NL7404363A - Elektronenmikroskoop met energieanalysator. - Google Patents

Elektronenmikroskoop met energieanalysator.

Info

Publication number: NL7404363A
Authority: NL; Netherlands
Prior art keywords: microskop; electronic; energy analyzer; analyzer; energy
Prior art date: 1974-04-01

Application number

NL7404363A

Other languages

English (en)

Original Assignee

Philips Nv

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1974-04-01

Filing date

1974-04-01

Publication date

1975-10-03

1974-04-01 Application filed by Philips Nv filed Critical Philips Nv

1974-04-01 Priority to NL7404363A priority Critical patent/NL7404363A/nl

1975-03-21 Priority to DE2512468A priority patent/DE2512468C2/de

1975-03-27 Priority to GB12925/75A priority patent/GB1507366A/en

1975-03-27 Priority to CA223,309A priority patent/CA1021883A/en

1975-03-28 Priority to US05/562,965 priority patent/US3979590A/en

1975-04-01 Priority to FR757510152A priority patent/FR2266300B1/fr

1975-04-01 Priority to JP50038657A priority patent/JPS50141966A/ja

1975-10-03 Publication of NL7404363A publication Critical patent/NL7404363A/nl

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Tubes For Measurement (AREA)
Electron Sources, Ion Sources (AREA)
Analysing Materials By The Use Of Radiation (AREA)

NL7404363A 1974-04-01 1974-04-01 Elektronenmikroskoop met energieanalysator. NL7404363A (nl)

Priority Applications (7)

Application Number	Priority Date	Filing Date	Title
NL7404363A NL7404363A (nl)	1974-04-01	1974-04-01	Elektronenmikroskoop met energieanalysator.
DE2512468A DE2512468C2 (de)	1974-04-01	1975-03-21	"Elektronenmikroskop mit einem Wien-Filter als Energieanalysator"
GB12925/75A GB1507366A (en)	1974-04-01	1975-03-27	Electron microscope
CA223,309A CA1021883A (en)	1974-04-01	1975-03-27	Electron microscope comprising an energy analyser
US05/562,965 US3979590A (en)	1974-04-01	1975-03-28	Electron microscope comprising an energy analyzer
FR757510152A FR2266300B1 (nl)	1974-04-01	1975-04-01
JP50038657A JPS50141966A (nl)	1974-04-01	1975-04-01

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
NL7404363A NL7404363A (nl)	1974-04-01	1974-04-01	Elektronenmikroskoop met energieanalysator.

Publications (1)

Publication Number	Publication Date
NL7404363A true NL7404363A (nl)	1975-10-03

Family

ID=19821088

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7404363A NL7404363A (nl)	1974-04-01	1974-04-01	Elektronenmikroskoop met energieanalysator.

Country Status (7)

Country	Link
US (1)	US3979590A (nl)
JP (1)	JPS50141966A (nl)
CA (1)	CA1021883A (nl)
DE (1)	DE2512468C2 (nl)
FR (1)	FR2266300B1 (nl)
GB (1)	GB1507366A (nl)
NL (1)	NL7404363A (nl)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4210806A (en) *	1979-01-18	1980-07-01	International Business Machines Corporation	High brightness electron probe beam and method
DE3423149A1 (de) *	1984-06-22	1986-01-02	Fa. Carl Zeiss, 7920 Heidenheim	Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop
US4687936A (en) *	1985-07-11	1987-08-18	Varian Associates, Inc.	In-line beam scanning system
US4789787A (en) *	1987-05-27	1988-12-06	Microbeam Inc.	Wien filter design
US4851670A (en) *	1987-08-28	1989-07-25	Gatan Inc.	Energy-selected electron imaging filter
DE69322890T2 (de) *	1992-02-12	1999-07-29	Koninkl Philips Electronics Nv	Verfahren zur Verringerung einer räumlichen energiedispersiven Streuung eines Elektronenstrahlenbündels und eine für den Einsatz eines solchen Verfahrens geeignete Elektronenstrahlvorrichtung
US5444243A (en) *	1993-09-01	1995-08-22	Hitachi, Ltd.	Wien filter apparatus with hyperbolic surfaces
DE69610287T2 (de) *	1995-10-03	2001-04-12	Koninkl Philips Electronics Nv	Korpuskularoptisches gerät mit einer festen blende für den monochromatorfilter
JP4527289B2 (ja) *	1998-12-17	2010-08-18	エフイーアイカンパニ	オージェ電子の検出を含む粒子光学装置
JP3757371B2 (ja) *	1999-07-05	2006-03-22	日本電子株式会社	エネルギーフィルタ及びそれを用いた電子顕微鏡
US6717141B1 (en) *	2001-11-27	2004-04-06	Schlumberger Technologies, Inc.	Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like
GB0320187D0 (en) *	2003-08-28	2003-10-01	Shimadzu Res Lab Europe Ltd	Particle optical apparatus
DE602004016131D1 (de) *	2004-06-21	2008-10-09	Integrated Circuit Testing	Dispositif de correction d'aberration et methode de mise en oeuvre
EP1783811A3 (en) *	2005-11-02	2008-02-27	FEI Company	Corrector for the correction of chromatic aberrations in a particle-optical apparatus
KR100773657B1 (ko)	2006-01-18	2007-11-05	광주과학기술원	공간필터링 수단 및 이를 구비한 공초점 주사 현미경
EP2166557A1 (en) *	2008-09-22	2010-03-24	FEI Company	Method for correcting distortions in a particle-optical apparatus
DE102009028013B9 (de) *	2009-07-24	2014-04-17	Carl Zeiss Microscopy Gmbh	Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
EP2325862A1 (en) *	2009-11-18	2011-05-25	Fei Company	Corrector for axial aberrations of a particle-optical lens
EP2511936B1 (en)	2011-04-13	2013-10-02	Fei Company	Distortion free stigmation of a TEM

