1356173 九、發明說明 ' 【發明所屬之技術領域】 本發明係關於爲了液晶顯示面板此類檢 7C檢査等’而將探針和電極進行對準並使其 準方法及可動式探針單元機構以及檢査裝置 【先前技術】 Φ 液晶面板製造步驟中，有一檢査步驟係 驟的最終檢查中檢査已封入有液晶之液晶面 點亮檢査係使液晶面板點亮，使其顯示測試 晶面板的動作狀態之檢査。該點亮檢査進行 * 性、對比等檢査》 該點亮檢査所使用的檢査裝置有：使用 檢査測試圖案之自動檢査裝置、及以人的目 檢査裝置。 Φ 此種液晶面板檢査裝置之一，係於配置 晶面板的檢査台，設有檢査用的複數接觸元1 複數接觸元件單元，係於檢査時將該等 • 在檢査台的面板承受部上的液晶面板之電極 * 通電電路的檢査訊號供給到顯示面板。 且，檢査前對面板承受部配置顯示面板 板承受部取出顯示面板時，各接觸元件單元 配置區域後退。 藉此，多數之接觸元件單元不至於妨礙 査對象板之點 接觸之探針對 於液晶單元步 板之點亮。該 圖案，確認液 色度、色均一 CCD攝影機 視檢査之目視 接受檢査之液 戶單元者。 接觸元件接觸 ，藉此將來自 及檢査後從面 從顯示面板之 顯示面板對面 -4- 1356173 板承受部之配置及其取出，可順暢地進行顯示面板之處理 (專利文獻1)。 且，先前對於大小不同的顯示面板，須設置顯示面板 専用的檢査台及探針單元，但也有藉由配合大小不同的顯 示面板尺寸予以調整開口部，而不須設置新的専用檢査台 及探針單元之裝置（專利文獻2)。 〔專利文獻1〕日本專利特開2002-3 50485號公報 〔專利文獻2〕日本專利特開20 02-91336號公報 【發明內容】 此先前之探針單元爲了將電動機及配線安裝在各接觸 單元以驅動接觸單元，致使配線條數很多。於該情形下’ 由於須確保配線佈線的空間，而難以確保寬闊的作業空間 〇 且，探針和液晶面板之電極進行對準時，只能以複數 探針塊形成一體之接觸單元爲單位，進行探針和各電極之 對準。因此，由於背光單元的熱所造成之液晶面板的熱膨 脹而導致之各探針對各電極之偏差，無法確實地吸收。 再者，相同的接觸單元内搭載有複數探針塊時’由於 無法調整各探針塊間的相對位置，因此若液晶面板的品種 (各電極之配置位置）改變，則不易適切對準各探針和各 電極。 本發明係鑑於如此之問題而發明者’其目的在於提供 容許檢査對象板之熱膨脹而可以容易地進行探針和電極之 -5- 1356173 對準的探針對準方法及可動式探針單元機構以及檢査裝置 〇 本發明所相關之探針對準方法係爲了解決前述課題而 發明者’其係藉由複數探針組裝體（以可移動方式支撐在 用於進行檢查對象板之檢查的探針單元之底板）和攝影手 段（以可相對前述各探針組裝體平行地移動之方式支撐在 前述底板），將前述檢査對象板之電極和前述各探針組裝 體之探針進行對準之探針對準方法，其特徵爲包含步驟： 探針對準步驟，係將前述檢查對象板設置在設定位置，— 面使前述攝影手段適當移動，藉由該攝影手段拍攝前述探 針組裝體之探針及前述檢查對象板之電極，—面使該探針 組裝體從其他探針組裝體獨立並使其移動，而將該探針和 前述電極進行對準；保持步驟，係於藉由該探針對準步驟 將前述探針和電極進行對準後之狀態下，保持前述探針組 裝體對前述底板的相對位置；基準位置特定步驟，係使前 述攝影手段移動，藉由該攝影手段拍攝前述對準後的檢査 對象板之校準記號，以特定前述對準後的檢查對象板之基 準位置：及通常對準步驟，係於藉由該基準位置特定步驟 所特定之前述基準位置，對合新的檢査對象板之校準記號 ’藉此方式將前述探針和前述新的檢查對象板之電極進行 對準。 利用前述構成，在探針對準步驟中，一面藉由前述攝 影手段拍攝前述探針組裝體之探針及前述檢査對象板之電 極’ ~面藉由使該當探針組裝體移動的方式，進行該當探 -6 - 1356173 針和前述電極之對準》在保持步驟中，將對準後的前述探 針組裝體保持在前述底板。一個探針組裝體之對準結束後 ，將前述攝影手段移動到下一探針組裝體，與前述同樣地 進行下一探針組裝體之對準。反覆此動作，進行所有的探 針組裝體之對準。接著，在基準位置特定步驟中，使前述 攝影手段對於對準後的檢査對象板進行移動並拍攝校準記 號，在該狀態下固定攝影手段，將拍攝到的校準記號位置 特定爲前述對準後的檢査對象板之基準位置。接著，在通 常對準步驟中，於第2片以後的檢査時進行對準。檢査新 的檢査對象板時，將新的檢査對象板之校準記號對合在前 述基準位置，使前述探針和前述新的檢査對象板的電極之 位置對合。 前述探針對準步驟中，較佳爲使前述攝影手段和對準 對象之前述探針組裝體彼此連結並同時地移動，進行該當 探針組裝體之探針和前述檢査對象板之電極的對準。 本發明所相關之可動式探針單元機構，其特徵爲具備 :複數探針組裝體，係於前端支撐探針，使該探針與檢查 對象板之電極接觸；攝影手段，用於拍攝該探針組裝體之 探針及前述檢查對象板之電極等；探針組裝體滑動機構， 係使前述各探針組裝體以可各自獨立移動且相對前述攝影 手段亦可獨立移動之方式，支撐在用於進行前述檢査對象 板之檢査的探針單元之底板，將前述檢查對象板之電極和 前述各探針組裝體之探針進行對準；攝影手段滑動機構， 係使前述攝影手段以可在前述探針組裝體之滑動方向平行 1356173 移動之方式支撐在前述底板，而適當移動至前述探針及電 極等之位置；移動機構，係連結在被該攝影手段滑動機構 支撐成可移動之前述攝影手段，使該攝影手段適當移動； 及鎖定機構，係於將前述檢查對象板之電極和前述各探針 組裝體之探針進行對準後之狀態下，保持該當探針組裝體 對前述底板之相對位置。 利用前述構成，藉由前述探針組裝體滑動機構，使前 述各探針組裝體各自獨立移動，將該當探針組裝體之探針 對準在前述檢査對象板之電極。此時，被前述攝影手段滑 動機構支撐成可移動的前述攝影手段，係藉由前述移動機 構適當移動到述探針及電極等的位置，一面拍攝前述探 針及電極等，一面藉由前述探針組裝體滑動機構滑動前述 探針組裝體，進彳T探針和電極之對準。對準終了後，藉由 前述鎖定機構將探針組裝體保持在前述底板。 較佳爲具備連結手段，在藉由前述攝影手段拍攝前述 探針組裝體之探針和則述檢査對象板之電極時，使該當探 針組裝體及攝影手段彼此連結，藉由移動該當攝影手段， 以調整前述探针之位置。 前述連結手段較佳爲具備：嵌合在設於前述探針組裝 體或攝影手段之導引孔的桿 '及設在前述攝影手段或探針 組裝體使前述桿出没的出没機構。 前述鎖定機構’較佳爲藉由使自前述出沒機構延伸出 來的前述桿嵌合在前述導引孔而被解除，藉由拉出而被鎖 定。1356173 IX. OBJECT OF THE INVENTION [Technical Field] The present invention relates to aligning a probe and an electrode for such a 7C inspection of a liquid crystal display panel, and a quasi-method and a movable probe unit mechanism thereof Inspection device [Prior Art] Φ In the manufacturing step of the liquid crystal panel, there is an inspection step. The final inspection of the system is performed. The liquid crystal panel is lit and the liquid crystal panel is lit to display the operation state of the test crystal panel. an examination. This lighting inspection is performed for inspection of sex, contrast, etc. The inspection apparatus used for the lighting inspection includes an automatic inspection device that uses a test pattern and a human inspection device. Φ One of the liquid crystal panel inspection devices is an inspection table in which a crystal panel is placed, and is provided with a plurality of contact elements for inspection, a plurality of contact element units, which are attached to the panel receiving portion of the inspection table during inspection. The electrode of the liquid crystal panel* The inspection signal of the power-on circuit is supplied to the display panel. Further, when the display panel is received by the panel receiving portion of the panel receiving portion before the inspection, the contact element unit arrangement area is retracted. Thereby, most of the contact element units do not hinder the illumination of the liquid crystal cell step by the probe which is in contact with the inspection target board. This pattern confirms the liquid chromaticity and color uniformity. CCD camera visual inspection The liquid unit that has been inspected. When the contact elements are in contact with each other, the arrangement from the surface of the display panel opposite to the display panel -4- 1356173 is removed from the display panel, and the display panel can be smoothly processed (Patent Document 1). Moreover, for the display panels of different sizes, the inspection table and the probe unit for the display panel must be provided. However, the opening portion can be adjusted by matching the size of the display