 4b and is irradiated downward.
- the projector HS of the notch detection sensor 43 may be provided on the lower surface side of the ceiling portion 4b (the same applies to the four height detection sensors 44A to 44D).
- the projector HS of the notch detection sensor 43 is configured such that when the tray 7 centered by the centering mechanism 42 is rotated by the rotary table 41, the inspection light L ⁇ b> 1 projected by the projector HS is a part of the outer edge of the tray 7. It arrange
- the light receiver JS of the notch detection sensor 43 is disposed at a position where the inspection light L1 projected by the projector HS can receive the inspection light L1 when passing through the notch 7c in the vertical direction.
- the notch detection sensor 43 is inspected by the light receiver JS while projecting the inspection light L1 from the projector HS while the rotary table 41 on which the tray 7 is placed is rotated (arrow B shown in FIG. 9). By observing the light receiving state of the light L1, the position of the notch 7c of the tray 7 can be detected.
- the alignment processing unit 6a (FIG. 6) of the control device 6 sets the rotation angle of the tray 7 (the rotation angle around the rotation axis of the rotary table 41) at which the position of the notch 7c is detected by the notch detection sensor 43 to 0 degree (the origin position). ).
- the rotation operation of the rotary table 41 in the detection of the notch 7c is performed when the alignment processing unit 6a of the control device 6 controls the operation of the rotary table drive motor 46.
- the notch detection sensor 43 and the alignment processing unit 6a of the control device 6 constitute a rotation direction positioning unit that positions the tray 7 in the rotation direction while rotating the tray 7 by the rotation table 41.
- the rotation direction positioning portion and the above-described centering mechanism 42 constitute a tray positioning portion that positions the tray 7 with respect to the table (rotary table 41) in the alignment chamber 4.
- the alignment chamber 4 is provided with four height detection sensors 44A to 44D as described above.
- These height detection sensors 44A to 44D include an irradiation unit that irradiates inspection light L2 such as a laser beam toward the height detection target point, and a light receiving unit that detects the position of the inspection light reflected from the height detection target point. Then, the height of the height detection target point is measured from the position of the reflected inspection light L2 by the principle of triangulation.
- Each of the four height detection sensors 44A to 44D detects whether or not the wafer W accommodated in the seven accommodating holes 7a provided in the tray 7 has run over the corresponding edge of the accommodating hole 7a and is displaced. Is for.
- each of the four height detection sensors 44A to 44D inspects the wafer W accommodated in each accommodation hole 7a of the tray 7 on the rotary table 41 or the surface of the tray 7 in the vicinity of the accommodation hole 7a.
- the light L2 is irradiated, and the height of the height detection target point on the surface of the wafer W or the tray 7 is detected based on the reflected light of the inspection light L2 on the surface of the wafer W or the tray 7.
- the inspection light L2 irradiated by each of the height detection sensors 44A to 44D and the reflected light of the inspection light L2 from the wafer W or the tray 7 are placed on the tray temporary placement table 45.
- through holes 45a are provided at various locations on the temporary tray placement table 45 in the thickness direction.
- these four height detection sensors 44A to 44D are provided side by side on a straight line LL extending in the horizontal plane direction through a position immediately above the center of the rotary table 41.
- the first height detection sensor 44A is inspected on a virtual circle S1 (FIGS. 9 and 10) that is concentric with the accommodation hole 7a provided in the center of the tray 7 and has a slightly smaller radius than the accommodation hole 7a.
- the light L2 is irradiated, and the height of the surface of the wafer W on the virtual circle S1 is detected.
- the direction in which the inspection light L2 is irradiated from the first height detection sensor 44A is fixed. However, as the tray 7 on the rotary table 41 rotates in the horizontal plane, the first height detection sensor 44A detects the height of the surface of the wafer W at a plurality of points on the virtual circle S1.
- the first height detection sensor 44A detects the heights of four height detection target points (wafer side target points) P1, P2, P3, and P4 on the virtual circle S1.
- the height detection target points P1 to P4 are located in the vicinity of the outer edge on the surface of the wafer W, and are arranged at equal angular intervals (90 ° intervals) with respect to the center of the wafer W in plan view.
- the second height detection sensor 44B is concentric with the accommodation hole 7a provided in the center of the tray 7, and is inspected on a virtual circle S2 (FIGS. 9 and 10) having a slightly larger radius than the accommodation hole 7a.
- the light L2 is irradiated, and the height of the surface of the tray 7 on the virtual circle S2 is detected.
- the direction in which the inspection light L2 is irradiated from the second height detection sensor 44B is fixed. However, as the tray 7 on the rotary table 41 rotates in a horizontal plane, the second height inspection sensor 44B detects the height of the surface of the tray 7 at a plurality of points on the virtual circle S2.
- the second height detection sensor 44B detects the heights of four height detection target points (tray side target points) Q1, Q2, Q3, and Q4 on the virtual circle S2.
- the height detection target points Q1 to Q4 are located in the vicinity of the hole edge of the central receiving hole 7a, and are arranged at equiangular intervals (90 ° intervals) with respect to the center of the receiving hole 7a in plan view.
- the positions of the height detection target points Q1 to Q4 are set so as to face each other across the hole edge of the accommodation hole 7a at the center of the height detection target points P1 to P4.
- the third height detection sensor 44 ⁇ / b> C has a virtual circle S ⁇ b> 3 whose radius is slightly larger than a virtual circle SG (FIG. 9) that is in contact with the six accommodation holes 7 a provided side by side in the peripheral position of the tray 7 on the center side of the tray 7. (FIG. 9 and FIG. 10) is irradiated with the inspection light L2, and the height of the surface of the wafer W or the tray 7 on the virtual circle S3 is detected.
- the direction in which the inspection light L2 is irradiated from the third height detection sensor 44C is fixed. However, as the tray 7 on the turntable 41 rotates in the horizontal plane, the third height detection sensor 44C detects the height at a plurality of points on the virtual circle S3.
- the third height detection sensor 44 ⁇ / b> C has two height detection targets near the outer edge on the surface of the wafer W in the accommodation hole 7 a for each of the six accommodation holes 7 a arranged in the peripheral position of the tray 7.
- the heights of the points (wafer side target points) U1, U2 (12 points in total) are detected.
- the third height detection sensor 44C is provided on the surface of the tray 7 facing each other across the height edges of the accommodation holes 7a and the two height detection target points U1, U2 for each of the six accommodation holes 7a.
- the heights of two height detection target points (tray side target points) V1, V2 (12 points in total) are detected.
- the fourth height detection sensor 44 ⁇ / b> D has a virtual circle S ⁇ b> 4 having a slightly smaller radius than the virtual circle SN (FIG. 9) that is in contact with the six receiving holes 7 a provided side by side at the peripheral position of the tray 7 on the outer peripheral side of the tray 7. (FIG. 9 and FIG. 10) is irradiated with the inspection light L2, and the height of the surface of the wafer W or the tray 7 on the virtual circle S4 is detected.
- the direction in which the inspection light L2 is irradiated from the fourth height detection sensor 44D is fixed. However, as the tray 7 on the turntable 41 rotates in the horizontal plane, the fourth height detection sensor 44D detects the height at a plurality of points on the virtual circle S4.
