TWD175850S - 基板保持環 - Google Patents

基板保持環

Info

Publication number
TWD175850S
TWD175850S TW104304793D01F TW104304793D01F TWD175850S TW D175850 S TWD175850 S TW D175850S TW 104304793D01 F TW104304793D01 F TW 104304793D01F TW 104304793D01 F TW104304793D01 F TW 104304793D01F TW D175850 S TWD175850 S TW D175850S
Authority
TW
Taiwan
Prior art keywords
design
substrate
view
retaining ring
substrate retaining
Prior art date
Application number
TW104304793D01F
Other languages
English (en)
Inventor
Osamu Nabeya
Hozumi Yasuda
Keisuke Namiki
Makoto Fukushima
Shingo Togashi
Satoru Yamaki
Shintaro Isono
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD175850S publication Critical patent/TWD175850S/zh

Links

Abstract

【物品用途】;本設計的物品是基板保持環，如「使用狀態參考圖」所示，應用於半導體等製造時的基板研磨工程中，將晶圓等基板保持在環內，以便於對基板的單面進行研磨的基板保持環。;【設計說明】;後視圖、右側視圖及左側視圖皆與前視圖相同，均予以省略。;與原設計的差異在於：本設計之凹溝配置較原設計多，該等差異細微，不影響兩案的近似。
TW104304793D01F 2015-03-03 2015-09-02 基板保持環 TWD175850S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015004632 2015-03-03

Publications (1)

Publication Number Publication Date
TWD175850S true TWD175850S (zh) 2016-05-21

Family

ID=89162620

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104304793D01F TWD175850S (zh) 2015-03-03 2015-09-02 基板保持環

Country Status (1)

Country Link
TW (1) TWD175850S (zh)

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