panel with different sizes, without setting up a new inspection table and exploration. Device for needle unit (Patent Document 2). [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. In order to drive the contact unit, the number of wiring strips is large. In this case, it is difficult to ensure a wide working space due to the space of the wiring, and when the probe and the electrodes of the liquid crystal panel are aligned, only the contact unit in which the plurality of probe blocks are integrated can be used as a unit. The alignment of the probe and each electrode. Therefore, the deviation of each probe from the respective electrodes due to the thermal expansion of the liquid crystal panel due to the heat of the backlight unit cannot be surely absorbed. Further, when a plurality of probe blocks are mounted in the same contact unit, the relative position between the probe blocks cannot be adjusted. Therefore, if the type of the liquid crystal panel (the arrangement position of each electrode) is changed, it is difficult to properly align the probes. Needle and each electrode. The present invention has been made in view of such a problem, and an object of the present invention is to provide a probe alignment method and a movable probe unit mechanism which can easily perform -5 - 1356173 alignment of a probe and an electrode, permitting thermal expansion of an inspection target plate, and Inspector 〇 The probe alignment method according to the present invention is for solving the above problems, and the inventors have employed a plurality of probe assemblies (movably supported by a probe unit for performing inspection of an inspection target plate). a bottom plate) and a photographing means (supported on the bottom plate so as to be movable in parallel with each of the probe assemblies), and the probes for aligning the electrodes of the inspection target plate and the probes of the probe assemblies are aligned The method includes the steps of: a probe alignment step of setting the inspection target plate at a set position, and appropriately moving the photographing means, and photographing the probe of the probe assembly and the foregoing inspection by the photographing means The electrode of the target plate, the surface of the probe assembly is separated from and moved by the other probe assembly, and the probe and the aforementioned The pole is aligned; the maintaining step is to maintain the relative position of the probe assembly to the bottom plate in a state in which the probe and the electrode are aligned by the probe alignment step; the reference position specifying step is The photographing means is moved, and the alignment mark of the aligned inspection target sheet is imaged by the photographing means to specify the reference position of the aligned inspection target sheet: and the normal alignment step is based on the reference The reference position specified by the position-specific step is aligned with the calibration mark of the new inspection target plate. In this manner, the probe and the electrode of the new inspection target plate are aligned. According to the above configuration, in the probe alignment step, the probe of the probe assembly and the electrode of the inspection target plate are imaged by the imaging means, and the probe assembly is moved. Detecting -6 - 1356173 Alignment of the Needle and the Electrode" In the holding step, the aligned probe assembly is held on the bottom plate. After the alignment of one probe assembly is completed, the photographing means is moved to the next probe assembly, and the alignment of the next probe assembly is performed in the same manner as described above. Repeat this action to align all the probe assemblies. Next, in the reference position specifying step, the photographing means moves the aligned inspection target sheet to take a calibration mark, and in this state, the photographing means is fixed, and the photographed calibration mark position is specified as the aligned Check the reference position of the target board. Next, in the normal alignment step, alignment is performed at the time of inspection after the second sheet. When the new inspection target plate is inspected, the calibration mark of the new inspection target plate is aligned to the aforementioned reference position, and the position of the probe and the electrode of the new inspection target plate are aligned. In the probe alignment step, it is preferable that the imaging means and the probe assembly of the alignment target are coupled to each other and moved simultaneously, and alignment of the probe of the probe assembly and the electrode of the inspection target plate is performed. . A movable probe unit mechanism according to the present invention is characterized by comprising: a plurality of probe assemblies, which support a probe at a front end to bring the probe into contact with an electrode of the inspection