- the fourth height detection sensor 44D includes two height detection objects near the outer edge on the surface of the wafer W in the accommodation hole 7a for each of the six accommodation holes 7a arranged in the peripheral position of the tray 7.
- the heights of the points (wafer side target points) X1, X2 are detected.
- the fourth height detection sensor 44D is arranged on the surface of the tray 7 facing each other with the two height detection target points X1 and X2 and the hole edge of the accommodation hole 7a sandwiched between the six accommodation holes 7a.
- the heights of two height detection target points (tray side target points) Y1, Y2 (12 points in total) are detected.
- the accommodation state determination unit 6b (FIG. 6) of the control device 6 has four sets of height detection target points, that is, height detection target points P1 and Q1 for the wafer W stored in the storage hole 7a in the center of the tray 7.
- the height detection target points P2 and Q2, the height detection target points P3 and Q3, and the height detection target points P4 and Q4 are compared in height.
- the height detection target points P1 to P4 are detected by the first height detection sensor 44A, and the height detection target points Q1 to Q4 are detected by the second height detection sensor 44B.
- the accommodation state determination unit 6b determines the accommodation state of the wafer W in the corresponding accommodation hole 7a.
- the accommodation state determination unit 6b determines whether or not the wafer W is in a state of being tilted by riding on the edge of the accommodation hole 7a of the tray 7, that is, whether or not the wafer W is displaced from the accommodation hole 7a. Judgment is made.
- the accommodation state determination unit 6b is configured to correspond to four sets of height detection target points, that is, height detection target points U1 and V1, for the wafers W accommodated in each of the six accommodation holes 7a in the peripheral position of the tray 7.
- the height detection target points U2 and V2, the height detection target points X1 and Y1, and the height detection target points X2 and Y2 are compared in height.
- the height detection target points U1, U2, V1, and V2 are detected by the third height detection sensor 44C, and the height detection target points X1, X2, Y1, and Y2 are detected by the fourth height detection sensor 44D. .
- the accommodation state determination unit 6b determines whether or not the corresponding accommodation hole 7a of the wafer W is in the opposite accommodation state, that is, whether or not a positional deviation has occurred.
- the determination of the displacement by the accommodation state determination unit 6b is specifically executed as follows.
- the height at the height detection target point on the wafer W is compared with the height at the height detection target point on the tray 7 facing the hole edge of the accommodation hole 7a.
- the heights of height detection target points P1 to P4 on the wafer W are compared with the heights of height detection target points Q1 to Q4 on the tray 7, respectively.
- the height detection target points U1, U2, X1, and X2 on the wafer W and the height detection target points V1, V2, Y1, and Y2 on the tray 7 are displayed. Are compared with each other.
- a difference obtained by subtracting the height of the height detection target points Q1 to Q4 on the tray side from the height of the height detection point targets P1 to P4 on the wafer W side is obtained, and this difference is determined in advance. Whether or not there is a positional deviation is determined based on whether or not it is within the specified range.
- the following criteria can be used instead of or in addition to this criteria.
- variation in the difference between the height detection target points on the tray 7 corresponding to the four height detection target points on one wafer W falls within a predetermined range, It can be considered that the difference with respect to the height of the height detection target point on the tray 7 side corresponding to the height detection target point is substantially the same. In this case, it is determined that the wafer W is not displaced with respect to the corresponding accommodation hole 7a.
- the wafer W is It is determined that a positional shift has occurred with respect to the corresponding accommodation hole 7a.
- the plurality of (here, four) height detection sensors 44A to 44D provided in the plasma processing apparatus 1 according to the first embodiment are provided with the plurality of receiving holes provided in the tray 7 placed on the rotary table 41. It functions as a height detection unit that detects the height of a plurality of locations on the surface of each wafer W accommodated in 7a, and the accommodation state determination unit 6b of the control device 6 includes height detection means (four height detection sensors). 44A to 44D), each wafer W accommodated in the plurality of accommodation holes 7a provided in the tray 7 is positioned with respect to the corresponding accommodation hole 7a based on the heights of the plurality of locations on the surface of each wafer W detected by 44A to 44D).
- the height detection sensors 44A to 44D (height detection unit) and the accommodation state determination unit 6b (determination unit) constitute an accommodation state detection unit in the present invention.
- the rotation of the turntable 41 when the height of the height detection target point is detected is performed by the accommodation state determination unit 6b of the control device 6 performing operation control of the turntable drive motor 46.
- the height detection target points P1 to P3, U1, U2, X1, and X2 of the wafer W are set at positions close to the outer edge on the surface of the wafer W.
- the influence on judgment can be minimized.
- the positional deviation of the wafer W is determined based on the difference between the height detection target point of the wafer W and the corresponding height detection target point of the tray 7. The effects of errors, errors due to the consumption of the tray 7 due to etching, and errors due to warping or deformation of the tray 7 can be eliminated.
- the processing chamber 5 is connected to the transfer chamber 3 via the gate valve 8. When the gate valve 8 is closed, the processing chamber 5 functions as a vacuum container independent of the transfer chamber 3.
- the processing chamber 5 includes a susceptor 51 as a support for supporting the wafer W together with the tray 7 therein, and a plasma processing unit 52 (FIG. 6) for performing plasma processing on the wafer W supported by the susceptor 51. ing.
- the susceptor 51 includes a tray mounting portion 51a and a plurality of wafer support portions 51b provided so as to protrude upward from the tray mounting portion 51a.
- the alignment chamber 4 center alignment of the tray 7 with respect to the rotary table 41 (centering) and positioning in the rotation direction are performed in the alignment chamber 4, and the tray 7 (this is transported by the transport arm 31 in the transport chamber 3).
- a wafer W is accommodated in each accommodation hole 7 a of the tray 7.
- each wafer support portion 51b enters into each accommodation hole 7a of the tray 7 from below to support each wafer W by lifting.
- the susceptor 51 is provided with four elevating pins 54 that move up and down in synchronization with the operation of the elevating pin drive mechanism 53 (FIG. 6) controlled by the control device 6.
- Four elevating pin insertion holes 7d (FIGS. 5A and 5B) provided on the lower surface side of the tray 7 can be fitted into the upper end portions of the four elevating pins 54 from above. With the four elevating pin insertion holes 7d of the tray 7 fitted in the four elevating pins 54 (FIGS. 12A and 13A), the four elevating pins 54 are lowered with respect to the susceptor 51 (FIGS. 12B and 13B). Arrow C) shown in the inside.
- the tray 7 is placed on the tray placing portion 51a, and the wafers W accommodated in the accommodation holes 7a of the tray 7 are placed in the tray 7 by the wafer support portions 51b that enter the respective accommodation holes 7a from below. (FIGS. 12C and 13C).
- the operation of the plasma processing unit 52 is controlled by the control device 6.
- the gas supply source 52 a, the vacuum exhaust device 52 b, the first high-frequency voltage application device 52 c, the DC voltage application device 52 d, and the refrigerant circulation The apparatus 52e, the cooling gas supply apparatus 52f, and the 2nd high frequency voltage application apparatus 52g are provided (FIG. 6).
- the gas supply source 52 a supplies a gas for generating plasma into the processing chamber 5.
- the evacuation device 52b evacuates the gas in the processing chamber 5.
