TW200502070A - Carrying apparatus and carrying control method for sheet-like objects - Google Patents

Carrying apparatus and carrying control method for sheet-like objects

Info

Publication number
TW200502070A
TW200502070A TW092134088A TW92134088A TW200502070A TW 200502070 A TW200502070 A TW 200502070A TW 092134088 A TW092134088 A TW 092134088A TW 92134088 A TW92134088 A TW 92134088A TW 200502070 A TW200502070 A TW 200502070A
Authority
TW
Taiwan
Prior art keywords
carrying
objects
sheet
rotating arms
support base
Prior art date
Application number
TW092134088A
Other languages
English (en)
Inventor
Katsunori Sakata
Hidekazu Okutsu
Seiichi Fujii
Original Assignee
Rorze Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Corp filed Critical Rorze Corp
Publication of TW200502070A publication Critical patent/TW200502070A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/002—Arms comprising beam bending compensation means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/023—Cartesian coordinate type
    • B25J9/026—Gantry-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW092134088A 2003-07-04 2003-12-02 Carrying apparatus and carrying control method for sheet-like objects TW200502070A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003271050 2003-07-04

Publications (1)

Publication Number Publication Date
TW200502070A true TW200502070A (en) 2005-01-16

Family

ID=33562640

Family Applications (2)

Application Number Title Priority Date Filing Date
TW092134088A TW200502070A (en) 2003-07-04 2003-12-02 Carrying apparatus and carrying control method for sheet-like objects
TW093120144A TW200521056A (en) 2003-07-04 2004-07-05 Carrying apparatus and carrying control method for sheet-like substrate

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW093120144A TW200521056A (en) 2003-07-04 2004-07-05 Carrying apparatus and carrying control method for sheet-like substrate

Country Status (6)

Country Link
JP (1) JP4499038B2 (zh)
KR (1) KR101106401B1 (zh)
CN (1) CN100407395C (zh)
AU (1) AU2003304270A1 (zh)
TW (2) TW200502070A (zh)
WO (1) WO2005002804A1 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399331B (zh) * 2007-06-29 2013-06-21 Ihi Corp Floating handling device
CN112171697A (zh) * 2020-09-03 2021-01-05 中联重科股份有限公司 机械手装置和走台板装配***
TWI764276B (zh) * 2019-09-19 2022-05-11 日商川崎重工業股份有限公司 傾斜調整裝置及具備其之機器人

