WO2005012726A1 - 電磁式ポンプの固定子 - Google Patents
電磁式ポンプの固定子 Download PDFInfo
- Publication number
- WO2005012726A1 WO2005012726A1 PCT/JP2004/011047 JP2004011047W WO2005012726A1 WO 2005012726 A1 WO2005012726 A1 WO 2005012726A1 JP 2004011047 W JP2004011047 W JP 2004011047W WO 2005012726 A1 WO2005012726 A1 WO 2005012726A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mover
- electromagnetic
- pump
- stator
- yoke
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
- F04B17/04—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors using solenoids
- F04B17/042—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors using solenoids the solenoid motor being separated from the fluid flow
Definitions
- the present invention relates to a stator for an electromagnetic pump, and more particularly to a compact stator for an electromagnetic pump used for transporting a fluid such as a gas or a liquid.
- the present applicant first accommodates a movable member made of a magnetic material in a cylinder chamber on the stator side in a reciprocating manner, and energizes an electromagnetic coil fitted around the cylinder to thereby move the movable member in the moving direction.
- an electromagnetic coil fitted around the cylinder to thereby move the movable member in the moving direction.
- fluid is sucked in from the outside through the first valve, fluid is sent out through the second valve, and the other is pumped out.
- Patent Document 1 See Patent Document 1.
- FIG. 7 shows a cross-sectional structure of a main part of the mover 101 and the stator 102.
- the cylinder between the mover 101 and the stator 102 is omitted.
- the magnetic flux generated from the N pole side of the magnet 103 of the mover 101 returns to the S pole side of the magnet 103 via the inner yoke 104a, the outer yoke 105, and the inner yoke 104b.
- the electromagnetic coils 106a and 106b When the electromagnetic coils 106a and 106b are energized, the electromagnetic coils 106a and 106b receive the electromagnetic force from the above-described magnetic field.
- the electromagnetic coils 106a and 106b are fixed to the stator 101 side. 102 moves in the cylinder axis direction (vertical direction in Fig. 7).
- Patent Document 1 Japanese Patent Application No. 2002-286188
- the present invention has been made to solve these problems, and aims at improving the output efficiency of the pump by reducing the leakage magnetic flux, and reducing the noise at the time of driving to achieve stable pump characteristics.
- An object of the present invention is to provide an electromagnetic pump stator obtained.
- the present invention has the following configuration to achieve the above object.
- a mover provided with a magnetic material is accommodated in a cylinder whose both end surfaces are closed by a pair of frame members so as to be able to reciprocate in the axial direction, and between the both sides in the movement direction of the mover and the inner wall surface of the frame member.
- a stator of an electromagnetic pump in which a pump chamber is formed and an air-core electromagnetic coil is fitted around the cylinder, a yoke made of a magnetic material is provided on an axial end face of the electromagnetic coil.
- a plurality of electromagnetic coils are fitted around the cylinder, and a yoke made of a magnetic material is provided on both end faces in the axial direction of each electromagnetic coil.
- a yoke made of a magnetic material is provided between adjacent end faces of the plurality of electromagnetic coils via a spacer or a gap made of a nonmagnetic material.
- a yoke provided on the end face of each electromagnetic coil extends on the inner wall side of the electromagnetic coil facing the magnetic flux acting surface of the mover.
- the magnetic flux generated from the mover passes through the yoke made of magnetic material provided on the axial end face of the electromagnetic coil on the stator side, and the magnetic flux returning to the mover increases. Leakage magnetic flux is reduced, and the number of magnetic fluxes linked by energizing the electromagnetic coil is surely increased, so that the pump output efficiency can be improved without increasing the size of the stator.
- the number of magnetic fluxes linked by energizing each electromagnetic coil can be improved.
- a yoke made of a magnetic material is provided between adjacent end faces of a plurality of electromagnetic coils through a spacer or a gap made of a non-magnetic material, or a yoke provided on an end face of each electromagnetic coil is a movable element.