- the first high-frequency voltage application device 52 c applies a high-frequency voltage to the dielectric coil 55 (FIG. 3) provided above the processing chamber 5.
- the DC voltage application device 52d applies a DC voltage to the electrostatic chucking electrode 56 (FIG.
- the refrigerant circulation device 52e circulates the refrigerant whose temperature is adjusted in the refrigerant flow path 57 (FIG. 11B) provided in the susceptor 51.
- the cooling gas supply device 52f cools the wafer W in a cooling gas supply pipe 58 (FIG. 11B, FIG. 13A, FIG. 13B, and FIG. 13C) that is provided in the susceptor 51 and opens on the upper surface of the wafer support 51b.
- a cooling gas (for example, helium gas) is supplied.
- the second high-frequency voltage application device 52 g generates a bias that attracts the plasma generated in the processing chamber 5 to the wafer W side.
- the control device 6 moves the transfer arm 31 so that one of the plurality of trays 7 (wafers W are accommodated in the accommodating holes 7a of the respective trays 7) supplied to the stock unit 2. Is held by the transfer arm 31. Thereafter, the control device 6 operates the transfer arm 31 to move the tray 7 into the alignment chamber 4 (arrow D1 shown in FIG. 14). Further, the control device 6 lowers the transport arm 31 above the rotary table 41 and places the tray 7 on the rotary table 41 (arrow D2 shown in FIG. 14). After placing the tray 7 on the rotary table 41, the control device 6 returns the transfer arm 31 to the transfer chamber 3 (arrow D3 shown in FIG. 14).
- the control device 6 controls the operation of the centering mechanism drive unit 42d to operate the centering mechanism 42, and the tray 7 is moved in the manner described above. Centering is performed (step ST1 shown in FIG. 15). Then, when the centering of the tray 7 is finished, the notch 7c provided in the tray 7 is detected using the notch detection sensor 43 while operating the rotary table 41 and rotating the tray 7 360 degrees or more in the horizontal plane. When the notch 7c is detected, the rotation of the tray 7 (the rotation of the turntable 41) is stopped to grasp the origin position in the rotation direction of the tray 7 (step ST2 shown in FIG. 15).
- control device 6 determines whether or not notch 7c has been successfully detected (step ST3 shown in FIG. 15). As a result, if it is determined that the detection of the notch 7c in step ST2 has failed, an error message is displayed on the display unit (alarm generating unit) 61 (FIG. 6) such as a display device provided in the plasma processing apparatus 1. After the display, a waiting state for returning the tray 7 to the stock unit 2 is entered (step ST4 shown in FIG. 15).
- step ST2 the number of rotations of the rotary table 41 in the detection of the notch 7c in step ST2 is set to a predetermined number of times (for example, three times), and the control device 6 sets the notch 7c until the rotation table 41 is rotated a predetermined number of times. If not detected, detection of the notch 7c has failed and the process proceeds from step ST3 to step ST4.
- step ST3 when the accommodation state determination unit 6b of the control device 6 determines that the detection of the notch 7c is successful in step ST3, the four height detection sensors 44A to 44D rotate the tray 7 from the origin position. In the manner described above, the height of each wafer W accommodated in the plurality of accommodation holes 7a provided in the tray 7 placed on the rotary table 41 and the height detection target point on the surface of the tray 7 is detected. This is performed (step ST5 shown in FIG. 15).
- step ST5 When the accommodation state determination unit 6b of the control device 6 performs the detection in step ST5, the height of each of the height detection target points on the surface of the wafer W and the tray 7 detected by the four height detection sensors 44A to 44D. Based on this data, among the plurality of wafers W accommodated in the plurality of accommodation holes 7a included in the tray 7 placed on the rotary table 41, the wafer W that has been displaced with respect to the corresponding accommodation hole 7a. Whether it exists or not is detected (step ST6 shown in FIG. 15).
- an error message is displayed on the display unit 61 (step ST4 shown in FIG. 15).
- the form of the error message displayed on the display unit 61 may be any character, figure, symbol, lamp lighting, etc., as long as the operator can recognize it.
- Step ST4 a waiting state for returning the tray 7 to the stock unit 2 is entered (FIG. 15).
- the waiting state ends when the conditions for returning the tray 7 to the stock unit 2 are satisfied.
- the control device 6 holds the tray 7 on the rotary stage 41 by the transfer arm 31 of the transfer mechanism 30 and returns it from the alignment chamber 4 to the cassette 21 of the stock unit 2.
- step ST6 among the plurality of wafers W accommodated in the plurality of accommodation holes 7a provided in the tray, a positional deviation is caused with respect to the corresponding accommodation hole 7a. If it is determined that there are no wafers W, a standby state for transferring the tray 7 to the processing chamber 5 is entered (step ST7 shown in FIG. 15), and the processing in the alignment chamber 4 is terminated.
- the plurality of trays 7 are provided at the positioning stage of the tray 7 in the alignment chamber 4 before the plasma processing is performed on the wafer W in the processing chamber 5. It is determined whether or not each wafer W accommodated in the accommodation hole 7a is displaced with respect to the corresponding accommodation hole 7a. As a result, the tray 7 is not transferred to the susceptor 51 in the processing chamber 5 when there is a wafer W that is displaced with respect to the corresponding accommodation hole 7a.
- the control device 6 activates the transfer arm 31 when it enters the standby state of step ST7.
- the tray 7 on the rotary table 41 is held, and the tray 7 is placed on the susceptor 51 of the processing chamber 5 via the transfer chamber 3. This operation is indicated by an arrow E1 in FIG. 16A and an arrow E2 in FIG. 16B.
- the four lifting pin insertion holes 7 d provided on the lower surface side of the tray 7 are connected to the susceptor 51.
- the upper ends of the four lift pins 54 provided are fitted, and the tray 7 is supported by the four lift pins 54.
- the control device 6 moves the transfer arm 31 away from the processing chamber 5 (arrow E3 shown in FIG. 16C). Then, the gate valve 8 provided in the processing chamber 5 is closed, and the processing chamber 5 is sealed.
- the control device 6 controls the operation of the lifting pin drive mechanism 53 to lower the four lifting pins 54.
- the tray 7 is placed on the tray placing portion 51 a of the susceptor 51, and the wafer W accommodated in each accommodation hole 7 a of the tray 7 is placed (supported) on the wafer support portion 51 b of the susceptor 51. (FIG. 16C).
- the control device 6 When the control device 6 places the tray 7 and the wafer W on the susceptor 51, the control device 6 controls the operation of the gas supply source 52 a to supply a gas for generating plasma into the processing chamber 5.
- the DC voltage application device 52d is operated to apply a DC voltage to the electrostatic chucking electrode 56 in the wafer support 51b. As a result, the wafer W on the wafer support 51 b is electrostatically attracted to the electrostatic attracting electrode 56.
- control device 6 When the control device 6 detects that the pressure of the gas for generating plasma supplied into the processing chamber 5 has been adjusted to a predetermined pressure, the control device 6 controls the operation of the first high-frequency voltage application device 52 c to control the dielectric coil 55. A high frequency voltage is applied to. As a result, plasma is generated in the processing chamber 5.
