NL7416395A - Elektronenmikroskoop. - Google Patents

Elektronenmikroskoop.

Info

Publication number
NL7416395A
NL7416395A NL7416395A NL7416395A NL7416395A NL 7416395 A NL7416395 A NL 7416395A NL 7416395 A NL7416395 A NL 7416395A NL 7416395 A NL7416395 A NL 7416395A NL 7416395 A NL7416395 A NL 7416395A
Authority
NL
Netherlands
Prior art keywords
microskop
electronic
electronic microskop
Prior art date
Application number
NL7416395A
Other languages
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7416395A priority Critical patent/NL7416395A/nl
Priority to DE2555781A priority patent/DE2555781C3/de
Priority to US05/639,863 priority patent/US4071765A/en
Priority to GB50999/75A priority patent/GB1537478A/en
Priority to JP50149047A priority patent/JPS5185665A/ja
Priority to FR7538587A priority patent/FR2295560A1/fr
Publication of NL7416395A publication Critical patent/NL7416395A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7416395A 1974-12-17 1974-12-17 Elektronenmikroskoop. NL7416395A (nl)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL7416395A NL7416395A (nl) 1974-12-17 1974-12-17 Elektronenmikroskoop.
DE2555781A DE2555781C3 (de) 1974-12-17 1975-12-11 Elektronenstrahlapparat
US05/639,863 US4071765A (en) 1974-12-17 1975-12-11 Electron microscope
GB50999/75A GB1537478A (en) 1974-12-17 1975-12-12 Electron beam apparatus
JP50149047A JPS5185665A (nl) 1974-12-17 1975-12-13
FR7538587A FR2295560A1 (fr) 1974-12-17 1975-12-17 Appareil a faisceau electronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7416395A NL7416395A (nl) 1974-12-17 1974-12-17 Elektronenmikroskoop.

Publications (1)

Publication Number Publication Date
NL7416395A true NL7416395A (nl) 1976-06-21

Family

ID=19822658

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7416395A NL7416395A (nl) 1974-12-17 1974-12-17 Elektronenmikroskoop.

Country Status (6)

Country Link
US (1) US4071765A (nl)
JP (1) JPS5185665A (nl)
DE (1) DE2555781C3 (nl)
FR (1) FR2295560A1 (nl)
GB (1) GB1537478A (nl)
NL (1) NL7416395A (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0780878A2 (en) * 1995-12-20 1997-06-25 Hitachi, Ltd. Scanning electron microscope

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD134582A1 (de) * 1978-01-19 1979-03-07 Eberhard Hahn Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage
NL7804039A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop met stigmator.
NL182924C (nl) * 1978-05-12 1988-06-01 Philips Nv Inrichting voor het implanteren van ionen in een trefplaat.
NL183553C (nl) * 1978-05-12 1988-11-16 Philips Nv Inrichting voor het richten van elektrisch geladen deeltjes naar een trefplaats.
US4948971A (en) * 1988-11-14 1990-08-14 Amray Inc. Vibration cancellation system for scanning electron microscopes
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
JPH10208679A (ja) * 1997-01-27 1998-08-07 Hitachi Ltd 荷電粒子線装置
DE19738070A1 (de) * 1997-09-01 1999-03-04 Leo Elektronenmikroskopie Gmbh Energiefilter, insbesondere für ein Elektronenmikroskop
US6968948B2 (en) * 2003-08-15 2005-11-29 Walter Scott Container for holding live plants for display and sale for a long duration

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3576438A (en) * 1969-04-28 1971-04-27 Bell Telephone Labor Inc Focus monitor for electron microscope including an auxiliary electron gun and focusing lens
NL7012758A (nl) * 1970-08-28 1972-03-01
JPS5126227B2 (nl) * 1971-09-21 1976-08-05
US3872305A (en) * 1972-12-06 1975-03-18 Jeol Ltd Convertible scanning electron microscope
US3927321A (en) * 1974-04-24 1975-12-16 American Optical Corp Electron microscope beam tube

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0780878A2 (en) * 1995-12-20 1997-06-25 Hitachi, Ltd. Scanning electron microscope
EP0780878A3 (en) * 1995-12-20 1997-11-26 Hitachi, Ltd. Scanning electron microscope

Also Published As

Publication number Publication date
US4071765A (en) 1978-01-31
FR2295560A1 (fr) 1976-07-16
FR2295560B1 (nl) 1982-02-26
DE2555781B2 (de) 1979-02-22
JPS5185665A (nl) 1976-07-27
GB1537478A (en) 1978-12-29
DE2555781A1 (de) 1976-06-24
DE2555781C3 (de) 1979-11-08

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Legal Events

Date Code Title Description
BV The patent application has lapsed