201139252 六、發明說明： 【發明所屬之技術領域】 ’尤其係關於一種包括在複 之搬送車之搬送車系統。 本發明係關於一種搬送車系統 數個處理裝置之間沿著軌道行敬 【先前技術】 先前，眾所周知有一種包 裡巴括預定路徑、設置於路徑上之複 數個平台者路技行駛而搬送物品之複數個搬 搬 送車系統。於搬送車系統中，於平台與搬送車之間進行裝載 (自平台尚搬送車裳载物品）或郵载（自搬送車向平台搬出物 品）。 作為搬送車系統之代表例，眾所周知有一種在半導體工廠 之搬送系統中所使用之高架搬送車系統。高架搬送車夺统由 設置於頂棚之執道及可沿著軌道行駛之㈣崎車構成。高 架搬送車主要包含卡合純道之行駛部、可絲堆積有半導 體日㈣M ’ F_ 〇penmg Unified p〇d) 之保持部、及用以使保持部上下移動之移動機構。 進而，近年來’高架搬送車包括使载物橫向移動之橫向移 動機構。搬送車系統係採用橫向移動用之暫時保管埠，由此 較先前之貯藏庫相比’可簡單且迅速地予以暫時保管運用 (例如，參照專利文獻1)。 [先前技術文獻] [專利文獻] 100102077 3 201139252 [專利文獻1]曰本專利特開2005-206371號公報 【發明内容】 (發明所欲解決之問題） 於上述搬送車系統令，係於路徑之侧方採用暫時保管埠， 但存在因條件之不同而無法充分提高搬送車系統整體之搬 送效率之情形。 - 本發明之課題在於提高搬送車系統中物品之搬送效率。 - (解決問題之手段） 本發明之搬送車系統，係用以於複數個處理裝置之間搬送 物品者；其包括執道、搬送車及載置台。軌道包含與複數個 處理裝置相鄰接之複數個環路。搬送車藉由於複數個環路上 以單向通行地行駛而搬送物品。載置台包含於環路之内側與 環路之兩側部分相接近配置、且於環路之長度方向排成一行 而配置之第1載置台及第2載置台載置台及第2載置 台分別包含朝著環路之兩側部分之單側開放之第丨開口 部、及朝著環路之兩側部分之相反側開放之第2開口部。 於該系統中’载置台包含在環路内朝著兩侧之執道分別開 放之第1開口部及第2開口部’因此於臨時放置物品時，可 選擇位於目的地處理裝置之附近並且包含朝著該處理裝置 開放之開口部之载置台。以上之結果，可提高物品之搬送效 率。 第1載置台及第2載置台亦可於環路内被配置成直線狀。 100102077 Λ ⑧ 201139252 於該系統中’可將環路之寬度奴在最小限度。 搬送車系統亦可更包括連接於複數個環路而可於複數個 環路之間轉運物品移動之自動倉庫。 於該系統中，於複數個環路之間，可將物品保管於自動倉 庫因此’例如無需將偏離生產排程之物品放置於載置台。 又，自動倉庫具有路徑異常時之迂迴路作用。 軌道亦可配置於較底面而更靠下方處。 於5亥系統中，由於軌道並不朝較底面更靠上方處突出，因 此當操作者越過執道移動時，執道難以成為阻礙。 搬送車系統亦可更包括覆蓋軌道而與底面平行地配置之 保護蓋。 於該系統中，藉由保護蓋而可使底面平坦，因此不存在當 刼作車越過轨道移動時會損壞執道之虞。 處理裝置亦可包括經配置為可使物品直接移動之第i處 理裝置及第2處理裝置。複數個環路亦可包含分別被配置於 第1處理裝置之人σ及第2處理裝置之出口之人口側環路及 出口侧環路。 於該系統中，物品將自位於入口側環路之搬送車移動至第 1處理裝置’進而直接移動至第2處理裝置。最後，物品會 自第2處理裝置移動至位於出口側環路之搬送車。藉由如此 將複數個處理裝置之彼此間予以連接，可減少搬送車系統整 體之搬送次數。 100102077 5 201139252 複數個環路亦可包含平行地排列之複數個第1環路及經 配置為連結複數個第1環路之第1端部間之第2環路。亦可 未於複數個第i環路之第2端部側設置有環路。 於該系統中，由於未設置有用以連結複數個第1環路之第 2端部間之環路，因此可容易將裝置搬入至複數個第1環路 之間’或者容易自複數個第1環路之間搬出裝置。 複數個環路亦可包含平行地排列之複數個第1環路、經配 置為連結複數個第1環路之第1端部間之第2環路、及經配 置為連結複數個第1環路之第2端部間之第3莩路。構成第 3環路之執道亦可被配置於較底面而更靠下方處。 土於該系 '統中，由於構成第3環路之執道並不朝較底面而更 罪上方處大出，因此當操作者越過軌道而移動時，軌道將難 以成為阻礙〇 ' 搬送車系統亦可更包括覆蓋構成第3環路之軌道而與底 面平行地配置之保護蓋。 ㈠系、、先巾係、藉由保護蓋而使底面平坦因此可容易地 將裳置搬人至複數個第路之間，或者自複數個第i環路 之間搬出裝置。 (發明效果） 於本發月之搬送車系統中，載置台係包含於環路内分別朝 者環路之兩側部分開放之第i開口部及第2開口部，因此可 提高物品之搬送效率。 100102077 201139252 【實施方式】 (1)搬送車系統 使用圖卜對本發明之搬送車系統丨進行說明。圖i係採 用本發明-實施形態之搬送車系統之模式平面圖。於該實施 形態中’搬送車系統1被採用於製造大型液晶之液晶製造工 廠。於液晶製造工廠，配置有複數個處理裝置2及檢查裝置 4 〇 搬送車系統1為於複數個處理裝置2之間搬送物品（例 如，收容有複數個基板之匣盒)之系統，其包括轨道3、搬 送車5、自動倉庫7及複數個緩衝區卜於搬送車系統丨中， 執道3包含複數個環路(環繞路），搬送車5可於各環路上以 單向通行而行驶。 軌道3包含第1〜第4環路η、13、15、17。第1〜第3 環路11、13、15係沿著一個方向較長地延伸，因此包含直 線狀之兩側部分及位於兩端之曲線。第丨〜第3環路n、13、 15相互平行地並列延伸。第4環路17以在第1〜第3環路 11、13、15之單側端間延長之方式進行配置。於該實施形 態中’係未於第1〜第3環路11、13、15中與第4環路17 相反側設置有執道。因此，可容易將裝置搬入至第丨〜第4 環路11、13、15、17之間，或者容易自該等之間搬出裝置。 第1環路11係藉由設置複數個第1捷徑用連結部19而實 現第1小環路11a、第2小環路lib、第3小環路iic。第2 100102077 7 201139252 環路13係藉由設置複數個第2捷徑用連結部21而實現第* 小環路13a、第5小環路13b、第6小環路13c。第3環路 15係藉由設置複數個第3捷徑用連結部2 3而實現第7 I严 路15a、第8小環路15b、第9小環路15c。 辰 第4環路17係藉由設置第4捷徑用連結部25而實現第 1〇小環路Ha、第U小環路17b。第1〇小環路m藉由複 數個連結部27而連結於第〗環路u及第2環路…第^ 小環路17b藉由連結部28而連結於第3環路15。 複數個處理裝置2係以多個而並列配置於第i〜第*環路 1卜13、15、17之外側。由於處理裝置2之構成及種類屬 於習知，故而此處省略詳細說明。 作為複數域理裝置2之—種，錢置在各料之間連續 配置之連續處理褒置29。連續處理裝置29被配置於第1環 路11與第2環路13之間、及第2環路13與第3環路15 之間。連續處理裝置29包含以可直接移動物品之方式而連 結配置之第1處理裝置祝及第2處理裝置29b。例如，第 1處理裝置29a為㈣裝置’第2處理裝置29b為剝離裝置。 因此’物扣可自位於第！環路u之搬送車5搬人至第工處 理裝置29a之入口平纟36而進行處理，接著並搬入至第2 處理裝置29b而進行處理，最後搬出至位於第2環路之 出口平。38之搬送車5。如上所述，由於在複數個處理裝 置2之間並未&置有搬送執道，因此可減少搬送車系統1 100102077 201139252 整體之搬送步驟數。 自動倉庫7係配置於第1環路11與第2環路13之間。自 動层庫7包含可載置物品之複數個棚架及起重機。由於自動 倉庫7之構成屬於習知，故而此處省略說明。自動倉庫7 沿著第1環路11及第2環路13延伸之方向較長地延伸，包 含向第1環路11側延伸之第丨平台31及向第2環路13侧 L伸之第2平台33。藉此，自動倉庫7可與在第1環路η 或第2環路π上行駛之搬送車5之間搬入搬出物品。 再者，於該實施形態中，複數個檢查裝置4係以連接於自 動倉庫7之形態而配置於自動倉庫7之周圍。但是，並檢查 裝置之位置並不特別受限。 複數個緩衝區9係具有於處理裝置2之間搬送物品時之臨 時放置地點作用之載置台。複數個緩衝區9係配置於第 第4環路11〜π内，更具體而言配置於各小環路内。緩衝 區9沿著環路之長度方向較長地形成，如下所述包含設置有 開口部之複數個收納部。於第1〜第9小環路lla、Ub、llc、 13a、13b、13c、15a、15b、15c内，分別配置有4個緩衝區 9。於第10小環路17a内配置有6個緩衝區9。於第u小 環路17b内，配置有成一行且直線狀4個緩衝區9。 使用圖4 ’對第1緩衝區9A與第2緩衝區9B之配置及 構造進行詳細說明。圖4係圖1之部分放大圖。於各小環路 内’交替配置有第1緩衝區9A與第2緩衝區9B。第i緩 100102077 9 201139252 衝區9A與第2緩衝區9B基本構造相同，但開口部之朝向 則相反。如圖4所示，於第1小環路11a内，第1缓衝區 9A包含3台第1單位緩衝區85。第1單位緩衝區85包含 朝向相鄰接之執道、具體而言朝向第1小環路11a —邊之直 線部分之第1開口部85a。第2缓衝區9B包含3台第2單 位緩衝區86。第2單位緩衝區86包含朝向相鄰接之執道、 具體而言朝向第1小環路11a另一邊之直線部分之第2開口 部86a。綜上所述，第1緩衝區9A之第1開口部85a與第 2緩衝區9B之第2開口部86a係於第1小環路11a内朝向 相反側。以上之結果，可相對於第1緩衝區9A自第1小環 路11a之第1側進行存取，且可相對於第2緩衝區9B自第 1小環路11a之第2側進行存取。如此能於一個小環路内確 保可自小環路之任一側進行存取之緩衝區，因此可短時間内 執行搬送車5與缓衝區9間之移載。 藉由以上構成，於與各處理裝置2相鄰接之環路内存在緩 衝區9，尤其存在包含朝著環路之兩側部分分別開口之開口 部之缓衝區9。因此，當於2個處理裝置2之間搬送物品時， 通常可藉由2個命令實現搬送。具體而言，藉由第1命令， 搬送車5可自出發地之處理裝置2搬出物品，並搬送至目的 地處理裝置2附近之緩衝區9。藉由第2命令，搬送車5將 物品自緩衝區9搬送至目的地之處理裝置2。如此，藉由使 搬送車52次移動而可結束物品之搬送，因而搬送車系統1 100102077 10 201139252 _物品之搬送處理量將提高。 使用圖5 ’作為搬送車系統i之變形例，對確保停止地點 之佈局進彳τ說明。圖5係表示軌道之變形例之搬送車系統之 部分模式平面圖。 於圖5中，係卸除處理裂置2之一部分，並於此部位配置 有自第7小環路l5a延伸之旁路線89。旁路線89兩端連接 於第7小祕15a，且其中間部成為既定長度之直線狀而與 第7小環路15a之直線部分平行。可於旁路線89符停有複 數口之搬送車5。再者，旁路線89之配置位置及形狀並不 受限於該實施形態。又，旁路線89之可停車台數亦可為一 台。 需要檢測或維護之搬送車5將進入旁路線89而於直線部 分停止。於該狀態下’操作者檢測或維護搬送車5。綜上所 述，藉由檢測或維護操作，可使於處理I置2之間搬送之搬 送車5之操作不會停止。亦即，可降低或消除搬送車系統】 之停工時間。 (2)搬送車 使用圖2及圖3 ’對搬送車5之構造進行說明。圖2係作 為本發明-實施形態之搬送車系統之部分剖視圖。圖3係搬 送車之模式平面圖。於圖2中’與紙面正交之方向為搬送車 5之搬送方向，紙面之左右方向為物品之移載方向。於圖3 中’紙面之上下方向為搬送車5之搬送方向紙面之左右方 100102077 η 201139252 向為物品之移載方向。 於圖2中，係表示出底面32及頂棚面34,並進而表示出 搬送車5、缓衝區9及處理裝置2之平台2a。搬送車5、緩 衝區9、處理裝置2之平台2a之上表面之高度大致相同， 均靠近頂棚面34。 搬送車5為用以於處理裝置2之平台之間搬送玻璃基板或 E盒等物品之搬送手段。搬送車5包含本體35、行駛部37、 輥式輸送機39、推挽移載裝置41及微環境機構43❶ 本體35係具有大致箱形形狀。 行駛部37包含設置於本體35之左右前後之車輪45、連 接於車輪45之行驶馬達13·7)、及設置於行駛馬達131 之編碼器！39(圖7)。供車輪45行駛之執道47如圖2所明 不般，係配置於形成於底面32之 底面32更下方。 ^㈣内，且配置於較 再:，如圖14所示，可於搬送車5不行敬之部位之㈣ :上^保輕W。保護蓋7_蓋轨道心與底面％ ^置。藉由保護蓋7G可使底面32平坦，因此不會存 在U桑作者越過執道47移動時而損壞執道ο之虞。 輥式輸送機39可滾動地設置於本體35之上表:，其構成 搬，車5之支持面。如圖2及圖3所示，輥式輸送機％之 著與行駛方向成直角之方向排列，藉此可使物品容 “者左右方向移動。再者，輥式輸送機％包含於行敬方 100102077 12 201139252 向間離之-對觀列。喊機3 + 心锟39a均為自由輥(無 減泰銘1 昆列僅構成物品之導向構件。因此，可 =_之阻力’故而可適合於移載有重量物品之情 輥搬送車5之支持面為由可滚動自如之缺構成之 輸送機39，因此於移載物品時可抑制磨耗粉產生。 j挽移載裝置41為推拉輥式輸送機39之_上之物品而 ^移動之進退裝置。推挽移載裝置41包含可於左右方向 伸縮之臂機構51、設置於臂機構W之掛鉤構件53、及使臂 機構51上下.左右·進退之推挽驅動機構133(圖7)。於圖2 所:之狀態下’推挽移縣置41被配置於較料輸送機％ 更罪下域。再者，推挽移載裝置41無需支持物品之載重， 因此構成間早。因此’可實現搬送車5之輕量化。 掛鉤構件53包含自臂機構51之最 兩侧延伸之第！部分53a、及自^部分饥之端部向上方 延伸之第2部分53b。笛 第2。卩分53b彼此間之左右方向距離 係稍長於物品之左右方向長度。 微環境機構43包含框體55、-對擋板57及FFU(FanFilter —;風扇過濾、單⑹59。微環境機構43為用以提高搬送車 5中物品之周圍環境清潔度之機構。框體55係設置於本體 35之上部及前後而遮蔽既定空間。於框體&之左右兩側形 成有開口部，於開口部設置有一對擔板…擔板57可藉由 擋板驅動馬達ΐ35(@ 7)_行開義作。於圖2所示之狀 100102077 13 201139252 態下，一對擋板57係自外部而遮蔽框體55内之空間。脚9 為用以向框體55内供給清潔空氣之裝置，藉由卿驅動馬 達137(圖7)來進行驅動。 (3)緩衝區 使用圖2’對緩衝區9(相當於圖4之第 衝區. 第2單位緩衝區86)之構造進行說明。 緩衝區9例如於第！小頊 配置。緩衝區9包_^Λ兩側部分相接近 構65 〇 σ 輥式輸送機63及微環境機 載置口 61具有大致箱形形狀。輥式輸送機幻可、衷動地設 :於載置台61之上表面’其構成緩衝區9之裁置二耗式 輸送機63之高声盘你1 Α 〈戟置面。輥式 _之魏沿二行二輸送機39㈣。輥式輸 物品容易料左右方r移藉此可使 驶方向上間離之一對二:者，輥式輸送機63包含行 輥。如此，緩奸9 _。輥式輸送機63之輥均為自由 輥式輸送機63因^裁置面為由可滾動自如之細構成之 微_趟因崎移載物品時可抑制磨耗粉產生。 糾機構65包含罩蓋67 於緩衝區9中用心▲ 佩衣境機構65為 度之機構m 軍蓋67内亦即物品之周固環境清潔 間。於罩蓋fi7 5又置於載置台61之上部而遮蔽既定空 之軌道側形成有開口部67a(相當於圖4之第 1開口部85a、笛？ b日 乐z開口部86a)。於該實施形態中，罩蓋僅 100102077 201139252 配置於物品之上方’但罩蓋亦可僅配置於物品之上方及左 右’亦可配置於物品之上方、左右及内面。於該實施形態中， 於開口部雖未設置有擋板’但亦可視需要設置有擋板。 FIHJ69為用以向框體55内供給清潔空氣而提高所載置物品 之周圍清潔度之裝置。:FFU69藉由FFU驅動馬達137(圖7) 而進行驅動。 (4) 平台 使用圖2 ’對處理裝置2之平台2a進行說明。平台2a包 含載置台71及親式輸送機73。 載置台71具有大致箱形形狀。輥式輸送機73可滾動地設 置於載置台71之上表面。輥式輸送機73之輥係沿著與行駛 方向呈直角之方向排列’藉此可使物品容易沿著左右方向移 動。再者，報式輸送機73包含於行駛方向間離之一對親列。 輥式輸送機73之輥均為自由輕。 (5) 控制構成 使用圖6，對搬送車系統丨之控制系統12〇進行說明。