WO1998041818A1 - Detecteur avec gyroscope et camera video l'utilisant - Google Patents

Detecteur avec gyroscope et camera video l'utilisant Download PDF

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Publication number
WO1998041818A1
WO1998041818A1 PCT/JP1997/000913 JP9700913W WO9841818A1 WO 1998041818 A1 WO1998041818 A1 WO 1998041818A1 JP 9700913 W JP9700913 W JP 9700913W WO 9841818 A1 WO9841818 A1 WO 9841818A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibrator
substrate
gyro sensor
slope
groove
Prior art date
Application number
PCT/JP1997/000913
Other languages
English (en)
Japanese (ja)
Inventor
Teruhisa Akashi
Kazutaka Sato
Fumitaka Muranushi
Yoshiko Nishi
Mitsuo Ohtsu
Kanji Kakuta
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to JP54032698A priority Critical patent/JP3462880B2/ja
Priority to PCT/JP1997/000913 priority patent/WO1998041818A1/fr
Publication of WO1998041818A1 publication Critical patent/WO1998041818A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure

Definitions

  • the present invention relates to a gyro sensor for detecting an angular velocity and a device using the same, and in particular, to a vibratory gyro sensor for detecting a corioliser according to an angular velocity by vibrating a beam-shaped vibrator, and a camera shake prevention using the same. It is suitable for video cameras and camera equipment with functions.
  • This vibrating gyro sensor is configured to detect the amount of deflection of a vibrator disposed in the center by a change in capacitance between the vibrator and two detection electrodes.
  • the capacitance change between the vibrator and the two electrodes is read as a method of detecting the corridor, so the processing accuracy of the electrode part and the capacitance between the electrodes greatly affect the detection sensitivity. I do.
  • the capacitance of the electrode must be increased by increasing the area of the electrode so that the rate of change in capacitance does not decrease due to the effect of stray capacitance around the wiring.
  • silicon must be etched through to form the electrodes, but even if anisotropic silicon etching is used, a small gap of 5 m or less can be achieved. It is difficult to form them uniformly in a plane with good reproducibility.
  • the vibrator in order to increase the area of the electrode part, the vibrator must have a long and narrow structure, which lowers the resonance frequency of the vibrator and lowers the detection sensitivity. Will do.
  • An object of the present invention is to solve the above-mentioned problems of the prior art, and to provide a gyro sensor that is miniaturized, has high detection sensitivity, and has small variation in sensitivity, a video camera using the gyro sensor, and a method of manufacturing a gyro sensor. And Disclosure of the invention
  • the vibrator can easily form the substrate by anisotropic etching or the like, and the amount of deflection of the vibrator can be detected on the slope of the groove provided in the vibrator through the strain detecting means.
  • a large output voltage can be obtained by taking the differential output voltage of each distortion detecting means.
  • the thickness of the gyro sensor can be reduced to reduce the overall size.
  • the present invention provides a vibrator formed on the same substrate as the supporting portion so that one end is supported by the supporting portion in a vibrating state, an insulating substrate joined to a back surface of the substrate, and a lower surface of the insulating substrate.
  • a gyro sensor that has a piezoelectric element joined to the piezoelectric element, and the vibrator vibrates in the thickness direction with the piezoelectric element, wherein the substrate is a silicon substrate, and a through portion is provided in the substrate by etching.
  • a groove provided in the vibrator having a slope formed by anisotropic etching on the surface of the silicon substrate; and a voltage on the slope of the groove.
  • a distortion detecting means formed by using a depositing resist.
  • the present invention provides a vibrator formed on the same substrate as the supporting portion so as to be supported in a vibrating state, an insulating substrate bonded to the back surface of the substrate, and a piezoelectric device bonded to the lower surface of the insulating substrate.
  • FIG. 1 is a perspective view showing a gyro sensor according to an embodiment of the present invention.
  • FIG. 3 is a cross-sectional view schematically showing an AA ′ cross section of FIG.
  • FIG. 6 is a block diagram showing a circuit configuration of one embodiment of the present invention.
  • FIG. 7 is a sectional view of a vibrator showing another embodiment of the present invention.
  • FIG. 8 is a plan view showing a substrate on which a vibrator according to one embodiment of the present invention is formed.
  • FIG. 10 is a cross-sectional view showing a manufacturing method according to one embodiment of the present invention.
  • FIG. 11 is a perspective view of a gyro sensor showing another embodiment of the present invention.
  • FIG. 13 is a perspective view showing the appearance of a video camera on which the sensor according to one embodiment of the present invention is mounted.
  • FIG. 15 is a plan view showing a mounting board of a gyro sensor according to one embodiment of the present invention.
  • the vibration type gyro sensor used for a video camera or the like needs to reduce the height of the sensor itself and the area occupied by the sensor. In order to prevent camera shake, two axes of angular velocity must be detected, and two sensors are required.
  • FIG. 1 is a perspective view showing the appearance of the gyro sensor according to the embodiment
  • FIG. 2 is a perspective view showing the appearance when the gyro sensor of FIG. 1 is separated for each substrate