- the control device 6 After each wafer W is held on the wafer support 51b by electrostatic adsorption, the control device 6 operates the cooling gas supply device 52f to cool the lower surface of each wafer support 51b from the cooling gas supply line 58. Fill with gas. Further, the control device 6 controls the operation of the second high-frequency voltage application device 52g so that the plasma in the processing chamber 5 is attracted to the wafer W on the wafer support 51b. Thereby, the wafer processing (etching) for the wafer W is started.
- the controller 6 stops the application of the bias voltage to the electrostatic attraction electrode 56 by the second high-frequency voltage applying device 52g after the predetermined time has elapsed after the plasma processing on the wafer W is started, and the inside of the processing chamber 5 is stopped. The plasma generation is stopped.
- the control device 6 controls the operation of the cooling gas supply device 52f to stop the supply of the cooling gas. After stopping the supply of the cooling gas, the control device 6 stops the supply of the gas from the gas supply source 52a into the processing chamber 5 at the timing when the pressure of the cooling gas on the lower surface of the wafer W is sufficiently lowered, and the first The application of the high frequency voltage to the dielectric coil 55 by the high frequency voltage applying device 52c is stopped.
- the application of the DC voltage to the electrostatic chucking electrode 56 by the DC voltage applying device 52d is stopped, and the electrostatic chucking of the wafer W is released.
- the charge removal process is executed as necessary to remove the static electricity remaining on the wafer W and the tray 7, and the process on the process wafer is terminated.
- the control device 6 discharges the gas in the processing chamber 5 to the outside of the plasma processing device 1 by the vacuum exhaust device 52b and the refrigerant flow path 57 by the refrigerant circulation device 52e.
- the refrigerant circulation operation is always performed.
- the wafer W is cooled through the susceptor 51 by the circulation operation of the refrigerant into the refrigerant flow path 57 by the refrigerant wafer holder 52e, and high plasma processing efficiency is maintained in combination with the cooling of the wafer W through the cooling gas.
- the control device 6 operates the transfer arm 31 while the plasma processing is performed on the wafer W in the processing chamber 5, and the tray that stores the wafer W to be subjected to the plasma processing next. 7 is removed from the stock unit 2 and carried into the alignment chamber 4. In addition, the control device 6 places the tray 7 on the rotary table 41. Thus, while the plasma processing is performed on the wafer W in the processing chamber 5, the center 7 alignment with respect to the rotary table 41 and the positioning in the rotation direction are performed for the tray 7 containing the wafer W to be subjected to the plasma processing next. In addition, the presence / absence detection of the wafer W can be executed.
- the control device 6 When the plasma processing on the wafer W in the processing chamber 5 is completed, the control device 6 operates the lifting pin driving mechanism 53 to raise the four lifting pins 54 and lift and support the tray 7 above the susceptor 51.
- the four elevating pins 54 are inserted from below into elevating pin insertion holes 7d provided on the lower surface side of the tray 7 in the ascending process.
- the control device 6 opens the gate valve 8 and causes the transfer arm 31 to enter the processing chamber 5.
- the control device 6 holds the tray 7 lifted and supported by the lifting pins 54 by the transfer arm 31 and moves it away from the processing chamber 5.
- the tray 5 is placed on the temporary tray placement table 45 in the alignment chamber 4 (FIG. 16D, arrows F1 and F2 shown in the figure).
- the transfer arm 31 transfers the tray 7 on the rotary table 41 (the tray 7 containing the wafer W to be subjected to plasma processing) that has already been centered with respect to the rotary table 41 (centering) and positioned in the rotational direction.
- the control device 6 moves the transfer arm 31 into the alignment chamber 4, and moves the tray 7 ( The tray 7) containing the wafers W that have already been subjected to the plasma processing is held, unloaded from the alignment chamber 4, and returned to the stock unit 2.
- the tray 7 carried out from the processing chamber 5 is once placed on the temporary tray table 45, cooled, and then returned to the stock unit 2. This prevents the wafer W (tray 7), which has become high temperature by the plasma processing, from being returned to the stock unit 2 in a high temperature state. Further, the tray 7 containing the wafer W to be subjected to the plasma processing is taken out from the alignment chamber 4 while the tray 7 containing the wafer W at a high temperature is placed on the tray temporary placement table 45, and the processing chamber is taken out. Carry to 5. As a result, the time required for the entire plasma processing can be shortened and work can be performed efficiently.
- a processing chamber 5 in which plasma processing is performed on the wafer W accommodated in each of the wafers W is provided.
- the plasma processing apparatus 1 also includes a rotary table 41 (table) on which the tray 7 containing the wafers W is placed in the alignment chamber 4 and a tray positioning that positions the tray 7 with respect to the rotary table 41 in the alignment chamber 4.
- Means notch detection sensor 43, alignment processing unit 6a of control device 6 and centering mechanism 42).
- the plasma processing apparatus 1 includes a susceptor 51 (support) that supports the tray 7 in the processing chamber 5, and a plurality of receiving holes 7 a provided in the tray 7 supported by the susceptor 51 in the processing chamber 5. And a plasma processing unit 52 as plasma processing means for performing plasma processing on the wafer W. Furthermore, the plasma processing apparatus 1 includes a transfer arm 31 as a transfer unit that transfers the tray 7 positioned by the tray positioning unit from the rotary table 41 of the alignment chamber 4 to the susceptor 51 in the process chamber 5, and the alignment chamber 4. A displacement detection for detecting whether or not each wafer W accommodated in the plurality of accommodation holes 7a included in the tray 7 mounted on the rotary table 41 is displaced relative to the corresponding accommodation hole 7a.
- Four height detection sensors 44A to 44D as means and an accommodation state determination unit 6b of the control device 6 are provided.
- the plurality of receiving holes 7 a included in the tray 7 are provided in the positioning stage of the tray 7 in the alignment chamber 4 before the plasma processing is performed on the wafer W in the processing chamber 5. It is detected whether or not each accommodated wafer W is displaced relative to the corresponding accommodation hole 7a. As a result, when there is a wafer W that is displaced with respect to the corresponding accommodation hole 7 a, the tray 7 is not transferred to the susceptor 51 in the processing chamber 5. Therefore, the wafer W is not exposed to high-temperature plasma in a state of insufficient cooling due to the positional displacement of the wafer W with respect to the accommodation hole 7a and the cooling gas not sufficiently spreading to the lower surface of the wafer W. Therefore, resist baking can be prevented from occurring on the wafer W due to insufficient cooling due to the positional deviation with respect to the accommodation hole 7a.
- misalignment detection means for detecting misalignment of the wafer W in the alignment chamber 4
- the plasma processing apparatus 1 can be reduced in size and positioned during the tray 7 positioning operation performed in the alignment chamber 4. Deviation detection can be performed.
- the accommodation state detection unit includes a plurality of locations on the surface of each wafer W accommodated in the plurality of accommodation holes 7 a provided in the tray 7 placed on the rotary table 41.
- Four height detection sensors 44A to 44D as height detection units for detecting the height of the wafer W, and the heights of a plurality of locations on the surface of each wafer W detected by the four height detection sensors 44A to 44D.
- the accommodation state determination unit 6b of the control device 6 determines whether or not each wafer W accommodated in the plurality of accommodation holes 7a included in the tray 7 is displaced with respect to the corresponding accommodation hole 7a. Therefore, detection of whether or not the wafer W is displaced with respect to the accommodation hole 7a of the tray 7 can be performed with an inexpensive configuration.