圖 6係表示搬送車系統之控制系統之方塊圖。 控制系統120包含製造控制器121、物流控制器123、自 動倉庫控制器125及搬送車控制器127。 物流控制器123為自動倉庫控制器125及搬送車控制器 127之上位之控制|!。搬送車控㈣127具有管理複數個搬 送車5且分配該等搬送指令之分配功能。再者，「搬送指八 100102077 201139252 包括與行駛有關之指令、及與裝載位置及卸載位置有關之指 令0 製造控制器121可於與處理裝置2之間進行通信。處理裝 置2係將已結束處理物品之搬送要求(裝载要求•卸载要求) 發送至製造控制器121。 製造控制器121將來自處理裝置2之搬送要求發送至物流 控制器123’物流控制器123將報告發送至製造控制器121。 物流控制器123當自製造控制器121接收搬送要求時，在 伴隨有於自動倉庫7中進行入庫或出庫之情形下，以既定時 序將入庫或出庫指令發送至自動倉庫控制器125。而且，自 動倉庫控制器125與此相應地將入庫或出庫指令發送至自 動倉庫7。物流控制器123當進而自製造控制器121接收搬 送要求時，則將其轉換為搬送指令，並進行對搬送車5進行 搬送指令分配動作。 搬送車控制器127為了作成搬送指令而連續地與各搬送 車5進行通信，根據自各搬送車5發送之位置資料而獲得其 位置資訊。 使用圖7，對搬送車5之搬送車内控制器129進行說明。 圖7係表示搬送車内之控制器構成之方塊圖。 搬送車内控制器129為由中央處理單元(CPU，Central Processing Unit)、隨機存取記憶體(RAM，Random Access Memory)、唯讀記憶體(rom，Read Only Memory)等構成而 100102077 201139252 執行程式之電腦。搬送車内控制器129之記憶體 路線圖。搬送車5 糸保存有 夺 皁5 一面將§己載於路線圖之座標及本機之内部 座標(藉L馬$ 139(下述)所求出之座標)加叫較，一^ 持續行駛。 於搬送車内控制器129連接有行駛馬達13卜推挽驅動機 構133、擋板驅動馬達135、FFU驅動馬達137及編石馬器⑽ (6)搬送車系統之動作 使用圖2及圖8〜圖13，對搬送車系統丨之動作進行說 明。圖8〜圖13係作為本發明一實施形態之搬送車系統之 部分剖視圖。於圖2之狀態下，搬送車5以載置有物品〇 之狀態而停止於緩衝區9與處理裝置2之平台2a之間。並 於平台2a載置有物品C2。自該狀態下，搬送車5將物品 C1下降至緩衝區9，其次自平台2a裝載物品C2。以丁，對 該動作進行詳細說明。 自圖2之狀態下，於搬送車5中，驅動擋板驅動馬達135, 藉此打開緩衝區9側之擔板57。進而，驅動推挽驅動機構 133之升降機構(未圖示），而使臂機構51上升。其結果，掛 鉤構件53之第2部分53b係配置於物品C1之左右方向兩 側。臂機構51上升後之狀態係於圖8所示。 自圖8之狀態下，於搬送車5中，驅動推挽驅動機構133 之滑動機構(未圖示），而使臂機構51向緩衝區9側滑動。 藉此，物品C1將被推至掛鉤構件53之第2部分53b，而自 100102077 17 201139252 搬送車5搬送至緩衝區9内。具體而言，物品Cl於輥式輸 送機39及輥式輸送機63上進行滑動移動。物品C1移動後 之狀態係於圖9所示。 自圖9之狀態下，於搬送車5中，驅動推挽驅動機構133 之升降機構(未圖示），而使臂機構51下降。其結果，掛鉤 構件53之第2部分53b被配置於較物品C1之左右方向兩 側而更靠下方處。其次，驅動推挽驅動機構133之滑動機構 (未圖示），而使臂機構51向搬送車5側滑動。由此，臂機 構51將返回搬送車5内。最後，驅動擋板驅動馬達135， 而可關閉緩衝區9側之擋板57。關閉擋板57後之狀態係於 圖10所示。 如上說明般，搬送車5係於緩衝區9之侧方停止，藉由推 挽移載裝置41而使物品於本體35與緩衝區9之間移動。當 力自推挽移載裝置41作用於物品時，物品將於輥式輸送機 39及輥式輸送機63上移動。如此，可藉由簡單構造而移載 重量物。 自圖10之狀態下，於搬送車5中，藉由驅動擋板驅動馬 達135，而可打開平台2a側之擋板57。進而，驅動推挽驅 動機構133之滑動機構(未圖示），而使臂機構51向緩衝區9 側滑動。臂機構51之滑動後狀態係於圖11所示。 自圖11之狀態下，係於搬送車5中，，f區動推挽驅動機構 133之升降機構(未圖示），而使臂機構51上升。其結果，掛 100102077 18 201139252 鉤構件53之第2部分53b被配置於物品C2之左右方向兩 側。臂機構51上升後之狀態係於圖12所示。 ° > 自圖12之狀態下，驅動推挽驅動機構133之滑動機構， 而使臂機構51向搬送年5侧滑動。藉此，臂機構51可返回 搬达車5内。又，物品C2被推至掛鉤構件幻之第2部分 53b而自平台2a搬送至搬送車5内。具體而言，物品C2 於輥式輪送機73及輥式輸送機39上進行滑動移動。進而， 驅動推挽驅動機構133之升降機構(未圖示），而使臂機構51 下降。其結果，掛鉤構件53之第2部分53b將被配置於較 物品C2之左右方向兩側而更靠下方處。最後，驅動擋板驅 動馬達135,而關閉平台2a側之擋板57。關閉擋板57後之 狀態係於圖13所示。 藉由以上處理，可結束一連串移載動作。 (7)其他實施形態 以上’已對本發明一實施形態進行說明，但本發明並不受 限於上述實施形態，可於不脫離發明主旨之範圍内進行各種 變更。 尤其，本說明書所記載之複數個實施形態及變形例可視需 要任意組合。 (A)於上述實施形態中，係每次各一個地交替設置有分別 包含複數個朝向不同側之開口部之第1缓衝區9A與第2缓 衝區9B，但本發明並不受限於此種實施形態。 100102077 19 201139252 緩衝區只要包含環路内分別朝著環路之兩側部分開 第1開口部及第2開口部，則可為任何構造。例如，亦可連 續配置有-種缓衝區。進而，亦可使用僅包含—個開口部之 緩衝區。亦即，關於緩衝區之形狀及各個緩衝區之 量’並不受特別限制。 、藉由以上構造’緩衝區包含環路内分職著環路之兩側部 分開放之第丨•部及第2開口部。因此，於將物品搬 緩衝區9時’可選擇位於目的地處理裝置2附近且包含朝著 贿理裝置2職之開口部之緩衝區。以上之結果，將提高 物品之搬送效率。 σ 曰（Β)於環路内’複數個緩衝區9亦可不配置成直線狀。但 ，為了絲路之寬度不會極端過大，較佳為將複數個緩衝 區9配置成一行。再者，於將緩衝區9配置成直線狀之情形 時，可最小限度地設定環路之寬度。 (C)於圖15所示之搬送車系統中，軌道3係除上述實施形 態之構造以外，於第丨〜第3環路u、13、15中與第4環 路Π相反侧係包含第5環路77。 第5環路77係藉由設置第5捷徑連結部79而實現第12 小環路77a、第13小環路77b。第12小環路77a藉由複數 個連結部81而連結於第丨環路u及第2環路13。第13小 環路77b藉由連結部83而連結於第3環路15。 第1〜第5環路n、13、15、17、77之執道如上述實施 100102077 20 201139252 形態中說明般，係收納於底面32之凹部32a内。於該實施 形態中，例如平常時，係預先於第5環路77之轨道上蓋上 保護蓋。藉由配置保護蓋，而使底面32平坦，因此可容易 將裳置搬入至第1〜第4環路11、13、15、17之間，^者 容易自該等之間搬出裝置。又，更無當操作者越過第5環路 77移動時會損壞轨道之虞。而且，例如緊急時，可卸除保 護蓋而使搬送車5於第5環路77上行駛。 於該實施形態中，並未於第5環路77内設置有緩衝區。 但是’亦可視需要配置有缓衝區。 (D)使用圖16〜圖19,對提高緩衝區之物品收容能力之其 他實施形態進行說明。圖16係採用本發明之進而其他實施 形態之搬送車系統之部分剖視圖。圖Π係載置台之模式平201139252 VI. Description of the invention: [Technical field to which the invention pertains] ‘In particular, it relates to a transport vehicle system included in a complex transport vehicle. The present invention relates to a plurality of processing devices of a transport vehicle system traveling along a track. [Prior Art] Previously, it has been known that a plurality of platform roads, including a predetermined path and a plurality of platform roads, are transported to carry articles. A plurality of moving and delivering systems. In the transport vehicle system, the platform is transported between the platform and the transport vehicle (the vehicle is still transported from the platform) or the mail carrier (self-moving vehicle transports the product to the platform). As an example of a transport vehicle system, an overhead transport system used in a transport system of a semiconductor factory is known. The overhead transport vehicle is composed of (4) Saki cars that are placed on the roof and can be driven along the track. The overhead transport vehicle mainly includes a traveling portion that engages with a pure lane, a holding portion that can be stacked with a semiconductor day (4) M'F_ 〇penmg Unified p〇d), and a moving mechanism for moving the holding portion up and down. Further, in recent years, the overhead transport vehicle includes a lateral movement mechanism that laterally moves the load. Since the transport system is temporarily stored for lateral movement, it can be easily and quickly stored and used in comparison with the previous storage (for example, refer to Patent Document 1). [Prior Art Document] [Patent Document] 100102077 3 201139252 [Patent Document 1] JP-A-2005-206371 SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) The above-described transport vehicle system is attached to a route Although the side is temporarily stored, there is a case where the transportation efficiency of the entire transportation system cannot be sufficiently improved due to the difference in conditions. - An object of the present invention is to improve the efficiency of transporting articles in a transport vehicle system. - (Means for Solving the Problem) The transport vehicle system of the present invention is for transporting articles between a plurality of processing devices; it includes a road, a transport vehicle, and a mounting table. The track contains a plurality of loops adjacent to a plurality of processing devices. The transporter transports the goods by driving in one-way traffic on a plurality of loops. The mounting table includes a first mounting table, a second mounting table mounting table, and a second mounting table, which are disposed on the inner side of the loop and are disposed adjacent to both sides of the loop, and are arranged in a row in the longitudinal direction of the loop. The second opening portion that opens to one side of the loop portion and the second opening portion that opens toward the opposite side of the both side portions of the loop. In this system, the "mounting table includes the first opening portion and the second opening portion which are respectively opened in the loop toward the two sides of the road. Therefore, when the article is temporarily placed, it is possible to select the vicinity of the destination processing device and include A mounting table that faces the opening of the processing device. The above results can improve the efficiency of moving items. The first stage and the second stage may be arranged in a straight line in the loop. 100102077 Λ 8 201139252 In this system, the width of the loop can be