target plate; and a photographing means for photographing the probe The probe of the needle assembly, the electrode of the inspection target plate, and the like; the probe assembly sliding mechanism is configured such that each of the probe assemblies can be independently moved and can be independently moved relative to the imaging means. Aligning the electrode of the inspection target plate with the probe of each probe assembly on the bottom plate of the probe unit for inspecting the inspection target plate; and the photographing means sliding mechanism for making the photographing means The sliding direction of the probe assembly is parallel to the first base plate, and is supported by the bottom plate, and is appropriately moved to the position of the probe, the electrode, and the like; and the moving mechanism is coupled to the aforementioned photographing means supported by the sliding mechanism of the photographing means. And the locking mechanism is adapted to: and the locking mechanism is configured to connect the electrode of the inspection target plate and the probe assembly In the state in which the probe is aligned, the relative position of the probe assembly to the bottom plate is maintained. According to the above configuration, each of the probe assemblies described above is independently moved by the probe assembly sliding mechanism, and the probe of the probe assembly is aligned with the electrode of the inspection target plate. In this case, the photographing means supported by the photographing means sliding mechanism is movable by moving the probe to the position of the probe, the electrode, etc., and the probe, the electrode, and the like are imaged by the moving mechanism. The needle assembly sliding mechanism slides the probe assembly to guide the alignment of the T probe and the electrode. After the alignment is completed, the probe assembly is held by the aforementioned bottom plate by the aforementioned locking mechanism. Preferably, the imaging means is provided, and when the probe of the probe assembly and the electrode of the inspection target plate are imaged by the imaging means, the probe assembly and the imaging means are coupled to each other, and by moving the imaging means, To adjust the position of the aforementioned probe. Preferably, the connecting means includes a rod that is fitted to the guide hole of the probe assembly or the imaging means, and a detachment mechanism that is provided in the imaging means or the probe assembly to cause the rod to be infested. It is preferable that the lock mechanism ′ is released by fitting the rod extending from the ejector mechanism to the guide hole, and is locked by pulling out.
-8 - 1356173 前述攝影手段較佳爲具備攝影機而構成，該攝影機具 有由CCD或CMOS所構成之影像感測器，前述檢查對象 板係液晶顯示板。 前述底板較佳爲具備可動框機構，該可動框機構係由 複數框板所構成，配合品種不同的檢查對象板之不同的尺 寸，用於使前述各框板移動以調整成前述檢查對象板之尺 寸。 本發明所相關之檢査裝置，係使探針組裝體之探針接 觸檢查對象板之電極以進行檢查，其特徵爲：具備可動式 探針單元機構，係用於使前述探針組裝體之探針和前述檢 查對象板之電極彼此對準之機構。 利用該構成，與前述可動式探針單元機構同様地發揮 作用，檢査前述檢査對象板。 如上述，根據本發明可達成如下述之效果》 在前述探針對準步驟，進行前述探針和前述電極之對 準，在保持步驟，將前述探針組裝體保持在前述底板，在 基準位置特定步驟，特定檢査對象板的基準位置，在通常 對準步驟，將前述探針和前述新的檢査對象板的電極進行 對準，因此可使前述探針組裝體容易對準在前述檢査對象 板。 且，藉由前述探針組裝體滑動機構，將前述探針組裝 體之探針對準在前述檢査對象板之電極，且藉由前述攝影 手段拍攝前述探針及電極等，一面藉由前述探針組裝體滑 動機構進行對準，且藉由前述鎖定機構將探針組裝體保持 -9- 1356173 在前述底板，因此可使前述探針組裝體容易對準在 査對象板。 【實施方式】 以下’針對使用具備本發明之實施形態所相關 式探針單元機構之檢査裝置及可動式探針單元機構 對準方法’參照附圖予以説明。並於此處説明以液 爲檢査對象板之例。且，檢査裝置係以進行液晶面 檢査之裝置進行説明。進行點亮檢査之檢査裝置的 成和上述先前之檢査裝置大致相同，因而此處主要 本發明之特徵部分：組裝在檢査裝置之可動式探針 構及使用該可動式探針單元機構之探針對準方法。 可動式探針單元機構1係爲了進行檢査，將前 面板之電極和各後述探針組裝體之探針予以對準， 彼此接觸之裝置。該可動式探針單元機構1係固定 檢査裝置之框側。具體而言如第2圖所示，安裝在 査裝置側的工件台2之位置。 工件台2係用於直接支撐液晶面板3之構件。 2上設有擋止件和推進件（皆不圖示），該擋止件 件係抵接在液晶面板3周緣部，用於將該液晶面板 地對準在工件台2上。液晶面板3載置在工件台2 首先是液晶面板3周緣部抵接在擋止件，再藉由設 於該擋止件之位置的推進件推液晶面板3相反側之 予以支撐。工件台2係安裝在檢査裝置内的XYZ 0 前述檢 之可動 的探針 晶面板 板點亮 全體構 係說明 單元機 述液晶 使該等 安裝在 面對檢 工件台 和推進 3正確 上時， 在對向 周緣部 台（不 1356173 圖示）。藉由該ΧΥΖ 0台，被工件台2所支撐的液晶面板 3之位置受到微調整。具體而言，將被工件台2所支撐的 液晶面板3之位置藉由χγζ 0台予以微調整，使液晶面板 3之電極4和探針組裝體5之探針6彼此整合（成爲第7 圖之狀態）。 工件台2内側（第2圖中的下側）設有背光單元7 ^ 該背光單元7係於點亮檢査中，將液晶面板3從其内側點 亮之裝置。具體而言，背光單元7包含：配置有複數支的 螢光管8、收納各螢光管8的框體9、組裝在工件台2的 導光板1〇及擴散板11。 可動式探針單元機構1係如第1圖至第5圖所示，包 含底板1 5、前述探針組裝體5、探針組裝體滑動機構1 7、 鎖定機構18、攝影手段19、攝影手段滑動機構20、移動 機構21。 底板15係支撐可動式探針單元機構丨全體的底板。 該底板15固定在檢査裝置框側。底板15係形成爲其中央 具備四角形開口 15Α之四角形板狀。探針組裝體5等係各 自安裝在該底板1 5上側面。 探針組裝體5係用於支撐探針6之構件。探針組裝體 5係於藉由其前端支撐探針6之狀態下，被底板15支撑成 可移動。探針組裝體5被底板15支撐成可移動，使探針6 接觸液晶面板3之電極4。該探針組裝體5係於底板15短 邊側裝設有4個、在長邊側裝設有5個。