WO2008010358A1 - Procédé et appareil pour stocker un corps en forme de planche. - Google Patents
Procédé et appareil pour stocker un corps en forme de planche. Download PDFInfo
- Publication number
- WO2008010358A1 WO2008010358A1 PCT/JP2007/061489 JP2007061489W WO2008010358A1 WO 2008010358 A1 WO2008010358 A1 WO 2008010358A1 JP 2007061489 W JP2007061489 W JP 2007061489W WO 2008010358 A1 WO2008010358 A1 WO 2008010358A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pallet
- plate
- glass substrate
- degrees
- positioning member
- Prior art date
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
- B65D19/38—Details or accessories
- B65D19/385—Frames, corner posts or pallet converters, e.g. for facilitating stacking of charged pallets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B23/00—Packaging fragile or shock-sensitive articles other than bottles; Unpacking eggs
- B65B23/20—Packaging plate glass, tiles, or shingles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Definitions
- the present invention relates to a plate-shaped body, particularly a flat panel display (FPD), that is, a plate for storing a large glass substrate for a liquid crystal display, a plasma display or the like, or a large glass substrate as an intermediate product in the manufacturing process on a pallet.
- FPD flat panel display
- the present invention relates to a storage method and a storage device for a shape.
- a strip-shaped plate glass manufactured by a glass substrate manufacturing kiln is cut into a predetermined size, and the cut rectangular large glass substrate is conveyed by a conveyor. Then, this is sucked and held by a robot, transferred one by one to a pallet, and stored in a pallet.
- Patent Document 1 JP 2005-298062 A
- Patent Document 2 Japanese Unexamined Patent Application Publication No. 2006-123953
- Patent Document 3 Japanese Patent Laid-Open No. 2005-75366
- Patent Document 4 Japanese Patent Laid-Open No. 2005-75433
- the present invention has been made in view of such circumstances, and a plate-like storage method that can satisfactorily store a large plate-like body such as a large glass substrate one by one on a pallet, and its An object is to provide an apparatus.
- the plate-like body described in this specification is mainly a glass substrate called a so-called 8th generation size (about 2400 mm x about 2160 mm).
- the thickness is about 0.4 mm and the thickness is 0.7 mm.
- a glass substrate with a thickness of 0.7 mm has a mass of about 10 kg per sheet.
- the plate-like body is positioned on the pallet. It can be stored without misplacement, but when using a general-purpose robot that is generally used, the movement of the general-purpose robot will vary, and the plate will not be displaced due to the performance limit of the robot during storage. can not deny. Therefore, even if a general-purpose robot is used by controlling the inclination angle (posture) of the pallet using its own weight (gravity) and sliding the plate toward the positioning position, Providing a device that can store the device without being displaced is also desirable from the viewpoint of cost reduction of the device. In this case, as explained earlier, if the pallet tilt angle is set too large, a loss of time will occur when replacing the pallet!
- the present invention provides a method for storing a plate-like body in which a rectangular plate-like body is stored on a pallet one by one.
- a pedestal comprising two side positioning members fixed to the upper material and arranged in an L shape, the first side of the positioning member being positioned below the pallet, and the upper material and The pallet is tilted so that the angle formed with the horizontal plane is 40 degrees or more, and the pallet is tilted so that the angle formed between the first side of the positioning member and the horizontal plane is 10 degrees or more.
- the plate-like bodies are stored one by one in the inclined posture.
- the lower part of the pallet refers to the lower part when the pallet is inclined so that the angle between the upper material and the horizontal surface is 40 degrees or more.
- the plate-like body housed in the pallet is slid by gravity due to the inclined arrangement of the pallet, and a side portion of the plate-like body comes into contact with the positioning member. Therefore, it is preferable that the pallet is positioned at a predetermined position.
- the pallet is placed in a plate-shaped storage device that stores a rectangular plate-shaped material one by one on the pallet pedestal.
- First and second tilting means to be tilted, and transporting means for transporting and storing the plate-like bodies one by one on the pallet uppering material tilted by the tilting means A positioning member having two sides arranged in an L shape for positioning the plate-like body at a predetermined position of the pallet is fixed to the upper material, and the first tilting means is a first member of the positioning member.
- the side of the pallet is positioned below the pallet and the pallet is inclined so that the angle between the upper material and the horizontal plane is 40 degrees or more.
- One The pallet is tilted so that the angle between the side and the horizontal plane is 10 degrees or more.
