TW200502070A - Carrying apparatus and carrying control method for sheet-like objects - Google Patents
Carrying apparatus and carrying control method for sheet-like objectsInfo
- Publication number
- TW200502070A TW200502070A TW092134088A TW92134088A TW200502070A TW 200502070 A TW200502070 A TW 200502070A TW 092134088 A TW092134088 A TW 092134088A TW 92134088 A TW92134088 A TW 92134088A TW 200502070 A TW200502070 A TW 200502070A
- Authority
- TW
- Taiwan
- Prior art keywords
- carrying
- objects
- sheet
- rotating arms
- support base
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/002—Arms comprising beam bending compensation means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/023—Cartesian coordinate type
- B25J9/026—Gantry-type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003271050 | 2003-07-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200502070A true TW200502070A (en) | 2005-01-16 |
Family
ID=33562640
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092134088A TW200502070A (en) | 2003-07-04 | 2003-12-02 | Carrying apparatus and carrying control method for sheet-like objects |
TW093120144A TW200521056A (en) | 2003-07-04 | 2004-07-05 | Carrying apparatus and carrying control method for sheet-like substrate |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093120144A TW200521056A (en) | 2003-07-04 | 2004-07-05 | Carrying apparatus and carrying control method for sheet-like substrate |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP4499038B2 (zh) |
KR (1) | KR101106401B1 (zh) |
CN (1) | CN100407395C (zh) |
AU (1) | AU2003304270A1 (zh) |
TW (2) | TW200502070A (zh) |
WO (1) | WO2005002804A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI399331B (zh) * | 2007-06-29 | 2013-06-21 | Ihi Corp | Floating handling device |
CN112171697A (zh) * | 2020-09-03 | 2021-01-05 | 中联重科股份有限公司 | 机械手装置和走台板装配*** |
TWI764276B (zh) * | 2019-09-19 | 2022-05-11 | 日商川崎重工業股份有限公司 | 傾斜調整裝置及具備其之機器人 |
Families Citing this family (48)
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JP2007054939A (ja) * | 2005-08-26 | 2007-03-08 | Mitsubishi Electric Corp | 産業用ロボット及びその輸送方法 |
US20080019806A1 (en) * | 2006-07-24 | 2008-01-24 | Nyi Oo Myo | Small footprint modular processing system |
CN101205017B (zh) * | 2006-12-20 | 2011-09-28 | 沈阳新松机器人自动化股份有限公司 | 一种超薄玻璃洁净搬运机器人 |
WO2008120466A1 (ja) * | 2007-03-26 | 2008-10-09 | Nidec Sankyo Corporation | 産業用ロボット及びその運搬方法 |
US7946800B2 (en) | 2007-04-06 | 2011-05-24 | Brooks Automation, Inc. | Substrate transport apparatus with multiple independently movable articulated arms |
US8267636B2 (en) | 2007-05-08 | 2012-09-18 | Brooks Automation, Inc. | Substrate transport apparatus |
JP2010023195A (ja) * | 2008-07-22 | 2010-02-04 | Nidec Sankyo Corp | 産業用ロボット |
DE102008062153A1 (de) | 2008-12-17 | 2010-12-30 | Grenzebach Maschinenbau Gmbh | Verfahren und Vorrichtung zum Schnelltransport von Glasplatten |
