WO2010041562A1 - 基板搬送ロボットおよびシステム - Google Patents
基板搬送ロボットおよびシステム Download PDFInfo
- Publication number
- WO2010041562A1 WO2010041562A1 PCT/JP2009/066751 JP2009066751W WO2010041562A1 WO 2010041562 A1 WO2010041562 A1 WO 2010041562A1 JP 2009066751 W JP2009066751 W JP 2009066751W WO 2010041562 A1 WO2010041562 A1 WO 2010041562A1
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- WIPO (PCT)
- Prior art keywords
- end portion
- substrate
- support member
- horizontal
- robot
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/044—Cylindrical coordinate type comprising an articulated arm with forearm providing vertical linear movement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Definitions
- the present invention relates to a robot for transporting a substrate and a substrate transport system including the robot.
- the substrate transport robot and system according to the present invention are suitable for transporting heavy substrates such as large glass substrates for solar panels.
- Various robots are used to carry a substrate to be processed into a substrate processing apparatus such as a chemical vapor deposition apparatus (CVD apparatus) and carry out a processed substrate.
- a substrate processing apparatus such as a chemical vapor deposition apparatus (CVD apparatus) and carry out a processed substrate.
- CVD apparatus chemical vapor deposition apparatus
- a substrate to be processed there is a square glass substrate used for a solar panel, and the size thereof is over 2 m on a side, and is a large heavy object.
- the floor area required for installing the substrate transfer system is as small as possible in order to enable installation in a limited space.
- the conventional substrate transfer robot has a structure in which the arm is extended in the horizontal direction when the end effector is moved horizontally, there has been a problem of the position shift of the end effector due to bending due to the weight of the extended arm.
- the present invention has been made in view of the above-described circumstances, and includes a substrate transport robot and the robot that can safely and accurately transport a heavy object such as a large glass substrate while preventing an increase in size of the structure.
- An object is to provide a substrate transfer system.
- a substrate transfer robot includes an end effector in which a substrate is held substantially horizontally, vertical drive means for driving the end effector in a vertical direction, and the vertical drive means in a horizontal direction.
- Horizontal driving means for driving, and rotation driving means for rotating the horizontal driving means around a vertical rotation axis, and an end of the end effector is connected to the vertical driving means, and the horizontal driving means is connected to the horizontal driving means.
- An end portion of the vertical driving means is connected.
- the horizontal drive means is a travel support member that extends in the horizontal direction and includes a front end portion and a rear end portion, and is a travel support member that is rotationally driven around the rotation axis by the rotational drive means;
- a travel drive mechanism configured to travel the vertical drive unit between the front end portion and the rear end portion of the travel support member;
- the travel drive mechanism is spanned between the front end portion and the rear end portion of the travel support member, and a horizontal transport belt to which a lower end portion of the vertical drive means is fixed, and the horizontal transport belt A horizontal transfer motor for driving the motor.
- the vertical driving means is an elevating support member that extends in a vertical direction and includes an upper end portion and a lower end portion, the elevating support member having the lower end portion attached to the horizontal driving means, and the end effector. And an elevating drive mechanism for driving elevating between the upper end portion and the lower end portion of the elevating support member.
- the elevating drive mechanism includes a vertical conveying belt that is stretched between the upper end portion and the lower end portion of the elevating support member and to which the base end portion of the end effector is fixed, and the vertical conveying belt. And a vertical conveying motor to be driven.
- the end effector extends in a horizontal direction and has a proximal end portion and a distal end portion, the proximal end portion is attached to the vertical driving means, and the vertical driving means is connected to the horizontal driving means.
- the tip end portion of the end effector is configured to be positioned closer to the rear end than the front end of the horizontal drive means.
- the rotation axis is located closer to the rear end than the center position in the front-rear direction of the horizontal driving means.
- a substrate transport system is a robot for transporting a substrate, and is a substrate processing apparatus for processing the substrate disposed adjacent to the robot.
- a robot for loading / unloading the substrate, and a substrate loading / unloading means disposed adjacent to the robot, loading the substrate to the vicinity of the robot, and unloading the substrate received from the robot includes: an end effector in which the substrate is held substantially horizontally; vertical drive means for driving the end effector in a vertical direction; and horizontal drive means for driving the vertical drive means in a horizontal direction.