minimized. The transport vehicle system may also include an automated warehouse that is coupled to a plurality of loops to transfer items between a plurality of loops. In this system, items can be stored in an automated warehouse between a plurality of loops so that, for example, items that deviate from the production schedule need not be placed on the mounting table. In addition, the automatic warehouse has the loop function when the path is abnormal. The track can also be placed on the lower side and on the lower side. In the 5 Hz system, since the track does not protrude above the bottom surface, it is difficult to obstruct the way when the operator moves over the road. The transport vehicle system may further include a protective cover that covers the rail and is disposed in parallel with the bottom surface. In this system, the bottom surface can be made flat by the protective cover, so there is no possibility that the brake will be damaged when the vehicle moves over the track. The processing device may also include an ith processing device and a second processing device configured to move the article directly. The plurality of loops may include a population side loop and an exit side loop respectively disposed between the person σ of the first processing device and the exit of the second processing device. In this system, the article is moved from the transport vehicle located on the entrance side loop to the first processing device and moves directly to the second processing device. Finally, the item moves from the second processing unit to the transport vehicle located on the exit side loop. By thus connecting a plurality of processing apparatuses to each other, the number of transports of the entire transport vehicle system can be reduced. 100102077 5 201139252 A plurality of loops may also include a plurality of first loops arranged in parallel and a second loop arranged to connect the first ends of the plurality of first loops. A loop may not be provided on the second end side of the plurality of i-th loops. In this system, since it is not provided to connect a loop between the second ends of the plurality of first loops, it is easy to carry the device between the plurality of first loops or to easily multiply the first ones. Move the device between the loops. The plurality of loops may include a plurality of first loops arranged in parallel, a second loop arranged to connect the first ends of the plurality of first loops, and a plurality of first loops arranged to connect The third road between the second end of the road. The obstruction that constitutes the third loop can also be placed on the lower side and on the lower side. In the system, since the road that constitutes the third loop is not more sinful than the bottom surface, when the operator moves over the track, the track will be difficult to become a barrier to the transport system. Further, it may include a protective cover that covers the track constituting the third loop and is disposed in parallel with the bottom surface. (1) The system, the first towel system, and the bottom surface are flattened by the protective cover, so that the skirt can be easily moved between the plurality of roads, or the device can be removed from the plurality of i-th loops. (Effect of the Invention) In the transport vehicle system of the present month, the mounting table includes the i-th opening and the second opening which are open to the both sides of the loop in the loop, thereby improving the transport efficiency of the articles. . 100102077 201139252 [Embodiment] (1) Transport vehicle system The transport vehicle system of the present invention will be described using FIG. Figure i is a schematic plan view of a transport vehicle system according to the present invention. In this embodiment, the transport system 1 is used in a liquid crystal manufacturing factory that manufactures large liquid crystals. In the liquid crystal manufacturing plant, a plurality of processing apparatuses 2 and inspection apparatuses 4 are disposed. The transport system 1 is a system for transporting articles (for example, cassettes containing a plurality of substrates) between a plurality of processing apparatuses 2, including tracks. 3. The transport vehicle 5, the automatic warehouse 7 and the plurality of buffers are in the transport vehicle system, and the road 3 includes a plurality of loops (surrounding roads), and the transport vehicle 5 can travel in one-way traffic on each loop. The track 3 includes first to fourth loops η, 13, 15, and 17. The first to third loops 11, 13, and 15 extend long in one direction, and thus include straight portions on both sides and curves at both ends. The third to third loops n, 13, and 15 extend parallel to each other in parallel. The fourth loop 17 is disposed to extend between the one ends of the first to third loops 11, 13, and 15. In this embodiment, the system is not provided on the opposite side of the fourth loop 17 from the first to third loops 11, 13, and 15. Therefore, it is possible to easily carry the device between the second to fourth loops 11, 13, 15, and 17, or to easily carry out the device from between. In the first loop 11, the first small loop 11a, the second small loop lib, and the third small loop iic are realized by providing a plurality of first shortcut connecting portions 19. In the loop 13, the third small loop 13a, the fifth small loop 13b, and the sixth small loop 13c are realized by providing a plurality of second shortcut connecting portions 21. In the third loop 15, the seventh short path 15a, the eighth small loop 15b, and the ninth small loop 15c are realized by providing a plurality of third shortcut connecting portions 2 3 . The fourth loop 17 is configured to realize the first small loop Ha and the fifth small loop 17b by providing the fourth shortcut connecting portion 25. The first small loop m is connected to the first loop u and the second loop by a plurality of connecting portions 27, and the second loop 17b is connected to the third loop 15 via the connecting portion 28. A plurality of processing apparatuses 2 are arranged side by side on the outer sides of the i-th to the *th loops 1b, 13, and 17. Since the configuration and type of the processing device 2 are conventional, detailed descriptions thereof are omitted here. As a kind of the complex domain device 2, the money is placed in a continuous processing device 29 which is continuously arranged between the materials. The continuous processing device 29 is disposed between the first loop 11 and the second loop 13 and between the second loop 13 and the third loop 15. The continuous processing device 29 includes a first processing device and a second processing device 29b that are arranged to be directly movable. For example, the first processing device 29a is a (four) device. The second processing device 29b is a peeling device. Therefore, the