GB962086A - Energy-selecting electron microscopes - Google Patents

Energy-selecting electron microscopes

Info

Publication number
GB962086A
GB962086A GB11463/63A GB1146363A GB962086A GB 962086 A GB962086 A GB 962086A GB 11463/63 A GB11463/63 A GB 11463/63A GB 1146363 A GB1146363 A GB 1146363A GB 962086 A GB962086 A GB 962086A
Authority
GB
United Kingdom
Prior art keywords
energy
electron microscopes
march
aperture
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11463/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB962086A publication Critical patent/GB962086A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)

Abstract

962,086. Electron microscopes. HITACHI Ltd. March 22, 1963 [March 27, 1962], No. 11463/63. Heading H1D. In an energy-selecting electron microscope low energy " inelastically scattered " electrons are deflected from the beam to give improved resolution. As shown, incident beam 1 passes through object 2 to produce diffraction spots 5 magnified at 8. An unipotential electrostatic energyanalysing lens 9 deflects lower energy electrons E1 to leave a monoenergetic beam E0 passing through aperture 10 to produce an image at 13. By moving the aperture 10 investigation of the lower energy inelastically scattered beams may be made.
GB11463/63A 1962-03-27 1963-03-22 Energy-selecting electron microscopes Expired GB962086A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1121262 1962-03-27

Publications (1)

Publication Number Publication Date
GB962086A true GB962086A (en) 1964-06-24

Family

ID=11771673

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11463/63A Expired GB962086A (en) 1962-03-27 1963-03-22 Energy-selecting electron microscopes

Country Status (3)

Country Link
US (1) US3256433A (en)
DE (1) DE1248181B (en)
GB (1) GB962086A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1639280C3 (en) * 1967-03-30 1974-01-31 Takeo Kawasaki Kanagawa Ichinokawa (Japan) Electron microscope with a magnetic cylinder lens to analyze the energy of the electrons
NL7404363A (en) * 1974-04-01 1975-10-03 Philips Nv ELECTRONIC MICROSKOP WITH ENERGY ANALYZER.
US4160905A (en) * 1976-11-27 1979-07-10 Kratos Limited Electron microscopes
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
US4851670A (en) * 1987-08-28 1989-07-25 Gatan Inc. Energy-selected electron imaging filter
JP3112527B2 (en) * 1991-11-14 2000-11-27 日本電子株式会社 electronic microscope
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE760135C (en) * 1939-03-30 1953-11-16 Aeg Electron microscope with two-stage imaging, in particular an electron microscope with high resolution (over microscope), and with an overview image of low magnification (intermediate image)
US2396624A (en) * 1940-03-11 1946-03-12 Borries Bodo Von Electronic microscope
US2392243A (en) * 1942-06-20 1946-01-01 Rca Corp Electron microscope
US2429558A (en) * 1945-08-24 1947-10-21 Research Corp Electron beam monochromator
GB646019A (en) * 1946-01-05 1950-11-15 Philips Nv Improvements in or relating to electron microscopes
DE848099C (en) * 1949-11-01 1952-09-01 Sueddeutsche Lab G M B H Device for analyzing electrons of different speeds
US2894160A (en) * 1954-09-09 1959-07-07 Sheldon Edward Emanuel Electron microscopes
US3134899A (en) * 1960-08-23 1964-05-26 Zeiss Jena Veb Carl Intensity measuring and/or recording devices for corpuscular radiation apparatus, particularly electron microscopes

Also Published As

Publication number Publication date
DE1248181B (en) 1967-08-24
US3256433A (en) 1966-06-14

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