探針組裝體5基 端部設有導引孔5Α’用於嵌合攝影手段19的連結機構37 -11 --8 - 1356173 Preferably, the photographing means is provided with a camera having an image sensor composed of a CCD or a CMOS, and the inspection target panel is a liquid crystal display panel. Preferably, the bottom plate is provided with a movable frame mechanism, and the movable frame mechanism is composed of a plurality of frame plates, and is adapted to move different sizes of the inspection target plates to adjust the frame plates to be adjusted to the inspection target plate. size. In the inspection apparatus according to the present invention, the probe of the probe assembly is in contact with the electrode of the inspection target plate for inspection, and is characterized in that a movable probe unit mechanism is provided for detecting the probe assembly. A mechanism in which the needle and the electrodes of the aforementioned inspection target plate are aligned with each other. With this configuration, the movable probe unit mechanism functions in the same manner as the movable probe unit mechanism, and the inspection target plate is inspected. As described above, according to the present invention, the following effects can be achieved. In the probe alignment step, the probe and the electrode are aligned, and in the holding step, the probe assembly is held on the bottom plate, and the reference position is specified. In the step of specifying the reference position of the inspection target plate, the probe and the electrode of the new inspection target plate are aligned in the normal alignment step, so that the probe assembly can be easily aligned with the inspection target plate. Further, the probe assembly sliding mechanism is used to align the probe of the probe assembly with the electrode of the inspection target plate, and the probe, the electrode, and the like are imaged by the imaging means, and the probe is used. The assembly sliding mechanism performs alignment, and the probe assembly is held by the locking mechanism at -9 - 1356173 on the bottom plate, so that the probe assembly can be easily aligned with the object to be inspected. [Embodiment] Hereinafter, an inspection apparatus and a movable probe unit mechanism alignment method using a probe unit mechanism according to an embodiment of the present invention will be described with reference to the drawings. Here, an example in which the liquid is used as the inspection target plate will be described. Further, the inspection apparatus will be described with an apparatus for performing liquid crystal surface inspection. The inspection device for performing the lighting inspection is substantially the same as the previous inspection device, and thus the main features of the present invention are: the movable probe assembly assembled in the inspection device and the probe pair using the movable probe unit mechanism Quasi-method. The movable probe unit mechanism 1 is a device that aligns the electrodes of the front panel and the probes of the probe assemblies described later to each other for inspection. The movable probe unit mechanism 1 is fixed to the frame side of the inspection device. Specifically, as shown in Fig. 2, the position of the workpiece stage 2 on the side of the inspection device is mounted. The workpiece stage 2 is used for directly supporting the members of the liquid crystal panel 3. 2 is provided with a stopper and a pusher (not shown) which abuts on the peripheral portion of the liquid crystal panel 3 for aligning the liquid crystal panel on the workpiece stage 2. The liquid crystal panel 3 is placed on the workpiece stage 2. First, the peripheral edge portion of the liquid crystal panel 3 abuts against the stopper, and is supported by the pusher provided on the opposite side of the liquid crystal panel 3 at the position of the stopper. The workpiece table 2 is mounted on the XYZ 0 in the inspection device. The above-mentioned movable probe crystal panel is illuminated. The entire system is described. The unit is configured to display the liquid crystal so that it is mounted on the surface of the inspection workpiece and the advancement 3 is correct. Opposite to the peripheral section (not shown in 1536617). With this ΧΥΖ 0, the position of the liquid crystal panel 3 supported by the workpiece stage 2 is finely adjusted. Specifically, the position of the liquid crystal panel 3 supported by the workpiece stage 2 is finely adjusted by χγζ0, and the electrode 4 of the liquid crystal panel 3 and the probe 6 of the probe assembly 5 are integrated with each other (becoming the seventh drawing). State). The inside of the workpiece stage 2 (the lower side in Fig. 2) is provided with a backlight unit 7. This backlight unit 7 is a device for lighting the liquid crystal panel 3 from the inside thereof during the lighting inspection. Specifically, the backlight unit 7 includes a plurality of fluorescent tubes 8 in which a plurality of tubes are disposed, a housing 9 that houses the respective fluorescent tubes 8, a light guide plate 1A that is assembled to the workpiece stage 2, and a diffusion plate 11. The movable probe unit mechanism 1 includes a bottom plate 15 , the probe assembly 5 , a probe assembly sliding mechanism 17 , a locking mechanism 18 , a photographing means 19 , and a photographing means as shown in FIGS. 1 to 5 . The sliding mechanism 20 and the moving mechanism 21. The bottom plate 15 supports the bottom plate of the movable probe unit mechanism. The bottom plate 15 is fixed to the inspection device