  • FIG. FIG. 4 is a cross-sectional view schematically showing a cross section taken along line AA ′ of FIG. 1
  • FIG. 4 is a cross-sectional view schematically showing a cross section taken along line BB ′ of FIG. 1
  • FIG. FIG. 6 is a cross-sectional view for explaining a method for detecting a liolika
  • FIG. 6 is a block diagram showing a circuit configuration of one embodiment
  • FIG. 6 is a block diagram showing a circuit configuration of one embodiment
  • reference numeral 131 denotes a video tape mounting section, which is composed of a power camera section 132, an audio input section 133, and a part of a finder 134.
  • the camera part 132 is partially cut, and the lens part 135 and the gyro sensor mounting board 136 are arranged.
  • a gyro sensor 14 1 for detecting horizontal shake and a gyro sensor 14 2 for detecting vertical shake are mounted on a gyro sensor mounting board 1 36.
  • the mounting substrate 135 is fixed to the lens portion 135 by screwing or the like to be integrated.
  • the mounting board 135 When the lens section 135 moves in the horizontal and vertical directions, the mounting board 135 also moves at the same time, and the angular acceleration in each direction is detected by the sensors 141 and 142.
  • the sensors 14 1 and 14 2 be arranged as close as possible to the lens optical axis 15 2 at the lens outer diameter position 15 1.
  • the sensors 14 1 and 14 2 are both vibratory gyro sensors, the resonance frequencies of the sensors should not be resonated with each other. It is shifted about 0 0 Hz.
  • the gyro sensor is composed of three types of substrates, a bulk piezoelectric substrate 1 that is a piezoelectric element, an insulating glass substrate 2 that is an insulating substrate, and a silicon substrate 3 that forms a vibrator. I have.
  • the size of the gyro sensor is about 4 x 14 mm and the thickness is about 2 mm.
  • the plane orientation of the silicon substrate 3 is ⁇ 100 ⁇ , and anisotropic etching of the silicon forms nine or more silicon openings to form a penetrating part, forming a cantilever.
  • the vibrator 4 is provided with a groove 5 having a facing slope formed by anisotropic etching.
  • the glass substrate 2 is for preventing the silicon substrate 3 and the electrode 12 of the piezoelectric substrate 1 from being short-circuited, and further has a glass recess 11 formed thereon.
  • the glass recess 1 1 prevents the vibrator 4 from contacting the glass substrate 2 Is formed. Since the vibrator is formed using silicon anisotropic etching, the cross-sectional shape of the opening 9 is a reverse tapered shape, and the cross-sectional shape of the vibrator 4 is bilaterally symmetrical and reverse-tapered U-shaped. It has become.
  • the amount of deflection can be detected as a voltage change between the piezoelectric thin film 6 and the piezoelectric thin film 7 formed in the groove 5 at ⁇ 0.
  • Fig. 5 is an explanatory diagram of the operation at the time of non-rotation with no angular velocity applied and at the time of rotation with angular velocity applied.
  • the output from the piezoelectric thin film 6 obtained by the combined vibration of the force f and the coriolis F is input to the filter built-in differential amplifier circuit 14 as shown in Fig. 6, and the disturbance component of the sensor Press to extract the voltage value of the Coriolis F.
  • the piezoelectric substrate 1 is vibrated by the oscillation circuit 13, and the oscillation frequency is monitored by the piezoelectric thin film 7 formed on the oscillator 4, and the oscillation frequency is fed back to the oscillation circuit 13 to adjust the frequency.
  • the signal obtained through the differential amplifier circuit 14 with this frequency as a reference is detected by the synchronous detection circuit 15. Further, the detected voltage value is amplified by the DC amplifier circuit 16 and is extracted as a signal by the corerica. As described above, the angular velocity is detected.
  • the grooves 5 are formed by performing anisotropic etching from the front side of the silicon substrate 3, and then the openings 9 are formed by performing anisotropic etching from the back side, whereby the U Make a character structure.
  • the piezoelectric thin film 7 is not always necessary. However, as described in FIG. 6, the provision of the piezoelectric thin film 7 allows the oscillation circuit 13 to feed back the signal from the piezoelectric thin film 7, so that The frequency can be adjusted, and higher sensitivity and higher sensitivity can be achieved.
  • the silicon substrate 3 has a plane orientation of ⁇ 100 ⁇ , when anisotropic etching is performed, as shown in (b), the face of the ⁇ 111 ⁇ silicon crystal plane 17 is reduced as shown in (b). A par slope is formed. Also, the larger the vibrating body mass and the faster the vibrating body speed, the larger Coriolis F is. For this purpose, a weight portion 18 may be formed at the tip of the oscillator 4 as shown in FIG. As a result, the tip of the vibrator 4 becomes heavier, the excitation amplitude becomes larger, and the deflection of the vibrator by the corioliser F increases, so that the voltage generated in the piezoelectric thin film 6 increases and the sensitivity improves.
  • a piezoelectric thin film 23 of ZnO and an upper electrode 24 are sequentially formed by sputtering so as to cover the lower electrode pattern 22.
  • the upper electrode 24 here is formed of the same chromium and gold two-layer thin film as the lower electrode 21.
  • a conductive thin film such as an anode thin film can be used.
  • a gyro sensor that is miniaturized, has high detection sensitivity, and has small variation in sensitivity, and a video camera and a gyro sensor manufacturing method using the gyro sensor.
  • the following can be specifically stated.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