- Rotation driving means for rotating the horizontal driving means about a vertical rotation axis, and the end of the end effector is provided on the vertical driving means. It is continued, an end portion of the vertical drive means to said horizontal drive means is connected, characterized in that.
- the substrate transport system is disposed adjacent to the robot, and the temporary storage device in which the substrate transported between the substrate carry-in / out means and the substrate processing apparatus is provisionally stored by the robot. Is further provided.
- the end effector extends in a horizontal direction and has a proximal end portion and a distal end portion, and the proximal end portion is attached to the vertical driving means, and the robot is configured such that the vertical driving means includes the vertical driving means.
- the front end portion of the end effector is positioned on the rear end side with respect to the front end of the horizontal drive means when positioned at the rear end portion of the horizontal drive means.
- An open space having at least a side facing the robot is formed at a lower portion of at least one of the storage devices, and the robot is configured to rotate the horizontal driving unit around the rotation axis.
- a front end portion of the horizontal driving means is disposed so as to pass through at least one of the open spaces.
- the substrate processing apparatus and the substrate carry-in / out means are arranged to face each other with the robot interposed therebetween, and the temporary storage device connects the substrate processing apparatus and the substrate carry-in / out means. It is arranged on a line orthogonal to.
- the substrate transport system includes a pair of provisional storage devices arranged to face each other with the robot interposed therebetween.
- the rotation axis is located closer to the rear end than the center position in the front-rear direction of the horizontal driving means.
- the horizontal drive means is a travel support member that extends in the horizontal direction and includes a front end portion and a rear end portion, and is a travel support member that is rotationally driven around the rotation axis by the rotational drive means;
- a travel drive mechanism that travels the vertical drive means between the front end portion and the rear end portion of the travel support member, and the travel drive mechanism includes the front end portion of the travel support member and the A horizontal conveying belt that is stretched between the rear end portion and to which the lower end portion of the vertical driving means is fixed; and a horizontal conveying motor that drives the horizontal conveying belt.
- the vertical driving means is an elevating support member that extends in a vertical direction and includes an upper end portion and a lower end portion, the elevating support member having the lower end portion attached to the horizontal driving means, and the end effector.
- Elevating drive mechanism for driving up and down between the upper end portion and the lower end portion of the elevating support member, the elevating drive mechanism between the upper end portion and the lower end portion of the elevating support member And a vertical conveyance belt to which a base end portion of the end effector is fixed, and a vertical conveyance motor for driving the vertical conveyance belt.
- FIG. 1 is a perspective view showing a schematic configuration of a substrate transfer system including a substrate transfer robot according to an embodiment of the present invention, together with a substrate processing apparatus.
- FIG. 2 is a plan view of the substrate transfer system and the substrate processing apparatus shown in FIG. 1.
- 1 is a longitudinal sectional view showing a schematic configuration of a substrate transfer robot according to an embodiment of the present invention. It is a figure for demonstrating the open space in the temporary storage apparatus shown in FIG. 1, a substrate processing apparatus, and a conveyor apparatus, (a) is a temporary storage apparatus, (b) is a substrate processing apparatus, (c) is a conveyor apparatus. Indicates. It is a figure for demonstrating the layout of the substrate conveyance system and substrate processing apparatus which were shown in FIG. 1, (a) is a partial top view, (b) is a partial side view. The side view for demonstrating the layout of the substrate conveyance system and substrate processing apparatus which were shown in FIG.
- the substrate transfer system includes a substrate transfer robot 1, temporary storage devices 2 and 3 and a conveyor device 4 arranged around the substrate transfer robot 1. Further, a substrate processing apparatus 5 for processing a substrate is disposed adjacent to the robot 1.
- the substrate processing device 5 and the conveyor device 4 are arranged to face each other with the robot 1 in between.
- a pair of temporary storage devices 2 and 3 are disposed on the line perpendicular to the line connecting the substrate processing apparatus 5 and the conveyor apparatus 4 with the robot 1 interposed therebetween.
- This transfer system is particularly suitable for transferring a large glass substrate 100 for a solar panel, and the robot 1 is appropriately connected between the conveyor device 4, the pair of temporary storage devices 2, 3 and the substrate processing device 5.
