TWD162134S - 基板洗淨用輥子軸桿之部分 - Google Patents

基板洗淨用輥子軸桿之部分

Info

Publication number
TWD162134S
TWD162134S TW102305013F TW102305013F TWD162134S TW D162134 S TWD162134 S TW D162134S TW 102305013 F TW102305013 F TW 102305013F TW 102305013 F TW102305013 F TW 102305013F TW D162134 S TWD162134 S TW D162134S
Authority
TW
Taiwan
Prior art keywords
roller shaft
article
design
view
substrate cleaning
Prior art date
Application number
TW102305013F
Other languages
English (en)
Inventor
Tomoatsu Ishibashi
Hiroshi Kojima
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD162134S publication Critical patent/TWD162134S/zh

Links

Abstract

【物品用途】;本設計的物品是基板洗淨用輥子軸桿，作為對於例如：研磨處理基板(半導體晶圓等)之表面附著之研磨屑等予以洗淨用輥子的軸桿。;【設計說明】;實線部分為本物品主張設計之範圍，虛線部分非本物品主張設計之範圍。;左側視圖與右側視圖對稱，左側視圖省略。;立體圖中虛線部分省略。
TW102305013F 2013-02-01 2013-07-23 基板洗淨用輥子軸桿之部分 TWD162134S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013002016 2013-02-01

Publications (1)

Publication Number Publication Date
TWD162134S true TWD162134S (zh) 2014-08-01

Family

ID=53639007

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102305013F TWD162134S (zh) 2013-02-01 2013-07-23 基板洗淨用輥子軸桿之部分

Country Status (2)

Country Link
US (1) USD735427S1 (zh)
TW (1) TWD162134S (zh)

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