- the movable element In the case where the movable element is extended on the inner wall side of the electromagnetic coil opposite to the magnetic flux acting surface, the movable element can reciprocate from the center of the movable range in the cylinder axial direction and hit the frame body. Because there is no noise, noise is reduced and stable pump characteristics are obtained.
- FIG. 1 is a cross-sectional view showing an overall configuration of an electromagnetic pump according to the present invention.
- FIG. 2 is a partial cross-sectional view showing a configuration of a stator of the electromagnetic pump according to the first embodiment.
- FIG. 3 is a partial cross-sectional view illustrating a configuration of a stator of an electromagnetic pump according to a second embodiment.
- FIG. 4 is an explanatory view of the operation of the mover when no power is supplied.
- FIG. 5 is an explanatory view of the operation of the mover when no power is supplied.
- FIG. 6 is a partial sectional view showing a configuration of a stator of an electromagnetic pump according to a third embodiment.
- FIG. 7 is a partial cross-sectional view showing a configuration of a stator of an electromagnetic pump showing a problem to be solved.
- FIG. 1 is a sectional view showing the overall configuration of an electromagnetic pump according to the present invention.
- a mover provided with a magnet is slidably disposed in a cylinder formed in a cylindrical shape in the axial direction of the cylinder, and an electromagnetic force of an electromagnetic coil disposed on the outer periphery of the cylinder is provided. Is applied to the mover, and the mover is reciprocated to perform a pump action.
- the mover 10 is accommodated in a closed cylinder and provided so as to be able to reciprocate in the axial direction of the cylinder.
- the mover 10 is composed of a magnet 12 formed in a disk shape and a pair of inner yokes 14a and 14b sandwiching the magnet 12 in the thickness direction.
- the magnet 12 is a permanent magnet magnetized in the thickness direction (vertical direction in FIG. 1) with one surface being an N pole and the other surface being an S pole.
- the inner yokes 14a and 14b are formed of a magnetic material, and the inner yokes 14a and 14b are It has a flat plate portion 15a formed slightly larger in diameter than the magnet 12, and a short cylindrical upright flange portion 15b around the flat plate portion 15a.
- the outer peripheral surface of the flange portion 15b becomes a magnetic flux acting surface on the mover 10 side of the magnetic flux generated from the magnet 12.
- the sealing material 16 is a non-magnetic material such as plastic which covers the outer peripheral side surface of the magnet 12.
- the sealing material 16 acts to cover the magnet 12 so that the magnet 12 does not expand and to prevent the magnet 12 from being exposed to the outside. It has the function of integrally forming the inner yokes 14a and 14b.
- the sealing material 16 is a force provided so as to fill the outer peripheral side surface of the magnet 12 sandwiched between the inner yokes 14a and 14b.
- the outer diameter of the sealing material 16 is slightly smaller than the outer diameter of the inner yokes 14a and 14b. Is formed.
- the sealing material 16 By forming the sealing material 16 in this manner, when finishing the outer peripheral surfaces of the inner yokes 14a and 14b, the sealing material 16 does not contact the grinding blade, and the work can be performed without damaging the grinding blade. Advantages and when the thermal expansion coefficient of the sealing material 16 is larger than the thermal expansion coefficient of the inner yokes 14a and 14b, when the pump is used in a high temperature state, the gap between the movable element 10 and the cylinder becomes larger. There is an advantage in that the pump can be prevented from being reduced or lost due to thermal expansion and can be operated stably.
- a cylindrical cylinder is formed by combining an upper frame body 20a and a lower frame body 20b made of a pair of non-magnetic materials, and the above-described mover 10 is housed in the cylinder so as to be able to reciprocate.
- a cylinder portion 24 formed in a cylindrical shape is formed on the frame body 22b of the lower frame body 20b.
- a sealing material 29 is provided at a portion of the fitting groove 28 where the end surface of the cylinder portion 24 contacts, and the inside of the cylinder is sealed from the outside by abutting the end surface of the cylinder portion 24 against the sealing material 29.
