KR100983421B1 - 기판처리장치 - Google Patents
기판처리장치 Download PDFInfo
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- KR100983421B1 KR100983421B1 KR1020080109695A KR20080109695A KR100983421B1 KR 100983421 B1 KR100983421 B1 KR 100983421B1 KR 1020080109695 A KR1020080109695 A KR 1020080109695A KR 20080109695 A KR20080109695 A KR 20080109695A KR 100983421 B1 KR100983421 B1 KR 100983421B1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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Abstract
Description
Claims (10)
- 기판을 파지하면서 회전시키는 기판파지 회전장치로서,회전축선의 둘레로 회전가능하게 설치된 회전부재와,상기 회전부재를 회전시키는 회전구동기구와,기판의 바깥둘레단부에 맞닿아 기판을 파지하는 기판파지상태와 기판의 바깥둘레단부로부터 이간(離間)하는 기판해방상태로 전환가능하게 상기 회전부재에 설치된 복수의 파지부재와,상기 복수의 파지부재를 상기 기판파지상태와 상기 기판해방상태로 전환하는 파지부재전환기구를 구비하고,상기 복수의 파지부재의 각각은, 상기 회전구동기구에 의한 상기 회전부재의 회전에 따른 기판의 바깥둘레단부를 따른 제1영역 및 제2영역을 통하여 상기 회전축의 둘레로 회전하고,상기 파지부재전환기구는, 상기 회전부재의 회전 중에 상기 복수의 파지부재 중 상기 제1영역에 위치하는 파지부재를 상기 기판파지상태로 하는 동시에 상기 복수의 파지부재 중 상기 제2영역에 위치하는 파지부재를 상기 기판해방상태로 하는 기판파지 회전장치.
- 제1항에 있어서,상기 파지부재전환기구는,자력(磁力)에 의해 상기 제1영역에 위치하는 파지부재를 상기 기판파지상태로 전환하는 제1자력발생부재와,자력에 의해 상기 제2영역에 위치하는 파지부재를 상기 기판해방상태로 전환하는 제2자력발생부재를 포함하는 기판파지 회전장치.
- 제2항에 있어서,상기 제1자력발생부재는, 상기 제1영역에 위치하는 파지부재에 대하여 근접 또는 이간해서 상기 제1영역에 위치하는 파지부재에 자력을 작용시키는 제1자석부재를 포함하고,상기 제2자력발생부재는, 상기 제2영역에 위치하는 파지부재에 대하여 근접 또는 이간해서 상기 제2영역에 위치하는 파지부재에 자력을 작용시키는 제2자석부재를 포함하는 기판파지 회전장치.
- 제1항에 있어서,상기 복수의 파지부재의 각각은, 상기 회전부재의 아래쪽에서 기판의 바깥둘레단부에 맞닿는 맞닿음위치와 기판의 바깥둘레단부로부터 이간하는 이간위치 사이에서 이동 가능하게 설치된 파지부를 가지는 기판파지 회전장치.
- 기판을 파지하면서 회전시키는 기판파지 회전장치와,기판의 바깥둘레단부를 세정하기 위한 제1세정구와,상기 제1세정구를 이동시키는 제1세정구이동기구를 구비하고,상기 기판파지 회전장치는,회전축선의 둘레로 회전가능하게 설치된 회전부재와,상기 회전부재를 회전시키는 회전구동기구와,기판의 바깥둘레단부에 맞닿아 기판을 파지하는 기판파지상태와 기판의 바깥둘레단부로부터 이간하는 기판해방상태로 전환가능하게 상기 회전부재에 설치된 복수의 파지부재와,상기 복수의 파지부재를 상기 기판파지상태와 상기 기판해방상태로 전환하는 파지부재전환기구를 포함하고,상기 복수의 파지부재의 각각은, 상기 회전구동기구에 의한 상기 회전부재의 회전에 따른 기판의 바깥둘레단부를 따른 제1영역 및 제2영역을 통하여 상기 회전축의 둘레로 회전하고,상기 파지부재전환기구는, 상기 회전부재의 회전중에 상기 복수의 파지부재 중 상기 제1영역에 위치하는 파지부재를 상기 기판파지상태로 하는 동시에 상기 복수의 파지부재 중 상기 제2영역에 위치하는 파지부재를 상기 기판해방상태로 하고,상기 제1세정구이동기구는, 상기 제1영역에 위치하는 파지부재가 상기 기판파지상태에 있는 동시에 상기 제2영역에 위치하는 파지부재가 상기 기판해방상태에 있을 때에 상기 제1세정구를 상기 제2영역으로 이동시키는 기판세정장치.
