KR101414530B1 - 반송차 시스템 - Google Patents

반송차 시스템 Download PDF

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Publication number
KR101414530B1
KR101414530B1 KR1020100112589A KR20100112589A KR101414530B1 KR 101414530 B1 KR101414530 B1 KR 101414530B1 KR 1020100112589 A KR1020100112589 A KR 1020100112589A KR 20100112589 A KR20100112589 A KR 20100112589A KR 101414530 B1 KR101414530 B1 KR 101414530B1
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KR
South Korea
Prior art keywords
loop
loops
buffer
article
conveyance
Prior art date
Application number
KR1020100112589A
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English (en)
Korean (ko)
Other versions
KR20110097599A (ko
Inventor
마사토미 카와구치
Original Assignee
무라다기카이가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 무라다기카이가부시끼가이샤 filed Critical 무라다기카이가부시끼가이샤
Publication of KR20110097599A publication Critical patent/KR20110097599A/ko
Application granted granted Critical
Publication of KR101414530B1 publication Critical patent/KR101414530B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020100112589A 2010-02-24 2010-11-12 반송차 시스템 KR101414530B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2010-038082 2010-02-24
JP2010038082A JP4973747B2 (ja) 2010-02-24 2010-02-24 搬送車システム

Publications (2)

Publication Number Publication Date
KR20110097599A KR20110097599A (ko) 2011-08-31
KR101414530B1 true KR101414530B1 (ko) 2014-07-03

Family

ID=44462933

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100112589A KR101414530B1 (ko) 2010-02-24 2010-11-12 반송차 시스템

Country Status (4)

Country Link
JP (1) JP4973747B2 (zh)
KR (1) KR101414530B1 (zh)
CN (1) CN102161417B (zh)
TW (1) TWI466809B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5648865B2 (ja) * 2012-06-18 2015-01-07 株式会社ダイフク 天井搬送車及び物品搬送設備
EP2786948B1 (de) * 2013-04-04 2017-03-15 Knapp AG Lagersystem mit einem durch magnetisch angetriebene Shuttles ausgebildeten Transportsystem
AT516404B1 (de) * 2015-03-04 2016-05-15 Knapp Ag Regallager mit einem Kreisverkehr auf einer geschlossenen Führungsbahn
US11458847B2 (en) * 2017-01-27 2022-10-04 Murata Machinery, Ltd. Article transferring device
JP6965646B2 (ja) * 2017-09-06 2021-11-10 株式会社ダイフク 搬送車、及び、搬送設備
JP6874698B2 (ja) * 2018-01-10 2021-05-19 株式会社ダイフク 物品収納設備
JP6644819B2 (ja) * 2018-02-09 2020-02-12 本田技研工業株式会社 搬送作業設備
CN111383966A (zh) * 2019-05-30 2020-07-07 乐清市芮易经济信息咨询有限公司 一种半导体片清洗设备
CN111736540B (zh) * 2020-03-20 2021-10-15 北京京东乾石科技有限公司 货物分拣控制方法、装置、电子设备及存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100276622B1 (ko) 1997-08-08 2001-02-01 다니구찌 이찌로오, 기타오카 다카시 반도체 웨이퍼 카셋트 반송장치 및, 반도체 웨이퍼 카셋트 반송장치에서 이용되는 스토커
KR100742410B1 (ko) 2001-12-27 2007-07-24 동경 엘렉트론 주식회사 피처리체의 반송 시스템, 무인 반송차 시스템, 무인반송차 및 피처리체의 반송 방법
KR20090014104A (ko) * 2007-08-03 2009-02-06 아시스트 테크놀로지스 재팬 가부시키가이샤 반송 시스템 및 해당 반송 시스템에 있어서의 교시 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1224237A (zh) * 1998-01-23 1999-07-28 日本电气株式会社 工件传送方法及***
JP2000355403A (ja) * 1999-06-17 2000-12-26 Murata Mach Ltd 搬送システム
JP3991852B2 (ja) * 2002-12-09 2007-10-17 村田機械株式会社 天井搬送車システム
US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
JP2006290491A (ja) * 2005-04-07 2006-10-26 Murata Mach Ltd 搬送車システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
JP4389225B2 (ja) * 2006-01-30 2009-12-24 村田機械株式会社 搬送システム
JP2009076578A (ja) * 2007-09-19 2009-04-09 Nikon Corp 物体処理システム、物体処理方法、露光装置、露光方法、塗布現像装置、塗布現像方法及びデバイス製造方法
CN101234677B (zh) * 2008-02-19 2010-07-28 姜广峻 货物分拣分装设备及其方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100276622B1 (ko) 1997-08-08 2001-02-01 다니구찌 이찌로오, 기타오카 다카시 반도체 웨이퍼 카셋트 반송장치 및, 반도체 웨이퍼 카셋트 반송장치에서 이용되는 스토커
KR100283596B1 (ko) 1997-08-08 2001-04-02 다니구찌 이찌로오, 기타오카 다카시 반도체 웨이퍼 카셋트 반송장치에서의 자동반송차 제어방법
KR100742410B1 (ko) 2001-12-27 2007-07-24 동경 엘렉트론 주식회사 피처리체의 반송 시스템, 무인 반송차 시스템, 무인반송차 및 피처리체의 반송 방법
KR20090014104A (ko) * 2007-08-03 2009-02-06 아시스트 테크놀로지스 재팬 가부시키가이샤 반송 시스템 및 해당 반송 시스템에 있어서의 교시 방법

Also Published As

Publication number Publication date
JP2011173673A (ja) 2011-09-08
JP4973747B2 (ja) 2012-07-11
TWI466809B (zh) 2015-01-01
TW201139252A (en) 2011-11-16
CN102161417A (zh) 2011-08-24
KR20110097599A (ko) 2011-08-31
CN102161417B (zh) 2015-04-01

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