KR101414530B1 - 반송차 시스템 - Google Patents
반송차 시스템 Download PDFInfo
- Publication number
- KR101414530B1 KR101414530B1 KR1020100112589A KR20100112589A KR101414530B1 KR 101414530 B1 KR101414530 B1 KR 101414530B1 KR 1020100112589 A KR1020100112589 A KR 1020100112589A KR 20100112589 A KR20100112589 A KR 20100112589A KR 101414530 B1 KR101414530 B1 KR 101414530B1
- Authority
- KR
- South Korea
- Prior art keywords
- loop
- loops
- buffer
- article
- conveyance
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2010-038082 | 2010-02-24 | ||
JP2010038082A JP4973747B2 (ja) | 2010-02-24 | 2010-02-24 | 搬送車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20110097599A KR20110097599A (ko) | 2011-08-31 |
KR101414530B1 true KR101414530B1 (ko) | 2014-07-03 |
Family
ID=44462933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020100112589A KR101414530B1 (ko) | 2010-02-24 | 2010-11-12 | 반송차 시스템 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4973747B2 (zh) |
KR (1) | KR101414530B1 (zh) |
CN (1) | CN102161417B (zh) |
TW (1) | TWI466809B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5648865B2 (ja) * | 2012-06-18 | 2015-01-07 | 株式会社ダイフク | 天井搬送車及び物品搬送設備 |
EP2786948B1 (de) * | 2013-04-04 | 2017-03-15 | Knapp AG | Lagersystem mit einem durch magnetisch angetriebene Shuttles ausgebildeten Transportsystem |
AT516404B1 (de) * | 2015-03-04 | 2016-05-15 | Knapp Ag | Regallager mit einem Kreisverkehr auf einer geschlossenen Führungsbahn |
US11458847B2 (en) * | 2017-01-27 | 2022-10-04 | Murata Machinery, Ltd. | Article transferring device |
JP6965646B2 (ja) * | 2017-09-06 | 2021-11-10 | 株式会社ダイフク | 搬送車、及び、搬送設備 |
JP6874698B2 (ja) * | 2018-01-10 | 2021-05-19 | 株式会社ダイフク | 物品収納設備 |
JP6644819B2 (ja) * | 2018-02-09 | 2020-02-12 | 本田技研工業株式会社 | 搬送作業設備 |
CN111383966A (zh) * | 2019-05-30 | 2020-07-07 | 乐清市芮易经济信息咨询有限公司 | 一种半导体片清洗设备 |
CN111736540B (zh) * | 2020-03-20 | 2021-10-15 | 北京京东乾石科技有限公司 | 货物分拣控制方法、装置、电子设备及存储介质 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100276622B1 (ko) | 1997-08-08 | 2001-02-01 | 다니구찌 이찌로오, 기타오카 다카시 | 반도체 웨이퍼 카셋트 반송장치 및, 반도체 웨이퍼 카셋트 반송장치에서 이용되는 스토커 |
KR100742410B1 (ko) | 2001-12-27 | 2007-07-24 | 동경 엘렉트론 주식회사 | 피처리체의 반송 시스템, 무인 반송차 시스템, 무인반송차 및 피처리체의 반송 방법 |
KR20090014104A (ko) * | 2007-08-03 | 2009-02-06 | 아시스트 테크놀로지스 재팬 가부시키가이샤 | 반송 시스템 및 해당 반송 시스템에 있어서의 교시 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1224237A (zh) * | 1998-01-23 | 1999-07-28 | 日本电气株式会社 | 工件传送方法及*** |
JP2000355403A (ja) * | 1999-06-17 | 2000-12-26 | Murata Mach Ltd | 搬送システム |
JP3991852B2 (ja) * | 2002-12-09 | 2007-10-17 | 村田機械株式会社 | 天井搬送車システム |
US6990721B2 (en) * | 2003-03-21 | 2006-01-31 | Brooks Automation, Inc. | Growth model automated material handling system |
JP2006290491A (ja) * | 2005-04-07 | 2006-10-26 | Murata Mach Ltd | 搬送車システム |
JP2007191235A (ja) * | 2006-01-17 | 2007-08-02 | Murata Mach Ltd | 天井走行車システム |
JP4389225B2 (ja) * | 2006-01-30 | 2009-12-24 | 村田機械株式会社 | 搬送システム |
JP2009076578A (ja) * | 2007-09-19 | 2009-04-09 | Nikon Corp | 物体処理システム、物体処理方法、露光装置、露光方法、塗布現像装置、塗布現像方法及びデバイス製造方法 |
CN101234677B (zh) * | 2008-02-19 | 2010-07-28 | 姜广峻 | 货物分拣分装设备及其方法 |
-
2010
- 2010-02-24 JP JP2010038082A patent/JP4973747B2/ja not_active Expired - Fee Related
- 2010-11-12 KR KR1020100112589A patent/KR101414530B1/ko not_active IP Right Cessation
- 2010-11-12 CN CN201010547578.0A patent/CN102161417B/zh not_active Expired - Fee Related
-
2011
- 2011-01-20 TW TW100102077A patent/TWI466809B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100276622B1 (ko) | 1997-08-08 | 2001-02-01 | 다니구찌 이찌로오, 기타오카 다카시 | 반도체 웨이퍼 카셋트 반송장치 및, 반도체 웨이퍼 카셋트 반송장치에서 이용되는 스토커 |
KR100283596B1 (ko) | 1997-08-08 | 2001-04-02 | 다니구찌 이찌로오, 기타오카 다카시 | 반도체 웨이퍼 카셋트 반송장치에서의 자동반송차 제어방법 |
KR100742410B1 (ko) | 2001-12-27 | 2007-07-24 | 동경 엘렉트론 주식회사 | 피처리체의 반송 시스템, 무인 반송차 시스템, 무인반송차 및 피처리체의 반송 방법 |
KR20090014104A (ko) * | 2007-08-03 | 2009-02-06 | 아시스트 테크놀로지스 재팬 가부시키가이샤 | 반송 시스템 및 해당 반송 시스템에 있어서의 교시 방법 |
Also Published As
Publication number | Publication date |
---|---|
JP2011173673A (ja) | 2011-09-08 |
JP4973747B2 (ja) | 2012-07-11 |
TWI466809B (zh) | 2015-01-01 |
TW201139252A (en) | 2011-11-16 |
CN102161417A (zh) | 2011-08-24 |
KR20110097599A (ko) | 2011-08-31 |
CN102161417B (zh) | 2015-04-01 |
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A201 | Request for examination | ||
N231 | Notification of change of applicant | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
LAPS | Lapse due to unpaid annual fee |