- the cylinder portion 24 can be extended from the upper frame body 20a and fitted to the lower frame body 20b. Further, the cylinder portion 24 may be formed separately from the upper frame body 20a and the lower frame body 20b.
- both end surfaces of the cylinder are closed by the upper frame body 20a and the lower frame body 20b.
- the pump chambers 30a, 30b are each formed with a force S between both sides in the moving direction of the mover 10 and the inner wall surfaces of the upper and lower frame bodies 20a, 20b.
- the pump chambers 30a and 30b correspond to gaps formed between the end faces of the mover 10 and the frame body 22a of the upper frame 20a and the frame body 22b of the lower frame 20b.
- the mover 10 slides in a state in which the mover 10 is in air-tight or liquid-tight seal with the cylinder portion 24 while in contact with the inner surface of the cylinder portion 24.
- the outer yoke of the inner yokes 14a and 14b is coated with a fluororesin coating, such as DLC (diamond 'like' carbon) coating, which has both lubricity and protection. Apply.
- a detent that prevents the mover 10 from rotating in the circumferential direction can be provided.
- Dampers 32 are attached to the end faces (inner wall surfaces) of the frame bodies 22a and 22b.
- the damper 32 is provided to absorb the impact when the inner yokes 14a, 14b abut on the end faces of the frame bodies 22a, 22b at the end position of the movable range of the mover 10.
- the damper 32 may be provided on the end faces of the inner yokes 14a and 14b, which are in contact with the frame bodies 22a and 22b, instead of the force provided on the end faces of the frame bodies 22a and 22b.
- a suction valve 34a and a delivery valve 36a are provided in the frame body 22a of the upper frame 20a in communication with the pump chamber 30a.
- a suction valve 34b and a delivery valve 36b are provided in the frame main body 22b of the lower frame 20b so as to communicate with the pump chamber 30b.
- the upper frame 20a and the lower frame 20b are provided with suction channels 38a, 38b which are in communication with the suction valves 34a, 34b.
- the upper frame 20a and the lower frame 20b are provided with delivery channels 40a, 40b communicating with the delivery valves 36a, 36b.
- the suction flow path 38a of the upper frame 20a and the suction flow path 38b of the lower frame 20b are connected by a communication pipe 42, and the delivery flow path 40a of the upper frame 20a and the delivery flow path 40b of the lower frame 20b.
- a communication pipe 44 are connected by a communication pipe 44.
- the suction channel and the delivery channel of the upper frame 20a and the lower frame 20b communicate with one suction port 38 and one delivery port 40, respectively.
- air-core electromagnetic coils 50a and 50b are fitted around the cylinder.
- the electromagnetic coils 50a and 50b are slightly spaced apart in the axial direction of the cylinder, and are arranged at an equal position with respect to the center position in the axial direction of the cylinder.
- Electromagnetic coil 50a, 50b The axis length is set longer than the movable range of the flange portion 15b of the inner yokes 14a, 14b.
- the winding directions of the electromagnetic coil 50a and the electromagnetic coil 50b are opposite to each other, and the currents are set to flow in opposite directions when energized by the same power supply.
- the outer yoke 52 is provided in a cylindrical shape so as to surround the outer periphery of the electromagnetic coils 50a and 50b.
- the outer yoke 52 is provided to increase the number of magnetic fluxes linked to the electromagnetic coils 50a and 50b by using a magnetic material and to effectively apply an electromagnetic force to the mover 10. Further, since the flange portion 15b is provided in the periphery of the inner yokes 14a and 14b constituting the mover 10 so as to stand in the axial direction, the magnetic flux generated from the magnet 12 is transferred from the inner yokes 14a and 14b to the outer yoke 52. This is to reduce the magnetic resistance of the magnetic circuit.
- the electromagnetic coils 50a, 50b and the outer yoke 52 are formed by fitting the outer yoke 52 into the fitting grooves 28 provided in the upper frame 20a and the lower frame 20b when the upper frame 20a and the lower frame 20b are combined. Can be assembled concentrically with part 24.