- the glass substrate 100 is conveyed.
- the unprocessed glass substrate 100 that has been transported to the vicinity of the robot 1 by the conveyor device 4 is transported by the robot 1 to the first provisional storage device 2.
- the unprocessed glass substrate 100 temporarily stored in the first temporary storage device 2 is carried into the substrate processing device 5 by the robot 1.
- the substrate processing apparatus 5 performs chemical vapor deposition (CVD) processing or the like on the glass substrate 100, and the processed glass substrate 100 is unloaded from the substrate processing apparatus 5 by the robot 1 and transferred to the second temporary storage apparatus 3. It is conveyed.
- CVD chemical vapor deposition
- the processed glass substrate 100 temporarily stored in the second temporary storage device 3 is transported to the conveyor device 4 by the robot 1 and carried out by the conveyor device 4.
- the substrate transfer robot 1 has a base 10 fixedly installed on a floor 50, and the base 10 can rotate an elongated traveling support member 11 extending in the horizontal direction. It is supported by.
- a rotation support shaft 12 is fixedly provided on the lower surface of the travel support member 11, and the rotation support shaft 12 is pivotally supported by a bearing 13 of the base 10.
- the rotation support shaft 12 is provided at a position slightly closer to the rear end portion 11B than the center position in the longitudinal direction of the travel support member 11.
- a servo motor 14 provided with an encoder is provided inside the base 10, and the rotational driving force of the servo motor 14 is transmitted to the rotation support shaft 12 through gear mechanisms 15 and 16. As a result, the travel support member 11 is rotationally driven around the rotation axis 17 in the vertical direction with respect to the base 10.
- the servo motor 14 and the gear mechanisms 15 and 16 constitute rotation driving means.
- an elevating support member 18 mounted on the travel support member 11 is an elevating support member 18 extending in the vertical direction so as to be movable between the front end portion 11A and the rear end portion 11B of the travel support member 11 while maintaining its upright state. Has been.
- a horizontal conveying belt is stretched between a front end portion 11A and a rear end portion 11B via a pair of pulleys (horizontal conveying pulleys) 19A, 19B. 20 is provided.
- the upper surface of the travel support member 11 is open, and the lower end portion 18B of the elevating support member 18 is fixed to the upper surface of the horizontal conveyance belt 20.
- the upper opening of the travel support member 11 may be sealed with a seal belt or the like.
- One pulley 19A is rotationally driven by a servo motor 21 provided with an encoder, and the horizontal conveyance belt 20 is driven back and forth. Thereby, the elevating support member 18 is driven to travel between the front end portion 11A and the rear end portion 11B of the travel support member 11.
- the servo motor 21, the horizontal conveyance belt 20, and the pulleys 19A and 19B constitute a traveling drive mechanism that causes the elevating support member 18 to travel in the horizontal direction.
- the travel drive mechanism and the travel support member 11 constitute a horizontal drive means.
- An end effector 22 extending in the horizontal direction is mounted on the front surface of the elevating support member 18 so as to be able to elevate between the upper end portion 18A and the lower end portion 18B of the elevating support member 18 while maintaining the horizontal state. Has been.
- the vertical conveying belt 24 is stretched between a pair of pulleys (vertical conveying pulleys) 23A and 23B between the upper end 18A and the lower end 18B. Is provided.
- the front surface of the elevating support member 18 is open, and the base end portion 22 ⁇ / b> B of the end effector 22 is fixed to the front surface of the vertical conveyance belt 24.
- the front opening of the lifting support member 18 may be sealed with a seal belt or the like.
- One pulley 23A is rotationally driven by a servo motor 25 equipped with an encoder, and the vertical conveyor belt 24 is driven up and down. Thereby, the end effector 22 is driven to travel between the upper end portion 18A and the lower end portion 18B of the lifting support member 18.
- the servo motor 25, the vertical conveyance belt 24, and the pulleys 23A and 23B constitute an elevating drive mechanism that elevates and lowers the end effector 22 in the vertical direction.
- the elevating drive mechanism and the elevating support member 18 constitute vertical drive means.