- the accommodation state determination unit 6b corresponds to each wafer W accommodated in the plurality of accommodation holes 7a provided in the tray 7 while rotating the tray 7 by the rotary table 41. It is detected whether or not there is a positional shift with respect to the containing hole 7a. As a result, the time required for detecting the positional deviation of the wafer W can be shortened and the processing time in the plasma processing apparatus 1 can be shortened.
- the plasma processing apparatus according to the second embodiment has a configuration in which one height detection sensor 44 is attached to a moving mechanism 70 provided on the upper surface of the ceiling portion 4 b of the alignment chamber 4. Have The height detection sensor 44 can be moved linearly in the horizontal plane above the rotary table 41 by the moving mechanism 70.
- the plasma processing apparatus according to the second embodiment is different from the plasma processing apparatus 1 according to the first embodiment in that there is one height detection sensor 44, but the other parts are the plasma processing apparatus 1 according to the first embodiment. Is the same.
- the moving mechanism 70 is screwed into the guide part 71 provided on the ceiling part 4 b of the alignment chamber 4 so as to extend in the horizontal plane direction, the ball screw 72 provided so as to extend in parallel with the guide part 71, and the ball screw 72.
- a moving part 73 whose rotational movement around the ball screw 72 is restricted by the guide part 71, and a ball screw driving motor 74 that rotationally drives the ball screw part 72 about its axis are provided.
- the height detection sensor 44 is fixedly provided on an overhanging portion 75 provided overhanging from the moving portion 73.
- the moving unit 73 moves along the guide unit 71, and the height detection sensor 44 is located above the rotary table 41 ( That is, it moves in the horizontal plane direction above the tray 7.
- the height detection sensor 44 is the first embodiment. It is provided so as to move along the straight line LL. While the accommodation state determination unit 6b of the control device 6 rotates the turntable 41 (arrow B shown in FIG. 18), it controls the operation of the ball screw drive motor 74 and moves the height detection sensor 44 along the straight line LL. Let Thereby, the data of the same height detection target point as in the first embodiment can be acquired by one height detection sensor 44. For this reason, the plasma processing apparatus in the second embodiment can obtain the same effects as the plasma processing apparatus 1 in the first embodiment.
- the plasma processing apparatus in the third embodiment shown in FIG. 19 has three height detection sensors. Specifically, three height detection sensors, that is, a first height detection sensor 44A, a second height detection sensor 44B, and a third height detection sensor 44C are provided on the upper surface of the ceiling portion 4b of the alignment chamber 4. They are provided side by side on the straight line LL in the first embodiment.
- the first height detection sensor 44A irradiates one point on the virtual circle S1 (see also FIG. 20) in the first embodiment with the inspection light L2, and 1 on the virtual circle S1.
- the heights of three height detection target points P1, P2, P3 (FIG. 20) close to the outer edge on the surface of the wafer W (passed by the rotation of the tray 7) located at the point are detected.
- the second height detection sensor 44B is positioned at one point on the virtual circle S3 by irradiating the inspection light L2 on one point on the virtual circle S3 in the first embodiment (the tray 7 is rotated).
- the height of one height detection target point U1 (having six height detection target points U1 as shown in FIG.
- the third height detection sensor 44C irradiates one point on the virtual circle S4 in the first embodiment with the inspection light L2, and is positioned at one point on the virtual circle S4 (the tray 7 rotates).
- the heights of two height detection target points X1 and X2 (passed by a total of 12 detection target points X1 and X2 as shown in FIG. 20) near the outer edge on the surface of each wafer W are detected.
- the accommodation state determination unit 6b of the control device 6 has three height detection target points (P1, P2, P3 or U1, X1, X2) on the wafer W, which are accommodated in the accommodation holes 7a of the tray 7. ) To determine whether or not each wafer W accommodated in the plurality of accommodation holes 7a included in the tray 7 is displaced (inclined) with respect to the corresponding accommodation hole 7a. .
- the accommodation state determination unit 6b has a variation in height of three height detection target points (P1, P2, P3 or U1, X1, X2) on one wafer W within a predetermined range. If it fits, that is, if it can be considered that the heights of the three height target points are substantially the same, it is determined that the wafer W is not displaced relative to the corresponding accommodation hole 7a. On the other hand, the accommodation state determination unit 6b determines that the variation in the heights of the three height detection target points (P1, P2, P3 or U1, X1, X2) on one wafer W does not fall within a predetermined range. The wafer W is determined to be displaced with respect to the corresponding accommodation hole 7a.
- the height detection target point on the wafer W and the corresponding height of the height detection target point on the tray 7 are the same as in the first embodiment. Based on the difference, it may be determined whether or not the wafer W is displaced.
- the plurality (three in this case) of height detection sensors 44A to 44C included in the plasma processing apparatus according to the third embodiment are accommodated in the plurality of accommodating holes 7a included in the tray 7 placed on the rotary table 41. It functions as a height detection unit that detects the height of a plurality of locations on the surface of each wafer W, and the accommodation state determination unit 6b of the control device 6 uses height detection means (three height detection sensors 44A to 44C). Whether each wafer W accommodated in the plurality of accommodation holes 7a included in the tray 7 is displaced with respect to the corresponding accommodation hole 7a based on the detected heights of the plurality of locations on the surface of each wafer W. It functions as a determination unit that determines whether or not. Therefore, the plasma processing apparatus in the third embodiment can obtain the same effects as the plasma processing apparatuses in the first and second embodiments.
- the plasma processing apparatus according to the fourth embodiment is configured so that one height detection sensor 44 can be moved in the horizontal plane direction by the moving mechanism 70 shown in the second embodiment.
- the height at each height detection target point on the surface of the seven wafers W detected by the three height detection sensors 44A to 44C in the third mode is detected. Therefore, the plasma processing apparatus in the fourth embodiment can obtain the same effects as the plasma processing apparatuses in the first to third embodiments.
- the plasma processing apparatus has three height detection sensors that are movable in the horizontal plane direction by the moving mechanism 70 shown in the second embodiment, that is, the first height detection.
- the height detection target point of each wafer W measured in the third embodiment (or the fourth embodiment) is measured by the sensor 44A, the second height detection sensor 44B, and the third height detection sensor 44C. The detection is performed simultaneously for each W.
- the accommodation state determination unit 6b of the control device 6 moves the three height detection sensors 44A to 44C integrally in the horizontal plane direction by the moving mechanism 70 and rotates the tray 7 by the rotary table 41 (in FIG. 22).
- the height of three height detection target points on the surface of each wafer W accommodated in the seven accommodation holes 7a provided in the tray 7 can be detected. Therefore, the plasma processing apparatus in the fifth embodiment can obtain the same effects as the plasma processing apparatuses in the first to fourth embodiments.
- the plasma processing apparatus in the sixth embodiment is different from the plasma processing apparatuses in the first to fifth embodiments described above, and includes a plurality of receiving holes 7a provided in the tray 7 placed on the rotary table 41.
- the position deviation detection means for detecting whether or not each wafer W accommodated in the wafer has a position deviation with respect to the corresponding accommodation hole 7a is not a height detection sensor but a camera 80 as an imaging means.
- the camera 80 is movable in the horizontal plane direction by the moving mechanism 70 shown in the second embodiment.