frame side. The bottom plate 15 is formed in a quadrangular plate shape having a quadrangular opening 15Α at its center. The probe assembly 5 and the like are each mounted on the upper side of the bottom plate 15. The probe assembly 5 is used to support the members of the probe 6. The probe assembly 5 is supported by the bottom plate 15 so as to be movable while the probe 6 is supported by the tip end thereof. The probe assembly 5 is supported by the bottom plate 15 so as to be movable so that the probe 6 contacts the electrode 4 of the liquid crystal panel 3. The probe assembly 5 is provided with four on the short side of the bottom plate 15 and five on the long side. The base end portion of the probe assembly 5 is provided with a guide hole 5'' for the fitting mechanism 37 of the photographing means 19 -
1356173 的連結桿39。在導引孔5A形成錐部，使連結本 嵌合。 探針組裝體滑動機構17係用於使前述各探| 可移動地支撐在前述底板15的裝置。探針組裝 構17將各探針組裝體5支撐成可各自獨立移動 前述攝影手段19獨立移動。藉此，探針組裝1 17使探針組裝體5適當移動，將前述液晶面板： 和前述各探針組裝體5之探針6進行對準。具儀 針組裝體滑動機構17係由探針軌道25、和安缓 探針軌道25滑動的探針導件26所構成。 探針軌道25係於底板15之開口 15A緣部， 緣部配置。探針軌道25係各自設成鄰接在開口 側和長邊側。具體而言，各自設在短邊側所對向 中的一方、和長邊側所對向的兩邊之中的一方。 探針導件26係於各自安裝在各探針組裝體 下，在探針軌道25嵌合成可滑動，將各探針組 底板1 5側支撐成可滑動。 鎖定機構18係用於保持探針組裝體5對前 之相對位置之裝置。該鎖定機構18係於前述秘 之電極4和前述各探針組裝體5之探針6進行尝 態下，保持該探針組裝體5對前述底板1 5之拆 鎖定機構1 8組裝在探針導件2 6，將該探針導件 軌道25固定、解除固定。具體而言，鎖定機構 圖所示，由電磁鎖定部28、使該電磁鎖定部28 P 39容易 十組裝體5 丨體滑動機 I且亦可對 丨滑動機構 5之電極4 丨而言，探 :成可在該 沿著該當 15A短邊 1的兩邊之 5的狀態 裝體5在 述底板1 5 :晶面板3 丨準後的狀 丨對位置。 26對探針 1 8如第8 動作的開 -12- 1356173 係由油壓式、氣壓式、電動式等致動器所構成，使連結桿 39出没。連結桿39係嵌合在探針組裝體5的導引孔5A， 用於連結探針組裝體5和攝影手段19之構件。連結桿39 係於被汽缸38支撐的狀態下延伸而嵌合在導引孔5A，藉 此連結成使探針組裝體5和攝影手段19形成一體進行移 動。再者，藉由連結桿39嵌合在導引孔5A而將開關29 斷開，藉由拉出而開啓開關29。 延伸板部34係設成延伸在探針組裝體5上側，且延 伸到面對探針組裝體5之探針6的位置。校準攝影機部3 5 係用於拍攝液晶面板3之電極4和探針組裝體5之探針6 的攝影機（參照第7圖）。該校準攝影機部35具備攝影 機，該攝影機具有由CCD或CMOS所構成的影像感測器 。藉由校準攝影機部35拍攝電極4和探針6，進行該等之 對準。再者，校準攝影機部35亦拍攝液晶面板3之校準 記號3 A，進行該液晶面板3之對準。 攝影手段滑動機構20係使前述攝影手段19，以可在 前述探針組裝體5之滑動方向平行移動之方式支撐在前述 底板15，而適當移動至前述探針6及電極4的位置或校準 記號3A的位置時所用的機構》該攝影手段滑動機構20係 由攝影手段軌道41、和被安裝成可在該攝影手段軌道41 滑動的攝影手段導件42所構成。 攝影手段軌道41係於底板15之開口 15A的緣部，鄰 接前述探針軌道25且配設成平行。即，攝影手段軌道41 係沿著前述底板15之開口 15A的緣部在正交之方向設有 -14- 1356173 準位置特定步驟所特定之前述基準位置的方式，將前述探 針6和前述新的液晶面板3之電極4進行對準。 必須檢査第2片液晶面板3 (與第1片同一品種）， 將該當液晶面板3在工件台2上載置在與第1片液晶面板 3相同的位置且對準。在此處，根據各液晶面板3之尺寸 精確度，即使將第1片和此第2片液晶面板3載置在工件 台2上的相同位置，探針單元對底板15之相對位置亦有 不整合的情形。因此，藉由攝影手段19拍攝第1片對準 後之液晶面板3上的校準記號3 A，將基準位置予以特定 ，再將第2片液晶面板3和底板1 5之相對位置調整成相 同於第1片液晶面板3的位置。該調整係藉由工件台2所 具備的前述ΧΥΖ0機構進行。 只要檢査對象之各液晶面板3的品種相同，由於液晶 面板3上的各電極4的位置及校準記號3A和各電極4之 相對位置也成爲相同，因此在該調整終了之時點，第2片 以後的液晶面板3之各電極4和探針6之對準即結束。 即，針對第2片液晶面板3，藉由前述同樣的步驟進 行點亮檢査，針對第3片以後（與第1片同一品種）的液 晶面板3，藉由與上述同樣的步驟進行點亮檢査。 〔效果〕 如上述，在前述探針對準步驟，將前述探針6和前述 電極4進行對準，在前述保持步驟’將前述探針組裝體5 保持在前述底板15’在前述基準位置特定步驟’特定液晶 -19- 1356173 面板3的基準位置，在前述通常對準步驟，由於已將前述 探針6和前述新的液晶面板3之電極4對合位置，因此可 使前述探針組裝體5容易對準在前述液晶面板3。其結果 爲提尚檢査能率。 且，由於使各探針組裝體5個別移動，將各探針6和 液晶面板3之各電極4予以對準，因此即使背光單元7之 熱所造成的液晶面板3之熱膨脹導致各探針6對各電極偏 移，仍可確實吸收該偏差。 相較於先前的檢査裝置，驅動機構的驅動源只有攝影 手段19的移動機構21，因此可減少驅動源之數量，亦可 減少對驅動源之配線條數。其結果爲有利於成本面，亦可 確保寬闊的作業空間。 且，即使液晶面板3的品種（電極位置）改變，電極 4的位置從先前的位置偏移，仍可容易地將各探針6對準 在各電極。 藉由校準攝影機部35拍攝液晶面板3的校準記號3A ，將該校準記號3A和基準點之偏差量調整成零，進行第 2片以後的液晶面板3和探針組裝體5之對準，因此可容 易且迅速地進行該等之對準。 且’藉由校準攝影機部35拍攝探針6和液晶面板3 之各電極4’將該等之偏差量調整成零，進行探針6和電 極4之對準，因此可容易且迅速地進行該等之對準。 〔變形例〕 -20- 1356173 前述實施形態中，在各邊僅設一個攝影手段19, 針組裝體5之數量多時，亦可設置2個以上之攝影手 〇 前述實施形態中，已説明以液晶面板3爲檢査對 之例，但可適用於必須整合探針6和電極4之所有的 對象板。且，利用檢査裝置進行的檢査亦不限於液晶 3之點亮檢査，可適用於所有的使探針6和電極4接 進行之檢査。 前述實施形態中，將連結機構37設在攝影手段 ，但亦可設在探針組裝體5側。只要可使攝影手段] 探針組裝體5彼此連結之構造即可。 前述實施形態中，以具備電磁螺線管30和固定3 之鎖定機構1 8爲例予以說明，但以其他構成當作鎖 構18亦可。例如，如第9圖所不，由固定銷51'升 52、彈簧53構成亦可。固定銷51係藉由彈簧53被 針軌道25側彈壓。升降銷52被***導引孔5A内， 端部具有錐部5 2A。固定銷51上端部亦具有對應升 52之錐部52A的錐部51A。藉此，連結桿39被推入 孔5A時，升降銷52被推入，藉由錐部51A、52A將 銷51朝上方推而解除固定。連結桿39被拉出時，固 51被彈簧53下推而固定。 前述實施形態中，底板1 5係以四角形板材構成 可動式底板亦可。於該情形下，在可動式探針單元機 備可動框機構而構成。該可動框機構係由複數框板構 但探 段19 象板 檢査 面板 觸而 19側 19和 消31 定機 降銷 朝探 且前 降銷 導引 固定 定銷 ，但 構具 成底 -21 - 1356173 板，配合不同品種的液晶面板3之不同的尺寸，移動前 各框板，調整成前述液晶面板3的尺寸之機構。 第10圖顯示該可動框機構之一例。可動框機構55 由Y軸移動機構56、X軸移動機構57所構成。Y軸移 機構56係用於調整可動框機構55之開口 55A的Y軸 向之機構。該Y軸移動機構56包含：配設在Y軸方向 軌道、嵌合在該軌道且被支撐成可在Y軸方向滑動的導 、被該導件支撐且安裝成可在Y軸方向滑動的上側底板 與該上側底板同樣地被前述導件支撐且安裝成可在Y軸 向滑動的下側底板、使上側底板及下側底板在Y軸方向 動的Y軸驅動部。X軸移動機構57係用於調整可動框 構55之開口 55A的X軸方向之機構。該X軸移動機構 包含：配設在X軸方向的X軸上邊框部、與X軸上邊 部並列配設在X軸方向的X軸下邊框部、配設在Y軸 向的Y軸右邊框部、與該Y軸右邊框部同樣地配設在 軸方向的Y軸左邊框部、使X軸下邊框部在X軸方向 動的X軸下邊驅動部、使X軸上邊框部在X軸方向移 的X軸上邊驅動部。該可動框機構55之具體構成，已 本申請人先前提出的可動式探針單元機構（日本專利特 2006-148562)中説明。 藉由以具備該可動框機構55的檢査裝置進行檢査 方式，檢査不同品種的液晶面板3時，將液晶面板3載 在工件台2之既定位置後，藉由可動框機構55將開 55A對合在液晶面板3的尺寸。將該開口 55A的大小對 述 係 動 方 的 件 > 方 移 機 57 框 方 Y 移 動 於 願 的 置 □ 合 -22- 1356173 液晶面板3的尺寸予以調整後，藉由前述攝影 將探針組裝體5之各探針6對準液晶面板3之 其結果可迅速地進行液晶面板3之品種交換。 且，即使液晶面板3之品種變更，亦因可 探針組裝體5，而可確實地進行探針6和電極 採用不同的液晶面板3時，不須特別之裝置。 由於可藉由各探針組裝體5，個別地進行 針組裝體5和液晶面板3之電極4的對準，因 面板3的規格（電極位置）改變，也可容易地 6和各電極4之對準。 且，前述實施形態中，藉由連結該探針組丨 影手段19，進行探針6和電極4之對準所用的 5之移動，但各探針組裝體5亦可同時具備驅 ，亦可使用線性電動機機構，與探針組裝體5 以電氣控制。此外，線性電動機機構可直接使 構。藉由該線性電動機機構，由於可正確地微 裝體5，而可提高探針6和電極4之對準精確 形下，探針組裝體5的鎖定機構，適用例如藉 制動器。藉此亦可達成與前述實施形態同樣的 【圖式簡單說明】 第1圖係表示本發明之實施形態所相關之 單元機構之主要部分放大立體圖。 手段19等 :各電極4。 個別地移動 4之對準。 對於複數探 此即使液晶 進行各探針 裝體5的攝 探針組裝體 動源。例如 獨立地單獨 用眾知之機 調整探針組 度。