- FIG 3 shows a state in which the lifting support member 18 is located at the rear end portion 11B of the traveling support member 11.
- the distal end portion 22A of the end effector 22 is more than the front end of the traveling support member 11. Is also located on the rear end side.
- an open space 5 ⁇ / b> A in which at least the side facing the robot 1 (front side) is opened is formed below the substrate processing apparatus 5.
- the substrate processing apparatus 5 may be arranged so as not to interfere with the minimum rotation radius of the robot.
- an open space 4A in which at least the side facing the robot 1 (front side) is opened is formed in an area between the upper and lower belts. ing.
- the substrate processing apparatus 5 may be arranged so as not to overlap with the circular locus 26.
- the traveling support member 11 of the robot 1 has the front end portion 11A in the open spaces 2A, 2B, and 4A when rotating. 5A inside.
- the travel support member 11 of the robot 1 corresponds to an open space 5 ⁇ / b> A formed below the substrate processing apparatus 5 and an open space 4 ⁇ / b> A inside the conveyor apparatus 4. It is arranged at the height position. Further, with respect to the temporary storage devices 2 and 3, the travel support member 11 is disposed at a height position corresponding to each of the open spaces 2 ⁇ / b> A and 3 ⁇ / b> A.
- the front end portion 11A can pass through the open spaces 2A, 3A, 4A, and 5A, and the travel support member 11 and each device 2-5 Interference can be prevented.
- the rotation support shaft 12 is provided at a position slightly closer to the rear end portion 11B than the center position in the longitudinal direction of the travel support member 11. Thereby, even when the traveling support member 11 is rotated in a state where the lifting support member 18 is positioned at the rear end portion 11B of the traveling support member 11, the lifting support member 18 may interfere with each device 2-5. Absent.
- the rotation support shaft 12 at a position slightly closer to the rear end than the center position in the longitudinal direction of the travel support member 11, the weight balance of the turning shaft at the time of turning the robot is improved, and a smooth rotating operation is achieved. be able to.
- the lifting support member 18 is positioned on the rear end portion 11B side of the travel support member 11, but the front portion of the travel support member 11 is made longer than the rear portion, so that the weight of the front portion is increased. Increases weight balance.
- belts and pulleys are used as the linear motion mechanism.
- linear motion mechanisms such as a rack and pinion, a ball screw, a linear motor, a cylinder, telescopic, and a pantograph are used. May be used.
- the power of the servo motor 14 is transmitted to the travel support member 11 via the gear mechanisms 15 and 16, but for example, the travel support member 11 is connected to a high output motor. You may connect directly.
- the end effector 22 faces the direction of the conveyor device 4 as shown in FIG. 1, and at this time, the lifting support member 18 is the rear end portion 11B of the travel support member 11 as shown in FIG. Located on the side.
- the vertical effect servo motor 25 is driven to lower the end effector 22 and move it downward from the lower surface of the glass substrate 100 on the conveyor device 4 by a predetermined distance.
- the servo motor 21 for horizontal conveyance is driven to move the elevating support member 18 to the front end portion 11A side of the traveling support member 11, and the end effector 22 is positioned below the glass substrate 100.
- the servo motor 25 for vertical conveyance is driven to move the end effector 22 upward by a predetermined distance, and the glass substrate 100 is held by the end effector 22.
- the servo motor 21 for horizontal conveyance is driven to move the elevating support member 18 to the rear end portion 11B side of the traveling support member 11.
- the servo motor 14 for rotational driving is driven to rotate the traveling support member 11 so that the end effector 22 faces the substrate processing apparatus 5.
- the vertical transfer servo motor 25 is driven to move the end effector 22 upward by a predetermined distance from the height of the substrate mounting portion of the substrate processing apparatus 5.
- the horizontal conveyance servomotor 21 is driven to move the lifting support member 18 to the front end portion 11A side of the travel support member 11, and the end effector 22 is positioned above the substrate placement portion of the substrate processing apparatus 5.
- the vertical transfer servomotor 25 is driven to move the end effector 22 downward by a predetermined distance, and the glass substrate 100 is placed on the substrate placement portion of the substrate processing apparatus 5.
- the horizontal conveyance motor 21 is driven to move the lifting support member 18 to the rear end portion 11B of the travel support member 11.