- 제5항에 있어서,기판의 상면 또는 하면을 세정하기 위한 제2세정구와,상기 제2세정구를 이동시키는 제2세정구이동기구를 더 구비하고,상기 제2세정구이동기구는, 상기 제1영역에 위치하는 파지부재가 상기 기판파지상태에 있는 동시에 상기 제2영역에 위치하는 파지부재가 상기 기판해방상태에 있을 때에 상기 제2세정구를 상기 제2영역을 통과시켜서 기판의 상면측 또는 하면측으로 이동시키는 기판세정장치.
- 제5항에 있어서,상기 파지부재전환기구는,자력에 의해 상기 제1영역에 위치하는 파지부재를 상기 기판파지상태로 전환하는 제1자력발생부재와,자력에 의해 상기 제2영역에 위치하는 파지부재를 상기 기판해방상태로 전환하는 제2자력발생부재를 포함하는 기판세정장치.
- 제7항에 있어서,상기 제1자력발생부재는, 상기 제1영역에 위치하는 파지부재에 대하여 근접 또는 이간해서 상기 제1영역에 위치하는 파지부재에 자력을 작용시키는 제1자석부재를 포함하고,상기 제2자력발생부재는, 상기 제2영역에 위치하는 파지부재에 대하여 근접 또는 이간해서 상기 제2영역에 위치하는 파지부재에 자력을 작용시키는 제2자석부 재를 포함한 기판세정장치.
- 제5항에 있어서,상기 복수의 파지부재의 각각은, 상기 회전부재의 아래쪽에서 기판의 바깥둘레단부에 맞닿는 맞닿음위치와 기판의 바깥둘레단부로부터 이간하는 이간위치의 사이에서 이동 가능하게 설치된 파지부를 갖고,상기 회전부재의 아래쪽에서 기판을 지지하는 기판지지부재와,상기 기판지지부재를 승강시키는 지지부재승강기구를 더 구비하는 기판세정장치.
- 노광장치(露光裝置)에 인접하도록 배치되는 기판처리장치로서,기판에 처리를 행하기 위한 처리부와,상기 처리부와 상기 노광장치 사이에서 기판의 주고받기를 행하기 위한 주고받기부를 구비하며,상기 처리부 및 상기 주고받기부의 적어도 한 쪽은,기판의 세정처리를 행하는 세정처리유닛을 포함하고,상기 세정처리유닛은,기판을 파지하면서 회전시키는 기판파지 회전장치와,기판의 바깥둘레단부를 세정하기 위한 세정구(洗淨具)와,상기 세정구를 이동시키는 세정구이동기구를 구비하고,상기 기판파지 회전장치는,회전축선의 둘레로 회전가능하게 설치된 회전부재와,상기 회전부재를 회전시키는 회전구동기구와,기판의 바깥둘레단부에 맞닿아 기판을 파지하는 기판파지상태와 기판의 바깥둘레단부로부터 이간하는 기판해방상태로 전환가능하게 상기 회전부재에 설치된 복수의 파지부재와,상기 복수의 파지부재를 상기 기판파지상태와 상기 기판해방상태로 전환하는 파지부재전환기구를 포함하고,상기 복수의 파지부재의 각각은, 상기 회전구동기구에 의한 상기 회전부재의 회전에 따른 기판의 바깥둘레단부를 따른 제1영역 및 제2영역을 통하여 상기 회전축의 둘레로 회전하고,상기 파지부재전환기구는, 상기 회전부재의 회전중에 상기 복수의 파지부재 중 상기 제1영역에 위치하는 파지부재를 상기 기판파지상태로 하는 동시에 상기 복수의 파지부재 중 상기 제2영역에 위치하는 파지부재를 상기 기판해방상태로 하고,상기 세정구이동기구는, 상기 파지부재전환기구가 상기 제1영역에 있는 파지부재를 상기 기판파지상태로 전환하는 동시에 상기 제2영역에 있는 파지부재를 상기 기판해방상태로 전환한 상태에서 상기 세정구를 상기 제2영역으로 이동시키는 기판처리장치.
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