201027658 六、發明說明： 【發明所屬之技術領域】 本發明係關於產生個別積體電路的基板之切割。特定古 之，本發明係關於該等單元之處理及具體而言本發明係關 於用於通過該處理而移動此等單元的系統及方法。 【先前技術】 單元拾取器總成係用以在分割各基板後結合個別切割積 體電路（ic單元）。個別單元拾取器係在總成内，各單元拾 取器經配置以藉由真空而結合一單元。成功操作一單元 拾取器總成的關鍵決定性因數包含： i) 結合速度及在該結合後的後續行進； ii) 安置單元的精確度； iii) 處理設備之資本成本。 隨著積體電路之利潤率的減少，及特定言之，重要的是 記住減少處理成本的壓力且因此需要在維持品質的同時加 速生產。由此得出實現此等處理的基礎結構之成本將同樣 遭受在維持速度及品質的同時減少成本的壓力。 考慮到在一基板内的積體電路晶片之體積，潛在瓶頸在 於1c單元一旦被切割後各系統逐站移動該等1C單元之能 力。已開發不同系統來實現此功能，例如在PCT/SG2005/ 000288中所揭示，其之内容係以引用方式倂入本文中。在 用於處理積體電路單元的此系統中，圖_示包括幾個單 元拾取器11B的-單元拾取器總成UA。為使該等單元拾 取器結合個別1C單元，該單元拾取器總成包括經設計以以 144472.doc 201027658 -指定方式結合各單元的一複雜配置。在保證效率及有效 的同時’此設備之成本係尤其高。 一單 因此採用倂入可導致一較低資本成本之若干態樣的 元拾取器總成將為有利。 【發明内容】201027658 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to cutting of a substrate for producing an individual integrated circuit. In particular, the present invention relates to the processing of such units and, in particular, the present invention relates to systems and methods for moving such units by such processing. [Prior Art] The unit pickup assembly is used to combine individual cutting integrated circuits (ic units) after dividing each substrate. Individual unit pickers are within the assembly, and each unit picker is configured to incorporate a unit by vacuum. Successful operation of a unit The key determinants of a pickup assembly are: i) the speed of combination and subsequent travel after the combination; ii) the accuracy of the unit; iii) the capital cost of the equipment. As the profit margin of integrated circuits decreases, and in particular, it is important to remember the pressure to reduce processing costs and therefore speed up production while maintaining quality. It follows that the cost of the infrastructure to achieve such processing will also suffer from the pressure to reduce costs while maintaining speed and quality. Considering the volume of the integrated circuit chip in a substrate, the potential bottleneck is the ability of each system to move the 1C units station by station once the 1c unit is cut. Different systems have been developed to implement this function, as disclosed, for example, in PCT/SG2005/000288, the disclosure of which is incorporated herein by reference. In this system for processing integrated circuit units, the figure shows a unit pickup assembly UA including several unit pickups 11B. In order for the unit pickers to incorporate individual 1C units, the unit picker assembly includes a complex configuration designed to combine units in a manner specified by 144472.doc 201027658. While ensuring efficiency and effectiveness, the cost of this equipment is particularly high. A single picker assembly that incorporates several aspects that result in a lower capital cost would be advantageous. [Summary of the Invention]
在-第-態樣中’本發明提供一種用於結合切割單元 之單元拾取器總成’該總成包括：複數個單元拾取器，各 單元拾取器具有用於結合—叫元的—結合端；該等單元 拾取器之各者經可移動地安裝以允許自—内縮位置移動至 -單元結合位置；一致動器總成’其經配置以移動至複數 個致動位置，料位置之各者對應自該㈣位置至該單元 結合位置的該等單元拾取器之一者；#中在該等致動位置 之任-者中時該致動器總、成係經配置以將對應單元拾取器 自該内縮位置移動至該結合位置。 在弟二態樣中，本發明提供一種用於結合切割ic單元之 單元拾取器總成，該總成包括：複數個單 該對内的各單元拾取器具有用於結合一料：::結: 端；該等單元拾取^之各者經可移㈣安裝以允許自一内 縮位置移動至一單元結合位置；複數個驅動構件，各 構件對應該等單元拾取n對之各者；該驅動構件具有相對 端使得在該對應對㈣各單元拾取器接觸相鄰於該驅動構 件之相對端的驅動構件；其中該等驅動構件之各者係可圍 繞介於該等相對端之間的一水平轴轉動使得該驅動構件沿 一第一方向轉動而迫使該等單元拾取器之一者向下且沿一 144472.doc 201027658 第一方向轉動而驅動另一單元拾取器向下。 在第三態樣中，本發明提供一種用於結合一1(：單元之單 元拾取器，該單元拾取器包括：一單元拾取器軸，其具有 用於結合該積體電路單元的一結合端；該結合端與一真空 源選擇性地連通用於選擇性地結合及分離該積體電路單 元·’一頂出銷，其在該軸内可交互移動；其中該頂出銷在 該軸内可選擇性縮回以允許結合該IC單元及可自該結合端 選擇性凸出用於分離該ic單元。In the first aspect, the present invention provides a unit pickup assembly for combining a cutting unit. The assembly includes: a plurality of unit pickups, each unit pickup having a binding end for bonding-calling elements; Each of the unit pickers is movably mounted to permit movement from the -retracted position to the -unit joint position; the actuator assembly 'configured to move to a plurality of actuated positions, each of the material positions Corresponding to one of the unit pickers from the (four) position to the unit bonding position; in the any one of the actuating positions, the actuator is configured to connect the corresponding unit picker Moving from the retracted position to the combined position. In the second aspect, the present invention provides a unit pickup assembly for combining a cutting ic unit, the assembly comprising: a plurality of single unit pickups in the pair having a combination of materials::: Each of the unit pickers is movable (4) mounted to permit movement from a retracted position to a unit joint position; a plurality of drive members, each member corresponding to the unit picking n pairs; the drive member Having an opposite end such that each of the unit pairs of the corresponding pair (4) contacts a drive member adjacent the opposite end of the drive member; wherein each of the drive members is rotatable about a horizontal axis between the opposite ends Rotating the drive member in a first direction forces one of the unit pickers to rotate downwardly and in a first direction of 144472.doc 201027658 to drive the other unit picker down. In a third aspect, the present invention provides a unit pickup for combining a unit (1:: unit), the unit pickup comprising: a unit pickup shaft having a joint end for coupling the integrated circuit unit The bonding end is selectively in communication with a vacuum source for selectively combining and separating the integrated circuit unit, an ejection pin, which is movable within the shaft; wherein the ejection pin is in the shaft Optionally retracted to allow bonding of the IC unit and selective protrusion from the bonding end for separating the ic unit.
在第四態樣中，本發明提供一種用於結合切割ic單元之 方法，該方法包括以下步驟：提供複數個單元拾取器，各 單元拾取器具有用於結合一IC單元的一結合端；將一致動 器總成移動至對應於該等單元拾取器之一第一者的一第一 致動位置；致動該第一單元拾取器及因此將單元拾取器自 一内縮位置移動至一單元結合位置且結合一第一ic單元。In a fourth aspect, the present invention provides a method for combining a cut ic unit, the method comprising the steps of: providing a plurality of unit pickers, each unit picker having a bond end for bonding an IC unit; The actuator assembly moves to a first actuation position corresponding to a first one of the unit pickups; actuating the first unit pickup and thereby moving the unit pickup from a retracted position to a unit combination Position and combine with a first ic unit.
在第五態樣十，本發明提供一種用於結合切割ic單元之 方法’該方法包括以下步驟：提供一對單元拾取器，在該 對内的各單元拾取器具有用於結合—IC單元的一結合端； 提供對應於該單元拾取器對的一驅動才冓件，該驅動構件具 有相對端使得各單元拾取器接觸相鄰於該驅動構件之相對 端的驅動構件；沿一第一方向轉動該驅動構件；該轉動迫 使該等單元拾取器之一第一者向下；使一第一叫元與該 第一單元拾取器結合；沿一第二方向轉動該驅動構件，該 轉動迫使該等單元拾取器之一第二者向下；及使一第二m 單元與該第二單元拾取器結合。 144472.doc -6 - 201027658 馬達對單元拾取器的習知比率為一比一。本發明可將比 率降至每一馬達對至少兩個拾取器且可潛在地具有一更大 传多的比率。在此基礎上可通過實施本發明之—總成而顯 著節省潛在的資本成本。 在一替代配i中，該複數個單元拾取器可配置為_圓形 陣列，且該致動器總成及該等單元拾取器圍繞—共用垂直 轴相對於彼此而移動。在一實施例中，該致動器總成可圍 繞該軸轉動以結合各單元拾取器。在一替代實施例中，該 致動器總成可保持轉動地靜態，且該等單元拾取器轉動以 便使該等拾取器之各者進入與致動器對應的位置。無論哪 種情況，驅動機構可轉動該等單元拾取器或轉動該致動器 總成。 【實施方式】 參考繪示本發明之可能配置的附圖將便於進一步描述本 發明。本發明之其他配置為可行且因此附圖之特殊性並非 理解為取代本發明之先前描述之一般性。 本發明藉由增大單元拾取器對操作該等單元拾取器所需 的馬達之數目的比率而尋求比先前技術低的單元拾取器總 成之資本成本。 圖1A、圖1B及圖lc顯示本發明之一實施例藉此單元 拾取器總成5僅使用兩個馬達20、32來操作八個單元拾取 器11，具體而言，單元拾取器總成5包括安裝至一框架15 的一單元拾取器陣列各單元拾取器係經可移動地安裝 以在自一内縮位置至一結合位置的一相互移動中移動，藉 144472.doc 201027658 此單元拾取器可結合一ic單元。 -驅動機構25包括經配置以通過一皮帶驅動㈣驅動一 滾珠螺桿配置45、50的-馬達32。該皮帶驅動㈣安裝於 轉動滚珠螺桿軸45以便驅動一滑塊50的驅動軸承4〇、“之 間。該滑塊50已安裝至致動器總成21之—底面。該驅動機 構因此經配置以沿由滾珠螺桿機構所界定的—直線路徑移 動該致動器總成21。採用一滾珠螺桿機構提供該致動器總 成21之精確安置’且因此提供程序之控制。 拾取器陣列1〇包括整合八個單元拾取器丨i且提供孔隙的 一區塊9,通過該孔隙該等單元拾取器丨丨可在—垂直交互 作用下滑動。該等單元拾取器自身包括通過耦合區塊17耦 合至一致動器軸65的一結合軸22。該結合軸及該致動器轴 係垂直地平行對齊且係配置在該區塊9内以便作為一單一 單元在一垂直交互作用下滑動。該致動器軸65進一步包含 經配置以使該單元拾取器丨丨偏置向上的一彈簧64。 致動器軸65進一步包含一結合區塊6〇，其經配置以自致 動器總成21接收一向下的力且因此給單元拾取器^提供向 下作用以結合一切割1C單元（未顯示）。 實際上結合轴22為具有安置在該軸之鑽孔内之一頂出銷 (未顯示）的一空心軸（）。該頂出銷係經定位以藉由定位在 該結合轴22之頂部的一操作桿33而起作用。該操作桿33係 經配置以接收一水平力’導致因此推該頂出銷向下的圍繞 一水平軸的轉動。 致動器總成21係更清楚地顯示在圖2A及圖2B之功能圖 144472.doc 201027658 中。特定言之’圖2A顯示位於驅動機構25之下方的該致動 器總成21之一橫截面正視圖。該致動器總成21係安裝至沿 粗螺桿軸45行進的滑塊50。該致動器總成包含使一接觸臂 80轉動的一馬達20。該接觸臂80係經配置以通過在區塊6〇 上向下按壓而接觸該致動器區塊60 ’如所論述該區塊_6〇抗 著彈簧64之向上力而移動致動器桿65。In a fifth aspect, the present invention provides a method for combining a cut ic unit. The method includes the steps of: providing a pair of unit pickers, each unit picker in the pair having a bonding-IC unit a driving member; a driving member corresponding to the unit pickup pair, the driving member having opposite ends such that each unit pickup contacts a driving member adjacent to an opposite end of the driving member; rotating the driving in a first direction a member; the rotation forces one of the unit pickers to be downward; the first caller is coupled to the first unit picker; the drive member is rotated in a second direction, the rotation forcing the units to pick up One of the second ones is down; and a second m unit is coupled to the second unit pickup. 