buckle can be located in the first! The transport vehicle 5 of the loop u is transported to the entrance level 36 of the first processing unit 29a for processing, and then moved to the second processing unit 29b for processing, and finally carried out to the exit of the second loop. 38 transport car 5. As described above, since the transfer path is not disposed between the plurality of processing devices 2, the number of transport steps of the entire transport system 1 100102077 201139252 can be reduced. The automatic warehouse 7 is disposed between the first loop 11 and the second loop 13. The automatic floor magazine 7 contains a plurality of scaffolding and cranes on which articles can be placed. Since the configuration of the automatic warehouse 7 is conventional, the description is omitted here. The automatic warehouse 7 extends long along the direction in which the first loop 11 and the second loop 13 extend, and includes a second platform 31 extending toward the first loop 11 side and a second extending toward the second loop 13 side L. Platform 33. Thereby, the automatic warehouse 7 can carry in and out articles between the transport vehicle 5 that travels on the first loop η or the second loop π. Further, in this embodiment, a plurality of inspection apparatuses 4 are disposed around the automatic warehouse 7 in a form of being connected to the automatic warehouse 7. However, the location of the inspection device is not particularly limited. The plurality of buffers 9 are mounting stations that function as temporary placement points when the articles are transported between the processing devices 2. A plurality of buffers 9 are arranged in the fourth loop 11 to π, and more specifically in the small loops. The buffer region 9 is formed to be long in the longitudinal direction of the loop, and includes a plurality of housing portions in which the openings are provided as follows. Four buffers 9 are disposed in the first to ninth small loops 11a, Ub, 11c, 13a, 13b, 13c, 15a, 15b, and 15c, respectively. Six buffers 9 are arranged in the 10th small loop 17a. In the u-th small loop 17b, four buffers 9 are arranged in a line and linearly. The arrangement and structure of the first buffer 9A and the second buffer 9B will be described in detail using Fig. 4'. Figure 4 is a partial enlarged view of Figure 1. The first buffer 9A and the second buffer 9B are alternately arranged in each small loop. Ii slow 100102077 9 201139252 The punching zone 9A has the same basic structure as the second buffer zone 9B, but the orientation of the opening is reversed. As shown in Fig. 4, in the first small loop 11a, the first buffer area 9A includes three first unit buffers 85. The first unit buffer 85 includes a first opening 85a that faces the adjacent channel, specifically, the straight portion of the first small loop 11a. The second buffer 9B includes three second unit buffers 86. The second unit buffer 86 includes a second opening portion 86a that faces the adjacent line, specifically, the straight portion toward the other side of the first small loop 11a. As described above, the first opening 85a of the first buffer zone 9A and the second opening 86a of the second buffer zone 9B are oriented opposite to each other in the first small loop 11a. As a result, the first buffer 9A can be accessed from the first side of the first small loop 11a, and can be accessed from the second side of the first small loop 11a with respect to the second buffer 9B. . In this way, a buffer that can be accessed from either side of the small loop can be secured in a small loop, so that the transfer between the transport vehicle 5 and the buffer 9 can be performed in a short time. According to the above configuration, the buffer area 9 exists in the loop adjacent to each of the processing apparatuses 2, and in particular, the buffer area 9 including the opening portions respectively opening toward the both side portions of the loop. Therefore, when an article is transported between two processing apparatuses 2, it is usually possible to carry out the transport by two commands. Specifically, by the first command, the transport vehicle 5 can carry out the articles from the processing device 2 at the departure place and transport them to the buffer zone 9 near the destination processing device 2. By the second command, the transport vehicle 5 transports the articles from the buffer zone 9 to the processing device 2 of the destination. In this way, by moving the transport vehicle 52 times, the transport of the articles can be ended, and thus the transport system 1 100102077 10 201139252 _ the transport processing amount of the articles is improved. Referring to Fig. 5' as a modification of the transport vehicle system i, the layout of the stop point is ensured. Fig. 5 is a partial schematic plan view showing a transport vehicle system in a modified example of the rail. In Fig. 5, a portion of the treatment split 2 is removed, and a bypass line 89 extending from the seventh small loop l5a is disposed at this portion. Both ends of the bypass line 89 are connected to the seventh small 15a, and the intermediate portion thereof has a linear shape of a predetermined length and is parallel to the straight portion of the seventh small loop 15a. The transport car 5 with multiple ports can be stopped at the bypass line 89. Further, the arrangement position and shape of the bypass line 89 are not limited to this embodiment. Further, the number of parking spaces of the bypass line 89 may be one. The transport vehicle 5 that needs to be detected or maintained will enter the bypass line 89 and stop at the straight line. In this state, the operator detects or maintains the transport vehicle 5. As described above, the operation of the transport vehicle 5 transported between the processing units 1 and 2 can be stopped by the detection or maintenance operation. That is, the downtime of the transport system can be reduced or eliminated. (2) Transport vehicle The structure of the transport vehicle 5 will be described with reference to Figs. 2 and 3'. Fig. 2 is a partial cross-sectional view showing a transport vehicle system according to the present invention. Figure 3 is a schematic plan view of the transport vehicle. In Fig. 2, the direction orthogonal to the plane of the paper is the transport direction of the transport vehicle 5, and the left-right direction of the paper surface is the transport direction of the article. In Fig. 3, the upper and lower sides of the paper are the left and right sides of the paper in the transport direction of the transport vehicle 5100102077 η 201139252 The direction of the article is the transfer direction of the article. In Fig. 2, the bottom surface 32 and the ceiling surface 34 are shown, and the transport vehicle 5, the buffer zone 9, and the platform 2a of the processing apparatus 2 are further shown. The height of the upper surface of the platform 5a of the transport vehicle 5, the buffer area 9, and the processing apparatus 2 is substantially the same, and both are close to the ceiling surface 34. The transport vehicle 5 is a transport means for transporting articles such as a glass substrate or an E-box between the platforms of the processing device 2. The transport vehicle 5 includes a main body 35, a traveling portion 37, a roller conveyor 39, a push-pull transfer device 41, and a micro-environment mechanism 43. The main body 35 has a substantially box shape. The traveling portion 37 includes wheels 45 provided on the left and right sides of the main body 35, travel motors 13·7) connected to the wheels 45, and an encoder provided in the travel motor 131! 