TWD167110S - 基板保持環 - Google Patents

基板保持環

Info

Publication number
TWD167110S
TWD167110S TW102307326D01F TW102307326D01F TWD167110S TW D167110 S TWD167110 S TW D167110S TW 102307326D01 F TW102307326D01 F TW 102307326D01F TW 102307326D01 F TW102307326D01 F TW 102307326D01F TW D167110 S TWD167110 S TW D167110S
Authority
TW
Taiwan
Prior art keywords
design
view
substrate
retaining ring
original
Prior art date
Application number
TW102307326D01F
Other languages
English (en)
Inventor
Makoto Fukushima
Hozumi Yasuda
Keisuke Namiki
Osamu Nabeya
Shingo Togashi
Satoru Yamaki
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD167110S publication Critical patent/TWD167110S/zh

Links

Abstract

【物品用途】;本設計的物品是基板保持環，如「使用狀態參考圖」所示，應用於半導體等製造時的基板研磨工程中，將晶圓等基板保持在環內，用以研磨基板的單面。;【設計說明】;本衍生設計與原設計之外觀差異在於：如底面立體圖、仰視圖及前視圖所示，本設計與原設計的底部溝槽及邊緣等略有所不同，因此本案與原設計案之差異些微，不影響原設計與衍生設計之近似。;後視圖、右側視圖及左側視圖均與前視圖相同，皆予省略。
TW102307326D01F 2013-06-14 2013-11-14 基板保持環 TWD167110S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2013-13457F JP1495083S (zh) 2013-06-14 2013-06-14

Publications (1)

Publication Number Publication Date
TWD167110S true TWD167110S (zh) 2015-04-11

Family

ID=58418611

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102307326D01F TWD167110S (zh) 2013-06-14 2013-11-14 基板保持環

Country Status (2)

Country Link
JP (1) JP1495083S (zh)
TW (1) TWD167110S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11049760B2 (en) 2016-03-04 2021-06-29 Applied Materials, Inc. Universal process kit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11049760B2 (en) 2016-03-04 2021-06-29 Applied Materials, Inc. Universal process kit

Also Published As

Publication number Publication date
JP1495083S (zh) 2017-04-03

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