KR20150104538A - 진직형상 측정방법 및 진직형상 측정장치 - Google Patents

진직형상 측정방법 및 진직형상 측정장치 Download PDF

Info

Publication number
KR20150104538A
KR20150104538A KR1020150031106A KR20150031106A KR20150104538A KR 20150104538 A KR20150104538 A KR 20150104538A KR 1020150031106 A KR1020150031106 A KR 1020150031106A KR 20150031106 A KR20150031106 A KR 20150031106A KR 20150104538 A KR20150104538 A KR 20150104538A
Authority
KR
South Korea
Prior art keywords
measured
curvature
shape
height data
sampling
Prior art date
Application number
KR1020150031106A
Other languages
English (en)
Korean (ko)
Inventor
고이치 이치하라
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 스미도모쥬기가이고교 가부시키가이샤 filed Critical 스미도모쥬기가이고교 가부시키가이샤
Publication of KR20150104538A publication Critical patent/KR20150104538A/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
KR1020150031106A 2014-03-05 2015-03-05 진직형상 측정방법 및 진직형상 측정장치 KR20150104538A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2014-042251 2014-03-05
JP2014042251A JP6199205B2 (ja) 2014-03-05 2014-03-05 真直形状測定方法及び真直形状測定装置

Publications (1)

Publication Number Publication Date
KR20150104538A true KR20150104538A (ko) 2015-09-15

Family

ID=54029918

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150031106A KR20150104538A (ko) 2014-03-05 2015-03-05 진직형상 측정방법 및 진직형상 측정장치

Country Status (4)

Country Link
JP (1) JP6199205B2 (zh)
KR (1) KR20150104538A (zh)
CN (1) CN104897105B (zh)
TW (1) TWI534410B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108844497A (zh) * 2018-06-07 2018-11-20 东北大学 一种数控机床导轨安装面直线度检测装置及方法
CN109855590B (zh) * 2019-01-12 2021-03-23 吉林大学 一种圆柱类零件弯曲变形轴线杠杆式连续测量方法
CN109596075A (zh) * 2019-01-28 2019-04-09 天津市兆瑞测控技术有限公司 一种直线度或弯曲度在线测量装置及方法
JP7296334B2 (ja) * 2020-03-26 2023-06-22 住友重機械工業株式会社 真直度計測システム、変位センサ校正方法、及び真直度計測方法
CN111644901B (zh) * 2020-04-09 2022-05-13 武汉船用机械有限责任公司 工件加工轴线的校正方法和装置
CN115235376B (zh) * 2022-09-23 2023-01-17 国网天津市电力公司电力科学研究院 一种非接触式电缆敷设质量检测方法及检测装置
CN115854949B (zh) * 2023-03-02 2023-05-16 泗水县金佳工贸有限公司 一种卷纸用弧形辊的弧形自动检测装置及控制方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2617707C2 (de) * 1975-04-23 1986-02-20 The Rank Organisation Ltd., London Vorrichtung zum Vermessen einer Oberfläche
FR2727198A1 (fr) * 1994-11-18 1996-05-24 Otis Elevator Co Capteur de distance et notamment du positionnement des cabines d'ascenseur
JPH09210668A (ja) * 1996-02-07 1997-08-12 Mitsubishi Heavy Ind Ltd 真直形状測定方法
JP2003254747A (ja) * 2002-02-28 2003-09-10 Mitsutoyo Corp 真直度測定法
JP2005062016A (ja) * 2003-08-13 2005-03-10 Fuji Photo Film Co Ltd 放射線像変換体およびその製造方法
JP4400331B2 (ja) * 2004-06-17 2010-01-20 信越半導体株式会社 ウエーハの形状評価方法及び管理方法
JP4197339B2 (ja) * 2006-01-16 2008-12-17 アンリツ株式会社 三次元形状測定装置
JP2007333556A (ja) * 2006-06-15 2007-12-27 Micro Engineering Inc 逐次多点式真直度測定法および測定装置
JP5100612B2 (ja) * 2008-10-29 2012-12-19 住友重機械工業株式会社 真直度測定方法及び真直度測定装置
JP5263126B2 (ja) * 2009-11-09 2013-08-14 新日鐵住金株式会社 板材の光学式形状測定方法及び測定装置
CN102221354B (zh) * 2011-04-02 2013-01-09 中南大学 一种多测点浮动定位表面不平顺测量方法
CN104359413B (zh) * 2014-10-15 2017-02-15 武汉中科创新技术股份有限公司 一种利用激光位移传感器测量钢管直径的装置及方法

Also Published As

Publication number Publication date
TWI534410B (zh) 2016-05-21
TW201534864A (zh) 2015-09-16
CN104897105A (zh) 2015-09-09
JP2015169451A (ja) 2015-09-28
CN104897105B (zh) 2018-08-07
JP6199205B2 (ja) 2017-09-20

Similar Documents

Publication Publication Date Title
KR20150104538A (ko) 진직형상 측정방법 및 진직형상 측정장치
KR101798322B1 (ko) 형상계측장치, 가공장치 및 형상계측장치의 교정방법
CN104296716A (zh) 一种基于单测头误差分离的超精密直线度测量方法
CN204188158U (zh) 一种可变检测位置的平面度检测装置
CN104344803A (zh) 一种可变检测位置的平面度检测装置
JP2009186207A (ja) プローブの真直度測定方法
KR101701084B1 (ko) 형상계측장치, 가공장치 및 형상계측방법
KR101974087B1 (ko) 스트랜드 가이드 롤러의 높이의 레이저 광학 판정을 위한 방법, 측정 시스템, 측정 터치 탐침부 및 측정 시스템의 용도
JP6170385B2 (ja) 測定装置、測定方法および物品の製造方法
KR20160113967A (ko) 형상계측장치 및 가공장치
JP7296334B2 (ja) 真直度計測システム、変位センサ校正方法、及び真直度計測方法
JP6444783B2 (ja) 形状計測装置、加工装置及び形状計測装置の校正方法
TWI777205B (zh) 形狀測量裝置、基準器及檢測儀的校正方法
JP5009560B2 (ja) 薄片状の被測定物の形状測定装置
Hofmann et al. A compact tactile surface profiler for multi-sensor applications in nano measuring machines
JP4493168B2 (ja) 形状測定方法および形状測定装置
KR20230097890A (ko) 시편의 2차원 기울기 오차 보상 기법을 이용한 시편의 두께측정장치
JP2021081198A (ja) 測定方法
TW201527713A (zh) 鑄嘴平坦度之檢測方法
JPH01193605A (ja) 物体表面検査装置
JPH05231830A (ja) 水平距離測定装置
Rathmann et al. In-Process Laser Scanning Technology for Micro Assembly
WO2012053998A1 (en) A surface roughness measurement method and setup

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application