La présente invention concerne un détecteur avec gyroscope comprenant un vibrateur formé sur le même substrat qu'une partie support de sorte que ledit vibrateur est soutenu par la partie support tandis qu'une des ses extrémités peut vibrer librement; un substrat isolant relié à l'arrière du substrat et un dispositif piézo-électrique relié à la surface inférieure du substrat isolant de façon à faire vibrer le vibrateur dasn la direction de son épaisseur à l'aide dudit dispositif piézo-électrique; une cannelure présentant des pentes opposées, disposée sur le vibrateur; et un élément de détection de tension disposé sur le côté intérieur des pentes opposées de la cannelure. Le détecteur avec gyroscope peut, ainsi, être plus compact, présenter une sensibilité de détection élevée et une variation de sensibilité peu importante. La présente invention concerne également une caméra vidéo utilisant ledit détecteur avec gyroscope.
PCT/JP1997/000913 1997-03-19 1997-03-19 Detecteur avec gyroscope et camera video l'utilisant WO1998041818A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP54032698A JP3462880B2 (ja) 1997-03-19 1997-03-19 ジャイロセンサ及びそれを用いたビデオカメラ
PCT/JP1997/000913 WO1998041818A1 (fr) 1997-03-19 1997-03-19 Detecteur avec gyroscope et camera video l'utilisant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1997/000913 WO1998041818A1 (fr) 1997-03-19 1997-03-19 Detecteur avec gyroscope et camera video l'utilisant

Publications (1)

Publication Number Publication Date
WO1998041818A1 true WO1998041818A1 (fr) 1998-09-24

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PCT/JP1997/000913 WO1998041818A1 (fr) 1997-03-19 1997-03-19 Detecteur avec gyroscope et camera video l'utilisant

Country Status (2)

