TWD165013S - 靜電夾盤之部分 - Google Patents

靜電夾盤之部分

Info

Publication number
TWD165013S
TWD165013S TW102300097F TW102300097F TWD165013S TW D165013 S TWD165013 S TW D165013S TW 102300097 F TW102300097 F TW 102300097F TW 102300097 F TW102300097 F TW 102300097F TW D165013 S TWD165013 S TW D165013S
Authority
TW
Taiwan
Prior art keywords
view
electrostatic chuck
work
same
design
Prior art date
Application number
TW102300097F
Other languages
English (en)
Inventor
Daniel Martin
Monica Agarwal
Original Assignee
應用材料股份有限公司
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司, Applied Materials Inc filed Critical 應用材料股份有限公司
Publication of TWD165013S publication Critical patent/TWD165013S/zh

Links

Abstract

【物品用途】;本創作係關於一種半導體晶圓處理組件，特別是靜電夾盤。;【設計說明】;後視圖與前視圖相同，故省略後視圖。右側視圖與左側視圖相同，故省略右側視圖。局部放大圖，係圖示本創作之靜電夾盤的上表面之部分。;圖式中虛線表示之部分為本案設計不主張之部分。
TW102300097F 2011-11-22 2012-05-08 靜電夾盤之部分 TWD165013S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/407,085 USD708651S1 (en) 2011-11-22 2011-11-22 Electrostatic chuck

Publications (1)

Publication Number Publication Date
TWD165013S true TWD165013S (zh) 2014-12-21

Family

ID=51032253

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102300097F TWD165013S (zh) 2011-11-22 2012-05-08 靜電夾盤之部分

Country Status (2)

Country Link
US (1) USD708651S1 (zh)
TW (1) TWD165013S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD845770S1 (en) 2017-01-10 2019-04-16 Rockwood & Hines Glass Group Co. Bottle
USD931240S1 (en) * 2019-07-30 2021-09-21 Applied Materials, Inc. Substrate support pedestal
USD947802S1 (en) 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid

Also Published As

Publication number Publication date
USD708651S1 (en) 2014-07-08

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