JP3783708B2 - 角速度センサ - Google Patents
角速度センサ Download PDFInfo
- Publication number
- JP3783708B2 JP3783708B2 JP2003352901A JP2003352901A JP3783708B2 JP 3783708 B2 JP3783708 B2 JP 3783708B2 JP 2003352901 A JP2003352901 A JP 2003352901A JP 2003352901 A JP2003352901 A JP 2003352901A JP 3783708 B2 JP3783708 B2 JP 3783708B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- angular velocity
- velocity sensor
- piezoelectric body
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 claims description 25
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 25
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 25
- 239000000919 ceramic Substances 0.000 claims description 17
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- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
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- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 3
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- 230000001070 adhesive effect Effects 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5663—Manufacturing; Trimming; Mounting; Housings
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Description
Claims (5)
- 基体と圧電体とを積層してなる四角柱状の振動子を備え、
上記圧電体はPZT(チタン酸ジルコニウム酸鉛)を主成分とする圧電セラミクスからなり、上記基体は、上記圧電セラミクスの主成分であるPZTと比べて、ヤング率と熱膨張係数が同等以下の物性値を持つカーボンを主成分とする材料からなることを特徴とする角速度センサ。 - 上記基体は、アモルファスカーボンからなることを特徴とする請求項1記載の角速度センサ。
- 上記圧電体の厚みと上記振動子の厚みとの比を0.14〜0.27の範囲内としたことを特徴とする請求項1記載の角速度センサ。
- 上記振動子の全幅と厚みとの比を1.030〜1.055の範囲内としたことを特徴とする請求項1記載の角速度センサ。
- 上記圧電体の対向する一方の主面であって上記基体と接合される面に形成され、基準電位に接続される基準電極と、
上記圧電体の対向する他方の主面に上記振動子の長手方向に沿って形成され、上記振動子を振動させるための信号が供給される少なくとも1つの駆動電極と、
上記圧電体の対向する他方の主面に上記駆動電極を挟む形で互いに平行に形成され、上記振動子に生じるコリオリ力に応じた信号を出力するための少なくとも1対の検出電極とを備え、
上記駆動電極と上記基準電極との間に電圧を印加して上記圧電体により上記振動子を振動させるとともに上記振動子に生じるコリオリ力を上記圧電体により検出し、上記検出電極から上記コリオリ力に応じた信号として角速度検出信号を出力することを特徴とする請求項1記載の角速度センサ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003352901A JP3783708B2 (ja) | 2003-10-10 | 2003-10-10 | 角速度センサ |
US10/956,424 US7111512B2 (en) | 2003-10-10 | 2004-10-01 | Angular rate sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003352901A JP3783708B2 (ja) | 2003-10-10 | 2003-10-10 | 角速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005114696A JP2005114696A (ja) | 2005-04-28 |
JP3783708B2 true JP3783708B2 (ja) | 2006-06-07 |
Family
ID=34543647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003352901A Expired - Fee Related JP3783708B2 (ja) | 2003-10-10 | 2003-10-10 | 角速度センサ |
Country Status (2)
Country | Link |
---|---|
US (1) | US7111512B2 (ja) |
JP (1) | JP3783708B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005114423A (ja) * | 2003-10-03 | 2005-04-28 | Sony Corp | 角速度センサ |
JP2005114631A (ja) * | 2003-10-09 | 2005-04-28 | Sony Corp | 角速度センサ |
JP5001534B2 (ja) * | 2005-06-30 | 2012-08-15 | 京セラ株式会社 | 圧電アクチュエータおよび吐出装置 |
JP4967663B2 (ja) * | 2007-01-09 | 2012-07-04 | ソニー株式会社 | 振動型ジャイロセンサ、制御回路及び電子機器 |
JP5088540B2 (ja) * | 2007-05-16 | 2012-12-05 | ソニー株式会社 | 検出装置、検出方法及び電子機器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5221870A (en) * | 1991-09-30 | 1993-06-22 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device |
JP2780643B2 (ja) * | 1994-06-03 | 1998-07-30 | 株式会社村田製作所 | 振動ジャイロ |
US5794080A (en) * | 1994-08-31 | 1998-08-11 | Nikon Corporation | Piezoelectric vibration angular velocity meter and camera using the same |
JPH1151960A (ja) * | 1997-08-06 | 1999-02-26 | Murata Mfg Co Ltd | 加速度センサ |
KR100254114B1 (ko) * | 1997-08-13 | 2000-04-15 | 노용래 | 2축 동시 측정용 압전 회전 센서 및 그 측정 회로 |
JP2000241167A (ja) * | 1999-02-24 | 2000-09-08 | Tokin Corp | 圧電振動ジャイロ |
JP3741027B2 (ja) * | 2001-01-10 | 2006-02-01 | 株式会社村田製作所 | 振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置 |
US6903491B2 (en) * | 2001-04-26 | 2005-06-07 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, actuator, and inkjet head |
WO2003055063A1 (en) * | 2001-12-06 | 2003-07-03 | University Of Pittsburgh | Tunable piezoelectric micro-mechanical resonator |
-
2003
- 2003-10-10 JP JP2003352901A patent/JP3783708B2/ja not_active Expired - Fee Related
-
2004
- 2004-10-01 US US10/956,424 patent/US7111512B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20050146618A1 (en) | 2005-07-07 |
US7111512B2 (en) | 2006-09-26 |
JP2005114696A (ja) | 2005-04-28 |
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