TWI418810B (zh) * | 2010-03-26 | 2013-12-11 | Hon Tech Inc | 多層式電子元件檢測機 |
JP5818345B2 (ja) * | 2011-04-27 | 2015-11-18 | 日本電産サンキョー株式会社 | 回転機構、産業用ロボットおよび回転体の原点位置復帰方法 |
KR101829397B1 (ko) | 2011-09-16 | 2018-02-19 | 퍼시몬 테크놀로지스 코포레이션 | 낮은 가변성을 가진 로봇 |
JP2013074112A (ja) * | 2011-09-28 | 2013-04-22 | Yaskawa Electric Corp | ハンドおよび基板搬送装置 |
CN102514971A (zh) * | 2011-12-08 | 2012-06-27 | 深圳市鑫联达包装机械有限公司 | 一种能够连续传送纸张的传输***及其传输方法 |
JP5614417B2 (ja) * | 2012-01-05 | 2014-10-29 | 株式会社安川電機 | 搬送システム |
TWM431163U (en) * | 2012-01-31 | 2012-06-11 | Shengjia Prec Co Ltd | Glass substrate transportation device |
CN102730401B (zh) * | 2012-06-26 | 2014-04-02 | 深圳市华星光电技术有限公司 | 基板中转装置及基板搬运*** |
JP5927724B2 (ja) * | 2012-09-06 | 2016-06-01 | 本田技研工業株式会社 | 移動装置 |
CN103663166A (zh) * | 2013-12-11 | 2014-03-26 | 深圳市华星光电技术有限公司 | 自动化物料搬运***及其天车*** |
WO2015112538A1 (en) | 2014-01-21 | 2015-07-30 | Persimmon Technologies, Corp. | Substrate transport vacuum platform |
CN104440950B (zh) * | 2014-11-17 | 2016-03-16 | 上海华力微电子有限公司 | 一种炉管用传片机械手的保护装置及保护方法 |
CN104495357B (zh) * | 2014-12-12 | 2017-01-04 | 南通富士通微电子股份有限公司 | 一种光刻板搬移装置 |
CN104690736B (zh) * | 2015-02-12 | 2017-03-08 | 成都天马微电子有限公司 | 机械手臂及其检测***和检测方法 |
JP6491515B2 (ja) | 2015-03-31 | 2019-03-27 | キヤノン株式会社 | 自動組立装置及び自動組立方法 |
CN104925473B (zh) * | 2015-05-29 | 2017-03-01 | 光驰科技(上海)有限公司 | 一种解决基板搬送小车通用性的控制方法 |
JP6629012B2 (ja) * | 2015-08-31 | 2020-01-15 | 豊田鉄工株式会社 | 加熱炉用のワーク搬送装置 |
CN105417066B (zh) * | 2015-11-09 | 2017-12-01 | 合肥欣奕华智能机器有限公司 | 基板位置偏移检测及校正装置和基板搬运*** |
CN105583815B (zh) * | 2016-03-17 | 2017-12-08 | 北京新智远恒计量校准技术有限公司 | 一种混凝土试样试验检测机器人 |
SG11201810030TA (en) * | 2016-05-20 | 2018-12-28 | Murata Machinery Ltd | Transport vehicle and transport method |
CN106216859B (zh) * | 2016-08-17 | 2018-02-27 | 江苏大学 | 一种激光间接冲击成形柔性加载的快速取用装置及其方法 |
JP6723131B2 (ja) | 2016-09-29 | 2020-07-15 | 株式会社Screenホールディングス | 基板搬送装置および基板搬送方法 |
JP6700149B2 (ja) | 2016-09-29 | 2020-05-27 | 株式会社Screenホールディングス | 姿勢変更装置 |
CN106516739B (zh) * | 2016-10-26 | 2019-04-16 | 福耀集团(福建)机械制造有限公司 | 一种基于机器人视觉的玻璃移载*** |
CN106737065B (zh) * | 2017-01-05 | 2019-03-15 | 张家港市铭斯特光电科技有限公司 | 一种玻璃生产线 |
US10651067B2 (en) | 2017-01-26 | 2020-05-12 | Brooks Automation, Inc. | Method and apparatus for substrate transport apparatus position compensation |
CN107458108B (zh) * | 2017-08-25 | 2023-04-18 | 浙江正润机械有限公司 | 摆动旋转机构和纸板移送纠偏机械手 |
JP7321095B2 (ja) * | 2017-10-11 | 2023-08-04 | ローツェ株式会社 | ポッドオープナー |
CN107934458B (zh) * | 2017-10-13 | 2019-09-10 | 弗埃斯工业技术(苏州)有限公司 | 薄板料件位置调整机构 |
CN109879052A (zh) * | 2017-12-06 | 2019-06-14 | 沈阳新松机器人自动化股份有限公司 | 一种单放纠偏机器人及其纠偏方法 |
JP7181013B2 (ja) * | 2018-06-20 | 2022-11-30 | Juki株式会社 | 電子部品実装装置及び電子部品実装方法 |
CN108818588A (zh) * | 2018-07-17 | 2018-11-16 | 芜湖超源力工业设计有限公司 | 一种双侧式夹取装置 |
CN109454640A (zh) * | 2018-11-14 | 2019-03-12 | 惠科股份有限公司 | 一种缩短交换片时长的方法 |