- the inclining means inclines the pallet so that an angle formed with the horizontal plane is 40 degrees or more in a state where the edge of the pallet is parallel to the horizontal plane, and the pallet upper material surface
- the pallet is tilted so that the angle formed by the first side of the positioning member and the horizontal plane is 10 degrees or more by rotating about an axis orthogonal to the axis.
- the conveying means conveys and stores the plate-like bodies one by one on the inclined pallet.
- This angle may be 40 degrees or more, but is preferably set to 40 degrees to 50 degrees because the pallet replacement time described above becomes longer as the angle increases.
- the upper limit of the angle is preferably about 72 degrees from the viewpoint of not causing stagnation in the stored plate-like body.
- the pallet when the pallet is tilted so that the angle between the first side of the positioning member and the horizontal plane is 10 degrees or more, the pallet is tilted to 40 degrees or more, which is combined with the plate-like body.
- the plate-like body starts to slide toward the positioning position due to its own weight.
- the side portion of the plate-like body is brought into contact with the positioning member, and the plate-like body is positioned at a predetermined position on the pallet.
- the plate-like body does not slip, and the positioning time decreases as the inclination angle increases.
- 10 to 20 degrees is preferable.
- the slippage of the plate-like body depends on the frictional resistance between the positioning member and the plate-like body when there is a positioning member. Therefore, it is preferable to attach a glass end face sliding member such as kraft paper to the positioning member to improve the sliding property of the plate-like body with respect to the pallet.
- the pallet is inclined so that the angle between the edge of the pallet and the horizontal plane is 40 degrees or more in a state in which the edge of the pallet is parallel to the horizontal plane, and the axis is perpendicular to the upper pallet surface of the pallet.
- the pallet is tilted to 10 degrees or more, and the plates are transported and stored one by one in the tilted pallet. It can be stored well one by one on the pallet.
- FIG. 1 is a side sectional view of a flat pallet.
- FIG. 2 is a plan view of the flat pallet shown in FIG.
- FIG. 3 is a plan view of the base of the flat pallet shown in FIG.
- FIG. 4 is a perspective view of the upper pallet of the flat pallet shown in FIG.
- FIG. 5 is a schematic plan view of a glass substrate storage device.
- FIG. 6 is an explanatory view showing the operation of the pallet tilting apparatus.
- FIG. 7 is a schematic structural diagram of a first tilting device.
- FIG. 8 is a schematic structural diagram of a second tilting device.
- FIG. 1 is a side sectional view of a flat pallet 1 in which a glass substrate 4 called 8th generation size (about 2400 mm ⁇ about 2160 mm) is stored.
- the pallet 1 is composed of a pedestal 3 and an upper lid 2 placed on the pedestal 3, and about 120 glass substrates 4 are stored in a horizontally stacked state.
- a pressing member 7 that presses the laminated glass substrate 4 from above to the pedestal 3 is disposed on the upper lid 2 of the pallet 1.
- Fig. 2 is a plan view of the pallet 1, which matches the shape of the glass substrate 4 to be stored. Accordingly, the plan view is rectangular.
- the upper lid 2 is removed from the pedestal 3 by appropriate means such as human power or a robot when the glass substrate is loaded on the pedestal 3 and when the glass substrate is taken out from the pedestal 3. Further, the upper lid 2 is fixed to the pedestal 3 by the clamp 10 so that it is not displaced from the pedestal 3 or dropped when the pallet 1 is transported.
- the pallet 1 needs to have a structure capable of withstanding the weight and rigidity when a large number of glass substrates 4 are loaded.
- the lighter the weight the better the transport efficiency and the storage efficiency.
- the weight when the glass substrate 4 is loaded is preferably 2000 kg or less.
- FIG. 3 is a plan view of the base 3.
- the pedestal 3 has a frame body 30 formed by assembling a plurality of steel or non-ferrous metal shaped steels in the form of a grid in the vertical and horizontal directions.
- the glass substrate 4 is laminated on the top material 5 (the bottom plate on which the glass substrate is laminated) 5 is fixed, and the glass substrate 4 protective material 6 (see FIG. 4) is fixed on the top material 5.
- the side plates 14 and 15 that are positioning members of the glass substrate 4 are arranged in an L shape in parallel with the two sides of the upper material 5 and fixed.
- the positioning members in this example, the side plates 14 and 15
- the positioning members are arranged so that the two sides forming the L-shape are parallel to the two adjacent sides of the pallet 1.
- the two sides forming the L-shape are connected as in this example in terms of easy attachment to and removal from the palette, but they may not be connected.
- the length dimension of the positioning member is not particularly specified as long as it is determined in accordance with the size of the glass substrate. However, if the dimensional force is too large, it may be difficult to position the glass substrate stably.