144472.doc -6 - 201027658 The conventional ratio of motor to unit pickup is one to one. The present invention can reduce the ratio to a ratio of at least two pickers per motor pair and potentially a greater pass. On this basis, significant capital cost savings can be achieved by implementing the assembly of the present invention. In an alternative configuration i, the plurality of unit pickers can be configured as a circular array, and the actuator assembly and the unit pickers move relative to one another about a common vertical axis. In an embodiment, the actuator assembly is rotatable about the axis to engage the unit pickers. In an alternate embodiment, the actuator assembly is held statically rotationally and the unit pickers are rotated to cause each of the pickers to enter a position corresponding to the actuator. In either case, the drive mechanism can rotate the unit pickers or rotate the actuator assembly. [Embodiment] The accompanying drawings which illustrate possible configurations of the present invention will facilitate further description of the invention. Other configurations of the present invention are possible and the particularity of the drawings is not to be construed as a substitute for the generality of the foregoing description of the invention. The present invention seeks a capital cost of a unit pickup assembly that is lower than the prior art by increasing the ratio of the number of units of the motor required to operate the unit pickups. 1A, 1B, and 1c show an embodiment of the present invention whereby the unit pickup assembly 5 operates the eight unit pickups 11 using only two motors 20, 32, specifically, the unit pickup assembly 5 A unit pickup array including a unit pickup array mounted to a frame 15 is movably mounted to move in a mutual movement from a retracted position to a combined position, by 144472.doc 201027658 This unit pickup can be Combine an ic unit. The drive mechanism 25 includes a motor 32 that is configured to drive a ball screw arrangement 45, 50 by a belt drive (four). The belt drive (four) is mounted to the rotating ball screw shaft 45 for driving a drive bearing 4" of the slider 50, "between. The slider 50 has been mounted to the bottom surface of the actuator assembly 21. The drive mechanism is thus configured The actuator assembly 21 is moved along a linear path defined by the ball screw mechanism. A ball screw mechanism is utilized to provide precise placement of the actuator assembly 21 and thus provide program control. Pickup Array 1 A block 9 is provided that integrates eight unit pickers 且i and provides apertures through which the unit pickers can slide under a vertical interaction. The unit pickers themselves include coupling through coupling blocks 17. A coupling shaft 22 to the actuator shaft 65. The coupling shaft and the actuator shaft are vertically aligned in parallel and are disposed in the block 9 to slide as a single unit under a vertical interaction. The actuator shaft 65 further includes a spring 64 that is configured to bias the unit pickup 向上 upward. The actuator shaft 65 further includes a coupling block 〇 configured to receive from the actuator assembly 21 One The lower force and thus the unit pickup 2 provides a downward action to incorporate a cutting 1C unit (not shown). The coupling shaft 22 is actually an ejection pin (not shown) having one of the bores disposed in the shaft. a hollow shaft (). The ejector pin is positioned to act by an operating lever 33 positioned at the top of the coupling shaft 22. The operating lever 33 is configured to receive a horizontal force' resulting in The ejector pin is rotated downward about a horizontal axis. The actuator assembly 21 is more clearly shown in the functional diagram 144472.doc 201027658 of Figures 2A and 2B. In particular, Figure 2A shows the drive mechanism 25 A cross-sectional elevational view of one of the actuator assemblies 21 below. The actuator assembly 21 is mounted to a slider 50 that travels along a thick screw shaft 45. The actuator assembly includes a contact arm 80 A motor 20 that rotates. The contact arm 80 is configured to contact the actuator block 60 by pressing down on the block 6'. As discussed, the block _6 is against the upward force of the spring 64. The actuator rod 65 is moved.