- the glass substrate 100 is carried in and out using the conveyor device 4.
- a placing table for placing the glass substrate 100 is installed, and a glass or the like is installed by a robot or the like.
- the substrate 100 may be carried in and out of the mounting table, or the glass substrate 100 may be carried in and out in a state where a plurality of substrates are accommodated in the substrate container.
- capacitance of the servomotor which comprises a drive means can be restrained small compared with the case where another arm is moved with an end effector like the prior art. Thereby, enlargement of the robot 1 can be prevented and an increase in manufacturing cost can be suppressed.
- the end effector 22 is moved in the horizontal direction by moving the vertical driving means in the horizontal direction, so that the arm is moved in the horizontal direction as in the conventional substrate transfer robot. There is no need to stretch. For this reason, there is no problem of bending due to the extension of the arm, and the end effector 22 can be accurately positioned at a desired position.
- each device 2-5 is attached to the robot 1 while preventing the traveling support member 11 of the robot 1 from interfering with each device 2-5. Therefore, the layout of the entire system including the substrate processing apparatus 5 can be made more compact than before.
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Description
Claims (15)
- 基板が略水平に保持されるエンドエフェクタと、
前記エンドエフェクタを垂直方向に駆動する垂直駆動手段と、
前記垂直駆動手段を水平方向に駆動する水平駆動手段と、
前記水平駆動手段を垂直方向の回転軸線周りに回転駆動する回転駆動手段と、を備え、
前記垂直駆動手段に前記エンドエフェクタの端部が接続され、
前記水平駆動手段に前記垂直駆動手段の端部が接続されている、ことを特徴とする基板搬送ロボット。 - 前記水平駆動手段は、水平方向に延在し、前端部及び後端部を含む走行支持部材であって、前記回転駆動手段によって前記回転軸線周りに回転駆動される走行支持部材と、前記垂直駆動手段を前記走行支持部材の前記前端部と前記後端部との間で走行駆動する走行駆動機構と、を有することを特徴とする請求項1記載の基板搬送ロボット。
- 前記走行駆動機構は、前記走行支持部材の前記前端部と前記後端部との間に掛け渡され、前記垂直駆動手段の下端部が固着された水平搬送ベルトと、前記水平搬送ベルトを駆動する水平搬送用モータと、を有することを特徴とする請求項2記載の基板搬送ロボット。
- 前記垂直駆動手段は、垂直方向に延在し、上端部及び下端部を含む昇降支持部材であって、前記下端部が前記水平駆動手段に装着された昇降支持部材と、前記エンドエフェクタを前記昇降支持部材の前記上端部と前記下端部との間で昇降駆動する昇降駆動機構と、を有することを特徴とする請求項1乃至3のいずれか一項に記載の基板搬送ロボット。
- 前記昇降駆動機構は、前記昇降支持部材の前記上端部と前記下端部との間に掛け渡され、前記エンドエフェクタの基端部が固着された垂直搬送ベルトと、前記垂直搬送ベルトを駆動する垂直搬送用モータと、を有することを特徴とする請求項4記載の基板搬送ロボット。
- 前記エンドエフェクタは、水平方向に延在して基端部及び先端部を有し、前記基端部が前記垂直駆動手段に装着されており、
