KR100697493B1 - 신틸레이터 패널 - Google Patents
신틸레이터 패널 Download PDFInfo
- Publication number
- KR100697493B1 KR100697493B1 KR1020047015154A KR20047015154A KR100697493B1 KR 100697493 B1 KR100697493 B1 KR 100697493B1 KR 1020047015154 A KR1020047015154 A KR 1020047015154A KR 20047015154 A KR20047015154 A KR 20047015154A KR 100697493 B1 KR100697493 B1 KR 100697493B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- scintillator
- film
- polyparaxylene
- deposition
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/54—Organic compounds
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Measurement Of Radiation (AREA)
- Conversion Of X-Rays Into Visible Images (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
Description
Claims (15)
- 기판의 표면에 신틸레이터를 형성한 신틸레이터 패널에 있어서,상기 신틸레이터는, 기판 표면의 대부분을 덮고, 한편 상기 기판의 표면이 덮이지 않는 부분을 가지도록 형성되며,상기 기판의 이면과, 상기 기판 표면의 상기 신틸레이터에 의하여 덮이지 않는 부분을 포함하여, 상기 기판 및 상기 신틸레이터의 노출부분 모두를 실질적으로 덮는 유기막을 구비한 신틸레이터 패널.
- 제 1항에 있어서,상기 유기막은 크시릴렌(xylylend)계 유기막인 것을 특징으로 하는 신틸레이터 패널
- 제 1항에 있어서,상기 기판 표면의 상기 신틸레이터로 덮이지 않은 부분은, 상기 기판의 측부 근방에 위치하는 것을 특징으로 하는 신틸레이터 패널.
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-1998-00171192 | 1998-06-18 | ||
JP17119298 | 1998-06-18 | ||
PCT/JP1999/003269 WO1999066351A1 (fr) | 1998-06-18 | 1999-06-18 | Procede de depot de fil organique |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020007014301A Division KR100687368B1 (ko) | 1998-06-18 | 1999-06-18 | 유기막 증착 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040097215A KR20040097215A (ko) | 2004-11-17 |
KR100697493B1 true KR100697493B1 (ko) | 2007-03-20 |
Family
ID=15918725
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020047015154A KR100697493B1 (ko) | 1998-06-18 | 1999-06-18 | 신틸레이터 패널 |
KR1020007014301A KR100687368B1 (ko) | 1998-06-18 | 1999-06-18 | 유기막 증착 방법 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020007014301A KR100687368B1 (ko) | 1998-06-18 | 1999-06-18 | 유기막 증착 방법 |
Country Status (7)
Country | Link |
---|---|
US (5) | US6777690B2 (ko) |
EP (2) | EP1118880B1 (ko) |
KR (2) | KR100697493B1 (ko) |
CN (2) | CN1272639C (ko) |
AU (1) | AU4168699A (ko) |
DE (1) | DE69913185T2 (ko) |
WO (1) | WO1999066351A1 (ko) |
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US7034306B2 (en) | 1998-06-18 | 2006-04-25 | Hamamatsu Photonics K.K. | Scintillator panel and radiation image sensor |
DE69937125T2 (de) | 1999-04-09 | 2008-06-19 | Hamamatsu Photonics K.K., Hamamatsu | Szintillatorplatte und strahlungsbildsensor |
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1999
- 1999-06-18 EP EP99925382A patent/EP1118880B1/en not_active Expired - Lifetime
- 1999-06-18 CN CNB2004100027941A patent/CN1272639C/zh not_active Expired - Lifetime
- 1999-06-18 EP EP03022728A patent/EP1382723B1/en not_active Expired - Lifetime
- 1999-06-18 WO PCT/JP1999/003269 patent/WO1999066351A1/ja not_active Application Discontinuation
- 1999-06-18 CN CNB998086010A patent/CN1144064C/zh not_active Expired - Lifetime
- 1999-06-18 KR KR1020047015154A patent/KR100697493B1/ko not_active IP Right Cessation
- 1999-06-18 AU AU41686/99A patent/AU4168699A/en not_active Abandoned
- 1999-06-18 DE DE69913185T patent/DE69913185T2/de not_active Expired - Lifetime
- 1999-06-18 KR KR1020007014301A patent/KR100687368B1/ko not_active IP Right Cessation
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2000
- 2000-12-18 US US09/737,818 patent/US6777690B2/en not_active Expired - Lifetime
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2002
- 2002-08-14 US US10/217,652 patent/US7048967B2/en not_active Expired - Lifetime
- 2002-08-14 US US10/218,130 patent/US6762420B2/en not_active Expired - Lifetime
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2006
- 2006-03-27 US US11/389,028 patent/US7662427B2/en not_active Expired - Fee Related
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2009
- 2009-12-17 US US12/640,791 patent/US7897938B2/en not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
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DE69913185T2 (de) | 2004-08-26 |
EP1382723A2 (en) | 2004-01-21 |
CN1519581A (zh) | 2004-08-11 |
US20100163751A1 (en) | 2010-07-01 |
WO1999066351A1 (fr) | 1999-12-23 |
US20020190223A1 (en) | 2002-12-19 |
EP1382723A3 (en) | 2006-01-25 |
US7048967B2 (en) | 2006-05-23 |
EP1382723B1 (en) | 2011-07-27 |
US20010030291A1 (en) | 2001-10-18 |
CN1144064C (zh) | 2004-03-31 |
KR100687368B1 (ko) | 2007-02-26 |
US7897938B2 (en) | 2011-03-01 |
US20020192372A1 (en) | 2002-12-19 |
US6777690B2 (en) | 2004-08-17 |
CN1309776A (zh) | 2001-08-22 |
EP1118880A1 (en) | 2001-07-25 |
US20060197035A1 (en) | 2006-09-07 |
KR20040097215A (ko) | 2004-11-17 |
US7662427B2 (en) | 2010-02-16 |
AU4168699A (en) | 2000-01-05 |
CN1272639C (zh) | 2006-08-30 |
EP1118880A4 (en) | 2002-07-31 |
EP1118880B1 (en) | 2003-11-26 |
KR20010052932A (ko) | 2001-06-25 |
US6762420B2 (en) | 2004-07-13 |
DE69913185D1 (de) | 2004-01-08 |
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