因此，本發明之單元拾取器總成5之功能為使驅動機構 移動致動器總成使得接觸臂80接觸單元拾取器丨丨之任一者 的致動器區塊。以此方式單元拾取器總成一次僅操作一個 拾取器。在個別切割1C單元之結合並非為處理過程中之一 「瓶頸」的應用中，一次結合幾個冗單元可能僅有些微益 處，且因此具有驅動該等單元拾取器U的多個馬達可能僅 有些微益處。考慮到此準則，本發明之一單元拾取器總成 -次僅需要結合一個單元，且因此藉由僅使用為驅動機構 馬達40及致動器總成馬達2〇的兩個馬達而能操作八個單元 拾取器（在此情況下）之一陣列。 圖3A至圖3C顯示本發明之單元拾取器總成之操作的一 順序圖。在圖3A中，馬達20使接觸臂80轉動，壓下一單元 拾取器11之致動器區塊60。耦合至結合轴22的致動器軸U 將結合端30引導向在一真空床丨上的—切割Ic單元2。此時 頂出銷85保持内縮在該結合軸22内。 圖3B顯示下一步驟為接觸臂8〇使單元拾取器降低成與切 割單元2接觸。接著真空管13在結合端3〇處賦予一真空卯 且因此結合該單元2。接著’隨著彈簧64使單元拾取:縮 144472.doc 201027658 回遠離真空床1’該接觸臂80釋放單元拾取器。 不顯示下一階段，藉此驅動機構藉由接觸抗著各致動器 區塊的接觸臂80而將致動器總成移動至下一單元拾取器且 重複將拾取器向下移動的程序。應瞭解相鄰拾取器之間的 淨空區可超出切割後相鄰切割Ic單元之間的淨空區。因 此，單元拾取器總成亦將被移位以便將下一單元拾取器直 接安置在各切割單元上直至靜止駐留在真空板丨上。一旦 第二單元拾取器係在適當位置，已經移動以與第二拾取器 一致的致動器總成就將致動單元拾取器以便將其向下引導 以結合單元拾取器。一旦所有單元拾取器已結合各切割單 元，接著此等單元就可藉由沿（例如）總系統内的一直線軌 道移動整個單元拾取器總成而被移動至下一站。 圖3C顯示有關達到下一處理站的下一階段。一旦接觸臂 再次將單元拾取器向下移動，就使得結合端3〇係接近於一 接收區塊3内的一凹槽。一旦接近於該凹槽但實際上並不 使單元擬合在該凹槽内，真空管13就釋放真空。為確保單 兀2係與單元拾取器分離，安裝至致動器總成的一直線致 動器69使一水平撞錘70凸出。該撞錘7〇接觸操作桿33導致 圍繞一水平軸的轉動36。安裝於結合軸22之頂部的操作桿 接觸頂出銷85，接著該頂出銷85使其之一部分95自結合端 3〇凸出。此小突出物95使單元2移出且因此允許單元落入 接收板3之凹槽内。應註意某些單元可由於釋放真空而移 出且頂出銷起的作用為確保該等單元完全分離以防某些單 元通過靜電吸引力或其他原因而黏貼。 144472.doc -10. 201027658 如前述，下一階段包括接觸臂回轉以便允許單元拾取器 縮回。接著單元拾取器總成移位以便將下一單元拾取器直 接安置在接收板3内的一凹槽上。接著致動器總成被移動 至第二拾取器以便重複程序且因此將單元安置在第二凹槽 内。 因此藉由採用前面提及之程序，可構建一單元拾取器總 成以便在處理站之間移位切割1C單元且單元拾取器總成具 有一構造’其需要比先前技術更少的馬達且因此需要更少 資本成本’即單元拾取器總成具有對應各單元拾取器的一 馬達。Accordingly, the unit picker assembly 5 of the present invention functions to cause the drive mechanism to move the actuator assembly such that the contact arm 80 contacts the actuator block of either of the unit pickers. In this way, the unit pickup assembly operates only one pickup at a time. In applications where the combination of individual cut 1C units is not a "bottleneck" in the process, combining several redundant units at a time may only have some micro benefits, and thus there may be only a few motors with the unit pickups U driving the units. Micro benefits. In view of this criterion, a unit pickup assembly of the present invention only needs to be combined with one unit, and thus can operate eight by using only two motors that are the drive mechanism motor 40 and the actuator assembly motor 2〇. An array of unit pickers (in this case). 3A to 3C are a sequence diagram showing the operation of the unit pickup assembly of the present invention. In Fig. 3A, the motor 20 rotates the contact arm 80 to press the actuator block 60 of the unit pickup 11. The actuator shaft U coupled to the coupling shaft 22 directs the coupling end 30 to the cutting Ic unit 2 on a vacuum bed. At this time, the ejector pin 85 remains retracted within the coupling shaft 22. Fig. 3B shows that the next step is to contact the arm 8 to lower the unit pickup into contact with the cutting unit 2. The vacuum tube 13 then imparts a vacuum at the joint end 3〇 and thus joins the unit 2. Then, the unit is picked up with the spring 64: 144472.doc 201027658 is returned away from the vacuum bed 1'. The contact arm 80 releases the unit pickup. The next stage is not displayed, whereby the drive mechanism moves the actuator assembly to the next unit pickup by contacting the contact arms 80 against the respective actuator blocks and repeats the process of moving the pickup downward. It should be understood that the clearance between adjacent pickers can exceed the clearance between adjacent cut Ic units after cutting. Therefore, the unit pickup assembly will also be displaced to position the next unit pickup directly on each cutting unit until it rests on the vacuum plate. Once the second unit picker is in place, the actuator total that has moved to coincide with the second pick will actuate the unit picker to direct it down to engage the unit picker. Once all of the unit pickers have been combined with the cutting units, then the units can be moved to the next station by moving the entire unit pickup assembly along a straight track in, for example, the overall system. Figure 3C shows the next stage in reaching the next processing station. Once the contact arm moves the unit pickup down again, the bond end 3 is brought close to a recess in the receiving block 3. Once close to the groove but does not actually fit the cell within the groove, the vacuum tube 13 releases the vacuum. To ensure separation of the unit 2 from the unit pickup, a linear actuator 69 mounted to the actuator assembly projects a horizontal ram 70. The ram 7 is in contact with the operating lever 33 to cause a rotation 36 about a horizontal axis. The operating lever mounted on the top of the coupling shaft 22 contacts the ejector pin 85, and then the ejector pin 85 has a portion 95 thereof projecting from the coupling end 3''. This tab 95 moves the unit 2 out and thus allows the unit to fall into the recess of the receiving plate 3. It should be noted that some units may be removed due to the release of vacuum and the action of the ejector pin is to ensure that the units are completely separated to prevent certain units from sticking by electrostatic attraction or other reasons. 