於該情 由電磁閥之 作用、效果 可動式探針 -23-Connecting rod 39 of 1356173. A tapered portion is formed in the guide hole 5A to engage the joint. The probe assembly sliding mechanism 17 is a device for movably supporting the aforementioned probes 15 on the bottom plate 15. The probe assembly 17 supports each of the probe assemblies 5 so as to be independently movable. The imaging means 19 is independently moved. Thereby, the probe assembly 1 17 appropriately moves the probe assembly 5, and the liquid crystal panel is aligned with the probe 6 of each of the probe assemblies 5. The instrument assembly slide mechanism 17 is composed of a probe rail 25 and a probe guide 26 that slides the probe rail 25. The probe rail 25 is attached to the edge of the opening 15A of the bottom plate 15, and is disposed at the edge. The probe rails 25 are each disposed adjacent to the opening side and the long side. Specifically, each of them is provided on one of the opposite sides of the short side and one of the opposite sides of the long side. The probe guides 26 are attached to the respective probe assemblies, and the probe rails 25 are fitted to be slidable, and the probe bases 15 side are supported to be slidable. The locking mechanism 18 is a device for holding the relative position of the probe assembly 5 to the front. The locking mechanism 18 is attached to the probe electrode 6 and the probe 6 of each of the probe assemblies 5, and the probe assembly 5 is held in the probe by the detachable locking mechanism 18 of the bottom plate 15. The guide member 2 6 fixes and releases the probe guide rail 25 . Specifically, as shown in the lock mechanism diagram, the electromagnetic lock portion 28 makes the electromagnetic lock portion 28 P 39 easy to assemble the body 5 body slide machine I and can also detect the electrode 4 of the slide mechanism 5 The position of the body 5 in the state along the five sides of the short side 1 of the 15A is in the position of the bottom plate 1 5 : the front face of the crystal plate 3 . 26 pairs of probes 1 8 The opening of the 8th operation -12-1356173 is composed of an actuator such as a hydraulic type, a pneumatic type, or an electric type, and the connecting rod 39 is used. The connecting rod 39 is fitted to the guide hole 5A of the probe assembly 5, and is used to connect the probe assembly 5 and the member of the photographing means 19. The connecting rod 39 is extended by the cylinder 38 and fitted to the guide hole 5A, and is coupled so that the probe assembly 5 and the photographing means 19 are integrally moved. Further, the switch 29 is opened by the connecting rod 39 fitted to the guide hole 5A, and the switch 29 is opened by pulling out. The extension plate portion 34 is provided to extend on the upper side of the probe assembly 5 and extends to a position facing the probe 6 of the probe assembly 5. The calibration camera unit 3 5 is a camera for taking the electrode 4 of the liquid crystal panel 3 and the probe 6 of the probe assembly 5 (see Fig. 7). The calibration camera unit 35 is provided with a camera having an image sensor composed of a CCD or a CMOS. The alignment of the electrodes 4 and the probes 6 is performed by the calibration camera unit 35. Further, the calibration camera unit 35 also captures the alignment mark 3 A of the liquid crystal panel 3, and performs alignment of the liquid crystal panel 3. The photographing means slide mechanism 20 supports the photographing means 19 so as to be supported by the bottom plate 15 so as to be movable in parallel in the sliding direction of the probe assembly 5, and appropriately move to the position of the probe 6 and the electrode 4 or the calibration mark Mechanism for use in the position of 3A>> The photographing means slide mechanism 20 is constituted by a photographing means rail 41 and an photographing means guide 42 which is attached to be slidable on the photographing means rail 41. The photographing means track 41 is attached to the edge of the opening 15A of the bottom plate 15, and is adjacent to the probe rail 25 and arranged in parallel. That is, the photographing means track 41 is formed such that the probe 6 and the aforementioned new one are provided along the edge portion of the opening 15A of the bottom plate 15 in the direction orthogonal to the reference position specified by the -14356173 quasi-position specific step. The electrodes 4 of the liquid crystal panel 3 are aligned. The second liquid crystal panel 3 (the same type as the first sheet) must be inspected, and the liquid crystal panel 3 is placed on the workpiece stage 2 at the same position as the first liquid crystal panel 3 and aligned. Here, according to the dimensional accuracy of each liquid crystal panel 3, even if the first sheet and the second liquid crystal panel 3 are placed at the same position on the workpiece stage 2, the relative position of the probe unit to the bottom plate 15 is not The situation of integration. Therefore, the