TWD170203S - 基板洗淨用滾軸桿之部分 - Google Patents

基板洗淨用滾軸桿之部分

Info

Publication number
TWD170203S
TWD170203S TW103301581F TW103301581F TWD170203S TW D170203 S TWD170203 S TW D170203S TW 103301581 F TW103301581 F TW 103301581F TW 103301581 F TW103301581 F TW 103301581F TW D170203 S TWD170203 S TW D170203S
Authority
TW
Taiwan
Prior art keywords
design
view
article
substrate
roller shaft
Prior art date
Application number
TW103301581F
Other languages
English (en)
Inventor
Mitsuru Miyazaki
Takuya Inoue
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD170203S publication Critical patent/TWD170203S/zh

Links

Abstract

【物品用途】;本設計的物品是基板洗淨用滾軸桿，為一種***到用來洗淨附著在施行研磨處理之基板(半導體晶圓等)的表面之研磨屑等的基板洗淨用滾子的軸桿；部分設計的對象是與本物品之一端部側的洗淨裝置的結合部分。;【設計說明】;後視圖與前視圖相對稱，後視圖省略。;仰視圖與俯視圖相同，仰視圖省略。;圖式中之「部分設計範圍之放大立體圖」，僅為放大表示部分設計所主張的範圍之圖。;圖中以實線所示為「主張設計之部分」，虛線所示為「不主張設計之部分」。
TW103301581F 2013-09-24 2014-03-21 基板洗淨用滾軸桿之部分 TWD170203S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013021976 2013-09-24

Publications (1)

Publication Number Publication Date
TWD170203S true TWD170203S (zh) 2015-09-01

Family

ID=53639011

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103301581F TWD170203S (zh) 2013-09-24 2014-03-21 基板洗淨用滾軸桿之部分

Country Status (2)

Country Link
US (1) USD735431S1 (zh)
TW (1) TWD170203S (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1670140S (zh) * 2020-05-15 2020-10-12

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5745945A (en) * 1996-06-28 1998-05-05 International Business Machines Corporation Brush conditioner for a semiconductor cleaning brush
US6502273B1 (en) * 1996-11-08 2003-01-07 Kanebo, Ltd. Cleaning sponge roller
US6076217A (en) * 1998-04-06 2000-06-20 Micron Technology, Inc. Brush alignment platform
JP3200036B2 (ja) * 1998-05-22 2001-08-20 アイオン株式会社 洗浄用回転ブラシ
US6247197B1 (en) * 1998-07-09 2001-06-19 Lam Research Corporation Brush interflow distributor
US6467120B1 (en) * 1999-09-08 2002-10-22 International Business Machines Corporation Wafer cleaning brush profile modification
US6240588B1 (en) * 1999-12-03 2001-06-05 Lam Research Corporation Wafer scrubbing brush core
US6523210B1 (en) * 2000-04-05 2003-02-25 Nicholas Andros Surface charge controlling apparatus for wafer cleaning
JP3844635B2 (ja) * 2000-04-12 2006-11-15 株式会社荏原製作所 ロールスポンジ、ロールスポンジの製造方法、ロールスポンジの製造具及びロールスポンジを軸に取り付ける方法
JP4046931B2 (ja) * 2000-07-14 2008-02-13 株式会社荏原製作所 基板洗浄装置及び洗浄具
US7955693B2 (en) * 2001-04-20 2011-06-07 Tolland Development Company, Llc Foam composition roller brush with embedded mandrel
US6616516B1 (en) * 2001-12-13 2003-09-09 Lam Research Corporation Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
WO2005016599A1 (en) * 2003-08-08 2005-02-24 Mykrolys Corporation Methods and materials for making a monolithic porous pad cast onto a rotatable base
US20050109371A1 (en) * 2003-10-27 2005-05-26 Applied Materials, Inc. Post CMP scrubbing of substrates
KR101324870B1 (ko) * 2005-12-06 2013-11-01 엔테그리스, 아이엔씨. 다공성 패드를 위한 성형된 회전가능 기부
JP4813185B2 (ja) * 2006-01-17 2011-11-09 富士通セミコンダクター株式会社 ウェハの洗浄装置及び洗浄方法
US7735177B1 (en) * 2006-02-10 2010-06-15 Lam Research Corporation Brush core assembly
WO2010001761A1 (ja) * 2008-06-30 2010-01-07 アイオン株式会社 洗浄用スポンジローラ
TWD147969S (zh) * 2011-04-20 2012-07-01 荏原製作所股份有限公司 半導體晶圓洗淨用滾子
US20130255721A1 (en) * 2012-04-03 2013-10-03 Illinois Tool Works Inc. Concave nodule sponge brush
US8778087B2 (en) * 2012-04-03 2014-07-15 Illinois Tool Works Inc. Conical sponge brush for cleaning semiconductor wafers

Also Published As

Publication number Publication date
USD735431S1 (en) 2015-07-28

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