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JP (1) JP3462880B2 (fr)
WO (1) WO1998041818A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005064921A1 (fr) * 2003-12-26 2005-07-14 Matsushita Electric Industrial Co., Ltd. Dispositif d'imagerie, boitier de produit et circuit integre semi-conducteur
WO2006090805A1 (fr) * 2005-02-23 2006-08-31 Sony Corporation Gyro-capteur oscillatoire
JP2008058061A (ja) * 2006-08-30 2008-03-13 Epson Toyocom Corp 角速度センサおよび電子機器
CN100544404C (zh) * 2003-12-26 2009-09-23 松下电器产业株式会社 图像拾取装置、产品组件以及半导体集成电路
JP2010230691A (ja) * 2005-03-04 2010-10-14 Sony Corp 振動型ジャイロセンサ
RU2761371C1 (ru) * 2018-02-06 2021-12-07 Кисон Текнолоджи Корпорейшн Лимитед Интегральный датчик обнаружения физиологических сигналов

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05209754A (ja) * 1992-01-29 1993-08-20 Murata Mfg Co Ltd 振動ジャイロ
JPH05256652A (ja) * 1992-03-11 1993-10-05 Murata Mfg Co Ltd 振動ジャイロ
JPH05322578A (ja) * 1992-05-20 1993-12-07 Tamagawa Seiki Co Ltd ジャイロ装置
JPH05333038A (ja) * 1992-06-03 1993-12-17 Canon Inc 角速度センサ
JPH08145686A (ja) * 1994-11-18 1996-06-07 Japan Aviation Electron Ind Ltd 振動ジャイロ
JPH08160064A (ja) * 1994-12-09 1996-06-21 Japan Aviation Electron Ind Ltd 半導体角速度センサとその製造方法
JPH08178667A (ja) * 1994-12-22 1996-07-12 Japan Aviation Electron Ind Ltd 半導体角速度センサ
JPH08261766A (ja) * 1995-03-20 1996-10-11 Clarion Co Ltd 振動ジャイロスコープ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05209754A (ja) * 1992-01-29 1993-08-20 Murata Mfg Co Ltd 振動ジャイロ
JPH05256652A (ja) * 1992-03-11 1993-10-05 Murata Mfg Co Ltd 振動ジャイロ
JPH05322578A (ja) * 1992-05-20 1993-12-07 Tamagawa Seiki Co Ltd ジャイロ装置
JPH05333038A (ja) * 1992-06-03 1993-12-17 Canon Inc 角速度センサ
JPH08145686A (ja) * 1994-11-18 1996-06-07 Japan Aviation Electron Ind Ltd 振動ジャイロ
JPH08160064A (ja) * 1994-12-09 1996-06-21 Japan Aviation Electron Ind Ltd 半導体角速度センサとその製造方法
JPH08178667A (ja) * 1994-12-22 1996-07-12 Japan Aviation Electron Ind Ltd 半導体角速度センサ
JPH08261766A (ja) * 1995-03-20 1996-10-11 Clarion Co Ltd 振動ジャイロスコープ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005064921A1 (fr) * 2003-12-26 2005-07-14 Matsushita Electric Industrial Co., Ltd. Dispositif d'imagerie, boitier de produit et circuit integre semi-conducteur
CN100544404C (zh) * 2003-12-26 2009-09-23 松下电器产业株式会社 图像拾取装置、产品组件以及半导体集成电路
US8208017B2 (en) 2003-12-26 2012-06-26 Panasonic Corporation Imaging device, product package, and semiconductor integrated circuit
WO2006090805A1 (fr) * 2005-02-23 2006-08-31 Sony Corporation Gyro-capteur oscillatoire
JP2006284551A (ja) * 2005-02-23 2006-10-19 Sony Corp 振動型ジャイロセンサ
US7654139B2 (en) 2005-02-23 2010-02-02 Sony Corporation Vibratory gyrosensor having a vibration element provided with terminals
JP2010230691A (ja) * 2005-03-04 2010-10-14 Sony Corp 振動型ジャイロセンサ
JP2008058061A (ja) * 2006-08-30 2008-03-13 Epson Toyocom Corp 角速度センサおよび電子機器
RU2761371C1 (ru) * 2018-02-06 2021-12-07 Кисон Текнолоджи Корпорейшн Лимитед Интегральный датчик обнаружения физиологических сигналов
US11243111B2 (en) 2018-02-06 2022-02-08 Keeson Technology Corporation Limited Integrated physiological signal detection sensor

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Publication number Publication date
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