KR20020062276A - 하부 게이트 타입 박막 트랜지스터, 그 제조 방법 및 이를사용한 액정 디스플레이 디바이스 - Google Patents

하부 게이트 타입 박막 트랜지스터, 그 제조 방법 및 이를사용한 액정 디스플레이 디바이스 Download PDF

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Publication number
KR20020062276A
KR20020062276A KR1020027002269A KR20027002269A KR20020062276A KR 20020062276 A KR20020062276 A KR 20020062276A KR 1020027002269 A KR1020027002269 A KR 1020027002269A KR 20027002269 A KR20027002269 A KR 20027002269A KR 20020062276 A KR20020062276 A KR 20020062276A
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KR
South Korea
Prior art keywords
source
drain electrodes
thin film
gate
channel layer
Prior art date
Application number
KR1020027002269A
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English (en)
Korean (ko)
Inventor
테이조 유가와
Original Assignee
코닌클리케 필립스 일렉트로닉스 엔.브이.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 코닌클리케 필립스 일렉트로닉스 엔.브이. filed Critical 코닌클리케 필립스 일렉트로닉스 엔.브이.
Publication of KR20020062276A publication Critical patent/KR20020062276A/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/6675—Amorphous silicon or polysilicon transistors
    • H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78651—Silicon transistors
    • H01L29/7866—Non-monocrystalline silicon transistors
    • H01L29/78663—Amorphous silicon transistors
    • H01L29/78669—Amorphous silicon transistors with inverted-type structure, e.g. with bottom gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR1020027002269A 2000-06-26 2001-06-25 하부 게이트 타입 박막 트랜지스터, 그 제조 방법 및 이를사용한 액정 디스플레이 디바이스 KR20020062276A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000190765A JP2002026326A (ja) 2000-06-26 2000-06-26 ボトムゲート形薄膜トランジスタ及びその製造方法並びにこれを用いた液晶表示装置
JPJP-P-2000-00190765 2000-06-26
PCT/EP2001/007189 WO2002001603A2 (fr) 2000-06-26 2001-06-25 Transistor a couches minces de type grille inferieure, son procede de fabrication et dispositif d'affichage a cristaux liquides utilisant ce transistor

Publications (1)

Publication Number Publication Date
KR20020062276A true KR20020062276A (ko) 2002-07-25

Family

ID=18690177

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020027002269A KR20020062276A (ko) 2000-06-26 2001-06-25 하부 게이트 타입 박막 트랜지스터, 그 제조 방법 및 이를사용한 액정 디스플레이 디바이스

Country Status (6)

Country Link
EP (1) EP1297568A2 (fr)
JP (1) JP2002026326A (fr)
KR (1) KR20020062276A (fr)
CN (1) CN1401135A (fr)
TW (1) TW536828B (fr)
WO (1) WO2002001603A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100977229B1 (ko) * 2003-12-30 2010-08-23 엘지디스플레이 주식회사 유기 ｔｆｔ 및 그 제조방법, 그리고 이를 적용한액정표시소자
US7999261B2 (en) 2008-01-25 2011-08-16 Samsung Mobile Display Co., Ltd. Thin film transistor, method of fabricating the same, and organic light emitting diode display device having the TFT
US9704938B2 (en) 2015-01-09 2017-07-11 Samsung Display Co., Ltd. Organic light emitting diode display

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0210065D0 (en) * 2002-05-02 2002-06-12 Koninkl Philips Electronics Nv Electronic devices comprising bottom gate tft's and their manufacture
JP4403354B2 (ja) * 2002-09-11 2010-01-27 ソニー株式会社 薄膜回路基板
DE602004005685T2 (de) * 2003-03-07 2007-12-27 Koninklijke Philips Electronics N.V. Verfahren zur herstellung einer elektronischen anordnung
CN101278403B (zh) 2005-10-14 2010-12-01 株式会社半导体能源研究所 半导体器件及其制造方法
JP2007248956A (ja) * 2006-03-17 2007-09-27 Epson Imaging Devices Corp 電気光学装置および電子機器
CN100449716C (zh) * 2006-03-20 2009-01-07 友达光电股份有限公司 薄膜晶体管及其制造方法
KR101265331B1 (ko) * 2006-06-28 2013-05-23 엘지디스플레이 주식회사 박막 트랜지스터, 그 제조방법, 이를 구비한 액정표시장치제조방법
KR101545460B1 (ko) * 2008-09-12 2015-08-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 생산 방법
US20100253902A1 (en) * 2009-04-07 2010-10-07 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and manufacturing method thereof
JP2011071476A (ja) 2009-08-25 2011-04-07 Canon Inc 薄膜トランジスタ、薄膜トランジスタを用いた表示装置及び薄膜トランジスタの製造方法
TWI471946B (zh) * 2010-11-17 2015-02-01 Innolux Corp 薄膜電晶體
CN102176413A (zh) * 2011-03-25 2011-09-07 信利半导体有限公司 薄膜晶体管形成方法以及薄膜晶体管
JP5447996B2 (ja) * 2011-10-14 2014-03-19 ソニー株式会社 薄膜トランジスタ、薄膜トランジスタの製造方法、および電子機器
KR101427477B1 (ko) * 2012-10-11 2014-08-08 하이디스 테크놀로지 주식회사 액정표시장치
CN108695394A (zh) * 2017-04-06 2018-10-23 京东方科技集团股份有限公司 薄膜晶体管、其制备方法、阵列基板及显示装置
US11908911B2 (en) * 2019-05-16 2024-02-20 Intel Corporation Thin film transistors with raised source and drain contacts and process for forming such

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100193348B1 (ko) * 1996-02-12 1999-07-01 구자홍 액정표시장치의 박막트랜지스터 제조방법
JP2757850B2 (ja) * 1996-04-18 1998-05-25 日本電気株式会社 薄膜トランジスタおよびその製造方法
GB9919913D0 (en) * 1999-08-24 1999-10-27 Koninkl Philips Electronics Nv Thin-film transistors and method for producing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100977229B1 (ko) * 2003-12-30 2010-08-23 엘지디스플레이 주식회사 유기 ｔｆｔ 및 그 제조방법, 그리고 이를 적용한액정표시소자
US7999261B2 (en) 2008-01-25 2011-08-16 Samsung Mobile Display Co., Ltd. Thin film transistor, method of fabricating the same, and organic light emitting diode display device having the TFT
US9704938B2 (en) 2015-01-09 2017-07-11 Samsung Display Co., Ltd. Organic light emitting diode display

Also Published As

Publication number Publication date
TW536828B (en) 2003-06-11
WO2002001603A2 (fr) 2002-01-03
WO2002001603A3 (fr) 2002-08-08
CN1401135A (zh) 2003-03-05
EP1297568A2 (fr) 2003-04-02
JP2002026326A (ja) 2002-01-25

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