39 (Figure 7). As shown in Fig. 2, the lane 47 for driving the wheel 45 is disposed below the bottom surface 32 formed on the bottom surface 32. ^(4), and arranged in the more:: As shown in Figure 14, it can be used in the part of the transport vehicle 5 that does not respect (4): The protective cover 7_ covers the track core and the bottom surface. The bottom surface 32 can be made flat by the protective cover 7G, so that there is no such thing as the U.S. author damaging the ruling when moving over the ruling 47. The roller conveyor 39 is rollably disposed on the upper surface of the body 35: it constitutes a support surface for the moving vehicle 5. As shown in Fig. 2 and Fig. 3, the % of the roller conveyor is arranged at a right angle to the direction of travel, whereby the article can be moved in the left and right direction. Further, the roller conveyor is included in the line. 100102077 12 201139252 To the separation - the view of the line. The machine 3 + the heart 39a are free rolls (no reduction of the Thai Ming 1 column only constitutes the guiding member of the article. Therefore, the resistance can be = _ can be suitable for The support surface of the roll transporting vehicle 5 is a conveyor 39 which is formed by rolling and freely, so that the generation of the abrasion powder can be suppressed when the article is transferred. The j-pull transfer device 41 is a push-pull roller type. The push-pull transfer device 41 includes an arm mechanism 51 that can be extended and contracted in the left-right direction, a hook member 53 that is disposed on the arm mechanism W, and the arm mechanism 51. The push-pull drive mechanism 133 (Fig. 7) of the advance and retreat. In the state of Fig. 2, the push-pull county 41 is disposed in the lower conveyor area. Further, the push-pull transfer device 41 There is no need to support the load of the items, so the composition is early. Therefore, the lightweight of the transport vehicle 5 can be realized. The hook member 53 includes a first portion 53a extending from the outermost sides of the arm mechanism 51, and a second portion 53b extending upward from the end portion of the hung. The flute 2 is divided into left and right directions by 53b. It is slightly longer than the length of the article in the left-right direction. The micro-environment mechanism 43 includes a frame 55, a pair of baffles 57 and an FFU (FanFilter -; fan filter, single (6) 59. The micro-environment mechanism 43 is for improving the surroundings of the articles in the transport vehicle 5. Mechanism for environmental cleanliness: The frame body 55 is disposed on the upper portion of the main body 35 and the front and rear portions to shield the predetermined space. Openings are formed on the left and right sides of the frame body, and a pair of support plates are provided on the opening portion. The baffle drive motor ΐ 35 (@ 7) _ is opened. In the state of 100102077 13 201139252 shown in Fig. 2, a pair of baffles 57 are externally shielded from the space inside the frame 55. The means for supplying clean air to the frame 55 is driven by the drive motor 137 (Fig. 7). (3) The buffer is used in Fig. 2' for the buffer zone 9 (corresponding to the first punch of Fig. 4. The structure of the second unit buffer 86) will be described. The buffer 9 is, for example, the first! The buffer 9 is _ Λ Λ Λ Λ Λ 65 65 65 辊 辊 辊 辊 辊 辊 辊 辊 辊 及 及 及 及 及 及 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微The upper surface of the mounting table 61 is formed by the high-acoustic disk of the two-conveyor conveyor 63 which constitutes the buffer zone 9. You have a 面 戟 。 。 。 。 辊 辊 辊 辊 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 。 。 。 。 。 。 It is easy to expect that the left and right sides are moved so that one or two of the driving directions are separated. The roller conveyor 63 includes a row of rollers. Thus, the rapper 9 _. The rollers of the roller conveyor 63 are all free rollers. The conveyor 63 can suppress the generation of abrasion powder when the cutting surface is made of a finely rollable material. The correcting mechanism 65 includes a cover 67 in the buffer zone 9 for the center of the mechanism 565. An opening portion 67a (corresponding to the first opening portion 85a of Fig. 4 and the flute b opening portion 86a of Fig. 4) is formed on the rail side where the cover fi7 5 is placed on the upper portion of the mounting table 61 and shields the predetermined space. In this embodiment, the cover is only placed above the article in the case of "100102077 201139252", but the cover may be disposed only above and to the left of the article, or may be disposed above, to the left and right and inside of the article. In this embodiment, the baffle is not provided in the opening, but a baffle may be provided as needed. The FIHJ 69 is a device for supplying clean air to the inside of the casing 55 to improve the cleanliness of the surrounding articles. The FFU 69 is driven by the FFU drive motor 137 (Fig. 7). (4) Platform The platform 2a of the processing device 2 will be described with reference to Fig. 2'. The platform 2a includes a mounting table 71 and a personal conveyor 73. The mounting table 71 has a substantially box shape. The roller conveyor 73 is rollably disposed on the upper surface of the mounting table 71. The rollers of the roller conveyor 73 are arranged in a direction at right angles to the traveling direction, whereby the articles can be easily moved in the left-right direction. Furthermore, the newspaper conveyor 73 is included in a pair of directions in the direction of travel. The rollers of the roller conveyor 73 are all free and light. (5) Control configuration The control system 12 of the transport vehicle system will be described with reference to Fig. 6 . Figure 6 is a block diagram showing the control system of the transport vehicle system. The control system 120 includes a manufacturing controller 121, a logistics controller 123, an automatic warehouse controller 125, and a transport vehicle controller 127. The logistics controller 123 is a control of the upper warehouse controller 125 and the transport vehicle