- the positioning member is preferably disposed in the vicinity of the edge of the pallet.
- FIG. 4 is a perspective view of the upholstery material 5.
- the upper material 5 is a non-ferrous metal plate such as an iron plate or aluminum, so that the glass substrate 4 can be stably placed on the pedestal 3 and can prevent dust from entering the interior space of the pallet that houses the glass substrate 4. It is arranged for.
- the side plates 14 and 15 may be iron plates or iron square pipes.
- the glass substrate 4 protective material 16, 17 has a glass end face sliding member 19, 20, such as kraft paper, ultra high molecular weight polyethylene (UPE), fluorine Fat etc. are pasted.
- the glass substrate 4 is brought into contact with the glass end surface sliding members 19 and 20 attached to the protective members 16 and 17 fixed to the side plates 14 and 15, and is loaded in this state.
- the glass substrate 4 is positioned in the horizontal direction with respect to the base 3.
- the pallet of the glass substrate 4 by the storage device described later is used.
- the glass substrate 4 slides on the glass end surface sliding member 20 due to its own weight, and the vertical side of the glass substrate 4 abuts against the protective material 16, thereby positioning the glass substrate 4 in the horizontal direction.
- the side plates 14 and 15 are arranged in the L shape on the two sides of the pallet so that the glass substrate 4 can be easily taken out in the subsequent process. If the glass substrate 4 is also removed when the end surface of the glass substrate 4 and the protective materials 16 and 17 fixed to the side plates 14 and 15 are in contact, the protective materials 16 and 17 may be damaged due to friction caused by the end surfaces. Therefore, the side plates 14 and 15 are preferably detachable so that they can be replaced as appropriate.
- the base 3 and the side plates 14 and 15 may be made of a non-metallic material such as non-ferrous metal such as aluminum as long as it can secure the strength to support the glass substrate 4.
- the protective material 6, 16, 17 is preferably a material that can efficiently absorb, for example, a vibration frequency of 8 to 20 Hz in consideration of the frequency generated in the vehicle (or airplane) itself during land transportation or air transportation. .
- vibration absorbing materials such as rubber, silicone, and various types of resin can be used.
- the upper lid 2 has an opening on the lower surface and surrounds the outside of the loaded plate-like body 4 from above. As shown in Fig. 1, four side covers 12, a top cover 13 and An internal space S for accommodating the glass substrate 4 is defined.
- the four side covers 12, the top cover 13, and the upper material 5 of the pedestal 3 prevent foreign matters such as dust from entering the internal space S.
- the side cover 12 and the top cover 13 may be made of steel, but the upper lid 2 needs to be attached and removed, so it is preferable that the cover is light. Therefore, it is preferable that only the frame portion of the upper lid 2 is made of steel, and the side cover 12 and the top cover 13 are made of a resin film or a plate-like body.
- the pallet 1 is transported to a destination by a forklift, a truck, an airplane or the like. But Therefore, the glass substrate 4 is pressed by the pressing member 7 so that the individual glass substrates 4 do not move in the pallet 1 during the conveyance.
- the pressing member 7 does not move the individual glass substrates 4 in the pallet 1 during the conveyance, the glass substrate 1 is free from defects such as chips, wrinkles, and cracks.
- the glass substrate 4 can be easily taken out in the subsequent process.
- two forklift holes 11 for receiving a fork of a forklift are formed in the base 3 in one shape steel frame member.
- the fork of the forklift can be received with respect to the knot ⁇ let 1 both in the vertical and horizontal directions and in the direction of displacement of the pedestal 3.
- the glass substrate 4 suitable to be stored in the pallet 1 is a large glass substrate having a plate thickness of 0.4 mm to 1.3 mm and a longitudinal and lateral force of about 1800 mm ⁇ 2000 mm to 2400 mm ⁇ 2800 mm.
- the thin substrates 18 are stacked with the thin interleaf paper 18 sandwiched between the glass substrates 4 and 4.
- the interleaf paper 18 is air permeable and has a rough surface with a smoothness of 18 seconds or less (JIS P 8119, 1976).
- the paper quality is preferably such that it is transferred to the surface of the glass and does not cause paper texture, burns, or smudges.
- the grease content of the interleaf paper 18 is 0.05% or less (JIS P 8205, 1976), and the quality of the glass substrate 4 itself is not adversely affected by the combined effect with the paper surface roughness described above! /, It is like paper quality.
- FIG. 5 is a schematic plan view of the glass substrate storage device (plate-shaped storage device) 50 of this example.