- the mover 10 is reciprocally driven (moves up and down) by the action of the electromagnetic force generated by the electromagnetic coils 50a and 50b by applying an alternating current to the electromagnetic coils 50a and 50b.
- the electromagnetic force generated by the electromagnetic coils 50a and 50b pushes the mover 10 in one direction and the other direction depending on the direction of current supply to the electromagnetic coils 50a and 50b.
- the mover 10 can be reciprocally driven with an appropriate stroke. When the mover 10 contacts the inner surfaces of the frame bodies 22a and 22b, the impact can be absorbed by the action of the damper 32.
- a sensor for detecting the moving position of the mover 10 in the cylinder is provided, and the The reciprocation of the mover 10 can also be controlled based on the sensor detection signal.
- a method for detecting the moving position of the mover 10 includes a method of providing a magnetic detection sensor for detecting the moving position of the mover 10 outside the cylinder, and a method of providing a pressure-sensitive sensor on the damper 32 so that the mover 10 A method of detecting the point of contact is possible.
- the moving stroke of the mover 10 is relatively small, but the pump chambers 30a and 30b can secure a relatively large area. Thus, it is possible to secure a constant flow rate.
- the pump action of the electromagnetic pump of the present embodiment is performed by the action that the fluid is alternately sucked into the pump chambers 30a and 30b and sent out by reciprocating the mover 10 by the electromagnetic coils 50a and 50b. That is, when the mover 10 moves downward in the state of FIG. 1, fluid is introduced into one pump chamber 30a, and fluid is simultaneously sent out from the other pump chamber 30b. Conversely, when the mover 10 moves upward, fluid is sent from one pump chamber 30a and fluid is introduced into the other pump chamber 30b. Thus, when the mover 10 moves to either side, the fluid is sucked and exhausted, the pulsation of the fluid is suppressed, and the fluid can be transported efficiently.
- the electromagnetic pump according to the present embodiment has inner needles 14a and 14b each having a flange 15b attached to the movable element 10, and has suction valves 34a and 34b and a delivery valve 36a close to both end faces of the movable element 10. And 36b, it has become possible to provide an extremely thin and small pump.
- a small pump with a height of about 15 mm and a width of about 20 mm can be constructed.
- the electromagnetic pump of the present embodiment can be used for transporting gas or fluid such as water or antifreeze, and the type of fluid is not limited.
- a fluid pump if the transport pressure is insufficient with one mover 10, a multi-stage type that connects a plurality of unit movers of the same shape consisting of a magnet 12 and inner yokes 14a and 14b may be used. It is sufficient to use the moving element 10. By connecting the unit movers in multiple stages, a mover having a large thrust can be obtained, and an electromagnetic pump having a required transport pressure can be obtained.
- Example 1 a characteristic configuration of the stator 60 of the electromagnetic pump will be described with reference to FIGS.
- valves and flow paths communicating with the cylinder section 24 and the pump chamber are omitted.
- yokes 26a, 26b, 26c made of a magnetic material are provided on the axial end faces of the electromagnetic coils 50a, 50b.
- yokes 26a and 26c are provided adjacent to the end surface of the electromagnetic coil 50a
- yokes 26c and 26b are provided adjacent to the end surface of the electromagnetic coil 50b.
- the yoke 26c provided between the electromagnetic coils 50a and 50b is shared.
- the magnetic flux passing through the inner yokes 14a and 14b from the magnet 12 of the mover 10 acts on the electromagnetic coils 50a and 50b on the stator 60 side through the flange portion 15b.
- a magnetic circuit is formed by the yoke 26a, the outer yoke 52, and the yoke 26c adjacent to the end face of the electromagnetic coil 50a, the leakage magnetic flux can be reduced and the magnetic flux can be used effectively.
- a magnetic circuit is formed by the yoke 26b, the outer yoke 52, and the yoke 26c adjacent to the end face of the electromagnetic coil 50b, the leakage magnetic flux can be reduced and the magnetic flux can be used effectively.