controller 127. The transport vehicle control (four) 127 has a distribution function of managing a plurality of transport vehicles 5 and allocating the transport commands. Furthermore, "Transportation Finger 100102077 201139252 includes instructions related to driving, and instructions related to the loading position and the unloading position. The manufacturing controller 121 can communicate with the processing device 2. The processing device 2 will end the processing. The article transport request (loading request/unloading request) is sent to the manufacturing controller 121. The manufacturing controller 121 sends the transport request from the processing device 2 to the logistics controller 123. The logistics controller 123 sends the report to the manufacturing controller 121. When receiving the transfer request from the manufacturing controller 121, the logistic controller 123 transmits the inbound or outbound command to the automatic warehouse controller 125 at a predetermined timing in the case where the automatic warehouse 7 performs the inbound or outbound storage. In response to this, the automatic warehouse controller 125 transmits the inbound or outbound command to the automatic warehouse 7. When the logistics controller 123 receives the transfer request from the manufacturing controller 121, it converts it into a transfer command and performs the transfer to the transport vehicle 5 The transport command distribution operation is performed. The transport vehicle controller 127 continuously feeds each transport vehicle 5 in order to create a transport command. The line communication obtains the position information based on the position data transmitted from each of the transport vehicles 5. The transport interior controller 129 of the transport vehicle 5 will be described with reference to Fig. 7. Fig. 7 is a block diagram showing the configuration of the controller in the transport vehicle. The in-vehicle controller 129 is a computer that executes a program by a central processing unit (CPU, Central Processing Unit), a random access memory (RAM), a read only memory (ROM), and the like. The memory road map of the in-vehicle controller 129. The transport vehicle 5 糸 holds the soap 5 side and the § has been placed on the road map coordinates and the internal coordinates of the machine (by L Ma $ 139 (described below) The coordinate is added to the call, and the drive is continued. The transport controller 129 is connected to the travel motor 13 and the push-pull drive mechanism 133, the flapper drive motor 135, the FFU drive motor 137, and the stone-removing machine (10) (6) The operation of the vehicle system will be described with reference to Fig. 2 and Fig. 8 to Fig. 13. Fig. 8 to Fig. 13 are partial cross-sectional views of the transport vehicle system according to the embodiment of the present invention. Then, the transport vehicle 5 is stopped between the buffer zone 9 and the platform 2a of the processing apparatus 2 in a state in which the article is placed, and the article C2 is placed on the platform 2a. From this state, the transport vehicle 5 carries the article C1. The load is lowered to the buffer zone 9, and the article C2 is loaded from the platform 2a. The operation will be described in detail. In the state of Fig. 2, in the transport vehicle 5, the shutter drive motor 135 is driven to open the buffer zone 9 The side plate 57. Further, the elevating mechanism (not shown) of the push-pull drive mechanism 133 is driven to raise the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed on both sides in the left-right direction of the article C1. The state in which the arm mechanism 51 is raised is as shown in FIG. In the state shown in Fig. 8, the slide mechanism (not shown) of the push-pull drive mechanism 133 is driven in the transport vehicle 5, and the arm mechanism 51 is slid toward the buffer area 9. Thereby, the article C1 is pushed to the second portion 53b of the hook member 53, and the transport vehicle 5 is transported into the buffer zone 9 from 100102077 17 201139252. Specifically, the article C1 is slidably moved on the roller conveyor 39 and the roller conveyor 63. The state after the movement of the article C1 is as shown in Fig. 9. In the state of Fig. 9, in the transport vehicle 5, the elevating mechanism (not shown) of the push-pull drive mechanism 133 is driven to lower the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed on the lower side of the article C1 in the left-right direction. Next, the slide mechanism (not shown) of the push-pull drive mechanism 133 is driven to slide the arm mechanism 51 toward the transport vehicle 5 side. Thereby, the arm mechanism 51 will return to the inside of the transport vehicle 5. Finally, the shutter drive motor 135 is driven to close the shutter 57 on the buffer side 9. The state after the shutter 57 is closed is shown in Fig. 10. As described above, the transport vehicle 5 is stopped on the side of the buffer zone 9, and the article is moved between the main body 35 and the buffer zone 9 by pushing the transfer device 41. When the force is applied to the article by the push-pull transfer device 41, the articles are moved on the roller conveyor 39 and the roller conveyor 63. Thus, the weight can be transferred by a simple configuration. In the state of Fig. 10, in the transport vehicle 5, the shutter 135 is driven by the drive shutter, and the shutter 57 on the side of the platform 2a can be opened. Further, a sliding mechanism (not shown) of the push-pull driving mechanism 133 is driven to slide the arm mechanism 51 toward the buffer 9 side. The state after sliding of the arm mechanism 51 is as shown in FIG. In the state shown in Fig. 11, in the transport vehicle 5, the lift mechanism (not shown) of the push-pull drive mechanism 133 is moved in the f-zone, and the arm mechanism 51 is raised. As a result, the second portion 53b of the hook member 53 of the hook 100102077 18 201139252 is disposed on both sides of the article C2 in the left-right direction. The state in which the arm mechanism 51 is raised is as shown in FIG. ° > In the state of Fig. 12, the sliding mechanism of the push-pull drive mechanism 133 is driven, and the arm mechanism 51 is slid toward the transport year 5. Thereby, the arm mechanism 51 can be returned to the inside of the transport vehicle 5. Further, the article C2 is pushed to the second portion 53b of the hook member and transported from the platform 2a to the transport vehicle 5. Specifically, the article C2 is slidably moved on the roller conveyor 73 and the roller conveyor 39. Further, the elevating mechanism (not shown) of the push-pull drive mechanism 133 is driven to lower the arm mechanism 51. As a result, the second portion 53b of the hook member 53 is disposed further below the left and right sides of the article C2. Finally, the shutter drive motor 135 is driven to close the shutter 57 on the side of the platform 2a. The state after the shutter 57 is closed is shown in Fig. 13. By the above processing, a series of transfer actions can be ended. (7) Other Embodiments The present invention has been described with respect to the embodiments of the present invention. However, the present invention is not limited to the embodiments described above, and various modifications may be made without departing from the spirit of the invention. In particular, the plurality of embodiments and modifications described in the present specification may be arbitrarily combined as needed. (A) In the above embodiment, the first buffer 9A and the second buffer 9B each including a plurality of openings facing different sides are alternately provided one at a time, but the present invention is not limited. In this embodiment. 