- a storage device 50 shown in the figure is installed adjacent to a conveyor 52 installed downstream of a glass substrate manufacturing kiln (not shown), and includes a robot (conveying means) 54 and a pallet tilting device (tilting hand). Dan) It is composed mainly of 56.
- the robot 54 is a general-purpose six-axis articulated robot, and a rectangular suction hand 60 in which a number of suction pads (not shown) are arranged flush with each other is connected to the tip of the arm 58. ing.
- the robot 54 is swung in the arrow direction to the sampling position. And adsorption
- the glass substrate 4 is adsorbed by the hand 60 through the interleaf paper 18, and thereafter, the glass substrate 4 is stored together with the interleaf paper 18 in the pallet 1 that is previously inclined at a predetermined angle by the pallet inclination device 56.
- the glass substrates 4 are stored on the pallet 1 one by one.
- the robot 54 is not limited to a 6-axis articulated robot, and may be a dedicated robot as long as it can transport a glass plate regardless of its configuration and name.
- the glass substrates 4 are stored (stacked) one by one in the pallet 1 with the pallet 1 being horizontal, they are stacked with the uppermost glass substrate 4 stored first. Since the air intervening between the glass substrate 4 and the next glass substrate 4 is difficult to escape, that is, because the glass substrate 4 is large, air is easily trapped between the glass substrates 4 and 4, so that the glass substrate 4 A small amount of air remaining between the four causes the action of an air bearing, and a problem arises when the positions of the laminated glass substrates 4 are shifted from each other.
- the glass substrate 4 can be stored in the pallet 1 without being displaced.
- tilt angle of 1 is inadvertently set large, it is not preferable because a time loss occurs when changing the pallet.
- the pallet tilting device 56 places the positioning member 15 below the pallet 1 as shown in FIG.
- the pallet 1 is tilted around the axis 62 so that the angular force between the horizontal plane H and the horizontal plane H is 0 degree or more, and the angle between the positioning member 15 and the horizontal plane is 10 degrees as shown in Fig. 6 (B).
- the pallet 1 is tilted by rotating around the shaft 64 orthogonal to the surface of the upper material 5 of the pallet 1.
- the robot 54 shown in FIG. 5 transports and stores the glass substrates 4 one by one on the pallet 1 in the inclined posture.
- the angle formed with the horizontal plane H of the pallet 1 is less than 40 degrees, the above-described problem of air venting is not improved, and when it exceeds 40 degrees, it can be drastically improved.
- This angle is not particularly limited as long as it is 40 degrees or more, but it is preferable to set it to 40 degrees to 50 degrees because the pallet replacement time described above becomes longer as the angle increases.
- the upper limit of the angle is preferably about 72 degrees from the viewpoint of preventing stagnation in the glass substrate 4 housed in the nott 1.
- the glass as shown in FIG. 6 (C) is coupled with the tilt of 40 degrees or more shown in FIG. 6 (A). Due to the weight of the substrate 4, the lower side 4 A of the glass substrate 4 slides on the kraft paper of the protective material 17 in the direction of arrow A, and the vertical side 4 B of the glass substrate 4 contacts the protective material 16. Thereby, the position of the glass substrate 4 in the horizontal direction (plate surface direction) is positioned, and the glass substrate 4 is positioned at a predetermined position on the pallet 1.
- the pallet 1 is inclined so that the angular force formed with the horizontal surface H of the base 3 is 0 degree or more, and the pallet 1 is placed on the surface of the upper covering material 5. Rotate around the orthogonal axis 64 and tilt the pallet 1 more than 10 degrees.
- the large glass substrates 4 can be satisfactorily stored in the pallet 1 one by one.
- the frictional resistance between the glass substrates 4 and 4 becomes low, and the protective material 16 and 17 for the glass substrate 4 fixed to the side plates 14 and 15 If the glass end surface sliding members 19 and 20 are attached to the glass end surface, the frictional resistance between the glass end surface sliding members 19 and 20 and the end surface of the glass substrate 4 is reduced, so that the glass can be stored better.
- FIG. 7 is a schematic structural diagram of a first tilting device 70 in the pallet tilting device 56 that tilts the pallet 1 so that the angle between the base 3 of the pallet 1 and the horizontal plane H is 40 degrees or more.
- FIG. 8 shows a schematic structure of the second tilting device 80 of the pallet tilting device 56, which rotates the pallet 1 by 10 degrees or more by rotating it around an axis 64 orthogonal to the surface of the upper material 5 of the pallet 1.
- FIG. 8 shows a schematic structural diagram of a first tilting device 70 in the pallet tilting device 56 that tilts the pallet 1 so that the angle between the base 3 of the pallet 1 and the horizontal plane H is 40 degrees or more.