144472.doc -10. 201027658 As mentioned above, the next stage involves contact arm swivel to allow the unit picker to retract. The unit pickup assembly is then displaced to position the next unit pickup directly on a recess in the receiving plate 3. The actuator assembly is then moved to the second picker to repeat the procedure and thus position the unit within the second recess. Thus, by employing the aforementioned procedure, a unit pickup assembly can be constructed to shift the 1C unit between processing stations and the unit pickup assembly has a configuration that requires fewer motors than prior art and thus Less capital cost is required', ie the unit pickup assembly has a motor corresponding to each unit pickup.
圖4A、圖4B及圖4C顯示根據本發明之一第二實施例的 一單兀拾取器總成。該單元拾取器總成1〇〇具有類似於第 一實施例之單元拾取器陣列的一單元拾取器陣列，該陣列 具有由一耦合區塊135耦合的平行致動器轴13〇及結合軸 120。單元拾取器121係定位在允許垂直運動且一起安裝至 一框架115的一區塊1〇6内。該單元拾取器陣列ι〇5與第一 實施例之單元拾取器陣列的不同之處為接觸部分位於該致 動器轴U0的頂部。而在第一實施例中，使用一接觸區 塊，在此情況下，、經配置以接觸一驅動構件（如一轉動臂 150)的-從動件140係位於該致動器軸13〇的頂部。在此實 施例中，在該從動件保持與該轉動f接觸的同時，該轉動 臂預期在一「ώ輪式」配置中起作用。 4Α至圖4C之實施例中 ’比率為四個馬達對八 在保持本發明之原則即減小在圖 馬達對單元拾取器之比率的情況下 144472.doc -11 - 201027658 個拾取器。在第二實施例中，驅動機構及致動器總成被移 除且由一致動器陣列151取代。在為八個拾取器的情況 下，在該陣列151内有四個馬達，每兩個拾取器對—個馬 達。各馬達係與一轉動臂150關聯且該轉動臂15〇之各對 應於一單元拾取器121。 此實施例之單元拾取器總成1〇〇係經配置以—次拾取四 個切割單元且因此各馬達涉及引導—單元拾取器以同時結 合一單元。圖5A、圖5B及圖5C顯示此實施例之操作的方 法。在圖5B中，各馬達起動以使轉動臂i 5〇以一順時針方 式轉動。與對應各拾取器的從動件14〇接觸的該等轉動臂 跟隨由一彈簧130使其向上偏的轉動臂。因此藉由以一順 時針之方式的轉動165，在彈簧13〇的作用下左手邊的單元 拾取器被向下推170,且右手邊的拾取器被允許向上移動 175。在向下運動中使拾取器引進至與切割單元對應且因 此能同時結合該等單元。應瞭解對於此實施例，該等切割 單元將具有類似於個別單元拾取器之間之淨空區之間隔二 一間隔以允許此同時發生之結合。 圖5C顯示下-階段’ #此沿一順時針方向轉動18〇轉動 臂150以便迫使右手邊之拾取器向下且允許由彈簧推動左 手邊之拾取器向上。因此可結合準備轉移的接下四個單 元。 可變動單元之配置的確切性質’例如，在某些情況下該 等單元可安置在一檢查器板配置中且因此為了結合其次四 個單元，可能需要移位單元總成100以便導致其二四個拾 144472.doc 12 201027658 取器與S亥其次四個單开射藤 W 士改 個卓兀對應。該等待結合單元之配置並非 形成本發明之部分且 寬範圍的Μ分佈。以早兀拾取器總成_可適於- 乂其：該等單元拾取器之間之間隙155係較為重要的此 方1 ’可輪廓化相鄰轉動臂以允許相鄰臂之間的一重 6〇Α_ Β使传該等臂之轉動不相互干預。因此如圖4Α及 ❿ 7、可相對靠近彼此地放置相鄰臂且該等臂實際上 不相互接觸。 圖*圖5Β及圖5C中所示之單元拾取器總成顯示一 實施例’藉此同時結合四個積體電路單元。在此操作中， 所有相鄰馬達的轉動臂同時操作以提升及降低作為一組的 單兀拾取器。圖6Α、圖6Β、圖6C及圖6D顯示根據本發明 之另-實施例操作的相同裝置。此處個別地操作馬達以便 單獨地操作單元拾取器之個別對。以此模式，同時結合個 別而非一組的積體電路單元。 圖6Β顯不第步驟’藉此第一馬達轉動⑹以降低M2第 一單元拾取器m以便結合一單一積體電路單元。對應 地，由於來自定位在總成内之—彈簧的偏壓效果所致第二 單元拾取器173提升163。應瞭解單元拾取器之結構可相似 於圖1C之結構，其中一彈簧64係經安置與單元拾取器串聯 以在單元拾取器不遭受來自轉動臂的一向下力時使該單元 拾取器偏置向上。 圖6C顯示第二步驟，藉此轉動臂15〇順時針轉動164以對 應地提升166第一單元拾取器172以便降低167第二單元拾 144472.doc -13- 201027658 取器173以便結合一積體電路單元。 已結合含第一拾取器172及第二拾取器173的―拕單元， 第一馬達返回至一平衡位置，藉此該等單元拾取器為水平 且第二馬達開始運作。圖6D顯示—轉動168以以類似於用 於第一單7L拾取器的圖6B中所示的—方式降低第三單元拾 取器174。相應地，個別地結合單元拾取器陣列ΐ5ι以拾取 個別積體電路單元。相應地，相比於圖5A至圖5c中所示 的同時發生之配置，圖6A至圖61)之實施例顯示單元拾取 器之個別操作。應瞭解自個別操作至同時發生之操作的任 一組合均可含此實施例之配置。 可變動單元之結合及分離的準確性質。一實例顯示在圖 7A、圖7B及圖7(：中。應瞭解圖3A、圖把及圖3(：中所示之 頂出銷的使用可應用於第二實施例之單元拾取器總成。同 樣地圖3A、圖3B及圖3C中所示之頂出銷配置亦可與先前 技術之其他單元拾取器總成一起使用。由此得出圖7八、圖 7B及圖7C中所不之結合系統亦可與第一實施例之單元拾 取器總成及先前技術之其他單元拾取器總成一起使用。 由於轉動臂150驅動單元拾取器2〇5向下朝向冗單元 2〇〇，所以彈簧將被壓縮且因此允許如圖化中所示之 下結合。一真空215係經由結合端125而施加至單元。應: 意一頂出銷21〇亦位於單元拾取器内。在結合處理期間: 頂出銷210係縮回在結合端125内以便避免妨礙扣單元 2〇〇。在結合後單元拾取器被縮回且接著引進第二單元於 取器陣列之操作以結合下—組的IC單元。接著運送單元: 144472.doc -14- 201027658 下刀離站。圖7c顯示結合之方法，藉此首先釋放真空且 某二或大多數單元變為分離且落入一接收區塊内的對 應凹槽。為確保單元與單元拾取器完全分離，在此實施例 • 中施加-股空氣壓力22〇，其迫使頂出鎖21〇向下且因此使 一部分230自結合端125凸出。此較小突出物23〇分離尚未 刀離的任何單元且允許該等單元落入對應的凹槽。因此就 圖3A圖3B及圖3C之實施例而論，了員出器藉由一致動器 .驅動頂出銷向下而運作，在此實施例中，頂出銷藉由空氣 壓力而操作以迫使插針就定位。 圖8A及圖8B顯示本發明之另一實施例。與圖4A至圖4C 之實施例一樣，單元拾取器總成250係配置成單元拾取器 255、260之可操作對。該等單元拾取器對255、260亦在一 替代交互配置中運作，如圖4A至圖4C之實施例所運作， 即第一單元拾取器260向下移動31〇，對應的第二單元拾取 器255向上移動。如囷4B中所示，第一拾取器26〇已向下移 ❹ 動310進入一單元結合位置，且第二單元拾取器255已向上 移動305進入一内縮位置。其他單元拾取器265保持在一平 衡位置。 此實施例與圖4A至圖4C之實施例的不同之處為驅動機 構。此處一皮帶驅動配置具有纏繞一驅動輪275及一自由 • 輪280的一皮帶270。該皮帶係安裝290至在一側上的第一 單元拾取器260，且安裝285至在相對側上的第二單元拾取 器 255。 沿交變方向由一馬達295選擇性地操作驅動輪275以便提 144472.doc •15- 201027658 起及降低拾取器之單元結合端300以根據需要結合及分離 單元。 類似於此實施例的替代配置為可行’如一鏈驅動取代皮 帶驅動。即，驅動輪即自由輪可由一驅動齒輪及一自由齒 輪取代，且皮帶由一鏈條取代。相比於輪子與皮帶的摩擦 結合，鏈條與齒輪之間的嚙合結合可在結合單元時具有更 佳精確度的優點。 在又另一替代配置中，皮帶驅動可由一齒條與小齒輪取 代。即，驅動輪可由一驅動齒輪取代，且皮帶由安裝至各 單元拾取器的兩個齒條取代。此處在含兩個齒條的嚙合結 合中驅動齒輪之轉動可驅動單元拾取器向上與向下，此外 具有一高的精確度。 出於清晰考慮，在更廣的實施例中，輪子與齒輪的一般 化術語可稱為轉轴。因此驅動輪與驅動齒輪可一般化為一 驅動轉軸。 類似地，如所論述的皮帶、鏈條及齒條一般可稱為傳輸 構件。 