前記垂直駆動手段が前記水平駆動手段の後端部に位置しているとき、前記エンドエフェクタの前記先端部が前記水平駆動手段の前端よりも後端側に位置するように構成されていることを特徴とする請求項1乃至5のいずれか一項に記載の基板搬送ロボット。 - 前記回転軸線は、前記水平駆動手段の前後方向の中央位置よりも後端寄りの位置にあることを特徴とする請求項1乃至6のいずれか一項に記載の基板搬送ロボット。
- 請求項1記載の基板搬送ロボットであって、前記ロボットに隣接して配置された、前記基板を処理するための基板処理装置に対して、前記基板を搬出入するためのロボットと、
前記ロボットに隣接して配置され、前記ロボットの近傍まで前記基板を搬入し、且つ、前記ロボットから受け取った前記基板を搬出するための基板搬出入手段と、を備えたことを特徴とする基板搬送システム。 - 前記ロボットに隣接して配置され、前記ロボットによって前記基板搬出入手段と前記基板処理装置との間で搬送される前記基板が暫定的に貯蔵される暫定貯蔵装置をさらに備えた請求項8記載の基板搬送システム。
- 前記エンドエフェクタは、水平方向に延在して基端部及び先端部を有し、前記基端部が前記垂直駆動手段に装着されており、
前記ロボットは、前記垂直駆動手段が前記水平駆動手段の後端部に位置しているとき、前記エンドエフェクタの前記先端部が前記水平駆動手段の前端よりも後端側に位置するように構成されており、
前記基板処理装置及び前記暫定貯蔵装置のうちの少なくとも1つの装置の下部には、少なくとも前記ロボットに面する側が開放された開放空間が形成されており、
前記ロボットは、前記回転軸線周りに前記水平駆動手段が回転する際に前記水平駆動手段の前端部が少なくとも1つの前記開放空間内を通過するように配置されていることを特徴とする請求項9記載の基板搬送システム。 - 前記基板処理装置と前記基板搬出入手段とが前記ロボットを間に挟んで対向して配置されており、
前記暫定貯蔵装置が、前記基板処理装置と前記基板搬出入手段とを結ぶ線に直交する線の上に配置されていることを特徴とする請求項9又は10に記載の基板搬送システム。 - 前記ロボットを間に挟んで対向して配置された一対の前記暫定貯蔵装置を備えたことを特徴とする請求項11記載の基板搬送システム。
- 前記回転軸線は、前記水平駆動手段の前後方向の中央位置よりも後端寄りの位置にあることを特徴とする請求項8乃至12のいずれか一項に記載の基板搬送システム。
- 前記水平駆動手段は、水平方向に延在し、前端部及び後端部を含む走行支持部材であって、前記回転駆動手段によって前記回転軸線周りに回転駆動される走行支持部材と、前記垂直駆動手段を前記走行支持部材の前記前端部と前記後端部との間で走行駆動する走行駆動機構と、を有し、
前記走行駆動機構は、前記走行支持部材の前記前端部と前記後端部との間に掛け渡され、前記垂直駆動手段の下端部が固着された水平搬送ベルトと、前記水平搬送ベルトを駆動する水平搬送用モータと、を有することを特徴とする請求項8乃至13のいずれか一項に記載の基板搬送システム。 - 前記垂直駆動手段は、垂直方向に延在し、上端部及び下端部を含む昇降支持部材であって、前記下端部が前記水平駆動手段に装着された昇降支持部材と、前記エンドエフェクタを前記昇降支持部材の前記上端部と前記下端部との間で昇降駆動する昇降駆動機構と、を有し、
前記昇降駆動機構は、前記昇降支持部材の前記上端部と前記下端部との間に掛け渡され、前記エンドエフェクタの基端部が固着された垂直搬送ベルトと、前記垂直搬送ベルトを駆動する垂直搬送用モータと、を有することを特徴とする請求項8乃至14のいずれか一項に記載の基板搬送システム。
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CN103569387A (zh) * | 2012-08-10 | 2014-02-12 | 川崎重工业株式会社 | 板状玻璃的包装装置 |
CN103569387B (zh) * | 2012-08-10 | 2016-08-17 | 川崎重工业株式会社 | 板状玻璃的包装装置 |
CN108406727A (zh) * | 2018-03-02 | 2018-08-17 | 俞权锋 | 一种搬运机械手装置 |
USD997224S1 (en) * | 2022-01-07 | 2023-08-29 | Milvus Robotics Teknoloji A.S. | Transfer robot |
Also Published As
Publication number | Publication date |
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US8882431B2 (en) | 2014-11-11 |
EP2353797B1 (en) | 2014-08-06 |
KR20110050558A (ko) | 2011-05-13 |
KR20140033521A (ko) | 2014-03-18 |
ES2498742T3 (es) | 2014-09-25 |
EP2353797A1 (en) | 2011-08-10 |
EP2353797A4 (en) | 2012-04-18 |
CN102177003B (zh) | 2015-04-22 |
CN102177003A (zh) | 2011-09-07 |
KR101488649B1 (ko) | 2015-02-04 |
US20110182702A1 (en) | 2011-07-28 |
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