- the camera 80 is provided so as to move along the straight line LL in the first embodiment, and the rotating table 41 is rotated from the accommodation state determination unit 6b of the control apparatus 6. (Arrow B shown in FIG. 23), by controlling the operation of the ball screw drive motor 74 and moving the camera 80 along the straight line LL, the camera 80 performs an imaging operation, so that one camera 80 has seven images. Image data of each wafer W accommodated in the accommodation hole 7a can be acquired.
- the accommodation state determination unit 6 b of the control device 6 accommodates each wafer W accommodated in each of the plurality of accommodation holes 7 a provided in the tray 7 based on the image of each wafer W obtained by imaging with the camera 80. It is possible to detect whether or not a positional deviation has occurred with respect to the hole 7a. Therefore, the plasma processing apparatus in the sixth embodiment can obtain the same effects as the plasma processing apparatuses in the first to fifth embodiments.
- the positional deviation detection means picks up images of the wafers W accommodated in the plurality of accommodation holes 7a provided in the tray 7 mounted on the rotary table 41 from above. And whether the wafers W accommodated in the plurality of accommodation holes 7a included in the tray 7 are misaligned with respect to the corresponding accommodation holes 7a based on the camera 80 and the image obtained by imaging with the camera 80. Since the determination unit (accommodating state determination unit 6b of the control device 6) is configured to determine whether or not, the wafer W is displaced with respect to the accommodating hole 7a of the tray 7 as in the first to fifth embodiments. It is possible to execute detection with an inexpensive configuration.
- step ST8 it is determined whether or not the wafer W is present in all of the plurality of accommodation holes 7a provided in the tray 7. This determination is based on the height of the wafer W detected at the height detection target points P1, P2, P3, U1, U2, X1, X2 (see FIG. 10) measured by the height detection sensors 44A to 44B. Done. For example, in the case of the wafer W at the center of the tray 7, the heights of three height detection target points P1, P2, and P3 can be used.
- the heights at three of the height detection target points U1, U2, X1, and X2 can be used. More specifically, when the height detected at any of the three height detection target points is equal to or lower than a predetermined reference height (corresponding to the height of the rotary table 41), the accommodation hole 7a In other cases, it can be determined that the wafer W is present in the accommodation hole 7a.
- step ST8 when the accommodation state determination unit 6b determines that there is an accommodation hole 7a in which the wafer W does not exist among the seven accommodation holes 7a provided in the tray 7, an error message is displayed on the display unit 61 (FIG. 24). Tep ST4). In this case, a standby state for returning the tray 7 to the stock unit 2 is entered (step ST4 in FIG. 24). After the end of the waiting state, the control device 6 holds the tray 7 on the rotary stage 41 by the transfer arm 31 of the transfer mechanism 30 and returns it from the alignment chamber 4 to the cassette 21 of the stock unit 2.
- the accommodation state determination unit 6b determines that the wafer W is present in all the accommodation holes 7a provided in the tray 7 in step ST8, the standby state for transporting the tray 7 to the processing chamber 5 is set. Entering (step ST7 in FIG. 24), the processing in the alignment chamber 4 is terminated.
- the plurality of accommodation holes 7a provided in the tray 7 and the wafers W accommodated therein are imaged from above by the camera 80.
- the accommodation state determination unit 6b can determine whether or not the wafer is present in each accommodation hole based on this image (step S8 in FIG. 24).
- the tray 7 accommodates one wafer W in the one accommodation hole 7a arranged at the center position, and the centers are equally spaced on the virtual circle CL centered at the center position.
- 6 wafers W are accommodated in the six accommodation holes 7a arranged in line with each other, but this is only an example, and the number of wafers W that can be accommodated in the tray 7 and the arrangement of the accommodation holes 7a. Is free.
- each accommodation hole 7 a of the tray 7 penetrates in the thickness direction of the tray 7, and the tray 7 containing the wafer W is placed on the tray placement portion 51 a of the susceptor 51.
- the plurality of wafer support portions 51 b included in the susceptor 51 enter the respective accommodation holes 7 a of the tray 7 from below to support the wafers W in the accommodation holes 7 a of the tray 7.
- the tray 7 is positioned in the rotational direction by detecting the notch 7c on the rotary table 41.
- the bottom of the accommodation hole 7a of the tray 7 is exposed to plasma.
- the susceptor 51 is not provided with the wafer support portion 51b, and the tray 7 is merely placed on the tray placement portion 51a of the susceptor 41, so the tray 7 does not have the notch 7c.
- the notch detection sensor 43 is not required, and the tray positioning unit may be configured without the rotation direction positioning unit.
- the table on which the tray 7 is placed in the alignment chamber 4 is not necessarily the rotary table 41 as described above. If the table is not the rotary table 41, the position of the wafer W while rotating the tray 7. Deviation detection cannot be performed.
- the three height detection sensors 44A to 44C shown in the fifth embodiment are moved two-dimensionally in a plane parallel to the horizontal plane by a mechanism for moving the three height detection sensors 44A to 44C in the horizontal plane. This makes it possible to easily detect the heights of the three height detection target points on the surface of each wafer W.
- a mechanism for alignment of the tray 7 including the rotary table 41 is arranged in the independent alignment chamber 4.
- a mechanism for alignment of the tray 7 including the rotary table 41 may be disposed in the transfer chamber 3.
- the present invention can also be applied to this configuration.
- the modified plasma processing apparatus 1 shown in FIG. 25 includes a transfer unit 81 provided adjacent to the stock unit 2.
- a tray 7 containing wafers W before processing is supplied from the transfer unit 81 to the stock unit 2, and these trays 7 are returned from the stock unit 2 to the transfer unit 81 after processing the wafers W.
- a transfer robot 83 is accommodated in a transfer chamber 82 in the transfer unit 81.
- the transfer robot 83 performs an operation of storing the wafer W before plasma processing in the storage hole 7a of the tray 7, that is, an operation of transferring the wafer W to the tray 7. To do. Further, the transfer robot 83 performs an operation of transferring the dry-etched wafer W from the tray 7 as conceptually indicated by an arrow G2 in FIG. Further, the transfer robot 83 loads the tray 7 storing the wafers W before processing into the stock unit 2 from the transfer unit 81 (arrow H1 in FIG. 25), and the tray 7 storing the processed wafers W. Is carried out from the stock unit 2 to the transfer unit 81 (arrow H2 in FIG. 25).
- a plasma processing apparatus capable of preventing resist burning on a wafer.