【圖式簡單說明】 圖1A、圖1B及圖1C為根據本發明之一實施例的一單元 拾取器總成之等角視圖； 圖2A及圖2B為圖1A之單元拾取器總成的正視橫戴面 rg| · 園， 圖3A、圖3B及圖3C為圖1A之單元拾取器總成的順序正 視圖； 144472.doc .16· 201027658 圖4A、圖4B及圖4C為根據本發明之一第二實施例的一 早元拾取益總成之不同視圖； 圖5A、圖5B及圖5C為執行一同時發生之結合的圖4八之 早元拾取器總成之順序正視圖； 圖6A、圖6B及圖6C為執行一個別結合的圖4A之單元拾 取器總成之順序正視圖； 圖7A、圖7B及圖7C為圖4A之單元拾取器總成的順序 圖；及 圖8 A及圖8B為根據本發明之一第三實施例的一單元拾 取器總成之正視圖。 【主要元件符號說明】 1 2 3 5 9 10 11 12 13 15 17 20 21 真空床 切割積體電路（1C)單元 接收區塊 單元拾取器總成 區塊 單元拾取器陣列 單元拾取器 致動器軸 真空管 框架 耦合區塊 馬達 致動器總成 144472.doc 201027658 22 結合軸 25 驅動構件 30 結合端 32 馬達 33 操作桿 34 皮帶驅動 40 驅動軸承 45 滚珠螺桿軸 50 滑塊 58 驅動軸承 60 致動器區塊 64 彈簧 65 致動器軸 69 直線致動器 70 水平撞錘 80 接觸臂 85 頂出銷 95 突出物 100 單元拾取器總成 105 單元拾取器陣列 106 區塊 115 框架 120 結合軸 121 單元拾取器 144472.doc -18- 2010276584A, 4B and 4C show a single pickup pickup assembly in accordance with a second embodiment of the present invention. The unit pickup assembly 1 has a unit pickup array similar to the unit pickup array of the first embodiment, the array having a parallel actuator shaft 13 and a coupling shaft 120 coupled by a coupling block 135. . The unit pickups 121 are positioned within a block 1〇6 that allows vertical movement and is mounted together to a frame 115. The unit pickup array ι 5 differs from the unit pickup array of the first embodiment in that the contact portion is located at the top of the actuator shaft U0. In the first embodiment, a contact block is used, in which case a follower 140 configured to contact a drive member (e.g., a swivel arm 150) is located on top of the actuator shaft 13A. . In this embodiment, the rotating arm is expected to function in a "turn-wheel" configuration while the follower remains in contact with the rotation f. In the embodiment of Fig. 4C, the ratio is four motor pairs. In the case of maintaining the principle of the present invention, that is, reducing the ratio of the motor to the unit pickup, 144472.doc -11 - 201027658 pickups. In the second embodiment, the drive mechanism and actuator assembly are removed and replaced by an actuator array 151. In the case of eight pickers, there are four motors in the array 151, each pair of pickups - one motor. Each of the motors is associated with a rotating arm 150 and each of the rotating arms 15 is corresponding to a unit pickup 121. The unit pickup assembly 1 of this embodiment is configured to pick up four cutting units one at a time and thus each motor involves a pilot-unit pickup to simultaneously join a unit. 5A, 5B and 5C show the operation of this embodiment. In Fig. 5B, each motor is started to rotate the turning arm i 5 顺 in a clockwise manner. The pivoting arms that are in contact with the followers 14A of the respective pickers follow the pivoting arms that are biased upward by a spring 130. Therefore, by rotating 165 in a clockwise manner, the left-hand unit pickup is pushed down 170 by the action of the spring 13〇, and the right-hand pickup is allowed to move upward 175. The pickup is introduced into the downward movement in correspondence with the cutting unit and thus can be combined at the same time. It will be appreciated that for this embodiment, the cutting units will have a spacing similar to the clearance between the individual unit pickers to allow for this simultaneous combination. Figure 5C shows the lower-stage 'this. This rotates the 18-turn arm 150 in a clockwise direction to force the pick of the right-hand side down and allows the pick-up of the left-hand side to be pushed upward by the spring. Therefore, the next four units ready for transfer can be combined. The exact nature of the configuration of the variable unit 'e. For example, in some cases the units may be placed in an inspector board configuration and thus in order to incorporate the next four units, it may be necessary to shift the unit assembly 100 to cause it to be two or four Pick up 144472.doc 12 201027658 Picker and S Hai followed by four single-shot vines W Shishi changed to Zhuo Yu. The configuration of the waiting combination unit is not a part of the present invention and a wide range of Μ distribution. The early pick-up assembly _ can be adapted - 乂: the gap between the unit pickers 155 is more important for this side 1 'contours the adjacent rotating arms to allow a weight between adjacent arms 6 〇Α _ Β Make the rotation of these arms not interfere with each other. Thus, as shown in Figures 4A and ❿7, adjacent arms can be placed relatively close to each other and the arms are not actually in contact with each other. The unit pickup assembly shown in Fig. 5 and Fig. 5C shows an embodiment' by which