calibration mark 3 A on the liquid crystal panel 3 after the first alignment is imaged by the photographing means 19, the reference position is specified, and the relative positions of the second liquid crystal panel 3 and the bottom plate 15 are adjusted to be the same. The position of the first liquid crystal panel 3. This adjustment is performed by the aforementioned ΧΥΖ0 mechanism provided in the workpiece stage 2. As long as the types of the liquid crystal panels 3 to be inspected are the same, the positions of the electrodes 4 on the liquid crystal panel 3 and the relative positions of the alignment marks 3A and the electrodes 4 are also the same. Therefore, at the end of the adjustment, after the second sheet The alignment of the electrodes 4 and the probes 6 of the liquid crystal panel 3 ends. In other words, in the second liquid crystal panel 3, the lighting inspection is performed by the same procedure as described above, and the liquid crystal panel 3 after the third sheet (the same type as the first sheet) is subjected to the lighting inspection in the same manner as described above. . [Effects] As described above, in the probe alignment step, the probe 6 and the electrode 4 are aligned, and in the holding step 'the holding of the probe assembly 5 on the bottom plate 15' in the reference position specifying step 'Specific liquid crystal-19-1356173 The reference position of the panel 3, in the above-described normal alignment step, since the probe 6 and the electrode 4 of the new liquid crystal panel 3 are already aligned, the probe assembly 5 can be used. It is easy to align with the liquid crystal panel 3 described above. The result is to check the energy rate. Further, since the respective probe assemblies 5 are individually moved, the respective probes 6 and the electrodes 4 of the liquid crystal panel 3 are aligned, and therefore the thermal expansion of the liquid crystal panel 3 caused by the heat of the backlight unit 7 causes the respective probes 6 to be caused. For each electrode offset, the deviation can still be absorbed. Compared with the prior inspection apparatus, the driving source of the driving mechanism is only the moving mechanism 21 of the photographing means 19, so that the number of driving sources can be reduced, and the number of wiring wires to the driving source can be reduced. The result is a cost-effective surface and a wide working space. Further, even if the type (electrode position) of the liquid crystal panel 3 is changed and the position of the electrode 4 is shifted from the previous position, the respective probes 6 can be easily aligned to the respective electrodes. The calibration camera unit 35 captures the calibration mark 3A of the liquid crystal panel 3, adjusts the amount of deviation between the calibration mark 3A and the reference point to zero, and performs alignment of the liquid crystal panel 3 and the probe assembly 5 after the second sheet. These alignments can be performed easily and quickly. Further, by aligning the probe 6 and the respective electrodes 4' of the liquid crystal panel 3 by the calibration camera unit 35, the amount of deviation is adjusted to zero, and the alignment of the probe 6 and the electrode 4 is performed, so that the measurement can be easily and quickly performed. Wait for alignment. [Modification] -20- 1356173 In the above embodiment, only one imaging device 19 is provided on each side. When the number of the needle assemblies 5 is large, two or more types of imaging devices may be provided. In the above embodiment, The liquid crystal panel 3 is an example of an inspection pair, but is applicable to all of the object plates in which the probe 6 and the electrode 4 must be integrated. Further, the inspection by the inspection device is not limited to the lighting inspection of the liquid crystal 3, and is applicable to all inspections in which the probe 6 and the electrode 4 are connected. In the above embodiment, the connection mechanism 37 is provided in the imaging means, but it may be provided on the probe assembly 5 side. It suffices that the imaging means] the probe assembly 5 can be connected to each other. In the above embodiment, the locking mechanism 18 including the electromagnetic solenoid 30 and the fixing 3 is taken as an example, but the other configuration may be referred to as the lock 18. For example, as shown in Fig. 9, the fixing pin 51' is raised 52 and the spring 53 may be used. The fixing pin 51 is biased by the spring 53 by the needle rail 25 side. The lift pin 52 is inserted into the guide hole 5A, and the end portion has a tapered portion 52A. The upper end portion of the fixing pin 51 also has a tapered portion 51A corresponding to the tapered portion 52A of the rising 52. Thereby, when the connecting rod 39 is pushed into the hole 5A, the lift pin 52 is pushed in, and the pin 51 is pushed upward by the tapered portions 51A and 52A to be released. When