- FIG. 2 illustrates the case where the electromagnetic coils 50a and 50b have two stages, the number of the electromagnetic coils can be further increased by using a plurality of magnets 12 on the mover 10 side.
- FIG. 3 it is the same that the electromagnetic coils 50a and 50b are fitted around the cylinder.
- the electromagnetic coils 50a and 50b are fitted around the cylinder.
- two yokes 26d and 26e are provided for the force S, and the yokes 26d and 26e Tosei wood power
- a spacer 25 is provided. Note that a gap (space) may be provided instead of the spacer 25.
- the spacer 25 (or gap) is provided between the yokes 26d and 26e in this manner, the movable element 10 is displaced upward or downward in FIG. 3 within the movable range without energizing the electromagnetic coils 50a and 50b.
- the restoring force of the mover 10 to return to the center in the axial direction in FIG. 3 increases, and the movable member 10 does not hit the frame body, so that noise is reduced and stable pump characteristics can be obtained.
- FIG. 4 shows a state in which the mover 10 has been displaced upward from the state shown in FIG.
- the mover 10 has an artificial force S that receives an attractive force in a direction in which the magnetic resistance is small (a direction in which magnetic flux flows easily).
- a large attractive force is applied to the magnetic circuit between the mover 10 and the yokes 26d and 26e by the yoke 26d, the outer yoke 52, and the yoke 26e, so that the mover 10 receives a restoring force downward (toward the center of the movable range).
- the mover 10 displaced upward is provided by the yokes 26a and 26e.
- the yoke 26a, the yoke 52, and the yoke 26e are provided. Since the suction force to the small yokes 26d and 26e is small, the downward restoring force, that is, the force to return to the center position of the movable range acts.
- FIG. 5 shows a state where the mover 10 is slightly displaced upward.
- a large suction force acts on the yoke 26a (upward) between the mover 10 and the yokes 26a and 26c. That is, a magnetic circuit which returns the magnetic flux applied from the inner yoke 14a to the inner yoke 14b through a magnetic path including the yoke 26a, the outer yoke 52, and the yoke 26c is formed. Therefore, the more the movable element 10 is displaced upward, the greater the force to be sucked upward.
- FIG. 6 two yokes 27d and 27e are provided for the force S on adjacent end faces of the electromagnetic coils 50a and 50b, and a spacer 25 (or a gap) made of a non-magnetic material is provided on the yokes 27d and 27e.
- the row f is provided with the yokes 27a, 27d, 27e, 27b provided on the end faces of the electromagnetic coils 50a, 50b on the magnetic flux acting surface (flange 15b) of the mover 10.
- the inner yokes 14a, 14b mounted on the mover 10 are provided with the flange portions 15b.
- the inner yokes 14a, 14b are not provided with the flange portions 15b. It is also possible to form a single plate. In this case, the mass of the mover 10 increases, thereby deteriorating the high-speed response and hindering the thinning of the pump device.However, the structure is simplified, and productivity can be improved and production costs can be reduced.
- the magnet 12 is mounted on the mover 10 and the magnet 12 is sandwiched by the inner yokes 14a and 14b.The force mover 10 does not have to always have the magnet 12. .
- the mover 10 When the mover 10 is formed of a magnetic material and the mover 10 is at a position deviated from one of the electromagnetic coils 50a and 50b, only one of the electromagnetic coils is energized to move the mover 10 in the axial direction. Then, when the movable element has been moved to the deviated position with respect to the other electromagnetic coil, the other electromagnetic coil is energized, and the energization of one of the electromagnetic coils is stopped. it can . In this way, it is also possible to control the energization of the pair of electromagnetic coils to ON-OFF. It is possible to reciprocate the moving element 10 in the axial direction.
- the electromagnetic pump shown in FIG. 1 communicates with suction passages 38a and 38b provided on one side and the other side of the mover 10, and has a delivery pump provided on one side and the other side of the mover 10. Force that is an example of connecting the flow paths 40a and 40b in parallel, so to speak, a plurality of electromagnetic pumps can be used by connecting the flow paths in series.