four integrated circuit units are simultaneously combined. In this operation, the rotating arms of all adjacent motors are simultaneously operated to raise and lower the single pick as a group. Figures 6A, 6B, 6C and 6D show the same apparatus operating in accordance with another embodiment of the present invention. The motors are individually operated here to individually operate individual pairs of unit pickers. In this mode, a plurality of integrated circuit units are combined at the same time. Fig. 6 shows the first step 'by this first motor rotation (6) to lower the M2 first unit pickup m to incorporate a single integrated circuit unit. Correspondingly, the second unit pickup 173 is lifted 163 due to the biasing effect of the spring from being positioned within the assembly. It should be understood that the structure of the unit pickup can be similar to the structure of FIG. 1C in that a spring 64 is disposed in series with the unit pickup to bias the unit pickup upward when the unit pickup does not suffer a downward force from the rotating arm. . Figure 6C shows a second step whereby the rotating arm 15 is rotated clockwise 164 to correspondingly lift 166 the first unit picker 172 to lower the 167 second unit pick 144472.doc -13 - 201027658 picker 173 for combining an integrator Circuit unit. The first motor is returned to an equilibrium position in conjunction with the "拕" unit including the first picker 172 and the second picker 173, whereby the unit pickers are horizontal and the second motor begins to operate. Figure 6D shows - rotation 168 to lower third unit picker 174 in a manner similar to that shown in Figure 6B for the first single 7L pickup. Accordingly, the unit pickup array ΐ5ι is individually combined to pick up individual integrated circuit units. Accordingly, the embodiment of Figs. 6A to 61) shows the individual operations of the unit pickups compared to the simultaneous configuration shown in Figs. 5A to 5c. It should be understood that any combination of operations from individual operations to simultaneous operations may include the configuration of this embodiment. The exact nature of the combination and separation of variable units. An example is shown in FIGS. 7A, 7B, and 7 (: It should be understood that the use of the ejector pins shown in FIG. 3A, FIG. 3, and FIG. 3 can be applied to the unit pickup assembly of the second embodiment. The ejector pin arrangement shown in the same map 3A, FIG. 3B and FIG. 3C can also be used with other unit pickup assemblies of the prior art. Thus, the results of FIGS. 7-8, 7B and 7C are obtained. The bonding system can also be used with the unit pickup assembly of the first embodiment and other unit pickup assemblies of the prior art. Since the rotating arm 150 drives the unit pickup 2〇5 downward toward the redundant unit 2〇〇, the spring It will be compressed and thus allowed to bond underneath as shown in the figure. A vacuum 215 is applied to the unit via the bond end 125. It should be: The ejector pin 21〇 is also located within the unit pickup. During the bonding process: The ejector pin 210 is retracted within the coupling end 125 to avoid obstructing the buckle unit 2 〇〇. After the combination, the unit pickup is retracted and then the second unit is introduced into the ejector array to combine the lower-set IC unit Then the transport unit: 144472.doc -14- 201027658 Figure 7c shows the method of bonding whereby the vacuum is first released and some or most of the cells become separated and fall into corresponding grooves in a receiving block. To ensure complete separation of the unit from the unit pickup, in this embodiment The mid-air pressure 22 施加 is applied, which forces the ejector lock 21 〇 downward and thus causes a portion 230 to protrude from the joint end 125. This smaller protrusion 23 〇 separates any units that have not been knives and allows the units to fall The corresponding groove is inserted. Therefore, with respect to the embodiment of Figures 3A, 3B and 3C, the output device operates by driving the ejector pin downward by the actuator. In this embodiment, the ejector pin is borrowed. Operating from air pressure to force the pins to be positioned. Figures 8A and 8B show another embodiment of the present invention. As with the embodiment of Figures 4A-4C, the unit pickup assembly 250 is configured as a unit pickup 255 260 operable pairs. The unit picker pairs 255, 260 also operate in an alternate interactive configuration, as in the embodiment of Figures 4A-4C, i.e., the first unit picker 260 moves downward 31 〇, The corresponding second unit pickup 255 moves upward. As shown in Figure 4B, the first picker 26 has moved downwardly into the unit coupling position and the second unit pickup 255 has been moved up 305 into a retracted position. The other unit pickers 265 remain in one Equilibrium position. This embodiment differs from the embodiment of Figures 4A through 4C as a drive mechanism. Here a belt drive configuration has a belt 270 wound around a drive wheel 275 and a free wheel 280. 