100102077 19 201139252 The buffer zone may have any configuration as long as it includes the first opening and the second opening in the loop on both sides of the loop. For example, you can also configure a buffer. Further, a buffer buffer including only one opening portion may be used. That is, the shape of the buffer and the amount of each buffer are not particularly limited. According to the above configuration, the buffer zone includes the second portion and the second opening portion of the loop which are separated from the two sides of the loop. Therefore, when the article is moved into the buffer zone 9, it is possible to select a buffer zone located near the destination processing device 2 and including the opening toward the bribery device 2. The above results will improve the efficiency of moving items. σ 曰 (Β) is in the loop. The plurality of buffers 9 may not be arranged in a straight line. However, in order to prevent the width of the silk path from being extremely excessive, it is preferable to arrange a plurality of buffer regions 9 in a row. Further, when the buffer area 9 is arranged in a straight line, the width of the loop can be minimized. (C) In the transport vehicle system shown in FIG. 15, the track 3 is the same as the structure of the above-described embodiment, and the second to third loops u, 13, and 15 are opposite to the fourth loop Π. 5 loop 77. The fifth loop 77 realizes the twelfth small loop 77a and the thirteenth small loop 77b by providing the fifth shortcut connecting portion 79. The twelfth small loop 77a is connected to the second loop u and the second loop 13 by a plurality of connecting portions 81. The 13th small loop 77b is connected to the third loop 15 by the connecting portion 83. The first to fifth loops n, 13, 15, 17, and 77 are stored in the recess 32a of the bottom surface 32 as described in the above-described embodiment 100102077 20 201139252. In this embodiment, for example, a protective cover is attached to the track of the fifth loop 77 in advance. Since the bottom surface 32 is flat by arranging the protective cover, it is easy to carry the skirt between the first to fourth loops 11, 13, 15, and 17, and it is easy to carry out the apparatus from between. Moreover, it is even more difficult for the operator to damage the track when moving over the fifth loop 77. Further, for example, in an emergency, the protective cover can be removed and the transport vehicle 5 can be driven on the fifth loop 77. In this embodiment, a buffer is not provided in the fifth loop 77. However, a buffer can also be configured as needed. (D) Another embodiment for improving the article housing capability of the buffer will be described with reference to Figs. 16 to 19 . Fig. 16 is a partial cross-sectional view showing a transport vehicle system according to still another embodiment of the present invention. Figure is the mode of the mounting platform
面圖。圖18係载置台之部分側視圖。圖19係搬送車系統之 部分剖視圖。 W 如園W及圖17所示 及支持機構95。Surface map. Figure 18 is a partial side view of the mounting table. Figure 19 is a partial cross-sectional view of the transport vehicle system. W, such as Park W and Figure 17, and support mechanism 95.
輥式輸送機93與上述實施形態相同，但於各輥93&之『 確保既定空隙。輕式輸送機93更包括對93 I 2部㈣、支柱奴及场棒93d。支持部咖為了= 3a如切之部分，μ輥咖 方^ 支持部㈣可旋轉自如⑺之方向延伸 端部予以支持。支柱 ^ 3 Ά他輥助對向侧4 斯 辑部咖維持在既定高度」 21 201139252 持棒93d自支柱伙傾斜地延伸而可旋轉自如地對槪仏中 與其純列呈相反側之端料以切。糾，並未魏％ 中與其他輥列呈相反侧設置有支柱。 支持機構95為用以聽式輸送機93上之物品向較槪式輸 送機93而更靠上方移動之機構，其包含支持構件97及驅動 機構"。支持構件97為沿著上下方向分別通過-對輕式輸 送機93而可支持物品之-對構件，如圖17所示，其包含底 框ιοί及自底框ιοί延伸之複數個較細之支持部ι〇3。各底 框謝被配置於各輥式輸送機93之前後方向外側，並沿著 報式輸送機93之各親93a所經_之方向延伸。如圖16 及圖17所示’複數個支持部103於輕式輸送機％之概％ 之間延伸。支持部1G3之上表面為平坦面，其配置於較親 93a之上表面而更靠下方。驅動機構99為用以驅動支持構 件W之機構，其包含支柱105、升降馬達(未圖示)及鏈條(未 圖示）。支柱U)5例如設置於四角而沿著上下方向延伸，如 圖18所示’可上下移動地對支持構件97之底框ι〇ι兩端進 行支持。升降馬達(未圖示)可經由鏈條(未圖示）而使支持構 件97上下移動。 於該實施形態中，支柱1()5較高地延伸，伴隨於此，緩衝 區91之罩蓋67之頂棚部亦會增高，進而頂棚面34之與緩 衝區91相對應之部分亦將增高。 於該搬送車祕中，於將物品放置於輥式輸送機％上 100102077 22 201139252 後升降馬達(未圖不)將捲起鏈條(未圖示广藉此使支持構 。如此，則複數個支持部1G3將___ a之間而向上方移動。藉此，如圖18所示 =97之支持部1Q3提拉物品c，由此物品c可間離岐 式輸达機93之親93a。最終，如圖19所示，物品C藉 數個支持部103而被支持於緩衝區91内之最高位置。在= 狀態下，於輥式輸㈣93 ±能確保可搬入下一物品之= 間。如此—來，可將2個物品搬入至緩衝區91内。亦即， 緩衝區91之物品收容能力將提高。 再考用以提拉物品之支持構件之形狀並不受限於上述實 施形態。支持構件亦可例如為梯子形狀。 (E)本體35之1¾式輸送機39與緩衝區9之輥式輪送機63 之冋度於移載物品C日寺相同即可。亦即，任—面或兩個面 均可變更高度，搬送車5之行駛中或停止中兩個面之高 可不同。 (產業上之可利用性） 本發明係可廣泛應用於用以在複數個處理裝置之間搬送 物品之搬送車系統。 、 【圖式簡單說明】 圖1係採用本發明一實施形態之搬送車系統之模式平面 圖 圖2係作為本發明一實施形態之搬送車系統之部分剖视 100102077 23 201139252 圖 圖3係搬送車之模式平面圖 圖4係圖1之部分放大圖。 圖 圖 係表示軌道之變形例之搬送車系統之部分模式平 面 圖6係表示搬送車系統之控制系統之方塊圖。 圖7係表示搬送車内之控制器之構成之方塊圖。 剖视 圖8係作為本發明一實施形態之搬送車系統之部八 圖 之部分剖视 圖9係作為本發明一實施形態之搬送車系統 圖 圖 圖10係作為本發明一實施形態之搬送車系統之部八 剖视 圖 圖 圖11係作為本發明一實施形態之搬送車*** 。 分剖视 圖12係作為本發明一實施形態之搬送車系 。 分剖視 圖13係作為本發明一實施形態之搬送車系 '、分剖視 下之搬适車 圖Η係用以說明在軌道上放置保護蓋之狀態 糸統之部分剖視圖。 圖b係採用本發明其他實施形態之搬送車***之模弋、， 100102077 24 201139252 面圖。 圖16係採用本發明進而其他實施形態之搬送車系統之部 分剖視圖。 圖Π係載置台之模式平面圖。 圖18係載置台之部分側視圖。 圖19係搬送車系統之部分剖視圖。 【主要元件符號說明】 1 搬送車系統 2 處理裝置 2a 平台 3 轨道 4 檢查裝置 5 搬送車 7 自動倉庫 9 緩衝區 9A 第1緩衝區 9B 第2缓衝區 11 第1環路（第1個環路） 11a 第1小環路 lib 第2小環路 11c 第3小環路(入口側環路) 13 第2環路（第2個環路） 100102077 25 201139252 13a 第4小環路 13b 第5小環路 13c 第6小環路（出口側環路) 15 第3環路（第1個環路） 15a 第7小環路 15b 第8小環路 15c 第9小環路 17 第4環路（第2個環路） 17a 第10小環路 17b 第11小環路 19 第1捷徑用連結部 21 第2捷徑用連結部 23 第3捷徑用連結部 25 第4捷徑用連結部 27 連結部 28 連結部 29 連續處理裝置 29a 第1處理裝置 29b 第2處理裝置 31 第1平台 32 底面 32a 凹部 100102077 26 201139252 33 34 35 36 37 38 39 39a 41 43 45 47 51 53 53a 53b 55 57 59 61 63 65 第2平台 頂棚面 本體 入口平台 行駛部 出口平台 幸昆式輸送機 輥 推挽移載裝置 微環境機構 車輪 執道 臂機構 掛鉤構件 第1部分 第2部分 框體 擋板The roller conveyor 93 is the same as the above-described embodiment, but the predetermined gap is ensured in each of the rollers 93 & The light conveyor 93 further includes a pair of 93 I 2 parts (four), a pillar slave and a field bar 93d. In order to support the part of the 3a, the support part (4) can be rotated in the direction of the extension (7). Pillar ^ 3 Ά 辊 助 助 助 4 4 4 4 4 4 21 21 21 21 21 21 21 21 21 2011 2011 2011 2011 2011 2011 2011 21 2011 2011 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 21 . Correction, no Wei% is provided with pillars on the opposite side of the other roller rows. The support mechanism 95 is a mechanism for moving