TWD170203S - 基板洗淨用滾軸桿之部分 - Google Patents
基板洗淨用滾軸桿之部分Info
- Publication number
- TWD170203S TWD170203S TW103301581F TW103301581F TWD170203S TW D170203 S TWD170203 S TW D170203S TW 103301581 F TW103301581 F TW 103301581F TW 103301581 F TW103301581 F TW 103301581F TW D170203 S TWD170203 S TW D170203S
- Authority
- TW
- Taiwan
- Prior art keywords
- design
- view
- article
- substrate
- roller shaft
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 3
- 239000000428 dust Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是基板洗淨用滾軸桿,為一種***到用來洗淨附著在施行研磨處理之基板(半導體晶圓等)的表面之研磨屑等的基板洗淨用滾子的軸桿;部分設計的對象是與本物品之一端部側的洗淨裝置的結合部分。;【設計說明】;後視圖與前視圖相對稱,後視圖省略。;仰視圖與俯視圖相同,仰視圖省略。;圖式中之「部分設計範圍之放大立體圖」,僅為放大表示部分設計所主張的範圍之圖。;圖中以實線所示為「主張設計之部分」,虛線所示為「不主張設計之部分」。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013021976 | 2013-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD170203S true TWD170203S (zh) | 2015-09-01 |
Family
ID=53639011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103301581F TWD170203S (zh) | 2013-09-24 | 2014-03-21 | 基板洗淨用滾軸桿之部分 |
Country Status (2)
Country | Link |
---|---|
US (1) | USD735431S1 (zh) |
TW (1) | TWD170203S (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1670140S (zh) * | 2020-05-15 | 2020-10-12 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5745945A (en) * | 1996-06-28 | 1998-05-05 | International Business Machines Corporation | Brush conditioner for a semiconductor cleaning brush |
US6502273B1 (en) * | 1996-11-08 | 2003-01-07 | Kanebo, Ltd. | Cleaning sponge roller |
US6076217A (en) * | 1998-04-06 | 2000-06-20 | Micron Technology, Inc. | Brush alignment platform |
JP3200036B2 (ja) * | 1998-05-22 | 2001-08-20 | アイオン株式会社 | 洗浄用回転ブラシ |
US6247197B1 (en) * | 1998-07-09 | 2001-06-19 | Lam Research Corporation | Brush interflow distributor |
US6467120B1 (en) * | 1999-09-08 | 2002-10-22 | International Business Machines Corporation | Wafer cleaning brush profile modification |
US6240588B1 (en) * | 1999-12-03 | 2001-06-05 | Lam Research Corporation | Wafer scrubbing brush core |
US6523210B1 (en) * | 2000-04-05 | 2003-02-25 | Nicholas Andros | Surface charge controlling apparatus for wafer cleaning |
JP3844635B2 (ja) * | 2000-04-12 | 2006-11-15 | 株式会社荏原製作所 | ロールスポンジ、ロールスポンジの製造方法、ロールスポンジの製造具及びロールスポンジを軸に取り付ける方法 |
JP4046931B2 (ja) * | 2000-07-14 | 2008-02-13 | 株式会社荏原製作所 | 基板洗浄装置及び洗浄具 |
US7955693B2 (en) * | 2001-04-20 | 2011-06-07 | Tolland Development Company, Llc | Foam composition roller brush with embedded mandrel |
US6616516B1 (en) * | 2001-12-13 | 2003-09-09 | Lam Research Corporation | Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates |
WO2005016599A1 (en) * | 2003-08-08 | 2005-02-24 | Mykrolys Corporation | Methods and materials for making a monolithic porous pad cast onto a rotatable base |
US20050109371A1 (en) * | 2003-10-27 | 2005-05-26 | Applied Materials, Inc. | Post CMP scrubbing of substrates |
KR101324870B1 (ko) * | 2005-12-06 | 2013-11-01 | 엔테그리스, 아이엔씨. | 다공성 패드를 위한 성형된 회전가능 기부 |
JP4813185B2 (ja) * | 2006-01-17 | 2011-11-09 | 富士通セミコンダクター株式会社 | ウェハの洗浄装置及び洗浄方法 |
US7735177B1 (en) * | 2006-02-10 | 2010-06-15 | Lam Research Corporation | Brush core assembly |
WO2010001761A1 (ja) * | 2008-06-30 | 2010-01-07 | アイオン株式会社 | 洗浄用スポンジローラ |
TWD147969S (zh) * | 2011-04-20 | 2012-07-01 | 荏原製作所股份有限公司 | 半導體晶圓洗淨用滾子 |
US20130255721A1 (en) * | 2012-04-03 | 2013-10-03 | Illinois Tool Works Inc. | Concave nodule sponge brush |
US8778087B2 (en) * | 2012-04-03 | 2014-07-15 | Illinois Tool Works Inc. | Conical sponge brush for cleaning semiconductor wafers |
-
2014
- 2014-03-21 US US29/485,723 patent/USD735431S1/en active Active
- 2014-03-21 TW TW103301581F patent/TWD170203S/zh unknown
Also Published As
Publication number | Publication date |
---|---|
USD735431S1 (en) | 2015-07-28 |
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