CA1021883A - Electron microscope comprising an energy analyser - Google Patents

Electron microscope comprising an energy analyser

Info

Publication number
CA1021883A
CA1021883A CA223,309A CA223309A CA1021883A CA 1021883 A CA1021883 A CA 1021883A CA 223309 A CA223309 A CA 223309A CA 1021883 A CA1021883 A CA 1021883A
Authority
CA
Canada
Prior art keywords
electron microscope
energy analyser
analyser
energy
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA223,309A
Other languages
English (en)
French (fr)
Inventor
Willem H.J. Andersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1021883A publication Critical patent/CA1021883A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA223,309A 1974-04-01 1975-03-27 Electron microscope comprising an energy analyser Expired CA1021883A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7404363A NL7404363A (nl) 1974-04-01 1974-04-01 Elektronenmikroskoop met energieanalysator.

Publications (1)

Publication Number Publication Date
CA1021883A true CA1021883A (en) 1977-11-29

Family

ID=19821088

Family Applications (1)

Application Number Title Priority Date Filing Date
CA223,309A Expired CA1021883A (en) 1974-04-01 1975-03-27 Electron microscope comprising an energy analyser

Country Status (7)

Country Link
US (1) US3979590A (nl)
JP (1) JPS50141966A (nl)
CA (1) CA1021883A (nl)
DE (1) DE2512468C2 (nl)
FR (1) FR2266300B1 (nl)
GB (1) GB1507366A (nl)
NL (1) NL7404363A (nl)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
DE3423149A1 (de) * 1984-06-22 1986-01-02 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop
US4687936A (en) * 1985-07-11 1987-08-18 Varian Associates, Inc. In-line beam scanning system
US4789787A (en) * 1987-05-27 1988-12-06 Microbeam Inc. Wien filter design
US4851670A (en) * 1987-08-28 1989-07-25 Gatan Inc. Energy-selected electron imaging filter
DE69322890T2 (de) * 1992-02-12 1999-07-29 Koninklijke Philips Electronics N.V., Eindhoven Verfahren zur Verringerung einer räumlichen energiedispersiven Streuung eines Elektronenstrahlenbündels und eine für den Einsatz eines solchen Verfahrens geeignete Elektronenstrahlvorrichtung
US5444243A (en) * 1993-09-01 1995-08-22 Hitachi, Ltd. Wien filter apparatus with hyperbolic surfaces
JPH10510674A (ja) * 1995-10-03 1998-10-13 フィリップス エレクトロニクス エヌ ベー 単色分光計用の固定ダイヤフラムからなる粒子光学装置
DE69920182T2 (de) * 1998-12-17 2005-02-17 Fei Co., Hillsboro Korpuskularstrahloptisches gerät mit auger-elektronendetektion
JP3757371B2 (ja) * 1999-07-05 2006-03-22 日本電子株式会社 エネルギーフィルタ及びそれを用いた電子顕微鏡
US6717141B1 (en) * 2001-11-27 2004-04-06 Schlumberger Technologies, Inc. Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus
DE602004016131D1 (de) * 2004-06-21 2008-10-09 Integrated Circuit Testing Dispositif de correction d'aberration et methode de mise en oeuvre
EP1783811A3 (en) * 2005-11-02 2008-02-27 FEI Company Corrector for the correction of chromatic aberrations in a particle-optical apparatus
KR100773657B1 (ko) 2006-01-18 2007-11-05 광주과학기술원 공간필터링 수단 및 이를 구비한 공초점 주사 현미경
EP2166557A1 (en) * 2008-09-22 2010-03-24 FEI Company Method for correcting distortions in a particle-optical apparatus
DE102009028013B9 (de) * 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
EP2325862A1 (en) * 2009-11-18 2011-05-25 Fei Company Corrector for axial aberrations of a particle-optical lens
EP2511936B1 (en) 2011-04-13 2013-10-02 Fei Company Distortion free stigmation of a TEM

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB962086A (en) * 1962-03-27 1964-06-24 Hitachi Ltd Energy-selecting electron microscopes
NL7012388A (nl) * 1970-08-21 1972-02-23

Also Published As

Publication number Publication date
DE2512468C2 (de) 1981-09-24
JPS50141966A (nl) 1975-11-15
US3979590A (en) 1976-09-07
GB1507366A (en) 1978-04-12
FR2266300B1 (nl) 1981-03-06
NL7404363A (nl) 1975-10-03
FR2266300A1 (nl) 1975-10-24
DE2512468A1 (de) 1975-10-09

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