- Plasma processing apparatus Stock part 3 Transfer chamber (transfer part) 4 Alignment chamber (alignment section) 5 processing chamber (processing section) 6a Alignment processing unit 6b Housing state determination unit (determination unit) 7 tray 7a accommodation hole 30 transport mechanism 31 transport arm 41 rotary table (table) 42 Centering mechanism 43 Notch detection sensor 44 Height detection sensor (height detection unit) 51 Susceptor (support) 52 Plasma processing unit 80 Camera (imaging unit) 81 Transfer section 82 Transfer chamber 83 Transfer robot W Wafer
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Abstract
Description
図1~図4において、本発明の実施の形態1におけるプラズマ処理装置1は処理対象物に対してプラズマ処理(例えばドライエッチング)を施すものであり、ストック部2、搬送室(搬送部)3、アライメント室(アラインメント部)4、処理室(処理部)5及び制御装置6(図1及び図3)を備える。ここで、図3は図2における矢視A-A断面図、図4は図2における矢視B-B断面図である。
おけるノッチ7cの検出に失敗したと判定した場合には、このプラズマ処理装置1に設けられるディスプレイ装置等の表示部(警報発生部)61(図6)にエラーメッセージを表示したうえで、トレイ7をストック部2に返却するための待ち状態に入る(図15に示すステップST4)。なお、ステップST2のノッチ7cの検出における回転テーブル41の回転数は予め定めた所定回数(例えば3回)までとし、制御装置6は、回転テーブル41を所定回数回転させるまでの間にノッチ7cを検出できなかった場合にはノッチ7cの検出に失敗したとしてステップST3からステップST4に進む。
実施の形態2におけるプラズマ処理装置は、図17及び図18に示すように、アライメント室4の天井部4bの上面に設けられた移動機構70に、1つの高さ検出センサ44が取り付けられた構成を有する。高さ検出センサ44は移動機構70によって、回転テーブル41の上方で水平面内方向に直線状に移動し得る。この実施の形態2におけるプラズマ処理装置では、高さ検出センサ44が1つである点が実施の形態1におけるプラズマ処理装置1とは異なるが、他の部分は実施の形態1におけるプラズマ処理装置1と同じである。
における直線LLに沿って移動するように設けられている。制御装置6の収容状態判定部6bが回転テーブル41を回転させつつ(図18中に示す矢印B)、ボール螺子駆動モータ74の作動制御を行って高さ検出センサ44を直線LLに沿って移動させる。これにより、1つの高さ検出センサ44で実施の形態1と同じ高さ検出対象点のデータを取得することができる。このため、実施の形態2におけるプラズマ処理装置は、実施の形態1におけるプラズマ処理装置1と同様の効果を得ることができる。
図19に示す実施の形態3におけるプラズマ処理装置は、実施の形態1及び2におけるプラズマ処理装置とは異なり、高さ検出センサが3つである。具体的には、アライメント室4の天井部4bの上面に3つの高さ検出センサ、すなわち第1の高さ検出センサ44A、第2の高さ検出センサ44B及び第3の高さ検出センサ44Cが実施の形態1における直線LL上に並んで設けられている。
実施の形態4におけるプラズマ処理装置は、図21に示すように、実施の形態2において示した移動機構70によって1つの高さ検出センサ44を水平面内方向に移動できるようにすることで、実施の形態3における3つの高さ検出センサ44A~44Cにより検出する7つのウエハWの表面上の各高さ検出対象点における高さを検出するものである。よって、この実施の形態4におけるプラズマ処理装置は、実施の形態1~3におけるプラズマ処理装置と同様の効果を得ることができる。
実施の形態5におけるプラズマ処理装置は、図22に示すように、実施の形態2において示した移動機構70によって水平面内方向に移動自在とした3つの高さ検出センサ、すなわち第1の高さ検出センサ44A、第2の高さ検出センサ44B及び第3の高さ検出センサ44Cによって、実施の形態3(又は実施の形態4)において計測する各ウエハWの高さ検出対象点の高さをウエハWごとに同時に検出するようにしたものである。制御装置6の収容状態判定部6bは、移動機構70によって3つの高さ検出センサ44A~44Cを水平面内方向に一体に移動させるとともに、回転テーブル41によってトレイ7を回転させることにより(図22中に示す矢印B)、トレイ7が備える7つの収容孔7aに収容された各ウエハWの表面上の3つの高さ検出対象点の高さを検出することができる。よって、この実施の形態5におけるプラズマ処理装置は、実施の形態1~4におけるプラズマ処理装置と同様の効果を得ることができる。
実施の形態6におけるプラズマ処理装置は、図23に示すように、上述の実施の形態1~5におけるプラズマ処理装置とは異なり、回転テーブル41に載置されたトレイ7が備える複数の収容孔7aに収容された各ウエハWが対応する収容孔7aに対して位置ずれを起こしているか否かの検出を行う位置ずれ検出手段が高さ検出センサではなく、撮像手段であるカメラ80となっており、このカメラ80が実施の形態2において示した移動機構70によって、水平面内方向に移動自在となっている。
実施の形態7におけるプラズマ処理装置は、収容状態判別部6bが図24においてステップST5とステップS6の間にステップST8の処理を実行する点のみが異なる。このステップST8では、トレイ7が備える複数の収容孔7aの全てにウエハWが存在しているか否かの判断を行う。この判断は、高さ検出センサ44A~44Bで測定された高さ検出対象点P1,P2,P3,U1,U2,X1,X2(図10参照)で検出されたウエハWの高さに基づいて行われる。例えば、トレイ7の中央のウエハWの場合、3つの高さ検出対象点P1,P2,P3の高さを使用できる。また、トレイ7の外周側の6つのウエハWの場合には、高さ検出対象点U1,U2,X1,X2のうちの3つにおける高さを使用できる。より具体的には、3つ高さ検出対象点のいずれにおいても検出された高さが予め定められた基準高さ(回転テーブル41の高さに対応する)以下の場合には、収容孔7aにウエハWが存在しないと判定し、それ以外の場合には収容孔7aにウエハWが存在すると判定できる。
するものであり、ウエハWを収容したトレイ7をサセプタ51のトレイ載置部51aに載置したときに、サセプタ51が備える複数のウエハ支持部51bがトレイ7の各収容孔7aに下方から入り込んでトレイ7の収容孔7a内のウエハWを支持する。そのため、トレイ7は回転テーブル41上でノッチ7cの検出が行われて回転方向の位置決めがなされるようになっていた。トレイ7の収容孔7aがトレイ7の厚さ方向に貫通するものでない場合(すなわち収容孔7aが有底である場合。この場合、トレイ7の収容孔7aの底がプラズマに露出されることになる)には、サセプタ51にウエハ支持部51bは設けられておらず、トレイ7はサセプタ41のトレイ載置部51aに載置されるだけなのでトレイ7はノッチ7cを有さない。したがって、この語場合にはノッチ検出センサ43も不要となり、トレイ位置決め部も回転方向位置決め部を省いた構成でよい。
2 ストック部
3 搬送室(搬送部)
4 アライメント室(アライメント部)
5 処理室(処理部)
6a アライメント処理部
6b 収容状態判定部(判定部)
7 トレイ
7a 収容孔
30 搬送機構
31 搬送アーム
41 回転テーブル(テーブル)
42 センタリング機構
43 ノッチ検出センサ
44 高さ検出センサ(高さ検出部)
51 サセプタ(支持台)
52 プラズマ処理部
80 カメラ(撮像部)
81 移載部
82 移載室
83 移載ロボット
W ウエハ
Claims (10)
- 複数の収容孔それぞれにウエハを収容した搬送可能なトレイを供給及び回収するためのストック部と、
前記ストック部から供給される前記トレイに収容された前記ウエハに対してプラズマ処理を実行する処理部と、
前記プラズマ処理前の前記トレイが載置されるテーブルを備え、このテーブル上の前記ウエハの位置決めが行われるアライメント部と、