the connecting rod 39 is pulled out, the solid 51 is pushed down by the spring 53 and fixed. In the above embodiment, the bottom plate 15 may be a movable bottom plate formed of a square plate material. In this case, the movable probe unit is constructed by a movable frame mechanism. The movable frame mechanism is composed of a plurality of frame plates but the probe portion 19 is inspected by the panel inspection panel 19 side 19 and the depression 31 is fixed to the probe and the front deceleration pin guides the fixed pin, but the frame is formed into a bottom 21 - 1356173 board, with different sizes of different types of liquid crystal panels 3, moving the front frame plates to adjust the size of the liquid crystal panel 3. Fig. 10 shows an example of the movable frame mechanism. The movable frame mechanism 55 is composed of a Y-axis moving mechanism 56 and an X-axis moving mechanism 57. The Y-axis shifting mechanism 56 is a mechanism for adjusting the Y-axis direction of the opening 55A of the movable frame mechanism 55. The Y-axis moving mechanism 56 includes a guide disposed in the Y-axis direction, a guide that is fitted to the rail and supported to be slidable in the Y-axis direction, and is supported by the guide and mounted to slide in the Y-axis direction. Similarly to the upper base plate, the bottom plate is supported by the guide member and attached to a lower base plate that is slidable in the Y-axis direction, and a Y-axis drive portion that moves the upper base plate and the lower base plate in the Y-axis direction. The X-axis moving mechanism 57 is a mechanism for adjusting the X-axis direction of the opening 55A of the movable frame 55. The X-axis moving mechanism includes an X-axis upper frame portion disposed in the X-axis direction, an X-axis lower frame portion disposed in the X-axis direction along the X-axis upper edge portion, and a Y-axis right frame disposed in the Y-axis direction. The Y-axis left frame portion in the axial direction, the X-axis lower-side driving portion that moves the X-axis lower frame portion in the X-axis direction, and the X-axis upper frame portion on the X-axis are disposed in the same manner as the Y-axis right frame portion. The X-axis upper drive unit that moves in the direction. The specific configuration of the movable frame mechanism 55 has been described in the movable probe unit mechanism previously proposed by the applicant (Japanese Patent Application No. 2006-148562). When the liquid crystal panel 3 of different types is inspected by the inspection apparatus including the movable frame mechanism 55, the liquid crystal panel 3 is placed at a predetermined position of the workpiece stage 2, and the movable frame mechanism 55 is used to open the 55A. The size of the liquid crystal panel 3. The size of the opening 55A is adjusted to the size of the liquid moving panel 3 by moving the frame member Y of the moving device 57 to the frame Y, and then the probe is assembled by the above-described photographing. As a result of the alignment of the probes 6 of the body 5 with the liquid crystal panel 3, the type exchange of the liquid crystal panel 3 can be quickly performed. Further, even if the type of the liquid crystal panel 3 is changed, the probe assembly 5 can be used, and when the probe 6 and the electrode are different in the liquid crystal panel 3, a special device is not required. Since the alignment of the electrodes 4 of the needle assembly 5 and the liquid crystal panel 3 can be individually performed by the respective probe assemblies 5, the specifications (electrode positions) of the panel 3 can be changed, and the electrodes 6 and the electrodes 4 can be easily alignment. Further, in the above embodiment, the movement of the probe 5 and the electrode 4 for the movement of the probe 6 is performed by connecting the probe group photographic means 19, but each probe assembly 5 may be provided with a drive at the same time. The linear assembly of the probe assembly 5 is electrically controlled using a linear motor mechanism. In addition, the linear motor mechanism can be constructed directly. With the linear motor mechanism, since the alignment of the probe 6 and the electrode 4 can be improved by accurately mounting the body 5, the locking mechanism of the probe assembly 5 can be applied, for example, by a brake. The same as the above-described embodiment, the first embodiment of the present invention is an enlarged perspective view of a main part of the unit mechanism according to the embodiment of the present invention. Means 19 and the like: each electrode 4. Move the alignment of 4 individually. For the plural probe, even if the liquid crystal performs the probe assembly body of each probe package 5, it is used. For example, independently adjust the probe set separately using a well-known machine. In this case, the effect of the solenoid valve, the effect of the movable probe -23-