- FIG. 8 shows a schematic structure of the second tilting device 80 of the pallet tilting device 56, which rotates the pallet 1 by 10 degrees or more by rotating it around an axis 64 orthogonal to the surface of the upper material 5 of the pallet 1.
- the pallet 1 with the upper lid 2 removed is placed on the table 72, and the table 72 can swing (raise and lower) via the shaft 62.
- the piston 76 of the cylinder device 74 is connected to the table 72.
- the table 72 is raised and lowered around the shaft 62, which can change the posture of the pallet 1 between the position tilted more than 40 degrees and the horizontal position. it can.
- the table 72 on which the pallet 1 is placed is provided so as to be swingable via the shaft 64, and the cylinder device is provided at the edge of the table 72.
- Two pistons 84 are connected via a bracket 86.
- the piston 84 is expanded and contracted, the table 72 is swung through the shaft 64, whereby the posture of the pallet 1 can be adjusted to a position inclined by 10 degrees or more.
- the cylinder is exemplified as the tilting device.
- any mechanism may be used as long as the pallet 1 can be tilted by motor drive.
- the glass substrate 4 has been described as the plate to be stored, but it can also be applied to a plate such as a resin plate or a metal plate.
- the present invention is particularly suitable for storing in a pallet a large glass substrate for a flat panel display such as a liquid crystal display or a plasma display, or a large glass substrate which is an intermediate product in the manufacturing process. It should be noted that the entire contents of the specification, claims, drawings and abstract of the Japanese Patent Application 2006-199418 filed on July 21, 2006 are cited here as disclosure of the specification of the present invention. Incorporate.
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Robotics (AREA)
- Pallets (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007800273420A CN101489883B (zh) | 2006-07-21 | 2007-06-06 | 板状体的收纳方法及收纳装置 |
KR1020087025689A KR101364947B1 (ko) | 2006-07-21 | 2007-06-06 | 판상체의 수납 방법 및 수납 장치 |
JP2008525806A JP4998805B2 (ja) | 2006-07-21 | 2007-06-06 | 板状体の収納方法及び収納装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006-199418 | 2006-07-21 | ||
JP2006199418 | 2006-07-21 |
Publications (1)
Publication Number | Publication Date |
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WO2008010358A1 true WO2008010358A1 (fr) | 2008-01-24 |
Family
ID=38956693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/061489 WO2008010358A1 (fr) | 2006-07-21 | 2007-06-06 | Procédé et appareil pour stocker un corps en forme de planche. |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4998805B2 (fr) |
KR (1) | KR101364947B1 (fr) |
CN (1) | CN101489883B (fr) |
TW (1) | TW200808619A (fr) |
WO (1) | WO2008010358A1 (fr) |
Cited By (3)
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JPWO2008010358A1 (ja) * | 2006-07-21 | 2009-12-17 | 旭硝子株式会社 | 板状体の収納方法及び収納装置 |
CN101654152B (zh) * | 2009-05-31 | 2011-12-21 | 江苏蓝星玻璃有限公司 | Low-E镀膜玻璃异地加工包装方法 |
JP2017065726A (ja) * | 2015-09-30 | 2017-04-06 | AvanStrate株式会社 | 素板ガラス梱包装置、素板ガラスの梱包方法、及び素板ガラス梱包体 |
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JP2011126546A (ja) * | 2009-12-15 | 2011-06-30 | Shin-Etsu Chemical Co Ltd | ガラス基板搬送用ケースおよびガラス基板搬送用台車 |
CN101817004A (zh) * | 2010-04-12 | 2010-09-01 | 中国电子科技集团公司第四十五研究所 | 一种电池片自动分选装置 |
TWI429566B (zh) * | 2012-01-05 | 2014-03-11 | Mas Automation Corp | Automatic Edge Method and Device for Plate - like Material |
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JPWO2008010358A1 (ja) * | 2006-07-21 | 2009-12-17 | 旭硝子株式会社 | 板状体の収納方法及び収納装置 |
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Also Published As
Publication number | Publication date |
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TW200808619A (en) | 2008-02-16 |
JPWO2008010358A1 (ja) | 2009-12-17 |
CN101489883B (zh) | 2010-11-03 |
KR101364947B1 (ko) | 2014-02-19 |
JP4998805B2 (ja) | 2012-08-15 |
CN101489883A (zh) | 2009-07-22 |
KR20090033322A (ko) | 2009-04-02 |
TWI335293B (fr) | 2011-01-01 |
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