the articles on the articulated conveyor 93 to the upper jaw conveyor 93, and includes a support member 97 and a drive mechanism. The support member 97 is a member that can support the article in the up and down direction by the pair of the light conveyor 93, as shown in FIG. 17, which includes the bottom frame ιοί and a plurality of thinner supports extending from the bottom frame ιοί. Department ι〇3. Each of the bottom frames is disposed on the outer side in the front-rear direction of each of the roller conveyors 93, and extends in the direction of the e-93a of the newspaper conveyor 93. As shown in Figs. 16 and 17, the plurality of support portions 103 extend between the % of the light conveyors. The upper surface of the support portion 1G3 is a flat surface which is disposed on the upper surface of the parent 93a and further below. The drive mechanism 99 is a mechanism for driving the support member W, and includes a support 105, a lift motor (not shown), and a chain (not shown). The pillars U) 5 are provided, for example, at four corners and extend in the up and down direction, and as shown in Fig. 18, both ends of the support member 97 are supported by the bottom frame ι〇ι. The lift motor (not shown) can move the support member 97 up and down via a chain (not shown). In this embodiment, the pillar 1 () 5 is extended relatively high, and accordingly, the ceiling portion of the cover 67 of the buffer region 91 is also increased, and the portion of the ceiling surface 34 corresponding to the buffer region 91 is also increased. In the transport car secret, after the article is placed on the roller conveyor%100102077 22 201139252, the lift motor (not shown) will roll up the chain (not shown to support the structure. Thus, multiple support The portion 1G3 moves upward between ___a, whereby the support portion 1Q3 of the =97 as shown in Fig. 18 pulls the article c, whereby the article c can be separated from the pro 93a of the sputum feeder 93. As shown in Fig. 19, the article C is supported by the plurality of support portions 103 at the highest position in the buffer zone 91. In the = state, the roll type (four) 93 ± ensures that the next item can be moved into the next item. - The two items can be carried into the buffer zone 91. That is, the article holding capacity of the buffer zone 91 is improved. The shape of the supporting member for pulling the article is not limited to the above embodiment. For example, it may be a ladder shape. (E) The conveyor belt 39 of the body 35 and the roller conveyor 63 of the buffer zone 9 may be the same as the transfer article C. The height can be changed on both sides, and the height of the two faces in the driving or stopping of the transport car 5 can be different. The present invention can be widely applied to a transport vehicle system for transporting articles between a plurality of processing apparatuses. [FIG. 1] FIG. 1 is a mode of a transport vehicle system according to an embodiment of the present invention. 2 is a partial cross-sectional view of a transport vehicle system according to an embodiment of the present invention. 100102077 23 201139252 FIG. 3 is a plan view of a transport vehicle. FIG. 4 is a partial enlarged view of FIG. 1. FIG. Fig. 7 is a block diagram showing a configuration of a controller in a transport vehicle. Fig. 7 is a block diagram showing a configuration of a controller in a transport vehicle. Fig. 7 is a block diagram showing a configuration of a transport vehicle system according to an embodiment of the present invention. FIG. 10 is a partial cross-sectional view of a transport vehicle system according to an embodiment of the present invention. FIG. 11 is an embodiment of the present invention. FIG. A transport vehicle system in a form. A cross-sectional view 12 is a transport vehicle system according to an embodiment of the present invention. A cross-sectional view 13 is an embodiment of the present invention. The transport vehicle system' is a partial cross-sectional view of the state in which the protective cover is placed on the rail. Fig. b is a model of the transport vehicle system according to another embodiment of the present invention. Fig. 16 is a partial cross-sectional view of a transport vehicle system according to another embodiment of the present invention. Fig. 18 is a partial plan view of the mounting table. Fig. 18 is a partial side view of the mounting table. Fig. 19 is a transporting vehicle. Partial cross-sectional view of the system. [Main component symbol description] 1 Transport vehicle system 2 Processing device 2a Platform 3 Track 4 Inspection device 5 Transport truck 7 Automatic warehouse 9 Buffer 9A 1st buffer 9B 2nd buffer 11 1st loop (1st loop) 11a 1st small loop lib 2nd small loop 11c 3rd small loop (inlet side loop) 13 2nd loop (2nd loop) 100102077 25 201139252 13a 4th small Loop 13b 5th small loop 13c 6th small loop (outlet side loop) 15 3rd loop (1st loop) 15a 7th small loop 15b 8th small loop 15c 9th small loop 17 4th Ring Road (2nd Loop) 17a The 10th small loop 17b The 11th small loop 19 The first shortcut connecting portion 21 The second shortcut connecting portion 23 The third shortcut connecting portion 25 The fourth shortcut connecting portion 27 The connecting portion 28 The connecting portion 29 The continuous processing device 29a First processing device 29b Second processing device 31 First platform 32 Bottom surface 32a Recession 100102077 26 201139252 33 34 35 36 37 38 39 39a 41 43 45 47 51 53 53a 53b 55 57 59 61 63 65 2nd platform ceiling surface body entrance platform Driving section exit platform 幸昆式 conveyor roller push-pull transfer device micro-environment mechanism wheel ruling arm mechanism hook member part 1 part 2 frame baffle
FFU 載置台 幸昆式輸送機 微環境機構 100102077 27 蓋 開口部FFU Mounting Station Lucky Kunming Conveyor Micro Environment Mechanism 100102077 27 Cover Opening
FFU 保護蓋 載置台 親式輸送機 第5環路（第3個環路) 第12小環路 第13小環路 第5捷徑用連結部 連結部 連結部 第1載置台 第1開口部 第2載置台 第2開口部 旁路線 緩衝區 輥式輸送機 輥 支持部 支柱 28 201139252 93d 95 97 99 101 103 105 120 121 123 125 127 129 131 133 135 137 139 支持棒 支持機構 支持構件 驅動機構 底框 支持部 支柱 控制系統 製造控制器 物流控制器 自動倉庫控制器 搬送車控制器 搬送車内控制器 行駛馬達 推挽驅動機構 擋板驅動馬達 FFU驅動馬達 編碼 C、Cl、C2 物品 100102077 29FFU protective cover mounting station fifth conveyor (third loop) 12th small loop 13th small loop fifth shortcut connecting portion connecting portion connecting portion first mounting table first opening second Stage 2nd opening bypass line buffer Roller conveyor roller support section 28 201139252 93d 95 97 99 101 103 105 120 121 123 125 127 129 131 133 135 137 139 Support rod support mechanism Support member drive mechanism bottom frame support Pillar control system manufacturing controller logistics controller automatic warehouse controller transport vehicle controller transport vehicle controller travel motor push-pull drive mechanism baffle drive motor FFU drive motor code C, Cl, C2 Item 100102077 29