前記アライメント部の前記テーブルに載置された前記トレイの各収容孔に収容されたウエハが対応する収容孔に対して位置ずれを起こしているか否かの検出を行う収容状態検出部と
を備えたことを特徴とするプラズマ処理装置。 - 前記トレイを搬送する搬送機構と、
前記収容状態検出部が前記テーブルに載置された前記トレイのいずれかの前記収容孔のウエハに位置ずれを起こしていることを検出すると、前記搬送機構により前記テーブル上の前記トレイを前記処理部に搬送することなく前記ストック部に戻す搬送制御部と
をさらに備えることを特徴とする請求項1に記載のプラズマ処理装置。 - 前記収容状態検出部は、
前記テーブルに載置された前記トレイが備える複数の前記収容孔に収容された各ウエハの表面のウエハ側対象点における高さを検出する高さ検出部と、
前記高さ検出部により検出された前記ウエハ側対象点における前記ウエハの表面の高さを用いて、各ウエハが対応する収容孔に対して位置ずれを起こしているか否かの判定を行う判定部と
を備えることを特徴とする請求項1又は請求項2に記載のプラズマ処理装置。 - 前記高さ検出部は、前記ウエハ側対象点と前記収容孔の孔縁を挟んで対向するトレイ側対象点におけるトレイの表面の高さをさらに検出し、
前記判定部は、前記ウエハ側測定点における前記ウエハの表面の高さと前記トレイ側対象点における前記トレイの表面の高さとの比較に基づいて、各ウエハが対応する収容孔に対して位置ずれを起こしているか否かの判定を行うことを特徴とする、請求項3に記載のプラズマ処理装置。 - 前記判定部は、前記高さ検出部が検出した前記ウエハ側対象点の高さに基づいて各収容孔内に前記ウエハが存在するか否かの判定をさらに行う、請求項3又は請求項4のいずれか1項に記載のプラズマ処理装置。
- 前記収容状態検出部は、
前記テーブルに載置された前記トレイが備える複数の前記収容孔に収容された各ウエハを上方から撮像する撮像部と、
前記撮像部により得られた画像に基づいて、各ウエハが対応する収容孔に対して位置ずれを起こしているか否かの判定を行う判定部手段と
を備えることを特徴とする請求項1又は請求項2に記載のプラズマ処理装置。 - 前記判定部は、前記撮像部により得られた画像に基づいて各収容孔内に前記ウエハが存在するか否かの判定をさらに行う、請求項6に記載のプラズマ処理装置。
- 前記テーブルは前記トレイを水平面内で回転させる回転テーブルであり、
前記収容状態検出部は、前記回転テーブルによる前記トレイの回転中に、前記トレイが備える前記複数の収容孔に収容された各ウエハが対応する収容孔に対して位置ずれを起こしているか否かの検出を行うことを特徴とする、請求項1から請求項7のいずれか1項に記載のプラズマ処理装置。 - 前記収容状態検出部が前記トレイのいずれかの前記収容孔の前記ウエハが位置ずれを起こしていることを検出すると警報を発生する警報発生部をさらに備える、請求項1から請求項8のいずれか1項に記載のプラズマ処理装置。
- 複数の収容孔それぞれにウエハを収容したトレイを、ストック部からアラインメント部に搬送してテーブルに載置し、
前記アライメント部の前記テーブル上の前記トレイの各収容孔内の前記ウエハの収容状態を検出し、
前記テーブル上の前記トレイのすべての前記収容孔内に前記ウエハが位置ずれを起こすことなく収容されていれば、前記トレイを前記アラインメント部から処理部に搬送してプラズマ処理を実行し、
前記テーブル上の前記トレイのいずれかの前記収容孔の前記ウエハが位置ずれを起こしていれば、前記トレイを前記アラインメント部から前記ストック部に戻す、プラズマ処理方法。
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US9576839B2 (en) | 2012-03-07 | 2017-02-21 | Osram Opto Semiconductors Gmbh | Substrate carrier arrangement, coating system having a substrate carrier arrangement and method for performing a coating process |
WO2013131748A1 (de) * | 2012-03-07 | 2013-09-12 | Osram Opto Semiconductors Gmbh | Substratträgeranordnung, beschichtungsanlage mit substratträgeranordnung und verfahren zur durchführung eines beschichtungsverfahrens |
JP2014060240A (ja) * | 2012-09-18 | 2014-04-03 | Disco Abrasive Syst Ltd | 加工装置 |
JP2014123673A (ja) * | 2012-12-21 | 2014-07-03 | Tokyo Electron Ltd | 基板位置検出装置及びこれを用いた基板処理装置、成膜装置 |
JP2014154565A (ja) * | 2013-02-04 | 2014-08-25 | Epicrew Inc | 撮像装置、半導体製造装置および半導体製造方法 |
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KR20160001683A (ko) * | 2014-06-27 | 2016-01-06 | 어플라이드 머티어리얼스, 인코포레이티드 | 인시튜 피드백을 통한 웨이퍼 배치 및 갭 제어 최적화 |
KR102567811B1 (ko) | 2014-06-27 | 2023-08-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 인시튜 피드백을 통한 웨이퍼 배치 및 갭 제어 최적화 |
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WO2016117427A1 (ja) * | 2015-01-20 | 2016-07-28 | 日本碍子株式会社 | ウエハ支持構造体 |
JP6010720B1 (ja) * | 2015-01-20 | 2016-10-19 | 日本碍子株式会社 | ウエハ支持構造体 |
US10332774B2 (en) | 2015-01-20 | 2019-06-25 | Ngk Insulators, Ltd. | Wafer support structure |
KR20190005113A (ko) * | 2017-07-05 | 2019-01-15 | 도쿄엘렉트론가부시키가이샤 | 기판 휨 감시 장치 및 이것을 사용한 기판 처리 장치, 그리고 기판 휨 감시 방법 |
KR102354310B1 (ko) * | 2017-07-05 | 2022-01-21 | 도쿄엘렉트론가부시키가이샤 | 기판 휨 감시 장치 및 이것을 사용한 기판 처리 장치, 그리고 기판 휨 감시 방법 |
JP2019016662A (ja) * | 2017-07-05 | 2019-01-31 | 東京エレクトロン株式会社 | 基板反り監視装置及びこれを用いた基板処理装置、並びに基板反り監視方法 |
JP2020096017A (ja) * | 2018-12-10 | 2020-06-18 | 株式会社 天谷製作所 | 成膜用冶具及び常圧気相成長装置 |
JP7387129B2 (ja) | 2018-12-10 | 2023-11-28 | 株式会社 天谷製作所 | 成膜用冶具及び常圧気相成長装置 |
JP2020096129A (ja) * | 2018-12-14 | 2020-06-18 | 株式会社アルバック | ロードロックチャンバ及び真空処理装置 |
JP7389076B2 (ja) | 2021-03-22 | 2023-11-29 | 大陽日酸株式会社 | 基板搬送機構及びこれを用いた基板搬送方法 |
Also Published As
Publication number | Publication date |
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US20130068727A1 (en) | 2013-03-21 |
US8883025B2 (en) | 2014-11-11 |
JP5593384B2 (ja) | 2014-09-24 |
CN102939648A (zh) | 2013-02-20 |
CN102939648B (zh) | 2015-05-27 |
JPWO2011151996A1 (ja) | 2013-07-25 |
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