- the delivery channel 40a may be connected to the suction channel 38b, or the delivery channel 40b may be connected to the suction channel 38a.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Electromagnetic Pumps, Or The Like (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/566,469 US7621724B2 (en) | 2003-08-01 | 2004-08-02 | Stator for solenoid pumps |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003-285243 | 2003-08-01 | ||
JP2003285243A JP4570342B2 (ja) | 2003-08-01 | 2003-08-01 | 電磁ポンプの固定子 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005012726A1 true WO2005012726A1 (ja) | 2005-02-10 |
Family
ID=34113871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/011047 WO2005012726A1 (ja) | 2003-08-01 | 2004-08-02 | 電磁式ポンプの固定子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7621724B2 (ja) |
JP (1) | JP4570342B2 (ja) |
CN (1) | CN1846063A (ja) |
WO (1) | WO2005012726A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006230103A (ja) * | 2005-02-17 | 2006-08-31 | Shinano Kenshi Co Ltd | 電磁駆動アクチュエータ及び電磁式ポンプ |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3736444A1 (en) * | 2019-05-09 | 2020-11-11 | Excillum AB | Electromagnetic pump |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5485404U (ja) * | 1977-11-30 | 1979-06-16 | ||
JPS5828468Y2 (ja) * | 1978-03-08 | 1983-06-21 | 日立金属株式会社 | 往復駆動装置 |
JPH0413431Y2 (ja) * | 1987-09-14 | 1992-03-27 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5485404A (en) | 1977-12-20 | 1979-07-07 | Nec Corp | Cooling system for air pump |
US4965864A (en) * | 1987-12-07 | 1990-10-23 | Roth Paul E | Linear motor |
JPH03107360A (ja) * | 1989-09-20 | 1991-05-07 | Atsugi Unisia Corp | 駆動装置 |
JP2803924B2 (ja) * | 1991-07-09 | 1998-09-24 | 財団法人鉄道総合技術研究所 | 電磁空心コイル内静磁誘導可動磁子リニアモータ |
DE10003882C2 (de) * | 2000-01-29 | 2003-10-02 | Bitzer Kuehlmaschinenbau Gmbh | Kältemittelkompressor |
KR100449009B1 (ko) * | 2001-11-27 | 2004-09-18 | 삼성전자주식회사 | 리니어 압축기 |
JP4206248B2 (ja) | 2002-09-30 | 2009-01-07 | シナノケンシ株式会社 | 電磁式ポンプ |
US6971861B2 (en) * | 2003-02-19 | 2005-12-06 | Black Arthur L | High speed unloader for gas compressor |
-
2003
- 2003-08-01 JP JP2003285243A patent/JP4570342B2/ja not_active Expired - Lifetime
-
2004
- 2004-08-02 CN CNA2004800255452A patent/CN1846063A/zh active Pending
- 2004-08-02 US US10/566,469 patent/US7621724B2/en active Active
- 2004-08-02 WO PCT/JP2004/011047 patent/WO2005012726A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5485404U (ja) * | 1977-11-30 | 1979-06-16 | ||
JPS5828468Y2 (ja) * | 1978-03-08 | 1983-06-21 | 日立金属株式会社 | 往復駆動装置 |
JPH0413431Y2 (ja) * | 1987-09-14 | 1992-03-27 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006230103A (ja) * | 2005-02-17 | 2006-08-31 | Shinano Kenshi Co Ltd | 電磁駆動アクチュエータ及び電磁式ポンプ |
Also Published As
Publication number | Publication date |
---|---|
US20060239835A1 (en) | 2006-10-26 |
US7621724B2 (en) | 2009-11-24 |
CN1846063A (zh) | 2006-10-11 |
JP4570342B2 (ja) | 2010-10-27 |
JP2005054637A (ja) | 2005-03-03 |
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