290 to the first unit pickup 260 on one side, and mounting 285 to the second unit pickup 255 on the opposite side. The drive wheel 275 is selectively operated by a motor 295 in the alternating direction to provide 144472.doc • 15-201027658 Up and down the unit junction end 300 of the pickup to join and separate the unit as needed. An alternative configuration similar to this embodiment is feasible as a chain drive instead of a belt drive. That is, the drive wheel, i.e., the free wheel, can be replaced by a drive gear and a free gear, and the belt is replaced by a chain. In combination with the friction of the wheel and the belt, the meshing engagement between the chain and the gear provides the advantage of better accuracy when incorporating the unit. In yet another alternative configuration, the belt drive can be replaced by a rack and pinion. That is, the drive wheel can be replaced by a drive gear, and the belt is replaced by two racks mounted to each unit pickup. Here, the rotation of the drive gear in the meshing engagement with the two racks drives the unit pickup up and down, in addition to having a high degree of precision. For the sake of clarity, in a broader embodiment, the general term for wheels and gears may be referred to as a rotating shaft. Therefore, the drive wheel and the drive gear can be generally turned into a drive shaft. Similarly, belts, chains, and racks as discussed may generally be referred to as transport members. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A, FIG. 1B and FIG. 1C are isometric views of a unit pickup assembly according to an embodiment of the present invention; FIGS. 2A and 2B are front views of the unit pickup assembly of FIG. 1A. Transverse wearing surface rg| · garden, FIGS. 3A, 3B, and 3C are sequential front views of the unit pickup assembly of FIG. 1A; 144472.doc .16· 201027658 FIG. 4A, FIG. 4B and FIG. 4C are diagrams according to the present invention. FIG. 5A, FIG. 5B, and FIG. 5C are sequential elevational views of the early element picker assembly of FIG. 4A performing a simultaneous combination; FIG. 6A, FIG. 6B and FIG. 6C are sequential views of the unit pickup assembly of FIG. 4A performing a combination; FIG. 7A, FIG. 7B and FIG. 7C are sequence diagrams of the unit pickup assembly of FIG. 4A; and FIG. Figure 8B is a front elevational view of a unit pickup assembly in accordance with a third embodiment of the present invention. [Main component symbol description] 1 2 3 5 9 10 11 12 13 15 17 20 21 Vacuum bed cutting integrated circuit (1C) unit receiving block unit pickup assembly block unit pickup array unit pickup actuator axis Vacuum tube frame coupling block motor actuator assembly 144472.doc 201027658 22 coupling shaft 25 drive member 30 coupling end 32 motor 33 operating rod 34 belt drive 40 drive bearing 45 ball screw shaft 50 slider 58 drive bearing 60 actuator region Block 64 Spring 65 Actuator shaft 69 Linear actuator 70 Horizontal ram 80 Contact arm 85 Ejector pin 95 Projection 100 Unit pickup assembly 105 Unit pickup array 106 Block 115 Frame 120 Combined shaft 121 Unit pickup 144472.doc -18- 201027658
125 結合端 130 致動器 135 耦合區塊 140 從動件 150 轉動臂 151 致動器陣列 155 間隙 160A-B 重疊 172 第一單元拾取器 173 第二單元拾取器 174 第三單元拾取器 200 1C單元 210 頂出銷 225 接收區塊 230 突出物 250 單元拾取器總成 255 單元拾取器 260 單元拾取器 265 單元拾取器 270 皮帶 275 驅動輪 280 自由輪 295 馬達 300 結合端 144472.doc -19-125 joint end 130 actuator 135 coupling block 140 follower 150 rotating arm 151 actuator array 155 gap 160A-B overlap 172 first unit pickup 173 second unit pickup 174 third unit pickup 200 1C unit 210 ejector pin 225 receiving block 230 protrusion 250 unit pickup assembly 255 unit pickup 260 unit pickup 265 unit pickup 270 belt 275 drive wheel 280 free wheel 295 motor 300 joint end 144472.doc -19-