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JP2007054939A (ja) * 2005-08-26 2007-03-08 Mitsubishi Electric Corp 産業用ロボット及びその輸送方法
US20080019806A1 (en) * 2006-07-24 2008-01-24 Nyi Oo Myo Small footprint modular processing system
CN101205017B (zh) * 2006-12-20 2011-09-28 沈阳新松机器人自动化股份有限公司 一种超薄玻璃洁净搬运机器人
WO2008120466A1 (ja) * 2007-03-26 2008-10-09 Nidec Sankyo Corporation 産業用ロボット及びその運搬方法
US7946800B2 (en) 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
JP2010023195A (ja) * 2008-07-22 2010-02-04 Nidec Sankyo Corp 産業用ロボット
DE102008062153A1 (de) 2008-12-17 2010-12-30 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zum Schnelltransport von Glasplatten
TWI418810B (zh) * 2010-03-26 2013-12-11 Hon Tech Inc 多層式電子元件檢測機
JP5818345B2 (ja) * 2011-04-27 2015-11-18 日本電産サンキョー株式会社 回転機構、産業用ロボットおよび回転体の原点位置復帰方法
KR101829397B1 (ko) 2011-09-16 2018-02-19 퍼시몬 테크놀로지스 코포레이션 낮은 가변성을 가진 로봇
JP2013074112A (ja) * 2011-09-28 2013-04-22 Yaskawa Electric Corp ハンドおよび基板搬送装置
CN102514971A (zh) * 2011-12-08 2012-06-27 深圳市鑫联达包装机械有限公司 一种能够连续传送纸张的传输***及其传输方法
JP5614417B2 (ja) * 2012-01-05 2014-10-29 株式会社安川電機 搬送システム
TWM431163U (en) * 2012-01-31 2012-06-11 Shengjia Prec Co Ltd Glass substrate transportation device
CN102730401B (zh) * 2012-06-26 2014-04-02 深圳市华星光电技术有限公司 基板中转装置及基板搬运***
JP5927724B2 (ja) * 2012-09-06 2016-06-01 本田技研工業株式会社 移動装置
CN103663166A (zh) * 2013-12-11 2014-03-26 深圳市华星光电技术有限公司 自动化物料搬运***及其天车***
WO2015112538A1 (en) 2014-01-21 2015-07-30 Persimmon Technologies, Corp. Substrate transport vacuum platform
CN104440950B (zh) * 2014-11-17 2016-03-16 上海华力微电子有限公司 一种炉管用传片机械手的保护装置及保护方法
CN104495357B (zh) * 2014-12-12 2017-01-04 南通富士通微电子股份有限公司 一种光刻板搬移装置
CN104690736B (zh) * 2015-02-12 2017-03-08 成都天马微电子有限公司 机械手臂及其检测***和检测方法
JP6491515B2 (ja) 2015-03-31 2019-03-27 キヤノン株式会社 自動組立装置及び自動組立方法
CN104925473B (zh) * 2015-05-29 2017-03-01 光驰科技(上海)有限公司 一种解决基板搬送小车通用性的控制方法
JP6629012B2 (ja) * 2015-08-31 2020-01-15 豊田鉄工株式会社 加熱炉用のワーク搬送装置
CN105417066B (zh) * 2015-11-09 2017-12-01 合肥欣奕华智能机器有限公司 基板位置偏移检测及校正装置和基板搬运***
CN105583815B (zh) * 2016-03-17 2017-12-08 北京新智远恒计量校准技术有限公司 一种混凝土试样试验检测机器人
SG11201810030TA (en) * 2016-05-20 2018-12-28 Murata Machinery Ltd Transport vehicle and transport method
CN106216859B (zh) * 2016-08-17 2018-02-27 江苏大学 一种激光间接冲击成形柔性加载的快速取用装置及其方法
JP6723131B2 (ja) 2016-09-29 2020-07-15 株式会社Ｓｃｒｅｅｎホールディングス 基板搬送装置および基板搬送方法
JP6700149B2 (ja) 2016-09-29 2020-05-27 株式会社Ｓｃｒｅｅｎホールディングス 姿勢変更装置
CN106516739B (zh) * 2016-10-26 2019-04-16 福耀集团(福建)机械制造有限公司 一种基于机器人视觉的玻璃移载***
CN106737065B (zh) * 2017-01-05 2019-03-15 张家港市铭斯特光电科技有限公司 一种玻璃生产线
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CN107458108B (zh) * 2017-08-25 2023-04-18 浙江正润机械有限公司 摆动旋转机构和纸板移送纠偏机械手
JP7321095B2 (ja) * 2017-10-11 2023-08-04 ローツェ株式会社 ポッドオープナー
CN107934458B (zh) * 2017-10-13 2019-09-10 弗埃斯工业技术（苏州）有限公司 薄板料件位置调整机构
CN109879052A (zh) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 一种单放纠偏机器人及其纠偏方法
JP7181013B2 (ja) * 2018-06-20 2022-11-30 Juki株式会社 電子部品実装装置及び電子部品実装方法
CN108818588A (zh) * 2018-07-17 2018-11-16 芜湖超源力工业设计有限公司 一种双侧式夹取装置
CN109454640A (zh) * 2018-11-14 2019-03-12 惠科股份有限公司 一种缩短交换片时长的方法
US11767181B2 (en) * 2019-03-14 2023-09-26 Mujin, Inc. Robotic system with handling mechanism and method of operation thereof
JP7133757B2 (ja) * 2019-11-05 2022-09-09 パナソニックＩｐマネジメント株式会社 ロボットの制御方法
CN110865620B (zh) * 2019-11-27 2022-01-25 郑州旭飞光电科技有限公司 一种基板玻璃在线抽检***、方法及包装***
CN111660311B (zh) * 2020-06-16 2022-05-10 扬州大学 一种智能化种蛋分拣入箱机器人及其操作方法
JP7446169B2 (ja) * 2020-06-26 2024-03-08 キヤノントッキ株式会社 基板搬送装置、基板処理システム、基板搬送方法、電子デバイスの製造方法、プログラム及び記憶媒体
CN112660828B (zh) * 2020-12-29 2022-03-08 飞马智科信息技术股份有限公司 一种取代Map传感器的液晶面板检测控制方法
CN114380053A (zh) * 2022-03-08 2022-04-22 哈尔滨工业大学 玻璃搬运机器人

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Publication number Priority date Publication date Assignee Title
TWI399331B (zh) * 2007-06-29 2013-06-21 Ihi Corp Floating handling device
TWI764276B (zh) * 2019-09-19 2022-05-11 日商川崎重工業股份有限公司 傾斜調整裝置及具備其之機器人
CN112171697A (zh) * 2020-09-03 2021-01-05 中联重科股份有限公司 机械手装置和走台板装配***

Also Published As

Publication number Publication date
CN1816907A (zh) 2006-08-09
WO2005002804A1 (ja) 2005-01-13
CN100407395C (zh) 2008-07-30
JPWO2005004230A1 (ja) 2006-11-09
TWI348447B (zh) 2011-09-11
JP4499038B2 (ja) 2010-07-07
TW200521056A (en) 2005-07-01
KR101106401B1 (ko) 2012-01-17
AU2003304270A1 (en) 2005-01-21
KR20060118394A (ko) 2006-11-23

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