US11767181B2 (en) * | 2019-03-14 | 2023-09-26 | Mujin, Inc. | Robotic system with handling mechanism and method of operation thereof |
JP7133757B2 (ja) * | 2019-11-05 | 2022-09-09 | パナソニックIpマネジメント株式会社 | ロボットの制御方法 |
CN110865620B (zh) * | 2019-11-27 | 2022-01-25 | 郑州旭飞光电科技有限公司 | 一种基板玻璃在线抽检***、方法及包装*** |
CN111660311B (zh) * | 2020-06-16 | 2022-05-10 | 扬州大学 | 一种智能化种蛋分拣入箱机器人及其操作方法 |
JP7446169B2 (ja) * | 2020-06-26 | 2024-03-08 | キヤノントッキ株式会社 | 基板搬送装置、基板処理システム、基板搬送方法、電子デバイスの製造方法、プログラム及び記憶媒体 |
CN112660828B (zh) * | 2020-12-29 | 2022-03-08 | 飞马智科信息技术股份有限公司 | 一种取代Map传感器的液晶面板检测控制方法 |
CN114380053A (zh) * | 2022-03-08 | 2022-04-22 | 哈尔滨工业大学 | 玻璃搬运机器人 |
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JPS59107882A (ja) * | 1982-12-09 | 1984-06-22 | 三菱電機株式会社 | ロボツトの制御装置 |
JPH0517225Y2 (zh) * | 1986-12-27 | 1993-05-10 | ||
JPH0785819B2 (ja) * | 1991-09-30 | 1995-09-20 | 株式会社栗本鐵工所 | 鍛造プレスの自動搬送装置 |
JPH09155783A (ja) * | 1995-12-06 | 1997-06-17 | Shin Meiwa Ind Co Ltd | 昇降装置及び昇降装置を備えたロボット |
JPH11188669A (ja) * | 1997-12-25 | 1999-07-13 | Mitsubishi Electric Corp | 搬送装置 |
JP2000183128A (ja) * | 1998-12-17 | 2000-06-30 | Komatsu Ltd | ワーク搬送装置の制御装置 |
TW473418B (en) * | 1998-12-10 | 2002-01-21 | Komatsu Mfg Co Ltd | Work carrier device and attitude holding method of work carrier device controller for work carrying apparatus |
JP4540201B2 (ja) | 2000-09-13 | 2010-09-08 | 独立行政法人産業技術総合研究所 | ZnO系酸化物半導体層を有する半導体装置の製法 |
JP2002093882A (ja) * | 2000-09-20 | 2002-03-29 | Olympus Optical Co Ltd | 基板搬送装置及び基板検査システム |
JP4182521B2 (ja) * | 2001-12-04 | 2008-11-19 | ローツェ株式会社 | 容器の一時的搬入、留置、搬出用装置 |
-
2003
- 2003-12-02 AU AU2003304270A patent/AU2003304270A1/en not_active Abandoned
- 2003-12-02 WO PCT/JP2003/015411 patent/WO2005002804A1/ja active Application Filing
- 2003-12-02 TW TW092134088A patent/TW200502070A/zh unknown
-
2004
- 2004-07-02 JP JP2005511363A patent/JP4499038B2/ja not_active Expired - Fee Related
- 2004-07-02 CN CN200480018520XA patent/CN100407395C/zh not_active Expired - Lifetime
- 2004-07-02 KR KR1020067000134A patent/KR101106401B1/ko active IP Right Grant
- 2004-07-05 TW TW093120144A patent/TW200521056A/zh unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI399331B (zh) * | 2007-06-29 | 2013-06-21 | Ihi Corp | Floating handling device |
TWI764276B (zh) * | 2019-09-19 | 2022-05-11 | 日商川崎重工業股份有限公司 | 傾斜調整裝置及具備其之機器人 |
CN112171697A (zh) * | 2020-09-03 | 2021-01-05 | 中联重科股份有限公司 | 机械手装置和走台板装配*** |
Also Published As
Publication number | Publication date |
---|---|
CN1816907A (zh) | 2006-08-09 |
WO2005002804A1 (ja) | 2005-01-13 |
CN100407395C (zh) | 2008-07-30 |
JPWO2005004230A1 (ja) | 2006-11-09 |
TWI348447B (zh) | 2011-09-11 |
JP4499038B2 (ja) | 2010-07-07 |
TW200521056A (en) | 2005-07-01 |
KR101106401B1 (ko) | 2012-01-17 |
AU2003304270A1 (en) | 2005-01-21 |
KR20060118394A (ko) | 2006-11-23 |
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