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB962086A (en) *	1962-03-27	1964-06-24	Hitachi Ltd	Energy-selecting electron microscopes
NL7012388A (nl) *	1970-08-21	1972-02-23

1974
- 1974-04-01 NL NL7404363A patent/NL7404363A/nl unknown
1975
- 1975-03-21 DE DE2512468A patent/DE2512468C2/de not_active Expired
- 1975-03-27 CA CA223,309A patent/CA1021883A/en not_active Expired
- 1975-03-27 GB GB12925/75A patent/GB1507366A/en not_active Expired
- 1975-03-28 US US05/562,965 patent/US3979590A/en not_active Expired - Lifetime
- 1975-04-01 FR FR757510152A patent/FR2266300B1/fr not_active Expired
- 1975-04-01 JP JP50038657A patent/JPS50141966A/ja active Pending

Also Published As

Publication number	Publication date
FR2266300A1 (nl)	1975-10-24
DE2512468A1 (de)	1975-10-09
DE2512468C2 (de)	1981-09-24
JPS50141966A (nl)	1975-11-15
GB1507366A (en)	1978-04-12
FR2266300B1 (nl)	1981-03-06
US3979590A (en)	1976-09-07
CA1021883A (en)	1977-11-29

Publication	Publication Date	Title
NL7508723A (nl)	1976-03-23	Windmolen.
NL7512201A (nl)	1976-04-21	Voorwerp met wasverzorgende eigenschappen.
NL7512294A (nl)	1976-04-23	Electromagnetische inrichting.
NL7404363A (nl)	1975-10-03	Elektronenmikroskoop met energieanalysator.
SE415393B (sv)	1980-09-29	Mikrovagsugn.
SE7504020L (sv)	1975-10-10	Grevskopa med tandfesten.
SE7512824L (sv)	1976-05-26	Elektronisk anordning
OA04854A (fr)	1980-10-31	Générateur électronique.
SE397142B (sv)	1977-10-17	Elektrostaisk kopieringsmaskin
SE415064B (sv)	1980-09-01	Batteriladdningskrets
NL7416395A (nl)	1976-06-21	Elektronenmikroskoop.
NL7514384A (nl)	1976-06-15	Elektronische rekenwerkwijze met positieve vei- ligheid.
NO143856C (no)	1981-04-29	Kuvette med roereinnretning.
SE7512784L (sv)	1976-05-17	Elektronisk dynamometer
SE7506725L (sv)	1976-03-08	Effekthalvledarkomponent
SE7504274L (sv)	1975-11-17	Dialysatorcell.
NL7509787A (nl)	1976-02-25	Electronische rekenmachine.
NL7501953A (nl)	1975-10-03	Elektroradiografisch stelsel.
SE7506416L (sv)	1975-12-09	Elektronisk taxameter.
IT1020822B (it)	1977-12-30	Tastiera elettronica
SE7508904L (sv)	1976-02-09	Elktronisk styrapparat.
NL7511071A (nl)	1976-04-13	Electronische ontsteker.
AT342336B (de)	1978-03-28	Elektronisches rechenwerk
AT348262B (de)	1979-02-12	Schichtstoff
SE7506826L (sv)	1975-12-15	Taxameter med elektronisk presentation.